CN104795469A - Roller-way-type solar cell irradiation annealing furnace - Google Patents
Roller-way-type solar cell irradiation annealing furnace Download PDFInfo
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- CN104795469A CN104795469A CN201510209724.1A CN201510209724A CN104795469A CN 104795469 A CN104795469 A CN 104795469A CN 201510209724 A CN201510209724 A CN 201510209724A CN 104795469 A CN104795469 A CN 104795469A
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- roller
- way
- solar cell
- type solar
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- 238000000137 annealing Methods 0.000 title claims abstract description 42
- 238000000034 method Methods 0.000 claims abstract description 17
- 238000010438 heat treatment Methods 0.000 claims abstract description 9
- 230000005855 radiation Effects 0.000 claims description 35
- 238000007639 printing Methods 0.000 claims description 11
- 239000000919 ceramic Substances 0.000 claims description 10
- 239000012774 insulation material Substances 0.000 claims description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- 229910052736 halogen Inorganic materials 0.000 claims description 4
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001256 stainless steel alloy Inorganic materials 0.000 claims description 3
- 239000005341 toughened glass Substances 0.000 claims description 3
- 229910052724 xenon Inorganic materials 0.000 claims description 3
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 3
- 150000002367 halogens Chemical class 0.000 claims description 2
- 238000005265 energy consumption Methods 0.000 abstract description 3
- 238000010924 continuous production Methods 0.000 abstract 1
- 238000005245 sintering Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 238000011031 large-scale manufacturing process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 101001073212 Arabidopsis thaliana Peroxidase 33 Proteins 0.000 description 1
- 101001123325 Homo sapiens Peroxisome proliferator-activated receptor gamma coactivator 1-beta Proteins 0.000 description 1
- 102100028961 Peroxisome proliferator-activated receptor gamma coactivator 1-beta Human genes 0.000 description 1
- XGCTUKUCGUNZDN-UHFFFAOYSA-N [B].O=O Chemical compound [B].O=O XGCTUKUCGUNZDN-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- -1 tungsten halogen Chemical class 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1864—Annealing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Photovoltaic Devices (AREA)
- Furnace Details (AREA)
- Tunnel Furnaces (AREA)
Abstract
The invention relates to a roller-way-type solar cell irradiation annealing furnace which can be used for irradiation annealing treatment of solar cells. In the irradiation annealing furnace, cell pieces are transmitted on a group of horizontally-arranged roller ways, light sources and a heating device are arranged above and below the roller ways respectively or below and above the roller ways respectively, and the fronts face the light sources while the backs face the heating device when the cell pieces are transmitted. The cell pieces after being sintered are continuously transmitted through the roller ways, and irradiation annealing treatment is completed continuously in the process of horizontal advancing, so that the roller-way-type solar cell irradiation annealing furnace has the advantages of low energy consumption, stability in running, high capacity and continuous production, and the problem of attenuation in the process of using solar cells can be solved to greatest extent after the furnace is popularized and utilized.
Description
Technical field
The present invention relates to a kind of roller bed type solar cell radiation annealing stove, can be used for the radiation annealing process of solar cell.
Background technology
Under normal circumstances, solar cell, with after chain-type sintering furnace sintering, can make assembly, drops into solar power station and uses.Solar cell, in use can luminous efficiency decay under long-term photoenvironment because the right existence of boron oxygen, and the PERC battery risen especially in recent years, this decay is particularly serious.Research shows, uses a kind of specific light source to carry out radiation annealing process to cell piece in advance under uniform temperature condition, can effectively prevent this relaxation phenomenon from occurring.But, still unspecial equipment cell piece being carried out to radiation annealing process at present.
For this reason, applicants have invented a kind of roller bed type solar cell radiation annealing stove, continuous irradiation annealing in process can be carried out to the cell piece sintered, fundamentally solve the large-scale production problem of radiation annealing process.
Summary of the invention
According to above the deficiencies in the prior art; technical problem to be solved by this invention is: provide a kind of roller bed type solar cell radiation annealing stove; fundamentally solve the large-scale production problem of radiation annealing process, thus solve solar cell attenuation problem in use to greatest extent.
