CN111564532B - Post-treatment efficiency-increasing equipment and method for HAC solar cell - Google Patents

Post-treatment efficiency-increasing equipment and method for HAC solar cell Download PDF

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CN111564532B
CN111564532B CN202010263716.6A CN202010263716A CN111564532B CN 111564532 B CN111564532 B CN 111564532B CN 202010263716 A CN202010263716 A CN 202010263716A CN 111564532 B CN111564532 B CN 111564532B
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CN111564532A (en
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黄海宾
周浪
曾庆国
高磊
全知觉
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Jiangxi Changda High Tech Energy Material Technology Co ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/20Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
    • H01L31/208Particular post-treatment of the devices, e.g. annealing, short-circuit elimination
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/12Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity with special arrangements for preheating or cooling the charge
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67098Apparatus for thermal treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67098Apparatus for thermal treatment
    • H01L21/67115Apparatus for thermal treatment mainly by radiation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/20Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
    • H01L31/202Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic Table
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/20Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
    • H01L31/206Particular processes or apparatus for continuous treatment of the devices, e.g. roll-to roll processes, multi-chamber deposition
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
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Abstract

The invention discloses an HAC solar cell post-treatment synergy device which is a tunnel-structured furnace body, wherein a metal chain belt is arranged in the furnace body, and the interior of the furnace body is divided into a preheating section, a photo-thermal treatment section and a cooling section along the advancing direction of a cell. The invention also discloses a post-treatment synergy method of the HAC solar cell, which comprises the steps of preheating, photo-thermal treatment and cooling in sequence, wherein a light source of the photo-thermal treatment section is formed by one or more monochromatic LEDs with the light-emitting wavelength of 450-700 nanometers, and the light intensity of the LEDs irradiated on the surface of a cell slice is limited to 2-50 KW/m 2 (ii) a In the photo-thermal treatment process, the temperature of the cell is controlled between 150 and 250 ℃, and the illumination time is 10 to 600 seconds; the light source is divided into a plurality of LED modules in the advancing direction of the battery piece, and each LED module is provided with an independent control switch; in the photo-thermal treatment section, the illumination adopts pulse type irradiation. Compared with the existing photo-thermal treatment equipment, the photo-thermal treatment equipment has the advantages that the light intensity is greatly reduced, the temperature rise of the solar cell is not too high, the energy is saved, and the requirement of the equipment on the cooling function can be reduced.

Description

Post-treatment efficiency-increasing equipment and method for HAC solar cell
Technical Field
The invention belongs to the field of solar cells and semiconductor devices, relates to material and device preparation technology and equipment, and particularly relates to post-treatment synergy equipment and method for HAC solar cells.
Background
Solar cells based on amorphous silicon/crystalline silicon Heterojunction Structures (HACs), including HITs, HBCs and other structures, have very high conversion efficiencies, and the technology is suitable for mass production and is subject toThe industry is concerned about and develops. In the solar cell, an intrinsic amorphous silicon film is used as a passivation layer, and a heavily doped amorphous silicon film is used as an emitter or a back electric field layer. The amorphous silicon thin film contains a large number of hydrogen atoms which are mainly bonded with silicon and have a complex structure including SiH 1 、SiH 2 、SiH 3 And the like.
In the preparation process of the solar cell, the substrate of the amorphous silicon film needs to be heated in the preparation process, and after the preparation of the amorphous silicon film is finished, the substrate is heated to about 200 ℃ in the subsequent preparation processes of the transparent conductive oxide layer and the metal grid line layer. Because various types of silicon-hydrogen bonds are weak, many of them change during heating, recombine or become hydrogen to volatilize.
After the solar cell is prepared, if proper treatment can be carried out, the performance of the solar cell can be further improved. However, if the improvement is made by heating alone, the increase in temperature is advantageous for forming silicon-hydrogen bonds which are more favorable for passivation, but the increase in temperature causes volatilization of hydrogen, reduces the hydrogen content in the film, and is detrimental for improving the passivation effect. Moreover, if the heat treatment temperature exceeds 250 ℃, certain damage can be caused to the metal grid line prepared by the low-temperature silver paste. Finally, the effect of the modification by only the heat treatment is weak. At present, a continuous spectrum light source represented by a halogen lamp is adopted for heat treatment, or a white light LED light source is adopted for heat treatment, and meanwhile, the illumination and heating effects are combined, but in the current situation, if a good effect is obtained, the intensity of light needs to be increased, so that the temperature rise of the battery piece in the treatment process is overhigh, and the grid line is easily damaged. In addition, the power of the light source is very high, which generally reaches 50-80 kilowatts/square meter, and then the light management and the heat dissipation management of the light source are improved, which already reaches the limit under the current situation. The light management, the heat management and the like of the photo-thermal treatment furnace designed according to the principle reach the limit, and no good solution is provided at present.
