CN103308187B - High frequency three dimensional Shack Hartmann wavefront measuring device and measuring method thereof - Google Patents
High frequency three dimensional Shack Hartmann wavefront measuring device and measuring method thereof Download PDFInfo
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Abstract
High frequency three dimensional Shack Hartmann wavefront measuring device, Shack Hartmann wavefront measuring device is formed by lenticule battle array and fibre bundle, it is characterized in that, the front of this Shack Hartmann wavefront measuring device optical axis, is provided with HF laser, spectroscope, collimating mirror and interference filter successively; The rear of this Shack Hartmann wavefront measuring device optical axis is provided with Geiger avalanche photodiode array and system control unit, the output welding system control module of this Geiger avalanche photodiode array.Does the present invention adopt GM_APDs? array is as detecting core, realize measuring the wavefront error of measured target by the method for photon counting inverting, do you utilize GM_APDs? the high frequency of array and high-sensitivity characteristic, measurement mechanism is had, and measurement interval is short, single measurement precision high, effectively can reduce the impact of environmental change on measuring accuracy, the layering being specially adapted to air wavefront error in adaptive optics is measured.
Description
Technical field
The present invention relates to a kind of high frequency three dimensional Shack Hartmann wavefront measuring device based on Geiger avalanche photodiode array (GM_APDsarray) and measuring method thereof.Belong to field of optical measuring technologies.The present invention is subject to grant of national natural science foundation (project approval number: 11273040).
Background technology
Shack Hartmann is a kind of common wavefront error measurement mechanism, is widely used in optic test and astronomical telescope is debug, error measure be used to atmospheric wave in adaptive optics before, plays an important role for raising telescope image quality.Shack Hartmann adopts lenticule battle array entrance pupil to be divided into the sub-aperture of some, incident wave surface error can cause the change of focus image patch in sub-aperture, by the analysis and calculation to these focus image patch variable quantities, obtain the slope on the incident corrugated of each sub-aperture, and finally simulate complete incident wavefront error (SUDingqiang, etal.Experimentsystemofsegmented-mirroractiveoptics.).
In multi-conjugate adaptive optics (MACO), the wavefront error to atmospheric turbulence causes is needed to carry out more high-precision measurement, obtain the wavefront error of differing heights atmospheric turbulence, by correcting respectively differing heights air wavefront error, reaching and improving adaptive optics correction accuracy and the object expanding visual field.Before undertaking atmospheric wave at present, the Shack Hartmann of layered probe extensively adopts CCD as detecting core, its time resolution characteristics are in millisecond (ms) magnitude, need the layering adopting pockels cell (Pockels ' cell) that air could be realized to measure, light path be complicated, energy loss is large, layering precision low (MichaelLloyd-HartandN.MarkMilton.Designandexpectedperfor manceofthe6.5mMMTMCAOsystem).
The avalanche photodiode array (GM_APDsarray) be operated under Geiger mode angular position digitizer is a kind of novel photoelectric detector, both linear amplification modes can be operated in, as conventional laser ranging, laser radar, realize the measurement of stronger incident optical signal, also Geiger mode angular position digitizer can be operated in, there is single photon detection ability, the detection (CarlJacksonandAlanMathewson.Improvementsinsiliconphotonc ountingmodules) of faint optical signal can be realized by the method for photon counting inverting.
China has carried out some research in photon counting imaging research field, main employing forms Photo Counting System through the photomultiplier of special processing, the device such as gleam image intensifier and CCD as detecting core, by processing the image obtained, and under making it be operated in photon counting mode (Zhang Xinghua etc. the systematic research of ultraviolet single photon image; The experimental study of Zhu Xiang equality .30.4nm extreme ultraviolet detector).The detection level of faint light can be improved 3 ~ 4 orders of magnitude by these photon counting imaging systems, but also rests in the technical merit of " obtaining photon count value in an analog fashion ", has some limitations.
