CN110488247B - Two-dimensional MEMS scanning galvanometer laser radar system - Google Patents

Two-dimensional MEMS scanning galvanometer laser radar system Download PDF

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CN110488247B
CN110488247B CN201910767193.6A CN201910767193A CN110488247B CN 110488247 B CN110488247 B CN 110488247B CN 201910767193 A CN201910767193 A CN 201910767193A CN 110488247 B CN110488247 B CN 110488247B
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laser
dimensional mems
scanning galvanometer
image transmission
mems scanning
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CN110488247A (en
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吴东岷
王懋
范娜娜
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Suzhou Institute of Nano Tech and Nano Bionics of CAS
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Suzhou Institute of Nano Tech and Nano Bionics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4817Constructional features, e.g. arrangements of optical elements relating to scanning
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A90/00Technologies having an indirect contribution to adaptation to climate change
    • Y02A90/10Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation

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  • Computer Networks & Wireless Communication (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

The invention belongs to the field of laser radar detection, and provides a two-dimensional MEMS scanning galvanometer laser radar system for enlarging a receiving field angle and improving a signal to noise ratio; the two-dimensional MEMS scanning galvanometer is used as a scanning mechanism, the control system controls the laser to emit high-frequency pulse laser, returned laser signal light rays sequentially pass through the optical filter and the large relative aperture optical lens to be imaged on the incident end face of the image transmission fiber light cone, and the image transmission fiber light cone further transmits the light rays to the surface of the APD array detector. The image transmission fiber light cone is formed by arranging conical fiber bundles, and the APD array detector gates the corresponding APD detector units to acquire signals according to the scanning angle of the two-dimensional MEMS scanning galvanometer and the light spot position output by the corresponding echo light at the image transmission fiber light cone. When the caliber and focal length of the receiving optical system and the area of the detector are fixed, the view field of the MEMS laser radar is enlarged, the interference of ambient background light on the system is reduced, and the signal-to-noise ratio of signal receiving is improved.

Description

Two-dimensional MEMS scanning galvanometer laser radar system
Technical Field
The invention belongs to the field of laser radar detection, and particularly relates to a two-dimensional MEMS scanning galvanometer laser radar system.
Background
Lidars can be broadly classified into mechanical lidars and solid-state lidars. At present, the laser radars with large receiving fields all adopt a mechanical rotating structure, a laser light source is matched with a turntable type mechanical scanning system to scan a measured object point by point, and data are restored into a range image of a target in sequence. When three-dimensional scanning is performed, two-dimensional scanning is needed, the structure is complex, the cost is high, and the resolution is low. The MEMS micro-electromechanical system is applied to a laser radar, a very exquisite micro-vibrating mirror can be directly integrated on a silicon-based chip, and the micro-vibrating mirror capable of rotating in two dimensions is used for reflecting the light of a laser, so that scanning is realized. Compared with a mechanical laser radar, the two-dimensional MEMS scanning galvanometer laser radar has the advantages of being capable of reducing the volume of the laser radar, relatively simple in structure, improving the capacity of measuring, reducing the cost, long in detection distance, good in directivity, capable of measuring speed and distance, reliable in operation and high in measurement accuracy, and therefore the two-dimensional MEMS scanning galvanometer laser radar is expected to be widely applied to vehicle-mounted systems, and is a trend of development of vehicle-mounted sensors.
The laser radar system mainly comprises a receiving and transmitting coaxial optical path and a receiving and transmitting parallel optical path, and the MEMS galvanometer is used in the laser radar receiving and transmitting coaxial optical path system, and the caliber of a receiving system can be limited due to the smaller mirror surface of the MEMS galvanometer, so that the detection of the laser radar system on a remote target is limited. The two-dimensional MEMS scanning galvanometer is used in a laser radar receiving and transmitting parallel optical path system, and is used as a scanning mechanism to scan a target point by point; the laser receiving system collects the echo light reflected by the target and images the echo light on the surface of the detector, and the control system calculates the distance of the target by accurately calculating the time difference between laser emission and laser reception. The size of the laser detection distance is related to the intensity of the echo signal, and the echo signal is influenced by a plurality of factors, such as laser emission power, divergence angle, attenuation of an optical lens, diffuse reflection of a target, caliber of a receiving light path and the like; the field of view of a lidar system is primarily dependent upon the field of view of the receiving system. When the field of view of the radar system and the power of the echo signals are improved, how to reduce the interference of background light to the system and improve the signal-to-noise ratio of the system are key problems of the radar system.
Disclosure of Invention
The invention aims to solve the technical problems that the field angle of a two-dimensional MEMS scanning galvanometer laser radar receiving optical system and the signal to noise ratio caused by interference of background light to the system are not high due to the fact that the area of an APD array detector is small under the condition that the caliber of the optical system in a laser signal receiving system is large, and adopts the following technical scheme:
a two-dimensional MEMS scanning galvanometer laser radar system comprises a laser emission system, a control system and a laser signal receiving system; along the optical axis direction of the light propagation direction, the laser emission system is sequentially arranged as follows: the laser, the laser collimation system, two-dimensional MEMS scan the galvanometer; the laser signal receiving system from the object side to the image side is sequentially provided with: a narrow-band optical filter, a large relative aperture optical lens, an image transmission fiber light cone and an APD array detector; the large relative aperture optical lens and the image transmission fiber light cone form a receiving lens; the appearance of the image transmission fiber light cone is of a conical structure, one end with a large caliber is an incident end face, and the other end with a small caliber is an emergent end face; the image transmission fiber light cone is a conical fiber bundle formed by regularly arranging and combining tens of millions of conical fibers; the laser radar echo light is imaged on the incident end face of the image transmission fiber light cone sequentially through a narrow-band filter and a large relative aperture optical lens, and the image transmission fiber light cone further transmits the light to the surface of the APD array detector; the control system is respectively connected with the laser emission system, the APD array detector and the two-dimensional MEMS scanning galvanometer through wires or wireless signals and is used for controlling laser pulse emission of the laser, swing of the two-dimensional MEMS scanning galvanometer and receiving of data of the APD array detector. The wireless signal connection here includes: bluetooth communication protocol, infrared communication protocol, WLAN communication protocol.
The working principle is as follows: the two-dimensional MEMS scanning galvanometer laser radar system uses a two-dimensional MEMS scanning galvanometer as a scanning mechanism, and a control system controls a laser to emit high-frequency pulse laser, wherein the laser can be a pulse laser diode. Light emitted by the laser becomes a light spot with smaller divergence angle and concentrated energy through the laser collimation system, and the angular resolution and the detection distance of the laser radar are improved. Reflecting the light spots emitted by the laser collimation system by taking the two-dimensional MEMS scanning galvanometer as a scanning mechanism, and scanning the target point by point; the echo light reflected by the target is imaged at the cross section of one end with a large caliber of the image transmission fiber light cone through the narrow-band filter and the large relative aperture optical lens, and the image transmission fiber light cone further emits light from the cross section of one end with a small caliber of the image transmission fiber light cone and transmits the light to the surface of the APD array detector; and the APD array detector selects one or a plurality of corresponding APD array detector units to collect signals under the control of the gating control circuit according to the scanning angle of the two-dimensional MEMS scanning galvanometer and the light spot position output by the corresponding echo light on the output end face of the image transmission fiber light cone. The image transmission fiber light cone has an amplification rate M, an image received by the incident end face of the image transmission fiber light cone can be decomposed into pixels corresponding to cone-shaped fiber bundles forming the image transmission fiber light cone, and the regularly arranged cone-shaped fiber bundles transmit the carried pixel information to the other end of the image transmission fiber light cone in a one-to-one correspondence manner; the pixels are enlarged or reduced along with the diameter change of the tapered optical fiber in the transmission process, and are combined and imaged on the emergent end face according to the original arrangement mode. The linear array APD detector converts the optical signal into an electric signal and transmits the electric signal to the control system, and the control system can realize distance measurement by accurately calculating the time of the laser flying round trip path.
