CN110488247A - A kind of two dimension MEMS scanning galvanometer laser radar system - Google Patents
A kind of two dimension MEMS scanning galvanometer laser radar system Download PDFInfo
- Publication number
- CN110488247A CN110488247A CN201910767193.6A CN201910767193A CN110488247A CN 110488247 A CN110488247 A CN 110488247A CN 201910767193 A CN201910767193 A CN 201910767193A CN 110488247 A CN110488247 A CN 110488247A
- Authority
- CN
- China
- Prior art keywords
- image
- laser
- scanning galvanometer
- lens
- mems scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
- Y02A90/10—Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation
Abstract
The invention belongs to laser radar detection fields, propose a kind of two dimension MEMS scanning galvanometer laser radar system to expand field of view of receiver angle, improving signal-to-noise ratio；Two-dimentional MEMS scanning galvanometer is as sweep mechanism, high-frequency pulsed lasers are issued by control system control laser, the laser signal light of return successively passes through optical filter, object lens of large relative aperture optical lens is imaged on image-carrying fiber light cone incident end face, and light is further transmitted to APD array detector surface by image-carrying fiber light cone.Image-carrying fiber light cone is arranged by conic optic fiber beam, and the facula position that APD array detector is exported according to the scanning angle and corresponding echo light of two-dimentional MEMS scanning galvanometer in the image-carrying fiber light cone gates corresponding APD detector cells acquisition signal.Receiving optics bore and focal length and one timing of detector area are realized, expands the visual field of MEMS laser radar, reduces interference of the environmental background light to system, improve the received signal-to-noise ratio of signal.
Description
Technical field
The invention belongs to laser radar detection fields, and in particular to a kind of two dimension MEMS scanning galvanometer laser radar system.
Background technique
Laser radar can be roughly divided into mechanical laser radar and solid-state laser radar.The laser thunder of big field of view of receiver at present
Up to using mechanical rotational structure, the mechanical scanning system of turntable type is all cooperated using laser light source, measurand is carried out point-by-point
Scanning, data are reduced into the range image of target in sequence.When carrying out 3-D scanning, need that there are two dimensions
Scanning, structure is complicated, higher cost, and resolution ratio is not high.MEMS MEMS is applied on laser radar, it can be direct
The very exquisite micro- galvanometer of volume is integrated on silicon base chip, by can be with micro- galvanometer of Two Dimensional Rotating come the light of reflection laser
Line, to realize scanning.Compared to mechanical laser radar, two-dimentional MEMS scanning galvanometer laser radar not only can reduce laser
Radar volume, structure is relatively easy, improves volume production ability, reduces cost, and detection range is remote, good directionality, can test the speed survey
Away from reliable for operation, measurement accuracy is higher, therefore is expected to be widely used in onboard system, is onboard sensor development
A trend.
Laser radar system mainly has the coaxial optical path of transmitting-receiving and receives and dispatches parallel optical path, and MEMS galvanometer is used for laser radar and is received
In sending out light path system coaxial, due to the smaller bore that will limit reception system of the mirror surface of MEMS micromirror, to limit laser radar
Detection of the system to distant object.Two-dimentional MEMS scanning galvanometer is used in the parallel light path system of lidar transmit-receive, with two
MEMS scanning galvanometer is tieed up as sweep mechanism, point by point scanning is carried out to target；Laser receiver system is collected returns through what target reflected
Glistening light of waves line is simultaneously imaged on detector surface, and control system calculates target by accurately calculating Laser emission and received time difference
Distance.The size of laser acquisition distance and the power of echo-signal are closely bound up, and echo-signal is influenced by several factors,
Such as laser emitting power, dispersion angle, the decaying of optical lens, the diffusing reflection of target, the bore etc. of receiving light path；Laser radar
The reception visual field of system depends primarily on the field range of reception system.In the field range and echo-signal for improving radar system
Power when, how to reduce interference of the bias light to system, improve the critical issue that system received signal to noise ratio is radar system.
