CN102944879B - Four-dimensional imaging device based on MEMS two-dimensional scan mirror and imaging method of imaging device - Google Patents
Four-dimensional imaging device based on MEMS two-dimensional scan mirror and imaging method of imaging device Download PDFInfo
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- CN102944879B CN102944879B CN201210435370.9A CN201210435370A CN102944879B CN 102944879 B CN102944879 B CN 102944879B CN 201210435370 A CN201210435370 A CN 201210435370A CN 102944879 B CN102944879 B CN 102944879B
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Abstract
The invention discloses a four-dimensional imaging device based on an MEMS (Micro Electronic Mechanical System) two-dimensional scan mirror and an imaging method of the imaging device. The device comprises a CPU (Central Processing Unit) module, a pulsed laser, the MEMS two-dimensional scan mirror, a pulse peak retaining circuit, an angle measurement device of the MEMS two-dimensional scan mirror, a semi-transparent and semi-reflective mirror, a first pulsed laser receiving module, a second pulsed laser receiving module and a time interval measurement module. The device integrates a three-dimensional image in a measured area with laser reflection information of a measured objective surface, provides four-dimensional information of the measured area, and can better reflect characteristics of the measured area.
Description
Technical field
The invention belongs to technical field of imaging, relate to a kind of imaging device, especially a kind of light four-dimensional imaging device based on MEMS Scan mirror and formation method thereof.
Background technology
Along with the development of laser technology, the ranging technology of pulse laser has been tending towards perfect and ripe.Meanwhile, the active laser detection apparatus of core scanning device coordinates with microelectromechanical systems (Micro Electronic Mechanical System, MEMS) for there has also been certain development.Although but traditional active laser detection apparatus can generate the 3-D view in tested region accurately, the feature for tested region surface but cannot be extracted.
Summary of the invention
The object of the invention is to the shortcoming overcoming above-mentioned prior art, a kind of light four-dimensional imaging device based on MEMS Scan mirror and formation method thereof are provided, this device by the 3-D view in tested region and measured target surface for laser reflection situation information integration, the four-dimensional information in tested region is provided, the feature in tested region can be reflected better.
The object of the invention is to solve by the following technical programs:
This light four-dimensional imaging device based on MEMS Scan mirror, comprises CPU module, pulsed laser, MEMS Scan mirror, peak value of pulse metering circuit, MEMS Scan mirror corner measuring apparatus, semi-transparent semi-reflecting lens, the first pulse laser receiver module, the second pulse laser receiver module, time interval measurement module;
Described MEMS Scan mirror is fixed on the dead ahead of semi-transparent semi-reflecting lens, and semi-transparent semi-reflecting lens is fixed on the dead ahead of pulsed laser, and MEMS Scan mirror corner measuring apparatus (6) is fixed on two rotation axiss of MEMS Scan mirror; Described CPU module is connected with MEMS Scan mirror corner measuring apparatus and peak value of pulse metering circuit (4) respectively by first and second AD converter; Described time interval measurement module is also connected to CPU module; Described first pulse laser receiver module is all connected with time interval measurement module with the second pulse laser receiver module; Described second pulse laser receiver module is also connected with the input end of peak value of pulse metering circuit.
The present invention also proposes a kind of formation method of above-mentioned light four-dimensional imaging device, is specially:
1) pulsed laser emission pulse laser bundle, laser beam is divided into two-way after semi-transparent semi-reflecting lens, one tunnel laser beam is irradiated on measured target after MEMS two-dimensional scan scarnning mirror, another road is irradiated on the first pulse laser receiver module, be irradiated to the reflects laser after measured target to be received by the second pulse laser receiver module, the first pulse laser receiver module and the second pulse laser receiver module generate two pulse signals respectively and input to time interval measurement module; Time interval measurement module measures the mistiming of this two pulse signals, and described CPU module is by reading this mistiming in time interval measurement module and calculating the distance of measured target;
2) the pulse signal peak value that the second pulse laser receiver module receives maintains by peak value of pulse metering circuit, and by the second A/D converter, peak value of pulse signal is converted to digital signal, and described CPU module reads this peak signal;
3) MEMS Scan mirror corner measuring apparatus exports the corner of two-way voltage signal in order to control MEMS Scan mirror, and the first A/D converter measures this two-way voltage signal simultaneously, and CPU module reads this two-way voltage signal;
4) range information that will read of CPU module, peak value of pulse information, MEMS Scan mirror corner information, combines and generates four-dimensional image.
