TW201701496A - Roller-way-type solar cell irradiation annealing furnace - Google Patents
Roller-way-type solar cell irradiation annealing furnace Download PDFInfo
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- TW201701496A TW201701496A TW105112858A TW105112858A TW201701496A TW 201701496 A TW201701496 A TW 201701496A TW 105112858 A TW105112858 A TW 105112858A TW 105112858 A TW105112858 A TW 105112858A TW 201701496 A TW201701496 A TW 201701496A
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- 238000000137 annealing Methods 0.000 title claims abstract description 36
- 238000010438 heat treatment Methods 0.000 claims abstract description 29
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 239000011810 insulating material Substances 0.000 claims description 10
- 239000000919 ceramic Substances 0.000 claims description 7
- 229910052736 halogen Inorganic materials 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 4
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 229910002110 ceramic alloy Inorganic materials 0.000 claims description 3
- 150000002367 halogens Chemical class 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001256 stainless steel alloy Inorganic materials 0.000 claims description 3
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 3
- 239000005341 toughened glass Substances 0.000 claims description 3
- 229910052724 xenon Inorganic materials 0.000 claims description 3
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 7
- 238000010924 continuous production Methods 0.000 abstract description 3
- 238000005265 energy consumption Methods 0.000 abstract description 3
- 238000001816 cooling Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 3
- 230000032258 transport Effects 0.000 description 3
- 239000012774 insulation material Substances 0.000 description 2
- 238000011031 large-scale manufacturing process Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 101001073212 Arabidopsis thaliana Peroxidase 33 Proteins 0.000 description 1
- 101001123325 Homo sapiens Peroxisome proliferator-activated receptor gamma coactivator 1-beta Proteins 0.000 description 1
- 102100028961 Peroxisome proliferator-activated receptor gamma coactivator 1-beta Human genes 0.000 description 1
- XGCTUKUCGUNZDN-UHFFFAOYSA-N [B].O=O Chemical compound [B].O=O XGCTUKUCGUNZDN-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- -1 tungsten halogen Chemical class 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1864—Annealing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Photovoltaic Devices (AREA)
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- Tunnel Furnaces (AREA)
Abstract
Description
本發明涉及一種輥道式太陽電池輻照退火爐，可用於太陽電池的輻照退火處理。 The invention relates to a roller-type solar cell irradiation annealing furnace, which can be used for radiation annealing treatment of solar cells.
通常情況下，太陽電池用鏈式燒結爐燒結後，即可做成元件，投入太陽能電站使用。太陽電池因為硼氧對的存在，在使用過程中長期光照環境下會發生效率衰減，尤其是近幾年興起的PERC電池，這種衰減尤為嚴重。研究表明，預先使用一種特定的光源在一定溫度條件下對電池片進行輻照退火處理，會有效防止這種衰減現象發生。但是，目前尚沒有專門對電池片進行輻照退火處理的設備。 Usually, after the solar cell is sintered by a chain sintering furnace, it can be made into a component and put into a solar power plant. Due to the presence of boron-oxygen pair in solar cells, efficiency degradation occurs in long-term illumination during use, especially in PERC cells that have emerged in recent years. This attenuation is particularly serious. Studies have shown that the use of a specific light source to irradiate the cell under irradiation at a certain temperature will effectively prevent this attenuation. However, there is currently no equipment specifically for irradiating annealed cells.
為此，申請人發明了一種輥道式太陽電池輻照退火爐，可以對燒結完成的電池片進行連續輻照退火處理，從根本上解決輻照退火製程的規模化生產問題。 To this end, the applicant invented a roller-type solar cell irradiation annealing furnace, which can perform continuous irradiation annealing treatment on the sintered cell sheet, and fundamentally solve the problem of large-scale production of the irradiation annealing process.
根據以上習知技術的不足，本發明所要解決的技術問題是：提供一種輥道式太陽電池輻照退火爐，從根本上解決輻照退火製程的規模化生產問題，從而最大限度地解決太陽電池在使用過程中的衰減問題。 According to the above deficiencies of the prior art, the technical problem to be solved by the present invention is to provide a roller-type solar cell irradiation annealing furnace, which fundamentally solves the problem of large-scale production of the irradiation annealing process, thereby maximally solving the solar cell. Attenuation problems during use.
