CN102426362A - Laser active detector based on micromachine MEMS (Micro Electro Mechanical System) two-dimensional scanning mirror - Google Patents
Laser active detector based on micromachine MEMS (Micro Electro Mechanical System) two-dimensional scanning mirror Download PDFInfo
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- CN102426362A CN102426362A CN2011103678323A CN201110367832A CN102426362A CN 102426362 A CN102426362 A CN 102426362A CN 2011103678323 A CN2011103678323 A CN 2011103678323A CN 201110367832 A CN201110367832 A CN 201110367832A CN 102426362 A CN102426362 A CN 102426362A
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Abstract
The invention discloses a laser active detector based on micromachine MEMS (Micro Electro Mechanical System) two-dimensional scanning mirror. A CPU (Central Processing Unit) generates a laser pulse control signal to control a laser ranging device to transmit a pulse laser, a laser beam is irradiated to a detected target after being scanned by a static driving MEMS two-dimensional scanning mirror, the laser beam is reflected to the laser ranging device, and the CPU is connected with the laser ranging device and realizes detecting on the target after information processing. The laser active detector disclosed by the invention has the characteristics of small volume, light weight, low power consumption, fast response speed, low price, impact resistance and the like.
Description
Technical field
The present invention relates to a kind of laser imaging, particularly a kind of laser active probe device based on MEMS two-dimensional scan mirror.
Background technology
Existing 40 years of development of laser acquisition technology are historical.The high-rate laser scanning technique is a bottleneck technology of restriction laser acquisition technical development always.Traditional laser scanning method mainly comprises mechanical scanning harmony () photoscanning, but these two kinds of scan methods are used to all exist when the laser Active Imaging is guided certain limitation.Mechanical scanning is ripe a kind of scanning technique, thereby it utilizes the scanning of the rotation of optical elements such as catoptron or diaphotoscope or the direction of propagation realization light beam that vibration changes light beam.Sound () photoscanning then is that utilization sound () luminous effect changes the direction of propagation of light beam in the space; Promptly some direction changes to the refractive index of light sound () luminescent crystal in the effect lower edge of sound wave (electric field); When laser beam during along specific direction incident, at sound () thus effect under will deflect and reach the purpose of scanning.The size at beam deflection angle is directly proportional with the linear change rate of crystal refractive index.
The comparison of-1 three kind of scan method of table
Can find out from last table, mechanical scanning, scanning angle is big, the laser that temperature influence is little, be applicable to all kinds of wavelength, but sweep velocity is low, complex structure, and volume, quality, power consumption are all bigger, and the price of high-speed electric expreess locomotive is also relatively more expensive.Sound () photoscanning can obtain very high frequency of operation, but the scan deflection angle is less, and optical loss is bigger, and work efficiency is very low.
Summary of the invention
To the problems referred to above; The present invention proposes a kind of laser active probe device based on micromechanics MEMS two-dimensional scan mirror; Compare the MEMS scanning mechanism with traditional scanning mechanism and have that volume is very little, light weight, power consumption is little, response speed is fast, low price, characteristics such as impact resistance.
The present invention adopts following technical scheme:
CPU generates laser pulse control signal control laser range finder emission pulse laser; Laser beam is after the scanning of electrostatic-driven MEMS two-dimensional scan mirror; Shine on the target of being surveyed; Laser beam is reflected back toward laser range finder, and CPU is connected with laser range finder, through realizing the detection to target after the information processing.
Said two-dimensional scan mirror is a MEMS two dimensional laser scanning mirror.
Said laser range finder is a pulse laser laser welder.
Device of the present invention possesses following advantage:
1. simple in structure, the little light weight of volume;
2. sweep frequency is high.
Description of drawings
Fig. 1 is based on the laser image forming apparatus synoptic diagram of MEMS two-dimensional scan mirror
Embodiment
Below in conjunction with accompanying drawing and specific embodiment the present invention is made further detailed description.
As shown in Figure 1, this Laser Detecting Set is divided into 4 parts, and 1, CPU; 2, laser range finder; 3, electrostatic-driven MEMS two-dimensional scan mirror; 4, the target of being surveyed.
The I/O mouth of CPU is linked to each other with laser range finder, send pulse laser through the level gating pulse laser range finder that changes on the IO mouth; Pulse laser shines on the testee through MEMS two-dimensional scan mirror, and reflected light is received and measure the distance of target by laser range finder, and pulse laser laser welder is connected with CPU through UART, and the range information of measuring is imported CPU; At last, CPU utilizes range information, can realize the detection to the sensitizing range.
1 generates the laser pulse control signal controls 2 emission pulse lasers; Laser beam is after 3 scannings; Shine on 4, after laser beam was reflected back toward laser range finder, laser range finder went out the distance of measured target according to the time difference measurements between emission laser pulse and the reception laser pulse; 1 will survey 2 measurement result collection returns, through realizing the detection to target after the information processing.
Measuring method of the present invention comprises following several steps:
1.CPU through IO mouth gating pulse laser range finder emission pulse laser;
2. pulse laser shines on the detection of a target after the scanning of MEMS two-dimensional scan mirror;
3. laser-bounce obtains range information to laser range finder after laser range finder is measured;
4.CPU read the measured range information of laser range finder through the UART mouth;
5.CPU carrying out signal Processing, the information of adjusting the distance realizes detection to the sensitizing range.
6. repeat the 1-5 step, can realize the continuous imaging detection.
For realizing above purpose, apparatus of the present invention adopt structure as shown in Figure 1, and this structure comprises 1 MEMS two-dimensional scan mirror; This MEMS scanning mirror can be realized high speed two-dimension scanning; And output two-way aanalogvoltage is indicated the angle that is scanned, 1 laser range finder, 1 block signal treatment circuit; This circuit is used to gather the measured value of laser range finder, 1 MEMS two-dimensional scan mirror.
Claims (3)
1. based on the laser active probe device of micromechanics MEMS two-dimensional scan mirror; It is characterized in that CPU (1) generates laser pulse control signal control laser range finder (2) emission pulse laser, laser beam is after electrostatic-driven MEMS two-dimensional scan mirror (3) scanning; Shine on the target of being surveyed (4); Laser beam is reflected back toward laser range finder, and CPU (1) is connected with laser range finder (2), through realizing the detection to target after the information processing.
2. device according to claim 1 is characterized in that: said two-dimensional scan mirror is a MEMS two dimensional laser scanning mirror.
3. device according to claim 1 is characterized in that: said laser range finder (2) is a pulse laser laser welder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103678323A CN102426362A (en) | 2011-11-18 | 2011-11-18 | Laser active detector based on micromachine MEMS (Micro Electro Mechanical System) two-dimensional scanning mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103678323A CN102426362A (en) | 2011-11-18 | 2011-11-18 | Laser active detector based on micromachine MEMS (Micro Electro Mechanical System) two-dimensional scanning mirror |
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|---|---|
| CN102426362A true CN102426362A (en) | 2012-04-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2011103678323A Pending CN102426362A (en) | 2011-11-18 | 2011-11-18 | Laser active detector based on micromachine MEMS (Micro Electro Mechanical System) two-dimensional scanning mirror |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102944879A (en) * | 2012-11-05 | 2013-02-27 | 西安交通大学 | Four-dimensional imaging device based on MEMS two-dimensional scan mirror and imaging method of imaging device |
| CN106033622A (en) * | 2015-03-19 | 2016-10-19 | 联想(北京)有限公司 | Data collection method and device and target object reconstructing method and device |
| CN107728131A (en) * | 2017-11-10 | 2018-02-23 | 深圳市速腾聚创科技有限公司 | Laser radar and laser radar control method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008018955A2 (en) * | 2006-06-27 | 2008-02-14 | Arete' Associates | Camera-style lidar setup |
| CN101344591A (en) * | 2008-08-22 | 2009-01-14 | 清华大学 | Miniature laser two-dimension scanning survey system |
-
2011
- 2011-11-18 CN CN2011103678323A patent/CN102426362A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008018955A2 (en) * | 2006-06-27 | 2008-02-14 | Arete' Associates | Camera-style lidar setup |
| CN101344591A (en) * | 2008-08-22 | 2009-01-14 | 清华大学 | Miniature laser two-dimension scanning survey system |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102944879A (en) * | 2012-11-05 | 2013-02-27 | 西安交通大学 | Four-dimensional imaging device based on MEMS two-dimensional scan mirror and imaging method of imaging device |
| CN102944879B (en) * | 2012-11-05 | 2015-01-07 | 西安交通大学 | Four-dimensional imaging device based on MEMS two-dimensional scan mirror and imaging method of imaging device |
| CN106033622A (en) * | 2015-03-19 | 2016-10-19 | 联想(北京)有限公司 | Data collection method and device and target object reconstructing method and device |
| CN106033622B (en) * | 2015-03-19 | 2020-03-24 | 联想(北京)有限公司 | Data acquisition and target object reconstruction method and device |
| CN107728131A (en) * | 2017-11-10 | 2018-02-23 | 深圳市速腾聚创科技有限公司 | Laser radar and laser radar control method |
| CN107728131B (en) * | 2017-11-10 | 2020-04-28 | 深圳市速腾聚创科技有限公司 | Laser radar and laser radar control method |
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Application publication date: 20120425 |