The present invention has following beneficial effect:
The present invention by the 3-D view in tested region and measured target surface for laser reflection situation information integration, the four-dimensional information in tested region is provided, the feature in tested region can be reflected better.
The present invention, by can obtain the Distance geometry intensity image of target simultaneously, compared with the distance of traditional single-mode or intensity, is more conducive to the identification to target and tracking.
Accompanying drawing explanation
Fig. 1 is the connection block diagram of device each several part of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail:
See Fig. 1, the present invention is based on the light four-dimensional imaging device of MEMS Scan mirror, comprise CPU module 1, pulsed laser 2, MEMS Scan mirror 3, peak value of pulse metering circuit 4, MEMS Scan mirror corner measuring apparatus 6, semi-transparent semi-reflecting lens 7, first pulse laser receiver module (8), the second pulse laser receiver module 9, time interval measurement module 10.
MEMS Scan mirror 3 is fixed on the dead ahead of semi-transparent semi-reflecting lens 7, and semi-transparent semi-reflecting lens 7 is fixed on the dead ahead of pulsed laser 2, and MEMS Scan mirror corner measuring apparatus 6 is fixed on two rotation axiss of MEMS Scan mirror 3; CPU module 1 is connected with MEMS Scan mirror corner measuring apparatus 6 and peak value of pulse metering circuit 4 respectively by first and second AD converter 11,5; Described time interval measurement module 10 is also connected to CPU module 1; First pulse laser receiver module 8 and the second pulse laser receiver module 9) be all connected with time interval measurement module 10; Second pulse laser receiver module 9 is also connected with the input end of peak value of pulse metering circuit 4.
The formation method of above-described light four-dimensional imaging device is:
1) pulsed laser 2 emission pulse laser bundle, laser beam is divided into two-way after semi-transparent semi-reflecting lens 7, one tunnel laser beam is irradiated on measured target after MEMS Scan mirror 3 scans, another road is irradiated on the first pulse laser receiver module 8, be irradiated to the reflects laser after measured target to be received by the second pulse laser receiver module 9, the first pulse laser receiver module 8 and the second pulse laser receiver module 9 generate two pulse signals respectively and input to time interval measurement module 10; Time interval measurement module 10 measures the mistiming of this two pulse signals, and CPU module 1 is by reading this mistiming in time interval measurement module 10 and calculating the distance of measured target;
2) the pulse signal peak value that the second pulse laser receiver module 9 receives maintains by peak value of pulse metering circuit 4, and by the second A/D converter 5, peak value of pulse signal is converted to digital signal, and CPU module 1 reads this peak signal;
3) MEMS Scan mirror corner measuring apparatus 6 exports the corner of two-way voltage signal in order to control MEMS Scan mirror 3, and the first A/D converter 11 measures this two-way voltage signal simultaneously, and CPU module 1 reads this two-way voltage signal;
4) range information that will read of CPU module 1, peak value of pulse information, MEMS Scan mirror corner information, combines and generates four-dimensional image.
Claims (2)
1. the light four-dimensional imaging device based on MEMS Scan mirror, it is characterized in that, comprise CPU module (1), pulsed laser (2), MEMS Scan mirror (3), peak value of pulse metering circuit (4), MEMS Scan mirror corner measuring apparatus (6), semi-transparent semi-reflecting lens (7), the first pulse laser receiver module (8), the second pulse laser receiver module (9), time interval measurement module (10);
Described MEMS Scan mirror (3) is fixed on the dead ahead of semi-transparent semi-reflecting lens (7), semi-transparent semi-reflecting lens (7) is fixed on the dead ahead of pulsed laser (2), and MEMS Scan mirror corner measuring apparatus (6) is fixed on two rotation axiss of MEMS Scan mirror (3); Described CPU module (1) is connected with MEMS Scan mirror corner measuring apparatus (6) and peak value of pulse metering circuit (4) respectively by first and second A/D converter (11,5); Described time interval measurement module (10) is also connected to CPU module (1); Described first pulse laser receiver module (8) is all connected with time interval measurement module (10) with the second pulse laser receiver module (9); Described second pulse laser receiver module (9) is also connected with the input end of peak value of pulse metering circuit (4).
2. a formation method for light four-dimensional imaging device according to claim 1, is characterized in that:
1) pulsed laser (2) emission pulse laser bundle, laser beam is divided into two-way after semi-transparent semi-reflecting lens (7), one tunnel laser beam is irradiated on measured target after MEMS Scan mirror (3) scanning, another road is irradiated on the first pulse laser receiver module (8), be irradiated to the reflects laser after measured target to be received by the second pulse laser receiver module (9), the first pulse laser receiver module (8) and the second pulse laser receiver module (9) generate two pulse signals respectively and input to time interval measurement module (10); Time interval measurement module (10) measures the mistiming of this two pulse signals, and described CPU module (1) is by reading this mistiming in time interval measurement module (10) and calculating the distance of measured target;
2) the pulse signal peak value that the second pulse laser receiver module (9) receives maintains by peak value of pulse metering circuit (4), and by the second A/D converter (5), peak value of pulse signal being converted to digital signal, described CPU module (1) reads this peak signal;
3) MEMS Scan mirror corner measuring apparatus (6) exports the corner of two-way voltage signal in order to control MEMS Scan mirror (3), first A/D converter (11) measures this two-way voltage signal simultaneously, and CPU module (1) reads this two-way voltage signal;
4) range information that will read of CPU module (1), peak value of pulse information, MEMS Scan mirror corner information, combines and generates distance-angle-angle-intensity four-dimension image.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106405572B (en) * | 2016-11-10 | 2019-02-26 | 西安交通大学 | Remote high-resolution laser Active Imaging device and method based on space encoding |
| CN108107417A (en) * | 2017-11-07 | 2018-06-01 | 北醒（北京）光子科技有限公司 | A kind of solid-state face battle array laser radar apparatus |
| CN115267802A (en) * | 2018-12-29 | 2022-11-01 | 华为技术有限公司 | Laser measurement module and laser radar |
| US11262575B2 (en) | 2019-03-01 | 2022-03-01 | Beijing Voyager Technology Co., Ltd. | MEMS package with double-sided mirror |
| US11493609B2 (en) | 2019-03-01 | 2022-11-08 | Beijing Voyager Technology Co., Ltd. | MEMS device with integrated mirror position sensor |
| WO2022094962A1 (en) * | 2020-11-06 | 2022-05-12 | 深圳市大疆创新科技有限公司 | Hovering method for unmanned aerial vehicle, unmanned aerial vehicle and storage medium |
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| CN102426362A (en) * | 2011-11-18 | 2012-04-25 | 西安交通大学 | Laser active detector based on micromachine MEMS (Micro Electro Mechanical System) two-dimensional scanning mirror |
| CN102435152A (en) * | 2011-11-15 | 2012-05-02 | 西安交通大学 | Measuring apparatus of micro electronic mechanical system (MEMS) two-dimension (2d) scanning mirror scanning angle |
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| WO2012138873A2 (en) * | 2011-04-07 | 2012-10-11 | Raytheon Company | Portable self-retinal imaging device |
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| CN102435152A (en) * | 2011-11-15 | 2012-05-02 | 西安交通大学 | Measuring apparatus of micro electronic mechanical system (MEMS) two-dimension (2d) scanning mirror scanning angle |
| CN102426362A (en) * | 2011-11-18 | 2012-04-25 | 西安交通大学 | Laser active detector based on micromachine MEMS (Micro Electro Mechanical System) two-dimensional scanning mirror |
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Effective date of registration: 20180625 Address after: 710199 Shaanxi Xi'an Aerospace base 385 space Road 8, 820 floor, Chong Chuang square. Patentee after: Xi'an Shenqiong Photoelectric Technology Co., Ltd. Address before: 710049 Xianning West Road, Xi'an, Xi'an, Shaanxi Patentee before: Xi'an Jiaotong University |
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