Abroad all maintain the leading position on APD device and application technology level, the research of Photon Counting Image Acquisition Technique in three-dimensional laser radar field based on APD has possessed the condition (RichardM.Marino, etal.Acompact3DimaginglaserradarsystemusingGeiger-modeAP Darrays:systemandmeasurements) moving towards commercialization from laboratory.China is not enough to the research of all solid state, totally digitilized APD photon counting imaging, correlative study is little, only see a small amount of summary property paper publishing, with abroad have a long way to go (Li Qi etc. monopulse 3D laser radar principle and technology based on Geiger mode angular position digitizer (APD) array).
China had dropped into the research that a large amount of manpower and materials carry out active optics and adaptive optics aspect in recent years, significant progress is achieved in laser artificial beacon and air Wavefront detecting, Chinese Academy of Sciences's physics and chemistry total solids, quasi c. w. sodium beacon laser device technology reached international advanced level, in conjunction with Chinese Academy of Sciences's photoelectricity adaptive optical technique and atmospheric wave before the laser Sodium guide star system that is developed into of CCD detection technological cooperation carried out Sodium guide star field trial.But China's but limited success in layered probe before atmospheric wave, because China starts late in this field on the one hand, reason is on the other hand the embargo restriction being subject to western developed country, cannot buy the high frame rate, low noise, the highly sensitive sensitive detection parts that meet needed for layered probe.From current situation, detector situation under one's control is also by long-term existence.Only have exploration new technology, new way and new method, break through the technology barriers that western countries are arranged, the competitive power of China in this field can be improved.
Summary of the invention
The object of the invention is the deficiency poor for existing Shack Hartmann wave front sensor time resolution characteristics, survey frequency is lower, propose a kind of high frequency three dimensional Shack Hartmann wavefront measuring device based on Geiger avalanche photodiode array (GM_APDsarray) detecting core.This device adopts the method for photon counting inverting and time correlation to achieve high frequency, dynamic wavefront error is measured, and time resolution characteristics can reach ns magnitude, and measurement sensistivity can reach single photon magnitude.The present invention also will provide the detection method of this high frequency three dimensional Shack Hartmann wavefront measuring device.
The technical scheme completing foregoing invention task is, a kind of high frequency three dimensional Shack Hartmann wavefront measuring device, Shack Hartmann wavefront measuring device is formed by lenticule battle array and fibre bundle, it is characterized in that, the front of this Shack Hartmann wavefront measuring device optical axis, be provided with HF laser, spectroscope, collimating mirror and interference filter (such as, adopting narrow band pass filter) successively; The rear of this Shack Hartmann wavefront measuring device optical axis is provided with Geiger avalanche photodiode array (GM_APDsarray) and system control unit, the output welding system control module of this Geiger avalanche photodiode array.
Wherein HF laser irradiates measured target for generation of high-frequency laser pluses, and measured target can be optical element, also can be air.Spectroscope be used for by the optical axis coincidence of launching light path and receiving light path to together with, and by prism surface scattering, provide enabling signal for counting.Interference filter is used for gating echoed signal, and filtering parasitic light, its error range is ± 5nm.Collimating mirror is used for echoed signal to be collimated into directional light, and its focus overlaps with the conjugate imaging points of Laser emission.Lenticule battle array is square or circular arrangement, and parallel beam is divided into multiple sub-aperture, and the light beam in sub-aperture converges on corresponding lenticular focal plane respectively, and the change of incident light slope will cause change (the Δ x of image patch position
i, Δ y
i).Fibre bundle for the incident photon on lenticule battle array focal plane being matched the probe unit of GM_APDsarray, and keeps its positional information constant.GM_APDsarray is used for accepting incident photon information, and the photon information detected in each gaiting period is transferred to control module in the mode of character matrix carries out digital integration and inversion imaging and calculate.
The technical scheme completing the application's second invention task is, the measuring method of above-mentioned high frequency three dimensional Shack Hartmann wavefront measuring device, and it is characterized in that, step is as follows:
(1). described system control unit sends Laser emission instruction to HF laser, starts counting simultaneously;
(2). HF laser receives Emission Lasers pulse after firing order, is irradiated to measured target;
(3). the light beam that measured target reflects is through dichroic mirror, and entering collimating mirror becomes parallel beam;
(4). parallel beam focuses on fibre faceplate through narrow band pass filter and microlens array;
(5). the light beam focused on fibre faceplate receives to Geiger avalanche photodiode array through Optical Fiber Transmission;
(6). Geiger avalanche photodiode array obtains continuous print photon stream information through signal transacting; And be transferred to control module
(7). control module counts and inverting photon stream, obtains position and the time response of lenticule focus spot;
(8). facula position, time response information and standard information compare by control module, calculate the distribution character of wavefront error according to the time according to wavefront error reconstruction algorithm.
In other words, high frequency three dimensional Shack Hartmann wavefront measuring device provided by the present invention, comprises HF laser, spectroscope, collimating mirror, narrow band pass filter, lenticule battle array, fibre faceplate, Geiger avalanche photodiode array (GM_APDsarray) and system control unit.Described system control unit sends Laser emission instruction to HF laser, starts counting simultaneously.HF laser receives Emission Lasers pulse after firing order, is irradiated to measured target.The light beam that measured target reflects is through dichroic mirror, and entering collimating mirror becomes parallel beam.Parallel beam focuses on fibre faceplate through narrow band pass filter and microlens array, and receives to GM_APDsarray through Optical Fiber Transmission, obtains continuous print photon stream information through signal transacting.Photon stream is counted and inverting, obtains position and the time response of lenticule focus spot.Facula position, time response information and standard information are compared, calculates the distribution character of wavefront error according to the time according to wavefront error reconstruction algorithm.
Photon counting inversion imaging method based on GM_APDsarray is, adopts the GM_APDsarray of gate mode of operation as detecting core, by relevant photon counting inversion method, obtains the image of measured target.High frequency lasers after measured target reflection, its photon non-uniform Distribution, but incide the search coverage of GM_APDsarray according to certain probability.The photon counting probability distribution of multiple gaiting period can be obtained by Poisson transform:
According to photon counting probability distribution, adopt the light distribution of maximum entropy method (MEM) derivation effluent function:
The light distribution of thing function is normalized, makes it correspond to the gray shade scale of (0 ~ 255):
Target reflective information acquisition methods is characterised in that, laser emission point and collimating mirror front focus conjugation, realizes launching light path and receiving overlapping of optical axis by Amici prism.The laser that laser instrument is launched is launched by Amici prism, and the laser of Amici prism scattering is as enabling signal, and rolling counters forward starts.After target reflection, become conjugate imaging points by the position that 90 °, optical axis launched by Amici prism, the wavefront error of this picture point is equal to measured target entrance pupil wavefront error.The method both can realize wavefront error and measure, and can set up Shack hartmann diaphragm dot image sequence, contacting between measured target wavefront error sequence and time shaft again, realize three-dimensional measurement acquisition of information by the temporal correlation of Laser emission and reception.According to the temporal correlation of Laser emission, set up the three-dimensional series of thing function gray level image:
I(x,y,t)＝f
ch(x,y)g(t)
Adopt fibre bundle the feature that lattice array image formed by lenticule battle array transports to GM_APDsarray to be, adopt tapered cylindrical optical fiber bundle to be mated with GM_APDsarray search coverage lenticule battle array focal plane.Such design advantage has two, one is that lenticule battle array imaging spot array sizes is larger, the visual field of the burnt mirror of corresponding contracting is larger, the distortion produced can cause larger impact to measuring accuracy, adopt fibre bundle to reduce light path adjustment difficulty, avoid the pattern distortion adopting the burnt mirror of contracting to cause.On the other hand, by the optical fiber interval in adjustment fibre bundle, each pixel detecting Area comparison large (0.1 ~ 0.5mm) of GM_APDsarray, can ensure that lenticule battle array focal plane is mated with the perfect of GM_APDsarray.
The present invention is in conjunction with the actual needs of astronomical optics, foreign is in the technical development of GM_APDsarray, adopt GM_APDsarray as Shack Hartmann detecting core, the wavefront error being realized high frequency three dimensional by photon counting inversion method is measured, namely can be directly used in optical elements of large caliber face type to detect and the detection of telescope picture element, also can by high power laser, before realizing atmospheric wave by laser guide star and Rayleigh scattering method, layering is measured.
Accompanying drawing illustrates:
Fig. 1 is the optical system diagram of high frequency three dimensional Shack Hartmann wavefront measuring device.