We have found that the mechanism of photo-combined heat treatment is significantly different from heat treatment alone. Only photons of a specific waveband can play a good role, and photons of other wavebands can only play a heating role, even a negative effect. If the wavelength and the intensity of the light source can be limited, the method is more beneficial, the quantity of effective photons can be increased, unnecessary heating and cooling can be reduced, the temperature of the battery plate can be controlled in a proper range, a large amount of energy can be saved, and the difficulty of light and heat management of equipment, especially the difficulty of cooling the light source and cooling the battery plate, can be greatly reduced.
Disclosure of Invention
Aiming at the defects and difficulties in the prior art, the invention aims to provide a post-treatment synergy device for an HAC solar cell.
The invention is realized by the following technical scheme:
the invention provides an HAC solar cell post-treatment synergy device which is a furnace body with a tunnel structure, wherein a metal chain belt is arranged in the furnace body and is used as a transmission device of a cell, the interior of the furnace body is divided into a preheating section, a photo-thermal treatment section and a cooling section along the advancing direction of the cell, a light source is arranged above the photo-thermal treatment section in a tunnel, and the cell is driven by the metal chain belt to move from an inlet to an outlet.
The invention also provides a post-treatment synergy method of the HAC solar cell, which utilizes the synergy equipment to carry out preheating, photo-thermal treatment and cooling in turn;
the light source of the photothermal treatment section is formed by one or more monochromatic LEDs with the light emitting wavelength of 450-700 nanometers, and the light intensity of the LEDs irradiated on the surface of the cell slice is limited to 2-50 KW/m 2
In the photo-thermal treatment process, the temperature of the cell is controlled to be between 150 and 250 ℃, and the illumination time is 10 to 600 seconds;
the light source is divided into a plurality of LED modules in the advancing direction of the battery piece, and each LED module is provided with an independent control switch; during the photothermal treatment stage, pulsed illumination is used for illumination.
Further, if the light source adopts a monochromatic LED, the LED light source is any one of yellow light, green light or red light; if the light source adopts a mixed light source, yellow light and red light are taken as the mixed light source, and the ratio of the number of photons of the light emitted by the mixed light source to the number of the photons of the light emitted by the mixed light source is between 1:100 and 100: 1.
Furthermore, in the photothermal treatment section, the illumination intensity irradiated on the surface of the solar cell piece is 5-20 KW/m 2
Furthermore, the temperature of the cell piece is controlled between 180 ℃ and 220 ℃ in the photo-thermal treatment process, and the time is 30-100 seconds.
Furthermore, in the pulse type irradiation of the photo-thermal treatment section, the time length of each time of irradiation is 2-120 seconds, and the interval between two times of irradiation is 10-120 seconds, so that the periodic process of irradiation/non-irradiation is repeated in the advancing process of the solar cell; the pulse irradiation is realized by switching different LED modules.
Further, for the HAC solar cell of the double-sided amorphous silicon film structure, both surfaces are photo-thermally modified.
The efficiency-increasing equipment realizes adjustable productivity through adjusting the advancing speed of the metal chain belt and the illumination intensity, and the productivity is 3000-10000 sheets per hour.
The preheating section of the invention aims to raise the temperature of the battery plate to a specific temperature, which is generally consistent with or slightly lower than that of the photothermal treatment section; infrared heating or circulating hot air heating can be adopted.
The cooling section of the invention has the function of cooling the battery plate to below 70 ℃, thereby facilitating the collection of the battery plate. Air cooling is adopted.
In the design of the whole tunnel, the air flow flows from the cooling section to the preheating section; thus, energy can be fully utilized and energy consumption is reduced.
Compared with the prior art, the invention has the beneficial effects that:
(1) The invention can obviously improve the conversion efficiency of the HAC solar cell, greatly reduces the light intensity compared with the existing photo-thermal treatment equipment, ensures that the temperature rise of the solar cell is not too high, saves the energy and can reduce the requirement of the equipment on the cooling function.