Summary of the invention
The present invention is APD array detection in the biggish situation of optical system bore solved in laser signal reception system
The smaller field angle for limiting two-dimentional MEMS scanning galvanometer laser radar receiving optics of device area and bias light are to system
Interference caused by the not high technical problem of signal-to-noise ratio, the technical solution adopted is as follows:
A kind of two dimension MEMS scanning galvanometer laser radar system, including laser transmitting system, control system, laser signal receive system
System；Along on the optical axis direction of optical propagation direction, the laser transmitting system is set gradually are as follows: laser, laser quasi are lineal
System, two dimension MEMS scanning galvanometer；Laser signal described in from object space to image space receives system and sets gradually are as follows: narrow band filter,
Object lens of large relative aperture optical lens, image-carrying fiber light cone, APD array detector；Object lens of large relative aperture optical lens and image-carrying fiber light
Cone composition receives camera lens；The image-carrying fiber light cone shape is pyramidal structure, and the big one end of bore is incident end face, bore
Small one end is outgoing end face；The image-carrying fiber light cone is to bore as made of up to ten million conical fiber regular permutations and combinations
Shape fiber optic bundle；Laser radar echo light successively passes through narrow band filter, object lens of large relative aperture optical lens is imaged on image-carrying fiber
On light cone incident end face, light is further transmitted to APD array detector surface by image-carrying fiber light cone；Control system respectively with
Laser transmitting system, APD array detector, two dimension MEMS scanning galvanometer are connected by conducting wire or wireless signal, sharp for controlling
Laser pulse emission, the swing of two dimension MEMS scanning galvanometer and the reception of APD array detector data of light device.Herein wireless
Signal connection includes: bluetooth communication agreement, IrDA protocol, WLAN communications protocol.
Working principle are as follows: two-dimentional MEMS scanning galvanometer laser radar system is a kind of using two-dimentional MEMS scanning galvanometer as sweeping
Mechanism is retouched, high-frequency pulse laser is issued by control system control laser, pulse type laser two can be selected in laser herein
Pole pipe.The light that laser issues improves laser radar by the laser collimation system hot spot that smaller, energy is concentrated as the angle of divergence
Angular resolution and detection range.The light being emitted through laser collimation system is reflected by sweep mechanism of two-dimentional MEMS scanning galvanometer
Spot carries out point by point scanning to target；Through target reflection echo light by narrow band filter, object lens of large relative aperture optical lens at
As one end cross-section big in image-carrying fiber light cone bore, image-carrying fiber light cone is further by light from image-carrying fiber light cone mouth
It projects and is transmitted to APD array detector surface in the small one end cross section of diameter；APD array detector is scanned according to two-dimentional MEMS to shake
The facula position that the scanning angle of mirror and corresponding echo light are exported in the output end face of the image-carrying fiber light cone, is controlled by gating
Circuit control processed selects corresponding some or certain several APD array detector cells to acquire signals.The image-carrying fiber light cone tool
There is magnifying power M, can be the taper with composition image-carrying fiber light cone by the picture breakdown that image-carrying fiber light cone incident end face receives
Entrained image element information is transmitted to biography picture by the corresponding pixel of fiber optic bundle, regularly arranged conic optic fiber beam correspondingly
The other end of fiber light cone；Pixel is exaggerated or minimized in transmittance process with the variation of conical fiber diameter, in outgoing end face
By former arrangement mode combined imaging.Linear array APD detector converts optical signals to electric signal and is transmitted to control system, control system
Range measurement is realized by accurately calculating the time of laser flying trip path.
The prioritization scheme of above scheme is as follows:
The APD array detector is rearranged by APD detector cells, according to the scanning angle of two-dimentional MEMS scanning galvanometer
The facula position exported with corresponding echo light in the output end face of the image-carrying fiber light cone, by gate control circuit selection pair
Some or certain the several APD array detector cells answered acquire signals.It can avoid other APD detector cells and receive environment back
Scape light interferes system.
The two dimension MEMS scanning galvanometer can be swung along horizontal and vertical both direction, change laser optical path.
The diameter of the conical fiber be emitted from the image-carrying fiber light cone incident end face to image-carrying fiber light cone end face by
Gradual change is small；Every conical fiber is all made of fibre core and covering, and the Refractive Index of Material of fibre core is greater than the Refractive Index of Material of covering.
The object lens of large relative aperture optical lens can be simple lens or lens group.
The incident end face of the image-carrying fiber light cone is emitted end face and is close to APD array close to object lens of large relative aperture optical lens
Detector, by optics gluing knot between the image-carrying fiber light cone and APD array detector.
The incident end face of the image-carrying fiber light cone is located at the image space focal plane position of object lens of large relative aperture optical lens.
The laser selects pulse type laser diode.
The APD array detector is linear array APD detector, and the longitudinal direction and pulsed of the linear array APD detector swash
Optical diode fast axis direction is parallel.
The horizontal hunting scanning direction of the two dimension MEMS scanning galvanometer is parallel with pulse type laser diode fast axis direction.
The two-dimentional MEMS scanning galvanometer can swing the angle α, β along horizontal and vertical both direction respectively, and wherein α is at 0 °
Between ~ ± 25 °, β realizes laser light source both horizontally and vertically between 0 ° ~ ± 15 °, through two-dimentional MEMS scanning galvanometer
Scanning.
The laser collimation system, including a horizontal positioned cylindrical lens and the cylindrical lens being disposed vertically, respectively
Laser is improved in the slow axis and fast axis direction of collimation laser diode, fast axis divergence angle < 0.3 ° after collimation, slow axis divergence < 0.8 °
The angular resolution and detection range of radar.
The scanning mode of the two dimension MEMS scanning galvanometer are as follows: swept from left to right in the horizontal direction in a fixed vertical position
After retouching the angle α, the quick angle opposite direction rotation-α of horizontal direction, vertical direction rotates the angle γ, and γ < β, then the upright position is along level
The angle α is scanned in direction from left to right, is repeated in above-mentioned steps.
The two dimension MEMS scanning galvanometer presses the certain frequency scanning angle α in a certain fixed vertical position in the horizontal direction, right
Linear array APD detector is answered successively to gate certain APD detector cells, this can be considered a cycle, when two-dimentional MEMS scanning galvanometer
When scanning next upright position, the linear array APD detector starts the rule gating of new a cycle.
Laser diode of the present invention can be the pulsed of 905nm or 1550nm laser diode or its all band
Laser diode.
More specifically scheme is as follows:
The object lens of large relative aperture optical lens is successively made of the first constituent element, the second constituent element, third element from object space to image space,
Focal power is successively negative, just, just；Wherein the first constituent element be used for by the light-receiving of big visual field enter the reception camera lens, second
Constituent element compresses the angle of light, and third element further assembles light, and a face is aspherical in third element, for correcting ball
Difference.
Further: the object lens of large relative aperture optical lens includes 5 eyeglasses, and it is flat to be followed successively by first from object space to image space
Convex lens, plano-concave lens, the second plano-convex lens, biconvex lens, aspherical positive lens；Wherein the first plano-convex lens and the second plano-convex
The convex surface of lens is respectively positioned on object space side, and the concave surface of plano-concave lens is located at image space side.
Compared with prior art, the present invention its remarkable advantage are as follows: the present invention combines two dimension MEMS scanning galvanometer, image-carrying fiber
Light cone is as the relay element of object lens of large relative aperture optical lens and linear array APD detector to expand the visual field and linear array APD detector
Gated mode can reduce the volume of laser radar in the parallel light path system of laser radar, simplify structure, while can be improved sharp
The detection range and detection accuracy of optical radar.Using image-carrying fiber light cone as object lens of large relative aperture optical lens and APD array
Relay element between detector is reduced by image-carrying fiber light cone and transmits object lens of large relative aperture optical lens imaging and arrived
APD array detector surface receives optical system bore and focal length and the certain condition of detector area in MEMS laser radar
Under, the visual field of MEMS laser radar can be expanded.APD array detector is according to the scan position of MEMS laser radar using gating mould
Formula reduces interference of the environmental background light to system, improves in the power of the field range and echo-signal that improve radar system
The signal-to-noise ratio of echo signal reception.
Focal plane array detector compared to 207833020 U of patent CN only gates a detector cells every time, this
Invention can choose several APD array detector cells and be gated for one group, and object lens of large relative aperture optical lens can be allowed to connect
The echo-signal in bigger field range is received, so that APD detector is received more echo-signals, improves the detection of laser radar
Distance and field range.
Detailed description of the invention
Fig. 1 is two dimension MEMS scanning galvanometer laser radar system working principle schematic block diagram；
Fig. 2 is the structural schematic diagram of two dimension MEMS scanning galvanometer laser radar system,
Wherein: Ith area is emission system, and II Qu Wei great visual field receives system；1 is laser, and 2 be laser collimation system, and 3 be two dimension
MEMS scanning galvanometer, 4 be narrow band filter, and 5 be object lens of large relative aperture optical lens, and 6 be image-carrying fiber light cone, and 7 visit for APD array
Survey device;
Fig. 3 is the scan path schematic diagram of two dimension MEMS scanning galvanometer；
Fig. 4 is the grouping schematic diagram of APD array detector；
Fig. 5 is that laser signal receives system structure diagram,
Wherein: 5 be object lens of large relative aperture optical lens, and 6 be image-carrying fiber light cone；
Fig. 6 is image-carrying fiber light cone structural schematic diagram,
Wherein: 8 be image-carrying fiber light cone incident end face, and 9 are emitted end face for image-carrying fiber light cone, and 10 be conical fiber；
Fig. 7 is the schematic diagram for forming the simple optical fiber of image-carrying fiber light cone,
Wherein: 11 be fibre cladding, and 12 be fiber core.
Specific embodiment
In order to illustrate more clearly of invention, it is further described with reference to the accompanying drawings and embodiments:
Embodiment one
A kind of two dimension MEMS scanning galvanometer laser radar system, as shown in Figure 1 and Figure 2, including laser transmitting system, control system,
Laser signal receives system；Along on the optical axis direction of optical propagation direction, the laser transmitting system is set gradually are as follows: laser
Device 1, laser collimation system 2, two dimension MEMS scanning galvanometer 3；As shown in figure 5, the laser signal receive system from object space to
Image space is set gradually are as follows: narrow band filter 4, object lens of large relative aperture optical lens 5, image-carrying fiber light cone 6, APD array detector 7；
Object lens of large relative aperture optical lens and image-carrying fiber light cone composition receive camera lens；The image-carrying fiber light cone shape is taper knot
Structure, the big one end of bore are incident end face 8, and the small one end of bore is outgoing end face 9；The image-carrying fiber light cone is by thousands of
Conic optic fiber beam made of ten thousand 10 regular permutations and combinations of conical fiber；Object lens of large relative aperture optical lens and image-carrying fiber light cone group
At reception camera lens；Laser radar echo light successively passes through narrow band filter, object lens of large relative aperture optical lens is imaged on biography as fine
It ties up on light cone incident end face, light is further transmitted to APD array detector surface by image-carrying fiber light cone；Control system difference
It is connect with laser transmitting system, APD array detector, two dimension MEMS scanning galvanometer by conducting wire or wireless signal, for controlling
Laser pulse emission, the swing of two dimension MEMS scanning galvanometer and the reception of APD array detector data of laser processed.
It is worth noting that, Fig. 1 ~ Fig. 7 only positional relationship between schematic components；Between its figure size and all parts
Proportionate relationship does not constitute the specific restriction to this programme.
More optimal solution are as follows:
The pulse type laser diode is 905nm wavelength, and fast axis divergence angle is 25 °, and slow axis divergence is 9 °.
The laser collimation system, including a horizontal positioned cylindrical lens and the cylindrical lens being disposed vertically, respectively
The slow axis and fast axis direction of collimation laser diode, fast axis divergence angle < 0.3 ° after collimation, slow axis divergence < 0.8 °.
The two dimension MEMS scanning galvanometer, mirror surface diameter 5mm can swing α, β along horizontal and vertical both direction respectively
Angle, wherein for α between 0 ° ~ ± 25 °, β realizes light source horizontal and vertical between 0 ° ~ ± 15 °, through two-dimentional MEMS scanning galvanometer
Histogram to scanning.
The scanning mode of the two dimension MEMS scanning galvanometer are as follows: swept from left to right in the horizontal direction in a fixed vertical position
After retouching the angle α, the quick angle opposite direction rotation-α of horizontal direction, vertical direction rotates the angle γ, and γ < β, then the upright position is along level
The angle α is scanned in direction from left to right, is repeated the above steps, and the progressive scan to target can be realized, such as black line institute in Fig. 3
Show.
The object lens of large relative aperture optical lens can be simple lens or lens group, and the present embodiment uses lens group, such as Fig. 6 institute
Show, bore 40mm, including 5 eyeglasses, by object space to image space be followed successively by the first plano-convex lens, plano-concave lens, the second plano-convex lens,
Biconvex lens, aspherical positive lens；Wherein the convex surface of the first plano-convex lens and the second plano-convex lens is respectively positioned on object space side, plano-concave
The concave surface of lens is located at image space side.Number < 1 system F, vertical light cone direction field angle are greater than ± 20 °, horizontal direction field angle
It is ± 6 °, the light of different visual fields is converged onto the incident end face of the image-carrying fiber light cone after lens group, spot diameter≤
1mm。
The APD array detector use 1 × 16 linear array APD detector, single APD detector cells area be 1mm ×
0.45mm is arranged along the long side direction, the hot spot that 16 APD detector cells are exported according to the output end face of the fiber light cone
Size, with two neighboring APD detector cells be one group, totally 15 groups, be followed successively by A, B, C ..., O group, as shown in Figure 4.