The optimization scheme of the scheme is as follows:
the APD array detector is formed by arranging APD detector units, and a gating control circuit selects one or a plurality of corresponding APD array detector units to acquire signals according to the scanning angle of the two-dimensional MEMS scanning galvanometer and the light spot position of the corresponding echo light beam output on the output end face of the image transmission fiber light cone. The interference of other APD detector units receiving the ambient background light to the system can be avoided.
The two-dimensional MEMS scanning galvanometer can swing along the horizontal direction and the vertical direction, and the laser path is changed.
The diameter of the tapered optical fiber gradually becomes smaller from the incident end face of the image transmission fiber light cone to the emergent end face of the image transmission fiber light cone; each tapered fiber is composed of a fiber core and a cladding, wherein the refractive index of the material of the fiber core is larger than that of the material of the cladding.
The large relative aperture optical lens may be a single lens or a lens group.
The incident end face of the image transmission fiber light cone is close to the optical lens with the large relative aperture, the emergent end face of the image transmission fiber light cone is tightly attached to the APD array detector, and the image transmission fiber light cone and the APD array detector are bonded by optical cement.
The incident end face of the image transmission fiber light cone is positioned at the image space focal plane position of the large relative aperture optical lens.
The laser is a pulse laser diode.
The APD array detector is a linear array APD detector, and the long-side direction of the linear array APD detector is parallel to the fast axis direction of the pulse laser diode.
The horizontal swing scanning direction of the two-dimensional MEMS scanning galvanometer is parallel to the fast axis direction of the pulse laser diode.
The two-dimensional MEMS scanning galvanometer can swing an angle alpha and an angle beta along the horizontal direction and the vertical direction respectively, wherein alpha is between 0 degrees and +/-25 degrees, and beta is between 0 degrees and +/-15 degrees, and scanning of the laser light source in the horizontal direction and the vertical direction is realized through the two-dimensional MEMS scanning galvanometer.
The laser collimation system comprises a horizontally placed cylindrical lens and a vertically placed cylindrical lens, the slow axis and the fast axis directions of the laser diode are respectively collimated, the divergence angle of the fast axis after collimation is less than 0.3 degrees, the divergence angle of the slow axis is less than 0.8 degrees, and the angular resolution and the detection distance of the laser radar are improved.
The scanning mode of the two-dimensional MEMS scanning galvanometer is as follows: after a fixed vertical position scans an angle alpha from left to right along the horizontal direction, the horizontal direction is rapidly rotated by an angle alpha in the opposite direction, the vertical direction is rotated by an angle gamma, gamma < beta, and then the vertical position scans the angle alpha from left to right along the horizontal direction, and the steps are repeated in sequence.
The two-dimensional MEMS scanning vibrating mirror scans an angle alpha along a horizontal direction at a certain fixed vertical position according to a certain frequency, and certain APD detector units are sequentially gated by corresponding linear array APD detectors, so that the two-dimensional MEMS scanning vibrating mirror can be regarded as a period, and when the two-dimensional MEMS scanning vibrating mirror scans to the next vertical position, the linear array APD detectors start regular gating of a new period.
The laser diode of the invention can be a 905nm or 1550nm laser diode or a pulse laser diode of other wave bands.
The more specific scheme is as follows:
the optical lens with the large relative aperture sequentially comprises a first component, a second component and a third component from an object side to an image side, and the focal power of the optical lens is sequentially negative, positive and positive; the first component is used for receiving light with a large view field into the receiving lens, the second component compresses the angle of the light, the third component further converges the light, and one surface of the third component is an aspheric surface and is used for correcting spherical aberration.
Further: the large-relative-aperture optical lens comprises 5 lenses, and a first plano-convex lens, a plano-concave lens, a second plano-convex lens, a biconvex lens and an aspheric positive lens are sequentially arranged from an object space to an image space; the convex surfaces of the first plano-convex lens and the second plano-convex lens are both positioned on one side of the object space, and the concave surface of the plano-concave lens is positioned on one side of the image space.
Compared with the prior art, the invention has the remarkable advantages that: the invention combines a two-dimensional MEMS scanning galvanometer and an image transmission fiber light cone as relay elements of a large relative aperture optical lens and a linear array APD detector to enlarge the field of view and the gating mode of the linear array APD detector in a laser radar parallel light path system, can reduce the volume of the laser radar, simplify the structure and improve the detection distance and the detection precision of the laser radar. The image transmission fiber light cone is used as a relay element between the large relative aperture optical lens and the APD array detector, the image formed by the large relative aperture optical lens is reduced and transmitted to the surface of the APD array detector by the image transmission fiber light cone, and the field of view of the MEMS laser radar can be enlarged under the condition that the aperture and focal length of the MEMS laser radar receiving optical system and the detector area are certain. The APD array detector adopts a gating mode according to the scanning azimuth of the MEMS laser radar, and when the visual field range of a radar system and the power of an echo signal are improved, the interference of ambient background light to the system is reduced, and the signal-to-noise ratio of echo signal receiving is improved.
Compared with the focal plane array detector of the patent CN 207833020U, only one detector unit is selected at a time, the invention can select a plurality of APD array detector units as a group for gating, can allow a large relative aperture optical lens to receive echo signals in a larger visual field range, also enables the APD detector to receive more echo signals, and improves the detection distance and the visual field range of the laser radar.
Drawings
FIG. 1 is a schematic block diagram of the working principle of a two-dimensional MEMS scanning galvanometer lidar system;
figure 2 is a schematic diagram of a two-dimensional MEMS scanning galvanometer lidar system,
wherein: the area I is a transmitting system, and the area II is a large-view-field receiving system; 1 is a laser, 2 is a laser collimation system, 3 is a two-dimensional MEMS scanning galvanometer, 4 is a narrow-band optical filter, 5 is a large relative aperture optical lens, 6 is an image transmission fiber light cone, and 7 is an APD array detector;
FIG. 3 is a schematic diagram of a scanning path of a two-dimensional MEMS scanning galvanometer;
FIG. 4 is a schematic diagram of a grouping of APD array detectors;
figure 5 is a schematic diagram of a laser signal receiving system,
wherein: 5 is a large relative aperture optical lens, 6 is an image transmission fiber light cone;
figure 6 is a schematic view of the structure of the image transmission fiber light cone,
wherein: 8 is an incidence end face of an image transmission fiber light cone, 9 is an emergent end face of the image transmission fiber light cone, and 10 is a conical optical fiber;
figure 7 is a schematic view of a single optical fiber constituting an image-transmitting fiber light cone,
wherein: 11 is the fiber cladding and 12 is the fiber core.
Detailed Description
For a clearer description of the invention, reference will be made to the following description of embodiments taken in conjunction with the accompanying drawings:
example 1
A two-dimensional MEMS scanning galvanometer laser radar system, as shown in figure 1 and figure 2, comprises a laser emission system, a control system and a laser signal receiving system; along the optical axis direction of the light propagation direction, the laser emission system is sequentially arranged as follows: the laser device 1, the laser collimation system 2 and the two-dimensional MEMS scanning galvanometer 3; as shown in fig. 5, the laser signal receiving system is sequentially configured from an object side to an image side as follows: a narrow-band optical filter 4, a large relative aperture optical lens 5, an image transmission fiber light cone 6 and an APD array detector 7; the large relative aperture optical lens and the image transmission fiber light cone form a receiving lens; the appearance of the image transmission fiber light cone is of a conical structure, one end with a large caliber is an incident end face 8, and the other end with a small caliber is an emergent end face 9; the image transmission fiber light cone is a conical fiber bundle formed by regularly arranging and combining tens of millions of conical fibers 10; the large relative aperture optical lens and the image transmission fiber light cone form a receiving lens; the laser radar echo light is imaged on the incident end face of the image transmission fiber light cone sequentially through a narrow-band filter and a large relative aperture optical lens, and the image transmission fiber light cone further transmits the light to the surface of the APD array detector; the control system is respectively connected with the laser emission system, the APD array detector and the two-dimensional MEMS scanning galvanometer through wires or wireless signals and is used for controlling laser pulse emission of the laser, swing of the two-dimensional MEMS scanning galvanometer and receiving of data of the APD array detector.
It should be noted that fig. 1 to 7 only illustrate the positional relationship between the elements; the dimensions of the figures and the proportional relationships between the various components do not constitute a particular limitation of the present solution.
The more preferable scheme is as follows:
the pulse laser diode has 905nm wavelength, a fast axis divergence angle of 25 degrees and a slow axis divergence angle of 9 degrees.
The laser collimation system comprises a horizontally placed cylindrical lens and a vertically placed cylindrical lens, and is used for respectively collimating the slow axis direction and the fast axis direction of the laser diode, wherein the divergence angle of the fast axis after collimation is less than 0.3 degrees, and the divergence angle of the slow axis is less than 0.8 degrees.
The two-dimensional MEMS scanning galvanometer has the mirror surface diameter of 5mm, and can swing an angle alpha and an angle beta along the horizontal direction and the vertical direction respectively, wherein alpha is between 0 degrees and +/-25 degrees, and beta is between 0 degrees and +/-15 degrees, and the scanning of the light source in the horizontal direction and the vertical direction is realized through the two-dimensional MEMS scanning galvanometer.
The scanning mode of the two-dimensional MEMS scanning galvanometer is as follows: after a fixed vertical position scans an angle alpha from left to right along the horizontal direction, the horizontal direction rapidly rotates reversely by an angle alpha, the vertical direction rotates by an angle gamma, gamma < beta, then the vertical position scans the angle alpha from left to right along the horizontal direction, and the progressive scanning of the target can be realized by repeating the steps, as shown by a black straight line in fig. 3.
The large relative aperture optical lens can be a single lens or a lens group, the embodiment adopts the lens group, as shown in fig. 6, the aperture is 40mm, and the lens group comprises 5 lenses, namely a first plano-convex lens, a plano-concave lens, a second plano-convex lens, a biconvex lens and an aspheric positive lens from the object side to the image side in sequence; the convex surfaces of the first plano-convex lens and the second plano-convex lens are both positioned on one side of the object space, and the concave surface of the plano-concave lens is positioned on one side of the image space. The system F is less than 1, the angle of view of the vertical light cone direction is larger than +/-20 degrees, the angle of view of the horizontal direction is +/-6 degrees, and the light with different fields of view is converged to the incident end face of the image transmission fiber light cone after passing through the lens group, and the diameter of a light spot is less than or equal to 1mm.
The APD array detector adopts a 1X 16 linear array APD detector, the area of a single APD detector unit is 1mm x 0.45mm, the single APD detector unit is arranged along the long side direction, the 16 APD detector units are used as a group according to the size of a light spot output by the output end face of the fiber light cone, 15 groups are formed in total, and the number of the adjacent two APD detector units is A, B, C, … and O groups in sequence, as shown in figure 4.
The APD array detector adopts gating signal collection, as shown in fig. 2, when the scanning angle of the two-dimensional MEMS scanning galvanometer corresponds to the target 1, the echo signal reflected by the target 1 enters the large relative aperture optical lens through the narrow-band optical filter, then images on the incident end face of the image transmission fiber light cone, the image transmission fiber light cone further transmits light to a certain group of APD detector units, as shown by the solid line in fig. 2, and when the scanning angle of the two-dimensional MEMS scanning galvanometer corresponds to the target 2, the echo signal reflected by the target 2 is transmitted to another group of APD detector units through the narrow-band optical filter, the large relative aperture optical lens and the image transmission fiber light cone, as shown by the broken line in fig. 2. The method comprises the steps of carrying out a first treatment on the surface of the Along with the change of the scanning angle of the two-dimensional MEMS scanning galvanometer, a group of APD detector units corresponding to single gating acquire signals, so that the interference of other groups of APD array detector units to the system caused by receiving ambient background light can be avoided, and the signal to noise ratio of a receiving system is improved.
The narrowband filter is a 905nm narrowband filter and is used for filtering interference light of other wave bands according to the emitted laser wavelength of the MEMS laser radar emitting system.
The narrowband filter is positioned at the forefront end of the laser signal receiving system.
The appearance of the image transmission fiber light cone is a cone structure, as shown in fig. 6, and the image transmission fiber light cone is formed by regularly arranging and combining tens of millions of cone-shaped optical fibers; the end with the large caliber of the image transmission fiber light cone is an incident end face, the diameter is 22mm, and the end with the small caliber is an emergent end face, and the diameter is 10mm; the image transmission fiber light cone has a magnification of 2.2, an image received by the incident end face of the image transmission fiber light cone can be decomposed into pixels corresponding to tens of thousands of conical optical fibers forming the image transmission fiber light cone, and the regularly arranged conical optical fibers transmit the carried pixel information to the other end of the image transmission fiber light cone in a one-to-one correspondence manner; the pixels are enlarged or reduced along with the diameter change of the tapered optical fiber in the transmission process, and are combined and imaged on the emergent end face according to the original arrangement mode.
The image transmission fiber light cone is a conical fiber bundle formed by regularly arranging and combining conical fibers; the conical optical fiber bundle is in the shape of a frustum, and the end surfaces of two sides of the conical optical fiber bundle can be processed into a rectangle or a circle according to the shape of the APD array detector.
The image transmission fiber light cone in the embodiment consists of tens of millions of tapered optical fibers which are regularly arranged, wherein the diameter of each tapered optical fiber gradually decreases from one end with a large caliber to one end with a small caliber, and the wire diameter is less than or equal to 6 mu m; as shown in fig. 7, each optical fiber is composed of a core 11 and a cladding 12, wherein the inner layer is a core with a refractive index of n1, the outer layer is a cladding with a refractive index of n2, and n1> n2.
The two-dimensional MEMS scanning galvanometer laser radar system adopts the receiving-transmitting parallel light path, so that the caliber of a receiving light path is not limited by the area of the two-dimensional MEMS scanning galvanometer, and the detection distance and the field of view of the laser radar system are improved; the linear array APD detector adopts a gating mode according to the scanning azimuth of the two-dimensional MEMS scanning galvanometer laser radar, so that the interference of ambient background light to the system can be reduced, and the signal-to-noise ratio of echo signal reception can be improved.

Claims (8)

1. The utility model provides a two-dimensional MEMS scanning galvanometer laser radar system, includes laser emission system, control system, laser signal receiving system, its characterized in that:
along the optical axis direction of the light propagation direction, the laser emission system is sequentially arranged as follows: the laser, the laser collimation system, two-dimensional MEMS scan the galvanometer;
the laser is a pulse laser;
the laser signal receiving system from the object side to the image side is sequentially provided with: a narrow-band optical filter, a large relative aperture optical lens, an image transmission fiber light cone and an APD array detector; the appearance of the image transmission fiber light cone is of a conical structure, one end with a large caliber is an incident end face, and the other end with a small caliber is an emergent end face; the image transmission fiber light cone is a conical fiber bundle formed by regularly arranging and combining conical fibers; the large relative aperture optical lens and the image transmission fiber light cone form a receiving lens; the laser radar echo light is imaged on the incident end face of the image transmission fiber light cone sequentially through a narrow-band filter and a large relative aperture optical lens, and the image transmission fiber light cone further transmits the light to the surface of the APD array detector;
the control system is respectively connected with the laser emission system, the APD array detector and the two-dimensional MEMS scanning galvanometer through wires or wireless signals and is used for controlling the laser pulse emission of the laser, the swing of the two-dimensional MEMS scanning galvanometer and the receiving of the data of the APD array detector;
the incident end face of the image transmission fiber light cone is positioned at the image space focal plane position of the large relative aperture optical lens;
the control system controls the laser to emit high-frequency pulse laser, a two-dimensional MEMS scanning galvanometer is used as a scanning mechanism to reflect light spots emitted by the laser collimation system, and the target is scanned point by point; the echo light reflected by the target is imaged at the cross section of one end with a large aperture of the image transmission fiber light cone through the narrow-band filter and the large relative aperture optical lens, and the image transmission fiber light cone emits light from the cross section of one end with a small aperture of the image transmission fiber light cone and transmits the light to the surface of the APD array detector;
the APD array detector is formed by arranging APD detector units, and the corresponding APD array detector units are selected by a control system to acquire signals according to the scanning angle of the two-dimensional MEMS scanning galvanometer and the light spot position of the corresponding echo light beam output on the output end face of the image transmission fiber light cone; with the change of the scanning angle of the two-dimensional MEMS scanning galvanometer, a group of APD detector units corresponding to single gating acquire signals.
2. The two-dimensional MEMS scanning galvanometer laser radar system of claim 1, wherein the two-dimensional MEMS scanning galvanometer is scannable in both a horizontal and a vertical direction.
3. The two-dimensional MEMS scanning galvanometer laser radar system of claim 2, wherein the laser is a pulsed laser diode;
the APD array detector is a linear array APD detector, and the long-side direction of the linear array APD detector is parallel to the fast axis direction of the laser diode.
4. The two-dimensional MEMS scanning galvanometer laser radar system of claim 3, wherein a horizontal scanning direction of the two-dimensional MEMS scanning galvanometer is parallel to a fast axis direction of the pulsed laser diode.
5. The two-dimensional MEMS scanning galvanometer laser radar system of claim 4, wherein a diameter of the tapered optical fiber tapers from the image-transmissive fiber light cone entrance end face to the image-transmissive fiber light cone exit end face; each tapered fiber is composed of a fiber core and a cladding, wherein the refractive index of the material of the fiber core is larger than that of the material of the cladding.
6. The two-dimensional MEMS scanning galvanometer laser radar system of claim 1, wherein,
the optical lens with the large relative aperture sequentially comprises a first component, a second component and a third component from an object side to an image side, and the focal power of the optical lens is sequentially negative, positive and positive; the first component is used for receiving light with a large view field into the receiving lens, the second component compresses the angle of the light, the third component further converges the light, and one surface of the third component is an aspheric surface and is used for correcting spherical aberration.
7. The two-dimensional MEMS scanning galvanometer laser radar system of claim 1, wherein the incident end face of the image-bearing fiber light cone is proximate to the large relative aperture optical lens and the exit end face is proximate to the APD array detector.
8. The two-dimensional MEMS scanning galvanometer laser radar system of any one of claims 1 to 7, wherein the large relative aperture optical lens comprises 5 lenses, a first plano-convex lens, a plano-concave lens, a second plano-convex lens, a biconvex lens, and an aspheric positive lens in order from object side to image side; the convex surfaces of the first plano-convex lens and the second plano-convex lens are both positioned on one side of the object space, and the concave surface of the plano-concave lens is positioned on one side of the image space.
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