Roller bed type solar cell radiation annealing stove of the present invention, in described radiation annealing stove, cell piece transmits on one group of horizontal roller-way, above roller-way, be provided with light source, the below of roller-way is provided with heater, or be provided with light source in the below of roller-way, above roller-way, be provided with heater, cell piece is in transmitting procedure, and it is just facing to light source, and its back side is towards heater.
Preferably, light source is Halogen lamp LED, xenon lamp, incandescent lamp or LED.
Preferably, heater is infrared lamp, heating wire or air-heater.
Preferably, between described light source and cell piece, one deck printing opacity insulation material layer is set, light source is isolated in outside cell piece heating region.
Preferably, in the chamber installing light source, be provided with cold wind blower or air exhausting device that light source is cooled.
Preferably, printing opacity insulation material layer material is quartz glass or toughened glass.
Preferably, be 100 DEG C-300 DEG C by the heating-up temperature of heater to cell piece, preferably 150 DEG C-250 DEG C
Preferably, the irradiance of light source is 50mW/cm
2-200mW/cm
2, 80mW/cm
2-150mW/cm
2.
Preferably, the material of roller-way is that quartz-ceramics, quartz glass, aluminium oxide ceramics, silicon nitride ceramics, stainless steel or aluminium alloy etc. do not pollute cell piece, resistant to elevated temperatures material.
Described roller-way is solid roller-way or hollow roller-way, and the shape of roller-way is isometrical cylindric, step-like, circular cone shape, shape of threads or circular.
Roller-way can one-directional rotation, also can reciprocating rotation.
Compared with prior art, the beneficial effect that the present invention has is:
Roller bed type solar cell radiation annealing stove provided by the invention, cell piece after sintering is transmitted continuously by one group of horizontal roller-way, in horizontal traveling process, completed radiation annealing process continuously, have energy consumption low, operate steadily, production capacity is large, the feature of continuous prodution, after applying, the problem decayed in solar cell use procedure can be solved to greatest extent.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention
In figure: 1, roller-way; 2, cell piece; 3, light source; 4, upper furnace shell; 5, printing opacity insulation material layer; 6, cooling blower; 7, lower furnace shell; 8, heater.
Embodiment
Below in conjunction with accompanying drawing, embodiments of the invention are described further.
Embodiment 1
As shown in Figure 1, this roller bed type solar cell radiation annealing stove, by roller-way 1, light source 3, upper furnace shell 4, printing opacity insulation material layer 5, cooling blower 6, lower furnace shell 7 and heater 8 form, upper furnace shell 4, lower furnace shell 7 forms furnace chamber, roller-way 1 arranges in the horizontal direction and passes furnace chamber, cell piece 2 level under the transmission of roller-way 1 is advanced, enter radiation annealing stove, the bottom of radiation annealing stove is provided with heater 8, the top of radiation annealing stove is provided with light source 3, in the chamber installing light source 3, be provided with cold wind blower or air exhausting device that light source 3 is cooled, light source 3 is cooled, the bottom of light source 3 is provided with printing opacity insulation material layer 5, heating region and light source 3 are separated, to prevent heat, light source 3 is burnt out, after cell piece 2 completes radiation annealing, cooled by the cooling blower 6 at rear, namely whole radiation annealing process is completed.
Light source 3 can be Halogen lamp LED, xenon lamp, incandescent lamp or LED, heater 8 can be infrared lamp, heating wire or air-heater, roller-way 1 is solid roller-way or hollow roller-way, the shape of roller-way 1 is isometrical cylindric, step-like, circular cone shape, shape of threads or circular, the material of roller-way 1 is quartz-ceramics, quartz glass, aluminium oxide ceramics, silicon nitride ceramics, stainless steel or aluminium alloy, printing opacity insulation material layer 5 material is quartz glass or toughened glass, in the present embodiment, the roller-way 1 used is Quartz Ceramic Roller, light source is tungsten halogen lamp, heater 8 is infrared lamps, printing opacity heat-barrier material is quartz glass plate, the heating-up temperature in radiation annealing district is 100 DEG C-300 DEG C, and be better 150 DEG C-250 DEG C, the irradiance of light source is 50mW/cm
2-200mW/cm
2, be better 80mW/cm
2-150mW/cm
2.