本發明所述的輥道式太陽電池輻照退火爐，在所述輻照退火爐中，電池片在一組水平排列的輥道上傳輸，在輥道的上方設置有光源、在輥道的下方設置有加熱裝置，或者在輥道的下方設置有光源、在輥道的上方設置有加熱裝置，電池片在傳輸過程中，其正面朝向光源，其背面朝向加熱裝置。 The roller-type solar cell irradiation annealing furnace of the present invention, in which the cell sheet is transported on a set of horizontally arranged roller lanes, and a light source is disposed above the roller lane, below the roller lane A heating device is provided, or a light source is disposed below the roller table, and a heating device is disposed above the roller table. During the transfer, the battery sheet faces the light source with the front side facing the heating device.
較佳的是，光源為鹵素燈、氙燈、白熾燈或LED燈。 Preferably, the light source is a halogen lamp, a xenon lamp, an incandescent lamp or an LED lamp.
較佳的是，加熱裝置為紅外線燈管、電熱絲或熱風機。 Preferably, the heating device is an infrared lamp, a heating wire or a hot air blower.
較佳的是，在所述光源與電池片之間，設置一層透光隔熱材 料層，將光源隔離在電池片加熱區域之外。 Preferably, a light-transmissive heat insulating material is disposed between the light source and the battery sheet. The layer is isolated from the heating zone of the cell.
較佳的是，在安裝光源的腔室內，設置有對光源進行冷卻的吹風冷卻裝置或排風裝置。 Preferably, a blower cooling device or an exhausting device for cooling the light source is provided in the chamber in which the light source is mounted.
較佳的是，透光隔熱材料層材質為石英玻璃或鋼化玻璃。 Preferably, the light transmissive heat insulating material layer is made of quartz glass or tempered glass.
較佳的是，通過加熱裝置對電池片的加熱溫度是100℃-300℃，較佳為150℃-250℃。 Preferably, the heating temperature of the battery sheet by the heating means is from 100 ° C to 300 ° C, preferably from 150 ° C to 250 ° C.
較佳的是，光源的輻照度是50mW/cm2-200mW/cm2，80mW/cm2-150mW/cm2。 Preferably, the irradiance of the light source is 50mW / cm 2 -200mW / cm 2 , 80mW / cm 2 -150mW / cm 2.
較佳的是，輥道的材質為石英陶瓷、石英玻璃、氧化鋁陶瓷、氮化矽陶瓷、不銹鋼或鋁合金等對電池片沒有污染、耐高溫的材料。 Preferably, the material of the roller table is quartz ceramic, quartz glass, alumina ceramic, tantalum nitride ceramic, stainless steel or aluminum alloy, and the like, which has no pollution to the battery sheet and high temperature resistance.
所述的輥道為實心輥道或空心輥道，輥道的形狀為等徑的圓柱狀、臺階狀、圓錐台狀、螺紋狀或圓環狀。 The roller table is a solid roller or a hollow roller. The shape of the roller is cylindrical, stepped, truncated, threaded or annular.
所述輥道可以單向轉動、也可以往復轉動。 The roller table can be rotated in one direction or in a reciprocating manner.
與習知技術相比，本發明具有的有益效果是： Compared with the prior art, the present invention has the following beneficial effects:
本發明提供的輥道式太陽電池輻照退火爐，將燒結後的電池片通過一組水平排列的輥道連續傳輸、在水平行進過程中連續完成輻照退火處理，具有能耗低、運行平穩、產能大、連續化生產的特點，推廣應用後，可以最大限度地解決太陽電池使用過程中衰減的問題。 The roller-type solar cell irradiation annealing furnace provided by the invention continuously transports the sintered cell sheet through a set of horizontally arranged roller channels, and continuously completes the irradiation annealing treatment in the horizontal traveling process, and has low energy consumption and stable operation. The characteristics of large capacity and continuous production can be used to maximize the problem of attenuation during the use of solar cells.
1‧‧‧輥道 1‧‧‧ roller table
2‧‧‧電池片 2‧‧‧ battery
3‧‧‧光源 3‧‧‧Light source
4‧‧‧上爐殼 4‧‧‧Upper furnace shell
5‧‧‧透光隔熱材料層 5‧‧‧Transparent insulation material layer
6‧‧‧冷卻風機 6‧‧‧Cooling fan
7‧‧‧下爐殼 7‧‧‧ Lower furnace shell
8‧‧‧加熱裝置 8‧‧‧ heating device
第1圖是本發明結構示意圖。 Figure 1 is a schematic view of the structure of the present invention.
下面結合附圖對本發明的實施例做進一步說明。 The embodiments of the present invention will be further described below in conjunction with the accompanying drawings.
《實施例1》 "Embodiment 1"
如第1圖所示，本發明的輥道式太陽電池輻照退火爐由輥道1、光源3、上爐殼4、透光隔熱材料層5、冷卻風機6、下爐殼7和加熱裝置8組成，上爐殼4、下爐殼7形成爐腔，輥道1沿水平方向排列並穿過爐腔，電池片2在輥道1的傳輸下水平行進，進入輻照退火爐，在輻照退火爐的下部設置有加熱裝置8，在輻照退火爐的上部設置有光源3，在安裝光源3的腔室內，設置有對光源3進行冷卻的吹風冷卻裝置或排風裝置，對光源3進行冷卻， 在光源3的下部設置有透光隔熱材料層5，將加熱區域和光源3隔開，以防止熱量把光源3燒壞，電池片2完成輻照退火後，通過後方的冷卻風機6冷卻，即完成了整個輻照退火過程。 As shown in Fig. 1, the roller-type solar cell irradiation annealing furnace of the present invention comprises a roller table 1, a light source 3, an upper furnace shell 4, a light-transmitting heat insulating material layer 5, a cooling fan 6, a lower furnace shell 7, and heating. The device 8 is composed of an upper furnace shell 4 and a lower furnace shell 7 forming a furnace chamber. The roller lanes 1 are arranged in a horizontal direction and pass through the furnace chamber, and the battery sheet 2 is horizontally traveled under the conveyance of the roller lane 1 to enter the irradiation annealing furnace. A heating device 8 is disposed at a lower portion of the irradiation annealing furnace, a light source 3 is disposed at an upper portion of the irradiation annealing furnace, and a blower cooling device or an exhaust device for cooling the light source 3 is disposed in a chamber in which the light source 3 is mounted, and the light source is disposed 3 to cool, A light transmissive heat insulating material layer 5 is disposed at a lower portion of the light source 3 to separate the heating region from the light source 3 to prevent heat from burning the light source 3. After the cell sheet 2 is irradiated and annealed, the cooling fan 6 is cooled by the rear. That is, the entire irradiation annealing process is completed.
光源3可以為鹵素燈、氙燈、白熾燈或LED燈，加熱裝置8可以為紅外線燈管、電熱絲或熱風機，輥道1為實心輥道或空心輥道，輥道1的形狀為等徑的圓柱狀、臺階狀、圓錐台狀、螺紋狀或圓環狀，輥道1的材質為石英陶瓷、石英玻璃、氧化鋁陶瓷、氮化矽陶瓷、不銹鋼或鋁合金，透光隔熱材料層5材質為石英玻璃或鋼化玻璃。本實施例中，使用的輥道1是石英陶瓷輥、光源是鹵鎢燈、加熱裝置8是紅外線燈管、透光隔熱材料是石英玻璃板；輻照退火區的加熱溫度是100℃-300℃，較好是150℃-250℃，光源的輻照度是50mW/cm2-200mW/cm2，較好是80mW/cm2-150mW/cm2。 The light source 3 can be a halogen lamp, a xenon lamp, an incandescent lamp or an LED lamp. The heating device 8 can be an infrared lamp tube, a heating wire or a hot air fan. The roller table 1 is a solid roller or a hollow roller. The shape of the roller table 1 is equal. Cylindrical, stepped, truncated cone, threaded or annular, roller material 1 is made of quartz ceramic, quartz glass, alumina ceramic, tantalum nitride ceramic, stainless steel or aluminum alloy, transparent insulating material layer 5 material is quartz glass or tempered glass. In this embodiment, the roller table 1 used is a quartz ceramic roller, the light source is a tungsten halogen lamp, the heating device 8 is an infrared lamp tube, and the light transmissive heat insulating material is a quartz glass plate; the heating temperature of the irradiation annealing zone is 100 ° C - 300 ℃, preferably 150 ℃ -250 ℃, source irradiance was 50mW / cm 2 -200mW / cm 2 , preferably 80mW / cm 2 -150mW / cm 2 .
本發明提供的輥道式太陽電池輻照退火爐，將燒結後的電池片2通過一組水平排列的輥道1連續傳輸、在水平行進過程中連續完成輻照退火處理，具有能耗低、運行平穩、產能大、連續化生產的特點，推廣應用後，可以最大限度地解決太陽電池使用過程中衰減的問題。 The roller-type solar cell irradiation annealing furnace provided by the invention continuously transports the sintered cell sheet 2 through a set of horizontally arranged roller lanes 1 and continuously completes the irradiation annealing treatment in the horizontal traveling process, and has low energy consumption. The characteristics of stable operation, large capacity and continuous production can be used to maximize the solution to the problem of attenuation during the use of solar cells.
《實施例2》 <<Example 2》
電池片2在輥道1的傳輸下水平行進，在輻照退火爐的下部設置有光源3，在輻照退火爐的上部設置有加熱裝置8，在光源3與輥道1底面之間設置有透光隔熱材料層5，透光隔熱材料層5將上部加熱區域和光源3隔開，其餘同實施例1。 The battery sheet 2 travels horizontally under the transport of the roller table 1, a light source 3 is disposed at a lower portion of the irradiation annealing furnace, and a heating device 8 is disposed at an upper portion of the radiation annealing furnace, and a light source 3 is disposed between the light source 3 and the bottom surface of the roller table 1. The light-transmissive heat insulating material layer 5 and the light-transmitting heat insulating material layer 5 separate the upper heating region from the light source 3, and the rest are the same as in the first embodiment.
儘管本發明的實施方案已公開如上，但其並不僅僅限於說明書和實施方式中所列運用，它完全可以被適用於各種適合本發明的領域，對於熟悉本領域的人員而言，可容易地實現另外的修改，因此在不背離申請專利範圍及等同範圍所限定的一般概念下，本發明並不限於特定的細節和這裡示出與描述的圖例。 Although the embodiments of the present invention have been disclosed as above, they are not limited to the applications listed in the specification and the embodiments, and are fully applicable to various fields suitable for the present invention, and can be easily made by those skilled in the art. The invention is not limited to the specific details and the details shown and described herein, without departing from the scope of the invention.
1‧‧‧輥道 1‧‧‧ roller table
2‧‧‧電池片 2‧‧‧ battery
3‧‧‧光源 3‧‧‧Light source
4‧‧‧上爐殼 4‧‧‧Upper furnace shell
5‧‧‧透光隔熱材料層 5‧‧‧Transparent insulation material layer
6‧‧‧冷卻風機 6‧‧‧Cooling fan
7‧‧‧下爐殼 7‧‧‧ Lower furnace shell
8‧‧‧加熱裝置 8‧‧‧ heating device
Claims (10)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510209724.1A CN104795469A (en) | 2015-04-25 | 2015-04-25 | Roller-way-type solar cell irradiation annealing furnace |
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| Publication Number | Publication Date |
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| TW201701496A true TW201701496A (en) | 2017-01-01 |
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| TW (1) | TW201701496A (en) |
| WO (1) | WO2016173471A1 (en) |
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| CN104795469A (en) * | 2015-04-25 | 2015-07-22 | 北京金晟阳光科技有限公司 | Roller-way-type solar cell irradiation annealing furnace |
| CN105047580B (en) * | 2015-08-14 | 2019-03-05 | 浙江艾能聚光伏科技股份有限公司 | A kind of cell piece decaying platform |
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| US10126053B2 (en) | 2016-09-02 | 2018-11-13 | International Business Machines Corporation | Precision dual annealing apparatus |
| CN106229385B (en) * | 2016-09-27 | 2017-12-29 | 北京金晟阳光科技有限公司 | Solar cell radiation annealing stove |
| CN107464858B (en) * | 2017-09-27 | 2019-06-11 | 浙江晶科能源有限公司 | A kind of electrical pumping annealing system |
| CN108550656B (en) * | 2018-05-17 | 2023-11-21 | 苏州晶洲装备科技有限公司 | Electric injection equilibrium annealing device |
| CN109004065B (en) * | 2018-07-27 | 2019-11-29 | 浙江晶科能源有限公司 | A method of improving N-type double-side cell efficiency |
| CN109537057A (en) * | 2019-01-07 | 2019-03-29 | 无锡奥特维科技股份有限公司 | Annealing furnace apparatus |
| CN111564532B (en) * | 2020-04-03 | 2023-02-17 | 江西昌大高新能源材料技术有限公司 | Post-treatment efficiency-increasing equipment and method for HAC solar cell |
| CN111383978A (en) * | 2020-04-29 | 2020-07-07 | 北京金晟阳光科技有限公司 | Novel roller way transmission structure of solar cell roller way furnace |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020015028A (en) * | 2000-02-08 | 2002-02-27 | 모리시타 요이찌 | Lamp anneal device and substrate of display device |
| CN100475983C (en) * | 2007-08-29 | 2009-04-08 | 太仓市金鑫铜管有限公司 | Bright annealing furnace |
| US8111978B2 (en) * | 2008-07-11 | 2012-02-07 | Applied Materials, Inc. | Rapid thermal processing chamber with shower head |
| CN101478017B (en) * | 2009-01-09 | 2012-06-27 | 中电电气（南京）光伏有限公司 | Light induced attenuation characteristic improving method for crystalline silicon solar cell tablet and dedicated apparatus |
| CN201436685U (en) * | 2009-05-11 | 2010-04-07 | 沈阳汉锋新能源技术有限公司 | Special annealing furnace for amorphous silicon cell |
| CN102593249A (en) * | 2012-02-23 | 2012-07-18 | 常州天合光能有限公司 | Curing and power stabilizing device for assemblies and method thereof |
| CN202808935U (en) * | 2012-09-21 | 2013-03-20 | 蚌埠玻璃工业设计研究院 | Device for improving optical-induced degradation of amorphous silicon membrane |
| CN104201242B (en) * | 2014-09-03 | 2016-04-06 | 常州天合光能有限公司 | Improve boron doped p-type monocrystalline silicon battery photo attenuation device and using method thereof |
| CN104505427B (en) * | 2014-10-24 | 2016-07-13 | 横店集团东磁股份有限公司 | Improve method and the device of crystal silicon solar cell sheet LID and PID |
| CN204538071U (en) * | 2015-04-25 | 2015-08-05 | 北京金晟阳光科技有限公司 | Roller bed type solar cell radiation annealing stove |
| CN204537995U (en) * | 2015-04-25 | 2015-08-05 | 北京金晟阳光科技有限公司 | Roller bed type solar cell sintering and radiation annealing one continuous oven |
| CN104795469A (en) * | 2015-04-25 | 2015-07-22 | 北京金晟阳光科技有限公司 | Roller-way-type solar cell irradiation annealing furnace |
-
2015
- 2015-04-25 CN CN201510209724.1A patent/CN104795469A/en active Pending
-
2016
- 2016-04-22 WO PCT/CN2016/080079 patent/WO2016173471A1/en active Application Filing
- 2016-04-25 TW TW105112858A patent/TW201701496A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2016173471A1 (en) | 2016-11-03 |
| CN104795469A (en) | 2015-07-22 |
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