The APD array detector is acquired using gating signal, as shown in Fig. 2, when the scanning of two dimension MEMS scanning galvanometer
When angle corresponds to target 1, the echo-signal reflected by target 1 enters object lens of large relative aperture optical lens via narrow band filter, connects
Be imaged on the incident end face of image-carrying fiber light cone, by image-carrying fiber light cone further by light be transmitted to certain group APD detection
On device unit, as illustrated in solid line in figure 2, when the scanning angle of two-dimentional MEMS scanning galvanometer corresponds to target 2, reflected by target 2
Echo-signal another group of APD detector list is transmitted to by narrow band filter, object lens of large relative aperture optical lens, image-carrying fiber light cone
In member, as shown in phantom in Figure 2.；With the variation of two-dimentional MEMS scanning galvanometer scanning angle, single gating is one group corresponding
APD detector cells acquire signal, can avoid other group of APD array detector cells and receive environmental background light causing system
Interference improves the signal-to-noise ratio of reception system.
The narrow band filter is the narrow band filter of 905nm, according to the transmitting laser of MEMS laser radar emission system
Depending on wavelength, to filter out the interference light of its all band.
The narrow band filter is located at the front end that laser signal receives system.
Image-carrying fiber light cone shape described in the present embodiment is pyramidal structure, as shown in fig. 6, it is by tens million of conical fibers
Regular permutations and combinations form；The big one end of the image-carrying fiber light cone bore is incident end face, diameter 22mm, the small one end of bore
To be emitted end face, diameter 10mm；The image-carrying fiber light cone has enlargement ratio 2.2, can be by image-carrying fiber light cone incident end face
The picture breakdown received is pixel corresponding with composition tens million of conical fibers of image-carrying fiber light cone, regularly arranged
Entrained image element information is transmitted to the other end of image-carrying fiber light cone by conical fiber correspondingly；Pixel is in transmittance process
In be exaggerated or minimized with the variation of conical fiber diameter, press former arrangement mode combined imaging in outgoing end face.
Image-carrying fiber light cone is the conic optic fiber beam as made of conical fiber regular permutations and combinations；The shape of conic optic fiber beam
For frustum, both sides of the face can be processed as rectangle or circle according to APD array detector shape.
Image-carrying fiber light cone described in this example is made of tens million of regularly arranged conical fibers, every conical fiber
Diameter gradually becomes smaller from the big one end of the image-carrying fiber light cone bore to the small one end of image-carrying fiber light cone bore, string diameter≤6 μ
m；Such as Fig. 7, every optical fiber is all made of fibre core 11 and covering 12, and inner layer is the fibre core that refractive index is n1, and outer layer is that refractive index is
The covering of n2, n1 > n2.
The two-dimentional MEMS scanning galvanometer laser radar system of above-mentioned technical proposal makes receiving light path using parallel optical path is received and dispatched
Bore is not limited by two-dimentional MEMS scanning galvanometer area, improves the detection range and visual field of laser radar system；To pass as fine
Relay element of the light cone as object lens of large relative aperture optical lens and APD array detector is tieed up, linear array APD detector is according to two dimension
The scan position of MEMS scanning galvanometer laser radar uses gated mode, can reduce interference of the environmental background light to system, improves
The signal-to-noise ratio of echo signal reception.
Claims (10)
1. a kind of two dimension MEMS scanning galvanometer laser radar system, including laser transmitting system, control system, laser signal receive
System, it is characterised in that:
Along on the optical axis direction of optical propagation direction, the laser transmitting system is set gradually are as follows: laser, laser quasi are lineal
System, two dimension MEMS scanning galvanometer；
The laser is pulse laser；
Laser signal described in from object space to image space receives system and sets gradually are as follows: narrow band filter, object lens of large relative aperture optical frames
Head, image-carrying fiber light cone, APD array detector；The image-carrying fiber light cone shape is pyramidal structure, the big one end of bore
For incident end face, the small one end of bore is outgoing end face；The image-carrying fiber light cone is by conical fiber regular permutations and combinations
Made of conic optic fiber beam；Object lens of large relative aperture optical lens and image-carrying fiber light cone composition receive camera lens；Laser radar echo light
Line successively passes through narrow band filter, object lens of large relative aperture optical lens is imaged on image-carrying fiber light cone incident end face, image-carrying fiber
Light is further transmitted to APD array detector surface by light cone；
Control system passes through conducting wire or wireless communication with laser transmitting system, APD array detector, two dimension MEMS scanning galvanometer respectively
Number connection, for controlling swing and the APD array detector data of the laser pulse emission, two dimension MEMS scanning galvanometer of laser
Reception.
2. two dimension MEMS scanning galvanometer laser radar system according to claim 1, it is characterised in that: the APD battle array
Row detector is rearranged by APD detector cells, according to the scanning angle of two-dimentional MEMS scanning galvanometer and corresponding echo light
In the facula position that the output end face of the image-carrying fiber light cone exports, corresponding APD array is selected to detect by control system
Device unit acquires signal.