Roller bed type solar cell radiation annealing stove provided by the invention, cell piece 2 after sintering is transmitted continuously by one group of horizontal roller-way 1, in horizontal traveling process, completed radiation annealing process continuously, have energy consumption low, operate steadily, production capacity is large, the feature of continuous prodution, after applying, the problem decayed in solar cell use procedure can be solved to greatest extent.
Embodiment 2
Cell piece 2 level under the transmission of roller-way 1 is advanced, the bottom of radiation annealing stove is provided with light source 3, the top of radiation annealing stove is provided with heater 8, printing opacity insulation material layer 5 is provided with between light source 3 and roller-way 1 bottom surface, top heating region and light source 3 separate by printing opacity insulation material layer 5, and all the other are with embodiment 1.
Although embodiment of the present invention are open as above, but it is not restricted to listed in specification and execution mode utilization, it can be applied to various applicable the field of the invention completely, for those skilled in the art, can easily realize other amendment, therefore do not deviating under the universal that claim and equivalency range limit, the present invention is not limited to specific details and illustrates here and the legend described.
Claims (10)
1. a roller bed type solar cell radiation annealing stove, it is characterized in that: in described radiation annealing stove, cell piece (2) is in the upper transmission of one group of horizontal roller-way (1), the top of roller-way (1) is provided with light source (3), the below of roller-way (1) is provided with heater (8), or the below of roller-way (1) is provided with light source (3), the top of roller-way (1) is provided with heater (8), cell piece (2) is in transmitting procedure, it is just facing to light source (3), its back side is towards heater (8).
2. roller bed type solar cell radiation annealing stove according to claim 1, is characterized in that: described light source (3) is Halogen lamp LED, xenon lamp, incandescent lamp or LED.
3. roller bed type solar cell radiation annealing stove according to claim 1, is characterized in that: described heater (8) is infrared lamp, heating wire or air-heater.
4. roller bed type solar cell radiation annealing stove according to claim 1, it is characterized in that: between described light source (3) and cell piece (2), one deck printing opacity insulation material layer (5) is set, light source (3) is isolated in outside cell piece (2) heating region.
5. the roller bed type solar cell radiation annealing stove according to claim 1 or 4, is characterized in that: in the chamber installing light source (3), is provided with the cold wind blower or air exhausting device that cool light source (3).
6. roller bed type solar cell radiation annealing stove according to claim 4, is characterized in that: described printing opacity insulation material layer (5) material is quartz glass or toughened glass.
7. according to the arbitrary described roller bed type solar cell radiation annealing stove of claim 1 ~ 6, it is characterized in that: be 100 DEG C-300 DEG C by the heating-up temperature of heater (8) to cell piece (2).
8., according to the arbitrary described roller bed type solar cell radiation annealing stove of claim 1 ~ 6, it is characterized in that: the irradiance of described light source (3) is 50mW/cm
2-200mW/cm
2.
9., according to the arbitrary described roller bed type solar cell radiation annealing stove of claim 1 ~ 6, it is characterized in that: the material of described roller-way (1) is quartz-ceramics, quartz glass, aluminium oxide ceramics, silicon nitride ceramics, stainless steel or aluminium alloy.
10. according to the arbitrary described roller bed type solar cell radiation annealing stove of claim 1 ~ 6, it is characterized in that: described roller-way (1) is solid roller-way or hollow roller-way, the shape of roller-way (1) is isometrical cylindric, step-like, circular cone shape, shape of threads or circular.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510209724.1A CN104795469A (en) | 2015-04-25 | 2015-04-25 | Roller-way-type solar cell irradiation annealing furnace |
| PCT/CN2016/080079 WO2016173471A1 (en) | 2015-04-25 | 2016-04-22 | Roller type solar cell irradiation annealing furnace |
| TW105112858A TW201701496A (en) | 2015-04-25 | 2016-04-25 | Roller-way-type solar cell irradiation annealing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510209724.1A CN104795469A (en) | 2015-04-25 | 2015-04-25 | Roller-way-type solar cell irradiation annealing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104795469A true CN104795469A (en) | 2015-07-22 |
Family
ID=53560144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510209724.1A Pending CN104795469A (en) | 2015-04-25 | 2015-04-25 | Roller-way-type solar cell irradiation annealing furnace |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN104795469A (en) |
| TW (1) | TW201701496A (en) |
| WO (1) | WO2016173471A1 (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105047580A (en) * | 2015-08-14 | 2015-11-11 | 浙江艾能聚光伏科技股份有限公司 | Attenuation bench of battery piece |
| WO2016173471A1 (en) * | 2015-04-25 | 2016-11-03 | 北京金晟阳光科技有限公司 | Roller type solar cell irradiation annealing furnace |
| CN106229385A (en) * | 2016-09-27 | 2016-12-14 | 北京金晟阳光科技有限公司 | Solar cell radiation annealing stove |
| CN107464858A (en) * | 2017-09-27 | 2017-12-12 | 浙江晶科能源有限公司 | A kind of electrical pumping annealing system |
| US10126053B2 (en) | 2016-09-02 | 2018-11-13 | International Business Machines Corporation | Precision dual annealing apparatus |
| CN109004065A (en) * | 2018-07-27 | 2018-12-14 | 浙江晶科能源有限公司 | A method of improving N-type double-side cell efficiency |
| CN109537057A (en) * | 2019-01-07 | 2019-03-29 | 无锡奥特维科技股份有限公司 | Annealing furnace apparatus |
| US10570015B2 (en) | 2016-09-02 | 2020-02-25 | International Business Machines Corporation | Minimizing tin loss during thermal processing of kesterite films |
| CN111564532A (en) * | 2020-04-03 | 2020-08-21 | 江西昌大高新能源材料技术有限公司 | Post-treatment efficiency-increasing equipment and method for HAC solar cell |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108550656B (en) * | 2018-05-17 | 2023-11-21 | 苏州晶洲装备科技有限公司 | Electric injection equilibrium annealing device |
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-
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016173471A1 (en) * | 2015-04-25 | 2016-11-03 | 北京金晟阳光科技有限公司 | Roller type solar cell irradiation annealing furnace |
| CN105047580A (en) * | 2015-08-14 | 2015-11-11 | 浙江艾能聚光伏科技股份有限公司 | Attenuation bench of battery piece |
| CN105047580B (en) * | 2015-08-14 | 2019-03-05 | 浙江艾能聚光伏科技股份有限公司 | A kind of cell piece decaying platform |
| US10570015B2 (en) | 2016-09-02 | 2020-02-25 | International Business Machines Corporation | Minimizing tin loss during thermal processing of kesterite films |
| US10126053B2 (en) | 2016-09-02 | 2018-11-13 | International Business Machines Corporation | Precision dual annealing apparatus |
| CN106229385A (en) * | 2016-09-27 | 2016-12-14 | 北京金晟阳光科技有限公司 | Solar cell radiation annealing stove |
| CN106229385B (en) * | 2016-09-27 | 2017-12-29 | 北京金晟阳光科技有限公司 | Solar cell radiation annealing stove |
| CN107464858A (en) * | 2017-09-27 | 2017-12-12 | 浙江晶科能源有限公司 | A kind of electrical pumping annealing system |
| CN109004065A (en) * | 2018-07-27 | 2018-12-14 | 浙江晶科能源有限公司 | A method of improving N-type double-side cell efficiency |
| CN109004065B (en) * | 2018-07-27 | 2019-11-29 | 浙江晶科能源有限公司 | A method of improving N-type double-side cell efficiency |
| CN109537057A (en) * | 2019-01-07 | 2019-03-29 | 无锡奥特维科技股份有限公司 | Annealing furnace apparatus |
| CN111564532A (en) * | 2020-04-03 | 2020-08-21 | 江西昌大高新能源材料技术有限公司 | Post-treatment efficiency-increasing equipment and method for HAC solar cell |
| CN111564532B (en) * | 2020-04-03 | 2023-02-17 | 江西昌大高新能源材料技术有限公司 | Post-treatment efficiency-increasing equipment and method for HAC solar cell |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201701496A (en) | 2017-01-01 |
| WO2016173471A1 (en) | 2016-11-03 |
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Application publication date: 20150722 |
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