CN105074392B - 磁传感器装置以及旋转编码器 - Google Patents
磁传感器装置以及旋转编码器 Download PDFInfo
- Publication number
- CN105074392B CN105074392B CN201380075042.5A CN201380075042A CN105074392B CN 105074392 B CN105074392 B CN 105074392B CN 201380075042 A CN201380075042 A CN 201380075042A CN 105074392 B CN105074392 B CN 105074392B
- Authority
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- China
- Prior art keywords
- film
- sense magnetic
- heating electric
- temperature monitoring
- sensor arrangement
- Prior art date
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- 238000010438 heat treatment Methods 0.000 claims abstract description 115
- 238000012544 monitoring process Methods 0.000 claims abstract description 109
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- 230000000694 effects Effects 0.000 claims description 8
- 230000005284 excitation Effects 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 3
- 235000013399 edible fruits Nutrition 0.000 claims 1
- 238000001514 detection method Methods 0.000 abstract description 14
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052719 titanium Inorganic materials 0.000 abstract description 3
- 239000010936 titanium Substances 0.000 abstract description 3
- 229910000889 permalloy Inorganic materials 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 2
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
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- 229910052710 silicon Inorganic materials 0.000 description 2
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2451—Incremental encoders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Hall/Mr Elements (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-070271 | 2013-03-28 | ||
| JP2013070271A JP6151544B2 (ja) | 2013-03-28 | 2013-03-28 | 磁気センサ装置およびロータリエンコーダ |
| PCT/JP2013/084906 WO2014155886A1 (ja) | 2013-03-28 | 2013-12-26 | 磁気センサ装置およびロータリエンコーダ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105074392A CN105074392A (zh) | 2015-11-18 |
| CN105074392B true CN105074392B (zh) | 2017-11-14 |
Family
ID=51622917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380075042.5A Active CN105074392B (zh) | 2013-03-28 | 2013-12-26 | 磁传感器装置以及旋转编码器 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6151544B2 (ja) |
| KR (1) | KR20150135373A (ja) |
| CN (1) | CN105074392B (ja) |
| WO (1) | WO2014155886A1 (ja) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6595755B2 (ja) * | 2014-12-02 | 2019-10-23 | 日本電産サンキョー株式会社 | 補正テーブル作成装置、エンコーダ、及び補正テーブル作成方法 |
| JP2016169966A (ja) | 2015-03-11 | 2016-09-23 | 日本電産サンキョー株式会社 | 磁気センサおよびモータ |
| JP6619974B2 (ja) | 2015-08-28 | 2019-12-11 | 日本電産サンキョー株式会社 | エンコーダ |
| JP6940955B2 (ja) | 2017-02-14 | 2021-09-29 | 日本電産サンキョー株式会社 | ロータリエンコーダ |
| CN108426587B (zh) * | 2017-02-14 | 2020-09-18 | 日本电产三协株式会社 | 旋转编码器 |
| CN109556638B (zh) * | 2018-12-24 | 2019-10-18 | 前沿驱动（北京）技术有限公司 | 多圈绝对值编码器、编码方法、控制器及存储介质 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63154977A (ja) * | 1986-12-19 | 1988-06-28 | Hitachi Ltd | 磁場計測槽 |
| JPH02298814A (ja) * | 1989-05-13 | 1990-12-11 | Aisan Ind Co Ltd | 回転角度センサ |
| JP2007516415A (ja) * | 2003-06-25 | 2007-06-21 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 磁界依存角度センサを備える装置 |
| CN101627286A (zh) * | 2007-02-28 | 2010-01-13 | 株式会社山武 | 传感器、传感器的温度控制方法和异常恢复方法 |
| JP2012118000A (ja) * | 2010-12-03 | 2012-06-21 | Nidec Sankyo Corp | ロータリエンコーダ |
| CN102809732A (zh) * | 2011-05-30 | 2012-12-05 | 株式会社电装 | 磁传感器及其制造方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5397496B2 (ja) * | 2011-05-30 | 2014-01-22 | 株式会社デンソー | 磁気センサ装置およびその製造方法 |
-
2013
- 2013-03-28 JP JP2013070271A patent/JP6151544B2/ja active Active
- 2013-12-26 CN CN201380075042.5A patent/CN105074392B/zh active Active
- 2013-12-26 WO PCT/JP2013/084906 patent/WO2014155886A1/ja active Application Filing
- 2013-12-26 KR KR1020157030016A patent/KR20150135373A/ko active IP Right Grant
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63154977A (ja) * | 1986-12-19 | 1988-06-28 | Hitachi Ltd | 磁場計測槽 |
| JPH02298814A (ja) * | 1989-05-13 | 1990-12-11 | Aisan Ind Co Ltd | 回転角度センサ |
| JP2007516415A (ja) * | 2003-06-25 | 2007-06-21 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 磁界依存角度センサを備える装置 |
| CN101627286A (zh) * | 2007-02-28 | 2010-01-13 | 株式会社山武 | 传感器、传感器的温度控制方法和异常恢复方法 |
| JP2012118000A (ja) * | 2010-12-03 | 2012-06-21 | Nidec Sankyo Corp | ロータリエンコーダ |
| CN102809732A (zh) * | 2011-05-30 | 2012-12-05 | 株式会社电装 | 磁传感器及其制造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6151544B2 (ja) | 2017-06-21 |
| KR20150135373A (ko) | 2015-12-02 |
| JP2014194360A (ja) | 2014-10-09 |
| CN105074392A (zh) | 2015-11-18 |
| WO2014155886A1 (ja) | 2014-10-02 |
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| GR01 | Patent grant | ||
| GR01 | Patent grant |