3. two dimension MEMS scanning galvanometer laser radar system according to claim 2, which is characterized in that two-dimentional MEMS scanning
Galvanometer can be scanned along horizontal and vertical both direction.
4. two dimension MEMS scanning galvanometer laser radar system according to claim 3, which is characterized in that the laser choosing
With pulse type laser diode；
The APD array detector is linear array APD detector, and the longitudinal direction and laser diode of the linear array APD detector are fast
Axis direction is parallel.
5. two dimension MEMS scanning galvanometer laser radar system according to claim 4, which is characterized in that the two dimension MEMS
The horizontal scan direction of scanning galvanometer is parallel with pulse type laser diode fast axis direction.
6. two dimension MEMS scanning galvanometer laser radar system according to claim 1, which is characterized in that the conical fiber
Diameter be emitted end face from the image-carrying fiber light cone incident end face to image-carrying fiber light cone and gradually become smaller；Every conical fiber is all
It is made of fibre core and covering, the Refractive Index of Material of fibre core is greater than the Refractive Index of Material of covering.
7. two dimension MEMS scanning galvanometer laser radar system according to claim 1, which is characterized in that
The object lens of large relative aperture optical lens is successively made of the first constituent element, the second constituent element, third element from object space to image space,
Focal power is successively negative, just, just；Wherein the first constituent element be used for by the light-receiving of big visual field enter the reception camera lens, second
Constituent element compresses the angle of light, and third element further assembles light, and a face is aspherical in third element, for correcting ball
Difference.
8. two dimension MEMS scanning galvanometer laser radar system according to claim 1, which is characterized in that the image-carrying fiber
The incident end face of light cone is emitted end face and is close to APD array detector close to object lens of large relative aperture optical lens.
9. two dimension MEMS scanning galvanometer laser radar system according to claim 1, which is characterized in that the image-carrying fiber
The incident end face of light cone is located at the image space focal plane position of object lens of large relative aperture optical lens.
10. two-dimentional MEMS scanning galvanometer laser radar system described according to claim 1~one of 9, which is characterized in that described
Object lens of large relative aperture optical lens includes 5 eyeglasses, is followed successively by the first plano-convex lens, plano-concave lens, second flat from object space to image space
Convex lens, biconvex lens, aspherical positive lens；Wherein the convex surface of the first plano-convex lens and the second plano-convex lens is respectively positioned on object space one
The concave surface of side, plano-concave lens is located at image space side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910767193.6A CN110488247B (en) | 2019-08-20 | 2019-08-20 | Two-dimensional MEMS scanning galvanometer laser radar system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910767193.6A CN110488247B (en) | 2019-08-20 | 2019-08-20 | Two-dimensional MEMS scanning galvanometer laser radar system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110488247A true CN110488247A (en) | 2019-11-22 |
| CN110488247B CN110488247B (en) | 2023-06-23 |
Family
ID=68552214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910767193.6A Active CN110488247B (en) | 2019-08-20 | 2019-08-20 | Two-dimensional MEMS scanning galvanometer laser radar system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110488247B (en) |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111239760A (en) * | 2020-01-16 | 2020-06-05 | 湖北三江航天红峰控制有限公司 | Multi-view-field target environment information acquisition device and method based on fusion sensor |
| CN111239749A (en) * | 2020-02-04 | 2020-06-05 | 成都英飞睿技术有限公司 | Novel high-line-number MEMS laser radar system |
| CN111308477A (en) * | 2019-11-29 | 2020-06-19 | 深圳市镭神智能系统有限公司 | Laser radar receiving system and laser radar |