Fig. 2 is the workflow diagram of high frequency three dimensional Shack Hartmann wavefront measuring device.
Fig. 3 is GM_APDsarray photon counting inversion imaging schematic diagram.
Fig. 4 be adopt fibre bundle by lenticule battle array become lattice array image transmitting to the schematic diagram of GM_APDsarray.
Embodiment
Accompanying drawings the specific embodiment of the present invention.
Embodiment 1, based on the high frequency three dimensional Shack Hartmann wavefront measuring device of Geiger avalanche photodiode array (GM_APDsarray) detecting core.As shown in Figure 1, high frequency three dimensional Shack Hartmann wavefront measuring device proposed by the invention, is made up of HF laser 2, spectroscope 3, collimating mirror 4, narrow band pass filter 5, lenticule battle array 6, fibre bundle 7, GM_APDsarray8 and system control unit.Wherein HF laser 2 irradiates measured target 1 for generation of high-frequency laser pluses, and measured target 1 can be optical element, also can be air.Spectroscope 3 for the optical axis coincidence that will launch light path and receiving light path to together with, and by prism surface scattering, provide enabling signal for counting.Interference filter 4 is for gating echoed signal, and filtering parasitic light, its error range is ± 5nm.Collimating mirror 5 is for being collimated into directional light by echoed signal, and its focus overlaps with the conjugate imaging points of Laser emission.Lenticule battle array 6 is square or circular arrangement, and parallel beam is divided into multiple sub-aperture, and the light beam in sub-aperture converges on corresponding lenticular focal plane respectively, and the change of incident light slope will cause change (the Δ x of image patch position
i, Δ y
i).Fibre bundle 7 for the incident photon on lenticule battle array focal plane being matched the probe unit of GM_APDsarray, and keeps its positional information constant.GM_APDsarray8 is used for accepting incident photon information, and the photon information detected in each gaiting period is transferred to control module in the mode of character matrix carries out digital integration and inversion imaging and calculate.
As shown in Figure 2, high frequency three dimensional Shack Hartmann wavefront measuring device proposed by the invention, its workflow is as follows:
1) unit processed sends Laser emission instruction to HF laser, starts counting simultaneously.
2) HF laser receives Emission Lasers pulse after firing order, is irradiated to measured target.
3) light beam that reflects of measured target is through dichroic mirror, and entering collimating mirror becomes parallel beam.
4) parallel beam focuses on fibre faceplate through narrow band pass filter and microlens array, and receives to GM_APDsarray through Optical Fiber Transmission, obtains continuous print photon stream information through signal transacting.
5) photon stream is counted and inverting, obtain position and the time response of lenticule focus spot.
6) facula position, time response information and standard information are compared, calculate the distribution character of wavefront error according to the time according to wavefront error reconstruction algorithm.
As shown in Figure 3, high frequency three dimensional Shack Hartmann wavefront measuring device proposed by the invention, its photon counting imaging principle is as follows:
1) in gate duration, incident photon arrives on " pixel " unit of APD array 8 through object lens 7-1, and causes the APD snowslide of this unit;
2) avalanche current that APD produces is detected by high-speed driving control circuit, produces photon counting pulse, records and export;
3) high-speed driving control circuit can reduce rapidly the bias voltage of APD while detecting avalanche current, suppresses proceeding of snowslide, thus APD is possessed carry out the ability of next or several incident photon detection;
4) the different pixel Output rusults in each gaiting period form a two-dimensional digital matrix that is discrete, that do not have gray shade scale be made up of 0 and 1;
5) the high grey scale image of informative is obtained after within a certain period of time time correlation, inverting, nonuniformity correction, enhancing, noise reduction process being carried out to the character matrix that repeatedly gaiting period produces.
In figure, the label of each step is: several gate images 9, image processing 10, display and control 11, image 12.
Can find out, the Scientific problems at the core of APD photon counting imaging be in gate mode to target light field at room and time up-sampling, by obtaining the optimum estimate of target light field to the Inversion Calculation of sampled result, thus characterize the Statistical Distribution Characteristics of bright dipping field with minimum error.
As shown in Figure 4, high frequency three dimensional Shack Hartmann wavefront measuring device proposed by the invention, employing tapered cylindrical optical fiber bundle 7 realizes the coupling between microlens array 6 focal plane to GM_APDsarray8.Fibre bundle 7 is at side, microlens array 6 focal plane close-packed arrays, and its end face overlaps with focal plane, to receive incident photon signal better.Fibre bundle arranges at a certain distance in GM_APDsarray8 side, the distance between two optical fiber and GM_APDsarray8 bin interval consistent.Being spaced apart between fibre bundle 7 end face to GM_APDsarray8:
In formula, D is GM_APDsarray bin diameter, and d is fibre diameter, and NA is fiber numerical aperture.
Claims (2)
1. the measuring method of a high frequency three dimensional Shack Hartmann wavefront measuring device, described high frequency three dimensional Shack Hartmann wavefront measuring device is made up of microlens array and fibre bundle, the front of this Shack Hartmann wavefront measuring device optical axis, is provided with HF laser, Amici prism, collimating mirror and interference filter successively; The rear of this Shack Hartmann wavefront measuring device optical axis is provided with Geiger avalanche photodiode array and system control unit, the output welding system control module of this Geiger avalanche photodiode array; The high-frequency laser pluses that described HF laser produces is for irradiating measured target, and this measured target is optical element, or air; Described microlens array is square or circular arrangement; The laser emission point that described HF laser produces and collimating mirror front focus conjugation, realize launching light path and receiving overlapping of optical axis by described Amici prism;
The step of measuring method is as follows:
(1). described system control unit sends Laser emission instruction to described HF laser, starts counting simultaneously;
(2). described HF laser receives Emission Lasers pulse after firing order, is irradiated to described measured target;
(3). the light beam that described measured target reflects is through described Amici prism transmission, and entering described collimating mirror becomes parallel beam;
(4). this parallel beam focuses on fibre faceplate through narrow band pass filter and described microlens array;
(5). the light beam focused on fibre faceplate receives to described Geiger avalanche photodiode array through Optical Fiber Transmission;
(6). described Geiger avalanche photodiode array obtains continuous print photon stream information through signal transacting and is transferred to described system control unit;
(7). described system control unit counts and inverting photon stream, obtains position and the time response of described lenticule focus spot;
(8). facula position, time response information and standard information compare by described system control unit, calculate the distribution character of wavefront error according to the time according to wavefront error reconstruction algorithm;
Step (5) with step (6) in, described Geiger avalanche photodiode array realizes high frequency imaging by digital integration method to obtain, described digital integration method, adopt gate control method to sample to incident photon stream information, being recombinated and inversion procedure by the incident photon stream information matrix obtained sampling in multiple gaiting period, obtaining the target image comprising positional information and temporal information;
Step operation is (8): set up Shack hartmann diaphragm dot image sequence, contacting between measured target wavefront error sequence and time shaft by the temporal correlation of Laser emission and reception, realize three-dimensional measurement acquisition of information; According to the temporal correlation of Laser emission, set up the three-dimensional series of thing function gray level image: I (x, y, t)=f
ch(x, y) g (t), f
ch(x, y) representative function, g (t) represents the temporal correlation of Laser emission; Adopt described fibre bundle the feature that lattice array image formed by described microlens array transports to Geiger avalanche photodiode array to be, adopt tapered cylindrical optical fiber bundle to be mated with Geiger avalanche photodiode array search coverage described microlens array focal plane.
2. the measuring method of high frequency three dimensional Shack Hartmann wavefront measuring device according to claim 1, it is characterized in that, described fibre bundle arranges at a certain distance in Geiger avalanche photodiode array side, the distance between two optical fiber and Geiger avalanche photodiode array bin interval consistent; Being spaced apart between described fibre bundle end face to Geiger avalanche photodiode array:
in formula, D is Geiger avalanche photodiode array bin diameter, and d is fibre diameter, and NA is the fiber numerical aperture in described fibre bundle.
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| CN110779465B (en) * | 2019-11-20 | 2021-05-04 | 中国科学院长春光学精密机械与物理研究所 | Telescope primary mirror detects and calibration system |
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