(2) After the invention is implemented for synergy, the open-circuit voltage of the HAC solar cell can be obviously improved by more than 4mV, the filling factor can be improved by more than 0.2 percent (absolute value), and the conversion efficiency can be improved by more than 0.4 percent (absolute value).
(3) The invention greatly reduces the requirement of the integral heat dissipation of the module and the equipment by adjusting the LED module, most areas can adopt an air cooling mode, the equipment structure is simplified, a large amount of energy used for cooling is saved, and the design can shorten the length of the equipment and save the space.
Drawings
FIG. 1 is a schematic diagram of the apparatus of the present invention.
FIG. 2 is a side view structural diagram of embodiment 1 of the present invention
Illustration of the drawings: 1-preheating section, 2-photothermal treatment section, 3-cooling section, 4-light source and 5-metal chain belt.
Detailed Description
The invention will be further described with reference to the accompanying drawings.
Example 1
As shown in figure 1, the post-treatment synergy equipment for the HAC solar cell is a furnace body with a tunnel structure, a metal chain belt 5 is arranged in the furnace body and serves as a transmission device for cell pieces, the cell pieces are driven by the metal chain belt 5 to move from an inlet to an outlet, the interior of the furnace body is divided into a preheating section 1, a photo-thermal treatment section 2 and a cooling section 3 along the advancing direction of the cell pieces, a light source 4 formed by a plurality of groups of monochromatic red light source LED modules is arranged above the photo-thermal treatment section 2 in the tunnel, and the LED modules in each group can be independently controlled to be switched on and switched off.
The light source 4 adopts a monochromatic LED with the light-emitting wavelength of 610 nanometers, the monochromatic LED light source is red light, the surface of the HAC solar cell deposited with the n-type amorphous silicon is irradiated by the red light, and the light intensity of the light irradiated on the surface of the cell slice is limited to 2-10 KW/m 2 The adjustment is carried out; pulse type irradiation of the photo-thermal treatment section 2 is realized by on-off control of different LED modules, the time of each time of irradiation is 5-20 seconds, and the interval between two times of irradiation is 40-60 seconds, so that the periodic process of irradiation/non-irradiation is repeated in the advancing process of the solar cell, the temperature of the cell is controlled to be 190 +/-10 ℃, and the total irradiation time is 50-100 seconds;
in the specific implementation, the adjustable productivity is realized by adjusting the advancing speed of the metal chain belt 5 and the illumination intensity, and the productivity is 4000-6000 sheets per hour.
The experimental results of the conversion efficiency of the double-sided HAC solar cell before and after the photothermal treatment are shown in fig. 2, the efficiency is improved by 0.4% (absolute value) at the maximum, the open-circuit voltage is improved by 4.7mV, and the fill factor is improved by 0.79%.
Example 2
As shown in figure 1, the post-treatment synergy equipment for the HAC solar cell is a furnace body with a tunnel structure, a metal chain belt 5 is arranged in the furnace body and serves as a conveying device for cell pieces, the cell pieces are driven by the metal chain belt 5 to move from an inlet to an outlet, the interior of the furnace body is divided into a preheating section 1, a photo-thermal treatment section 2 and a cooling section 3 along the advancing direction of the cell pieces, a light source 4 consisting of a plurality of groups of monochromatic yellow LED modules is arranged above the photo-thermal treatment section 2 in a tunnel, and the LED modules in each group can be independently controlled to be switched on and off.
The light source 4 adopts a yellow monochromatic LED with the luminescence wavelength of 580 nanometers, and the light intensity of the yellow monochromatic LED irradiating the surface of the battery piece is limited to be 5-20 KW/m 2 The adjustment is carried out; pulse type irradiation of the photo-thermal treatment section 2 is realized by on-off control of different LED modules, the duration of each time of irradiation is 2-5 seconds, and the interval between two times of irradiation is 10-20 seconds, so that the periodic process of irradiation/non-irradiation is repeated in the advancing process of the solar cell, the temperature of the cell is controlled to be 160 +/-10 ℃ in the process, and the total irradiation time is 10-30 seconds;
in the specific implementation, the adjustable productivity is realized by adjusting the advancing speed of the metal chain belt 5 and the illumination intensity, and the productivity is 3000-5000 sheets per hour.
Experimental results of conversion efficiency of the double-sided HAC solar cell before and after photo-thermal treatment show that the efficiency is improved by 0.3 percent (absolute value) at most, the open-circuit voltage is improved by 4.7mV, and the filling factor is improved by 0.75 percent.
Example 3
As shown in figure 1, the HAC solar cell post-processing synergy equipment is a furnace body with a tunnel structure, a metal chain belt 5 is arranged in the furnace body and serves as a transmission device of a cell, the cell is driven by the metal chain belt 5 to move from an inlet to an outlet, the interior of the furnace body is divided into a preheating section 1, a photo-thermal processing section 2 and a cooling section 3 along the advancing direction of the cell, a plurality of groups of light sources 4 consisting of monochromatic green LED modules are arranged above the photo-thermal processing section 2 in a tunnel, and the LED modules in each group can be independently controlled to be switched on and off.
The light source 4 adopts a green light source monochromatic LED with the luminous wavelength of 500 nanometers to irradiate the surface of the HAC solar cell deposited with n-type amorphous silicon, and the light intensity of the light irradiated on the surface of the cell slice is limited to be 20-50 KW/m 2 The adjustment is carried out; pulse type irradiation of the photo-thermal treatment section 2 is realized by on-off control of different LED modules, the time length of each irradiation is 60-120 seconds, and the interval between two irradiations is 50-120 seconds, so that the periodic process of irradiation/non-irradiation is repeated in the advancing process of the solar cell, the temperature of the cell is controlled to be 240 +/-10 ℃, and the total irradiation time is 300-600 seconds;
in the specific implementation, the adjustable productivity is realized by adjusting the advancing speed of the metal chain belt 5 and the illumination intensity, and the productivity is 6000 to 10000 sheets per hour.
Experimental results of conversion efficiency of the double-sided HAC solar cell before and after photo-thermal treatment show that the efficiency is improved by 0.41 percent (absolute value) at most, open-circuit voltage is improved by 5.0mV, and filling factor is improved by 0.72 percent.
Example 4
As shown in figure 1, the post-treatment synergy equipment for the HAC solar cell is a furnace body with a tunnel structure, a metal chain belt 5 is arranged in the furnace body and serves as a transmission device for cell pieces, the cell pieces are driven by the metal chain belt 5 to move from an inlet to an outlet, the interior of the furnace body is divided into a preheating section 1, a photo-thermal treatment section 2 and a cooling section 3 along the advancing direction of the cell pieces, a light source 4 formed by a plurality of groups of LED modules is arranged above the photo-thermal treatment section 2 in the tunnel, and the LED modules in each group can be independently controlled to be switched on and switched off.
The light source 4 is composed of a bicolor LED which is formed by matching red light with the luminous wavelength of 610 nm and yellow light with the luminous wavelength of 555 nm, namely, a red light LED module and a yellow light LED module are alternately distributed, the ratio of the number of photons of the light emitted by the red light LED module and the yellow light LED module is 100:1, and the light intensity of the light source 4 irradiating the surface of the battery piece is 5-20 KW/m 2 Uniform 5-gear adjustability can be realized; the pulse type irradiation of the photo-thermal treatment section 2 is realized by controlling the switches of different LED modules, the time of each irradiation is 20-30 seconds, and the interval between two irradiations is 20-40 seconds, so that the solar cell rowsIn the process, the periodic process of illumination/no illumination is repeated, the temperature of the battery piece is controlled to be 210 +/-10 ℃ in the process, and the total illumination time is 80-100 seconds;
in the specific implementation, the adjustable productivity is realized by adjusting the advancing speed of the metal chain belt 5 and the illumination intensity, and the productivity is 8000-10000 sheets per hour.
Experimental results of conversion efficiency of the double-sided HAC solar cell before and after photo-thermal treatment show that the efficiency is improved by 0.50 percent (absolute value) at most, open-circuit voltage is improved by 5mV, and filling factor is improved by 0.75 percent.
Example 5
As shown in figure 1, the HAC solar cell post-treatment synergy equipment is a furnace body with a tunnel structure, a metal chain belt 5 is arranged in the furnace body and serves as a conveying device of a cell, the cell is driven by the metal chain belt 5 to move from an inlet to an outlet, the interior of the furnace body is divided into a preheating section 1, a photo-thermal treatment section 2 and a cooling section 3 along the advancing direction of the cell, a light source 4 formed by a plurality of groups of LED modules is arranged above the photo-thermal treatment section 2 in a tunnel, and the LED modules in each group can be independently controlled to be switched on and off.
The light source 4 is composed of a red light LED module and a yellow light LED module which are matched with each other, wherein the red light LED module and the yellow light LED module are alternately distributed, the ratio of the number of photons emitted by the red light LED module and the yellow light LED module is 1:100, and the light intensity of the light source 4 irradiating the surface of the battery piece is 2-30 KW/m 2 Uniform 4-gear adjustability can be realized; pulse type irradiation of the photo-thermal treatment section 2 is realized by on-off control of different LED modules, the time of each irradiation is 10-50 seconds, and the interval between two times of irradiation is 10-60 seconds, so that the periodic process of irradiation/no-irradiation is repeated in the advancing process of the solar cell, the temperature of the cell is controlled to be 220 +/-10 ℃, and the total irradiation time is 100-300 seconds;
in the specific implementation, the adjustable productivity is realized by adjusting the advancing speed of the metal chain belt 5 and the illumination intensity, and the productivity is 5000-8000 sheets per hour.
Experimental results of conversion efficiency of the double-sided HAC solar cell before and after photo-thermal treatment show that the efficiency is improved by 0.38 percent (absolute value) at most, the open-circuit voltage is improved by 4.5mV, and the filling factor is improved by 0.7 percent.
The foregoing merely represents preferred embodiments of the invention, which are described in some detail and detail, and therefore should not be construed as limiting the scope of the invention. It should be noted that, for those skilled in the art, various changes, modifications and substitutions can be made without departing from the spirit of the present invention, and these are all within the scope of the present invention. Therefore, the protection scope of the present patent should be subject to the appended claims.

Claims (6)

1. A post-treatment synergy method of an HAC solar cell is characterized by comprising the following steps: the device adopted by the method is a furnace body with a tunnel structure, a metal chain belt is arranged in the furnace body and serves as a transmission device of the battery piece, the interior of the furnace body is divided into a preheating section, a photo-thermal treatment section and a cooling section along the advancing direction of the battery piece, a light source is arranged above the photo-thermal treatment section in a tunnel, and the battery piece is driven by the metal chain belt to move from an inlet to an outlet;
the light source of the photo-thermal treatment section is formed by one or more monochromatic LEDs with the light emitting wavelength of 450-700 nanometers, and the light intensity of the LED irradiating the surface of the battery piece is limited to 2-50KW/m 2 (ii) a In the photo-thermal treatment process, the temperature of the battery piece is controlled to be between 150 and 250 ℃, and the illumination time is 10 to 600 seconds; the light source is divided into a plurality of LED modules in the advancing direction of the battery piece, and each LED module is provided with an independent control switch; in the photothermal treatment stage, pulsed irradiation is used for illumination.
2. The method of claim 1 for enhancing efficiency of post-treatment of a HAC solar cell, wherein: if the light source adopts a monochromatic LED, the LED light source is any one of yellow light, green light or red light; if the light source adopts a mixed light source, yellow light and red light are taken as the mixed light source, and the ratio of the number of photons of the light emitted by the mixed light source to the number of photons of the light emitted by the mixed light source is 1.
3. The method of claim 1 for enhancing efficiency of post-treatment of a HAC solar cell, wherein:in the photo-thermal treatment section, the surface of the solar cell is irradiated with light with the intensity of 5-20KW/m 2
4. The method of claim 1 for enhancing efficiency of post-treatment of a HAC solar cell, wherein: in the photo-thermal treatment process, the temperature of the battery piece is controlled to be 180-220 ℃, and the time is 30-100 seconds.
5. The method of claim 1 for enhancing efficiency of post-treatment of HAC solar cell, wherein the method comprises the steps of: in the pulse type irradiation of the photo-thermal processing section, the time of each time of illumination is 2-120 seconds, and the interval between two times of illumination is 10-120 seconds, so that the periodic process of illumination/no illumination is repeated in the advancing process of the solar cell.
6. The method of claim 1 for enhancing efficiency of post-treatment of a HAC solar cell, wherein: for the HAC solar cell with a double-sided amorphous silicon film structure, both surfaces are subjected to photo-thermal modification.
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