| CN111366907A (en) * | 2020-04-07 | 2020-07-03 | 哈尔滨工业大学(深圳)(哈尔滨工业大学深圳科技创新研究院) | MEMS three-dimensional laser radar system |
| CN111736114A (en) * | 2020-08-21 | 2020-10-02 | 武汉煜炜光学科技有限公司 | Method for improving data transmission speed of laser radar and laser radar |
| CN112433222A (en) * | 2020-11-24 | 2021-03-02 | 长春理工大学 | Haze-penetrating laser distance measuring system and method |
| CN112684431A (en) * | 2020-12-31 | 2021-04-20 | 深圳煜炜光学科技有限公司 | Solid-state scanning laser radar device and using method |
| CN112799033A (en) * | 2021-01-20 | 2021-05-14 | 湖北三江航天红峰控制有限公司 | Large-field-of-view scanning MEMS laser radar device and scanning system |
| CN112997095A (en) * | 2020-04-03 | 2021-06-18 | 深圳市速腾聚创科技有限公司 | Laser radar and autopilot device |
| CN113031003A (en) * | 2021-03-29 | 2021-06-25 | 哈尔滨工业大学 | Panoramic optical system, panoramic scanning system and imaging system based on MEMS (micro-electromechanical systems) micro-mirror |
| CN113064140A (en) * | 2021-03-24 | 2021-07-02 | 广州降光科技有限公司 | Three-dimensional laser scanning radar device |
| CN113227827A (en) * | 2020-04-03 | 2021-08-06 | 深圳市速腾聚创科技有限公司 | Laser radar and autopilot device |
| CN113447933A (en) * | 2020-03-24 | 2021-09-28 | 上海禾赛科技有限公司 | Detection unit of laser radar, laser radar and detection method thereof |
| CN114706164A (en) * | 2022-03-31 | 2022-07-05 | 深圳市速腾聚创科技有限公司 | Waveguide conversion chip and laser radar |
| CN115016114A (en) * | 2021-03-03 | 2022-09-06 | 中国科学院苏州纳米技术与纳米仿生研究所 | Laser scanning system and method |
| WO2024060929A1 (en) * | 2022-09-22 | 2024-03-28 | 上海精测半导体技术有限公司 | Photoacoustic measuring device and film thickness measuring method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102253394A (en) * | 2011-04-21 | 2011-11-23 | 北京理工大学 | Multispectral stripe tube three-dimensional lidar imaging apparatus |
| CN102508224A (en) * | 2011-11-18 | 2012-06-20 | 北京理工大学 | Device for improving imaging laser radar depth of field of multi-slit streak tube |
| CN103267982A (en) * | 2013-04-15 | 2013-08-28 | 广东汉唐量子光电科技有限公司 | Device for realizing high-speed photoelectric imaging detection |
| CN106911385A (en) * | 2017-02-28 | 2017-06-30 | 华南师范大学 | A kind of optical antenna and LED visible light communication system |
| CN108200312A (en) * | 2017-12-12 | 2018-06-22 | 中北大学 | A kind of light-field camera |
| CN108897004A (en) * | 2018-06-28 | 2018-11-27 | 中国人民解放军91977部队 | A kind of laser gated imaging search and rescue device |
| CN109490908A (en) * | 2018-11-07 | 2019-03-19 | 深圳市微觉未来科技有限公司 | A kind of Novel wire scanning laser radar and scan method |
-
2019
- 2019-08-20 CN CN201910767193.6A patent/CN110488247B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102253394A (en) * | 2011-04-21 | 2011-11-23 | 北京理工大学 | Multispectral stripe tube three-dimensional lidar imaging apparatus |
| CN102508224A (en) * | 2011-11-18 | 2012-06-20 | 北京理工大学 | Device for improving imaging laser radar depth of field of multi-slit streak tube |
| CN103267982A (en) * | 2013-04-15 | 2013-08-28 | 广东汉唐量子光电科技有限公司 | Device for realizing high-speed photoelectric imaging detection |
| CN106911385A (en) * | 2017-02-28 | 2017-06-30 | 华南师范大学 | A kind of optical antenna and LED visible light communication system |
| CN108200312A (en) * | 2017-12-12 | 2018-06-22 | 中北大学 | A kind of light-field camera |
| CN108897004A (en) * | 2018-06-28 | 2018-11-27 | 中国人民解放军91977部队 | A kind of laser gated imaging search and rescue device |
| CN109490908A (en) * | 2018-11-07 | 2019-03-19 | 深圳市微觉未来科技有限公司 | A kind of Novel wire scanning laser radar and scan method |
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111308477A (en) * | 2019-11-29 | 2020-06-19 | 深圳市镭神智能系统有限公司 | Laser radar receiving system and laser radar |
| CN111308477B (en) * | 2019-11-29 | 2022-05-24 | 深圳市镭神智能系统有限公司 | Laser radar receiving system and laser radar |
| CN111239760A (en) * | 2020-01-16 | 2020-06-05 | 湖北三江航天红峰控制有限公司 | Multi-view-field target environment information acquisition device and method based on fusion sensor |
| CN111239749A (en) * | 2020-02-04 | 2020-06-05 | 成都英飞睿技术有限公司 | Novel high-line-number MEMS laser radar system |
| CN113447933A (en) * | 2020-03-24 | 2021-09-28 | 上海禾赛科技有限公司 | Detection unit of laser radar, laser radar and detection method thereof |
