CN205747981U - A kind of diffusion furnace is with anti-heat leakage insulated door - Google Patents
A kind of diffusion furnace is with anti-heat leakage insulated door Download PDFInfo
- Publication number
- CN205747981U CN205747981U CN201620634972.0U CN201620634972U CN205747981U CN 205747981 U CN205747981 U CN 205747981U CN 201620634972 U CN201620634972 U CN 201620634972U CN 205747981 U CN205747981 U CN 205747981U
- Authority
- CN
- China
- Prior art keywords
- heat
- insulated door
- insulation cylinder
- heat insulation
- insulation cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of anti-heat leakage insulated door of diffusion furnace; including insulated door body; described insulated door body includes heat insulation cylinder and insulation cover; insulation cover and heat insulation cylinder form a sealing space; it is provided with dowel between insulation cover and heat insulation cylinder, is filled with heat-barrier material in described sealing space, the outer wall of heat insulation cylinder is provided with protective layer; heat insulation cylinder side is provided with connector, and the outside of described insulation cover is provided with suspension ring.This utility model simple in construction, by using heat insulation cylinder and the double-decker of insulation cover composition, thus cover the fire door of high temperature dispersing furnace simultaneously simple and effective, the high temperature in stove has effectively been isolated also by the heat-barrier material filled in the sealing space formed at insulation cover and heat insulation cylinder, the heat in stove is made to be difficult to conduction to outside, i.e. reach to isolate the heat radiation in stove, reduced the purpose of heat losses.
Description
Technical field
This utility model relates to a kind of diffusion furnace, particularly to a kind of diffusion furnace with anti-heat leakage insulated door.
Background technology
Diffusion furnace be in semiconductor device and large scale integrated circuit manufacture process for wafer being diffused, aoxidizing,
A kind of heat-processing equipment of the techniques such as plated film, annealing, alloy and sintering.The oral area of conventional high-temperature diffusion furnace is dependent on one block of quartz
Flat board simply covers, but owing to quartz flat board can not play the effect of effectively insulating, so in easily causing stove
Heat is quickly run off by fire door, and high temperature dispersing furnace now can only compensate the heat of loss by improving heating power,
This not only causes heat utilization efficiency relatively low, but also wastes the energy greatly.
Utility model content
The purpose of this utility model is that a kind of simple in construction of offer, good heat-insulation effect, the diffusion furnace that heat utilization efficiency is high
With anti-heat leakage insulated door.
To achieve these goals, the technical solution adopted in the utility model is such that diffusion furnace of the present utility model
With anti-heat leakage insulated door, including insulated door body, described insulated door body includes heat insulation cylinder and insulation cover, and insulation cover is with heat insulation
Cylinder forms a sealing space, is provided with dowel, is filled with heat-barrier material in described sealing space between insulation cover and heat insulation cylinder,
Being provided with protective layer on the outer wall of heat insulation cylinder, heat insulation cylinder side is provided with connector, and the outside of described insulation cover is provided with suspension ring.
As preferably, described heat insulation cylinder and insulation cover use carborundum to make.
As preferably, described protective layer uses quartz to make.
As preferably, described heat-barrier material is ceramic fibre or quartz fibre.
Compared with prior art, the utility model has the advantage of: this utility model simple in construction, by using heat insulation cylinder
With the double-decker of insulation cover composition, thus at the simple and effective fire door covering high temperature dispersing furnace simultaneously, also by every
The high temperature in stove effectively isolated by the heat-barrier material filled in the sealing space of heat lid and heat insulation cylinder composition, makes the heat in stove
It is difficult to conduction outside, has i.e. reached to isolate the heat radiation in stove, reduced the purpose of heat losses；Between insulation cover and heat insulation cylinder
It is provided with dowel, enhances the intensity of insulated door, extend its service life, connector is set, it is simple to install, suspension ring are set,
Convenient use, this utility model is suitable for promoting the use of.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Detailed description of the invention
Below in conjunction with accompanying drawing, the utility model is described in further detail.
Seeing Fig. 1, diffusion furnace of the present utility model is with anti-heat leakage insulated door, including insulated door body, described insulated door
Body includes that heat insulation cylinder 1 and insulation cover 2, insulation cover 2 and heat insulation cylinder 1 form a sealing space, between insulation cover 2 and heat insulation cylinder 1
It is provided with dowel 4, in described sealing space, is filled with heat-barrier material 5, the outer wall of heat insulation cylinder 1 is provided with protective layer 3, heat insulation
Cylinder 1 side is provided with connector 6, and the outside of described insulation cover 2 is provided with suspension ring 7, and described heat insulation cylinder 1 and insulation cover 2 use carbon
SiClx is made, and described protective layer 3 uses quartz to make, and described heat-barrier material 5 is ceramic fibre or quartz fibre.
Insulated door uses heat insulation cylinder 1 and insulation cover 2 to form double-decker, thus covers High temperature diffusion simple and effective
The fire door of stove simultaneously, also by form at insulation cover 2 and heat insulation cylinder 1 seal space in the heat-barrier material 5 filled effectively every
High temperature in stove, makes the heat in stove be difficult to conduction outside, has i.e. reached to isolate the heat radiation in stove, has reduced heat stream
The purpose lost；It is provided with dowel 4 between insulation cover 2 and heat insulation cylinder 1, enhances the intensity of insulated door, extend its service life,
Connector 6 is set, it is simple to install, suspension ring 7, convenient use, this utility model simple in construction is set, is suitable for promoting the use of.
Claims (4)
1. diffusion furnace is with an anti-heat leakage insulated door, including insulated door body, it is characterised in that: described insulated door body includes
Heat insulation cylinder and insulation cover, insulation cover and heat insulation cylinder form a sealing space, are provided with dowel, institute between insulation cover and heat insulation cylinder
Being filled with heat-barrier material in stating sealing space, the outer wall of heat insulation cylinder is provided with protective layer, heat insulation cylinder side is provided with connector,
The outside of described insulation cover is provided with suspension ring.
Diffusion furnace the most according to claim 1 is with anti-heat leakage insulated door, it is characterised in that: described heat insulation cylinder and insulation cover
Employing carborundum is made.
Diffusion furnace the most according to claim 1 is with anti-heat leakage insulated door, it is characterised in that: described protective layer uses quartz
Make.
Diffusion furnace the most according to claim 1 is with anti-heat leakage insulated door, it is characterised in that: described heat-barrier material is pottery
Fiber or quartz fibre.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620634972.0U CN205747981U (en) | 2016-06-24 | 2016-06-24 | A kind of diffusion furnace is with anti-heat leakage insulated door |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620634972.0U CN205747981U (en) | 2016-06-24 | 2016-06-24 | A kind of diffusion furnace is with anti-heat leakage insulated door |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205747981U true CN205747981U (en) | 2016-11-30 |
Family
ID=57383561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620634972.0U Expired - Fee Related CN205747981U (en) | 2016-06-24 | 2016-06-24 | A kind of diffusion furnace is with anti-heat leakage insulated door |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205747981U (en) |
-
2016
- 2016-06-24 CN CN201620634972.0U patent/CN205747981U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161130 Termination date: 20170624 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |