CN104810309A - 辊道式太阳电池烧结和辐照退火一体连续炉 - Google Patents
辊道式太阳电池烧结和辐照退火一体连续炉 Download PDFInfo
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- CN104810309A CN104810309A CN201510203266.0A CN201510203266A CN104810309A CN 104810309 A CN104810309 A CN 104810309A CN 201510203266 A CN201510203266 A CN 201510203266A CN 104810309 A CN104810309 A CN 104810309A
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- sintering
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- radiation annealing
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Classifications
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
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- F27B9/24—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
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- F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
- F27B9/36—Arrangements of heating devices
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- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
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- H—ELECTRICITY
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1864—Annealing
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- F27B9/06—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E10/00—Energy generation through renewable energy sources
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
Description
Claims (12)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510203266.0A CN104810309B (zh) | 2015-04-25 | 辊道式太阳电池烧结和辐照退火一体连续炉 | |
EP16785903.2A EP3291287B1 (en) | 2015-04-25 | 2016-04-22 | Roller type solar cell sintering and irradiation annealing integrated continuous furnace |
PCT/CN2016/080080 WO2016173472A1 (zh) | 2015-04-25 | 2016-04-22 | 辊道式太阳电池烧结和辐照退火一体连续炉 |
TW105112859A TW201639186A (zh) | 2015-04-25 | 2016-04-25 | 輥道式太陽電池燒結和輻照退火一體連續爐 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201510203266.0A CN104810309B (zh) | 2015-04-25 | 辊道式太阳电池烧结和辐照退火一体连续炉 |
Publications (2)
Publication Number | Publication Date |
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CN104810309A true CN104810309A (zh) | 2015-07-29 |
CN104810309B CN104810309B (zh) | 2018-02-09 |
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Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016173471A1 (zh) * | 2015-04-25 | 2016-11-03 | 北京金晟阳光科技有限公司 | 辊道式太阳电池辐照退火炉 |
WO2016173472A1 (zh) * | 2015-04-25 | 2016-11-03 | 北京金晟阳光科技有限公司 | 辊道式太阳电池烧结和辐照退火一体连续炉 |
CN106595299A (zh) * | 2015-10-14 | 2017-04-26 | 现代自动车株式会社 | 坯料加热设备 |
CN107966026A (zh) * | 2017-11-28 | 2018-04-27 | 乐山新天源太阳能科技有限公司 | 硅片烧结工艺 |
CN108198907A (zh) * | 2017-12-30 | 2018-06-22 | 苏州阿特斯阳光电力科技有限公司 | 一种硅片的确定方法及装置 |
WO2018161692A1 (zh) * | 2017-03-07 | 2018-09-13 | 东莞市科隆威自动化设备有限公司 | 一种抗光衰炉 |
CN109304951A (zh) * | 2017-07-26 | 2019-02-05 | 天津环鑫科技发展有限公司 | 一种gpp丝网印刷钝化层的方法 |
CN109537057A (zh) * | 2019-01-07 | 2019-03-29 | 无锡奥特维科技股份有限公司 | 退火炉设备 |
CN109695061A (zh) * | 2019-01-07 | 2019-04-30 | 无锡奥特维科技股份有限公司 | 灯箱装置、保温装置及退火炉设备 |
CN109860071A (zh) * | 2017-11-30 | 2019-06-07 | 上海新昇半导体科技有限公司 | 快速热处理装置及方法 |
CN110444636A (zh) * | 2019-08-21 | 2019-11-12 | 黄河水电光伏产业技术有限公司 | 一种圆形温区布局的烧结炉 |
CN110707180A (zh) * | 2019-11-04 | 2020-01-17 | 苏州南北深科智能科技有限公司 | 一种太阳能电池hit或hjt工艺固化、氢钝化一体机 |
US10591216B2 (en) | 2017-10-02 | 2020-03-17 | Industrial Technology Research Institute | Solidifying device |
CN111129215A (zh) * | 2019-12-16 | 2020-05-08 | 浙江爱旭太阳能科技有限公司 | 一种光源再生炉、以及降低perc电池效率衰减的方法 |
CN112670370A (zh) * | 2020-12-24 | 2021-04-16 | 横店集团东磁股份有限公司 | 一种太阳能电池片的烧结方法和应用 |
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CN101478882A (zh) * | 2006-06-26 | 2009-07-08 | 热力处理方案有限公司 | 具有高强度加热区段的快速热烧结红外线传送带式热处理炉 |
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CN204537995U (zh) * | 2015-04-25 | 2015-08-05 | 北京金晟阳光科技有限公司 | 辊道式太阳电池烧结和辐照退火一体连续炉 |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016173472A1 (zh) * | 2015-04-25 | 2016-11-03 | 北京金晟阳光科技有限公司 | 辊道式太阳电池烧结和辐照退火一体连续炉 |
WO2016173471A1 (zh) * | 2015-04-25 | 2016-11-03 | 北京金晟阳光科技有限公司 | 辊道式太阳电池辐照退火炉 |
CN106595299A (zh) * | 2015-10-14 | 2017-04-26 | 现代自动车株式会社 | 坯料加热设备 |
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