| CN112997095A (en) * | 2020-04-03 | 2021-06-18 | 深圳市速腾聚创科技有限公司 | Laser radar and autopilot device |
| CN113227827A (en) * | 2020-04-03 | 2021-08-06 | 深圳市速腾聚创科技有限公司 | Laser radar and autopilot device |
| WO2021196193A1 (en) * | 2020-04-03 | 2021-10-07 | 深圳市速腾聚创科技有限公司 | Lidar and self-driving device |
| CN111366907A (en) * | 2020-04-07 | 2020-07-03 | 哈尔滨工业大学(深圳)(哈尔滨工业大学深圳科技创新研究院) | MEMS three-dimensional laser radar system |
| CN111736114A (en) * | 2020-08-21 | 2020-10-02 | 武汉煜炜光学科技有限公司 | Method for improving data transmission speed of laser radar and laser radar |
| CN112433222A (en) * | 2020-11-24 | 2021-03-02 | 长春理工大学 | Haze-penetrating laser distance measuring system and method |
| CN112684431A (en) * | 2020-12-31 | 2021-04-20 | 深圳煜炜光学科技有限公司 | Solid-state scanning laser radar device and using method |
| CN112799033A (en) * | 2021-01-20 | 2021-05-14 | 湖北三江航天红峰控制有限公司 | Large-field-of-view scanning MEMS laser radar device and scanning system |
| CN115016114A (en) * | 2021-03-03 | 2022-09-06 | 中国科学院苏州纳米技术与纳米仿生研究所 | Laser scanning system and method |
| CN113064140A (en) * | 2021-03-24 | 2021-07-02 | 广州降光科技有限公司 | Three-dimensional laser scanning radar device |
| CN113031003A (en) * | 2021-03-29 | 2021-06-25 | 哈尔滨工业大学 | Panoramic optical system, panoramic scanning system and imaging system based on MEMS (micro-electromechanical systems) micro-mirror |
| CN113031003B (en) * | 2021-03-29 | 2022-09-27 | 哈尔滨工业大学 | Panoramic optical system, panoramic scanning system and imaging system based on MEMS (micro-electromechanical systems) micro-mirror |
| CN114706164A (en) * | 2022-03-31 | 2022-07-05 | 深圳市速腾聚创科技有限公司 | Waveguide conversion chip and laser radar |
| WO2024060929A1 (en) * | 2022-09-22 | 2024-03-28 | 上海精测半导体技术有限公司 | Photoacoustic measuring device and film thickness measuring method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110488247B (en) | 2023-06-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110488247A (en) | A kind of two dimension MEMS scanning galvanometer laser radar system | |
| US20190257924A1 (en) | Receive path for lidar system | |
| CN104020474B (en) | A kind of laser three-dimensional imaging optical transmitting and receiving system | |
| US8946637B2 (en) | Compact fiber-based scanning laser detection and ranging system | |
| CN105301600B (en) | A kind of no-raster laser three-dimensional imaging device based on taper reflection | |
| CN110161512B (en) | Multi-line laser radar | |
| CN109709572A (en) | A kind of half coaxial optical path reception laser radar system | |
| CN108152830A (en) | A kind of laser radar scanning imaging system and its measuring method | |
| CN210835218U (en) | Two-dimensional MEMS scanning galvanometer laser radar | |
| CN104155639A (en) | Transmitting and receiving integrated laser radar device | |
| CN107015237A (en) | A kind of sounding optical system | |
| CN103994719A (en) | High-precision three-dimensional imaging device based on Geiger APD arrays and using method thereof | |
| CN106093911A (en) | A kind of dot matrix emitting-receiving system for Non-scanning mode laser imaging | |
| CN107422336A (en) | A kind of variable resolution Non-scanning mode streak tube laser imaging system of the big depth of field of big visual field | |
| CN103630337B (en) | Lens front focal length measuring equipment and method | |
| CN110488246A (en) | A kind of big visual field receiving system of two dimension MEMS scanning laser radar | |
| WO2020164221A1 (en) | Transceiver device and laser radar | |
| CN102680959A (en) | Transmitting module of correlated imaging laser radar | |
| WO2020068249A1 (en) | Lidar system with anamorphic objective lens | |
| CN109444850A (en) | Phased-array laser radar | |
| CN102520412A (en) | Laser active detecting device based on MEMS (micro-electromechanical system) two-dimensional scanning mirror array | |
| CN112213737A (en) | Long-distance photon counting three-dimensional laser radar imaging system and method thereof | |
| CN207833020U (en) | A kind of laser radar scanning imaging system | |
| CN115267822A (en) | High-uniformity scanning type single photon laser three-dimensional radar imaging system and imaging method | |
| CN108710135A (en) | A kind of video mosaic system configuring big visual field laser three-D detection for different axis |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |