CN104772008B - 用于气体回收和再利用的系统和方法 - Google Patents
用于气体回收和再利用的系统和方法 Download PDFInfo
- Publication number
- CN104772008B CN104772008B CN201510017698.2A CN201510017698A CN104772008B CN 104772008 B CN104772008 B CN 104772008B CN 201510017698 A CN201510017698 A CN 201510017698A CN 104772008 B CN104772008 B CN 104772008B
- Authority
- CN
- China
- Prior art keywords
- process gas
- gas
- concentration
- recovery
- production
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 229
- 238000011084 recovery Methods 0.000 title claims description 28
- 239000007789 gas Substances 0.000 claims abstract description 179
- 238000004519 manufacturing process Methods 0.000 claims abstract description 82
- 229910052734 helium Inorganic materials 0.000 claims abstract description 26
- 239000001307 helium Substances 0.000 claims abstract description 23
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 23
- 238000004891 communication Methods 0.000 claims description 28
- 238000012545 processing Methods 0.000 claims description 14
- 238000000746 purification Methods 0.000 claims description 14
- 238000003860 storage Methods 0.000 claims description 6
- 239000007795 chemical reaction product Substances 0.000 claims description 5
- 239000012530 fluid Substances 0.000 claims description 4
- 238000007906 compression Methods 0.000 claims description 3
- 230000006835 compression Effects 0.000 claims description 3
- 229910052754 neon Inorganic materials 0.000 claims description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims description 2
- 238000003754 machining Methods 0.000 claims 2
- 239000003638 chemical reducing agent Substances 0.000 claims 1
- 239000002699 waste material Substances 0.000 abstract description 8
- 238000004064 recycling Methods 0.000 abstract description 4
- -1 but not limited to Substances 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 3
- 238000010926 purge Methods 0.000 description 17
- 238000011282 treatment Methods 0.000 description 10
- 239000012467 final product Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000012528 membrane Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000036571 hydration Effects 0.000 description 1
- 238000006703 hydration reaction Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000003345 natural gas Substances 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000003134 recirculating effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B23/00—Noble gases; Compounds thereof
- C01B23/001—Purification or separation processes of noble gases
- C01B23/0036—Physical processing only
- C01B23/0042—Physical processing only by making use of membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
- B01D2053/221—Devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2256/00—Main component in the product gas stream after treatment
- B01D2256/18—Noble gases
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0029—Obtaining noble gases
- C01B2210/0031—Helium
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Treating Waste Gases (AREA)
- Separation Of Gases By Adsorption (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201461926649P | 2014-01-13 | 2014-01-13 | |
| US61/926,649 | 2014-01-13 | ||
| US14/567,353 | 2014-12-11 | ||
| US14/567,353 US9649590B2 (en) | 2014-01-13 | 2014-12-11 | System and method for gas recovery and reuse |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104772008A CN104772008A (zh) | 2015-07-15 |
| CN104772008B true CN104772008B (zh) | 2017-08-18 |
Family
ID=52302144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510017698.2A Active CN104772008B (zh) | 2014-01-13 | 2015-01-13 | 用于气体回收和再利用的系统和方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9649590B2 (https=) |
| EP (1) | EP2893968B1 (https=) |
| JP (1) | JP6224633B2 (https=) |
| KR (1) | KR101713116B1 (https=) |
| CN (1) | CN104772008B (https=) |
| MY (1) | MY172889A (https=) |
| SG (1) | SG10201408623TA (https=) |
| TW (1) | TWI617343B (https=) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10443127B2 (en) * | 2013-11-05 | 2019-10-15 | Taiwan Semiconductor Manufacturing Company Limited | System and method for supplying a precursor for an atomic layer deposition (ALD) process |
| US9675925B2 (en) | 2014-07-25 | 2017-06-13 | Exxonmobil Upstream Research Company | Apparatus and system having a valve assembly and swing adsorption processes related thereto |
| RU2699551C2 (ru) | 2014-11-11 | 2019-09-06 | Эксонмобил Апстрим Рисерч Компани | Высокоемкие структуры и монолиты посредством печати пасты |
| AU2015361102B2 (en) | 2014-12-10 | 2018-09-13 | Exxonmobil Research And Engineering Company | Adsorbent-incorporated polymer fibers in packed bed and fabric contactors, and methods and devices using same |
| AU2015370106B2 (en) | 2014-12-23 | 2019-01-03 | Exxonmobil Upstream Research Company | Structured adsorbent beds, methods of producing the same and uses thereof |
| CA2979870C (en) | 2015-05-15 | 2019-12-03 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes related thereto |
| US9861929B2 (en) | 2015-05-15 | 2018-01-09 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes related thereto |
| US10293298B2 (en) | 2015-09-02 | 2019-05-21 | Exxonmobil Upstream Research Company | Apparatus and system for combined temperature and pressure swing adsorption processes related thereto |
| WO2017039991A1 (en) | 2015-09-02 | 2017-03-09 | Exxonmobil Upstream Research Company | Process and system for swing adsorption using an overhead stream of a demethanizer as purge gas |
| KR102118860B1 (ko) | 2015-10-27 | 2020-06-04 | 엑손모빌 업스트림 리서치 캄파니 | 복수의 밸브들을 갖는 관련 스윙 흡착 공정을 위한 장치 및 시스템 |
| AU2016346798B2 (en) | 2015-10-27 | 2019-11-07 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes related thereto having actively-controlled feed poppet valves and passively controlled product valves |
| EP3368188A1 (en) | 2015-10-27 | 2018-09-05 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes related thereto having a plurality of valves |
| KR20180083911A (ko) | 2015-11-16 | 2018-07-23 | 엑손모빌 업스트림 리서치 캄파니 | 흡착재 및 이산화탄소의 흡착 방법 |
| EP3429727B1 (en) | 2016-03-18 | 2025-02-12 | ExxonMobil Technology and Engineering Company | Apparatus and method for swing adsorption processes |
| US10427089B2 (en) | 2016-05-31 | 2019-10-01 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes |
| RU2716686C1 (ru) | 2016-05-31 | 2020-03-13 | Эксонмобил Апстрим Рисерч Компани | Устройство и система для осуществления процессов короткоцикловой адсорбции |
| US10434458B2 (en) | 2016-08-31 | 2019-10-08 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes related thereto |
| US10603626B2 (en) | 2016-09-01 | 2020-03-31 | Exxonmobil Upstream Research Company | Swing adsorption processes using zeolite structures |
| US10328382B2 (en) | 2016-09-29 | 2019-06-25 | Exxonmobil Upstream Research Company | Apparatus and system for testing swing adsorption processes |
| US10710053B2 (en) | 2016-12-21 | 2020-07-14 | Exxonmobil Upstream Research Company | Self-supporting structures having active materials |
| KR102260066B1 (ko) | 2016-12-21 | 2021-06-04 | 엑손모빌 업스트림 리서치 캄파니 | 발포형 기하구조 및 활물질을 갖는 자체-지지 구조물 |
| WO2019147516A1 (en) | 2018-01-24 | 2019-08-01 | Exxonmobil Upstream Research Company | Apparatus and system for temperature swing adsorption |
| WO2019168628A1 (en) | 2018-02-28 | 2019-09-06 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes |
| US11535207B2 (en) | 2018-11-24 | 2022-12-27 | Change Energy Services | Compressed-gas distribution associated with vehicle |
| US11318410B2 (en) | 2018-12-21 | 2022-05-03 | Exxonmobil Upstream Research Company | Flow modulation systems, apparatus, and methods for cyclical swing adsorption |
| US11557462B2 (en) | 2019-03-13 | 2023-01-17 | Kla Corporation | Collecting and recycling rare gases in semiconductor processing equipment |
| WO2020222932A1 (en) | 2019-04-30 | 2020-11-05 | Exxonmobil Upstream Research Company | Rapid cycle adsorbent bed |
| WO2021071755A1 (en) | 2019-10-07 | 2021-04-15 | Exxonmobil Upstream Research Company | Adsorption processes and systems utilizing step lift control of hydraulically actuated poppet valves |
| US11433346B2 (en) | 2019-10-16 | 2022-09-06 | Exxonmobil Upstream Research Company | Dehydration processes utilizing cationic zeolite RHO |
| EP4265322A1 (en) * | 2022-04-22 | 2023-10-25 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Helium recovery process |
| KR102710602B1 (ko) | 2023-09-01 | 2024-09-27 | 주식회사 에프알디 | 제논 및 크립톤의 분리정제방법 |
| KR102710551B1 (ko) | 2023-09-01 | 2024-09-26 | 주식회사 에프알디 | 흡착칼럼을 이용한 제논 및 크립톤 함유 미정제 혼합가스의 추출방법 |
| KR20250095882A (ko) | 2023-12-20 | 2025-06-27 | 주식회사 에프알디 | 흡착제를 활용한 고순도 크립톤의 분리정제방법 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2189165A (en) * | 1986-04-16 | 1987-10-21 | James Ephraim Lovelock | Method and apparatus for purifying a continuous flow of helium and/or neon gas |
| US4916237A (en) * | 1986-07-08 | 1990-04-10 | American Cyanamid Company | Substituted 1,2,3-thiadiazole-4-thiolates |
| US4857082A (en) | 1988-09-15 | 1989-08-15 | Air Products And Chemicals, Inc. | Membrane unit turn-down control system |
| GB2260854B (en) | 1991-10-22 | 1995-04-05 | British Aerospace | Surface discharge corona plasma cathode assembly |
| US5377491A (en) * | 1992-12-11 | 1995-01-03 | Praxair Technology, Inc. | Coolant recovery process |
| AU714363B2 (en) * | 1996-06-24 | 1999-12-23 | Corning Incorporated | Helium recycling for optical fiber manufacturing |
| ID17537A (id) | 1996-07-26 | 1998-01-08 | Praxair Technology Inc | Perolehan kembali helium bagi manupaktur serat optis |
| US6089282A (en) * | 1998-05-08 | 2000-07-18 | Aeronex, Inc. | Method for recovery and reuse of gas |
| US6125638A (en) | 1998-08-21 | 2000-10-03 | The Boc Group, Inc. | Optical fiber cooling process |
| AU7185900A (en) | 2000-01-14 | 2001-07-19 | Boc Group, Inc., The | Helium recovery process |
| US6517791B1 (en) * | 2000-12-04 | 2003-02-11 | Praxair Technology, Inc. | System and process for gas recovery |
| BR0211470A (pt) | 2001-07-31 | 2004-08-17 | Praxair Technology Inc | Sistema de reciclagem de gás, e, processo para a purificação e a reciclagem de um gás |
| WO2003011431A1 (en) | 2001-07-31 | 2003-02-13 | Praxair Technology, Inc. | Helium recovery |
| US7261763B2 (en) | 2003-07-17 | 2007-08-28 | The Boc Group, Inc. | Method for the recovery and recycle of helium and chlorine |
| JP4652860B2 (ja) * | 2004-04-27 | 2011-03-16 | 大陽日酸株式会社 | クリプトン又はキセノンの回収方法 |
| JP2007019052A (ja) | 2005-07-05 | 2007-01-25 | Sharp Corp | 窒化物半導体製造装置および窒化物半導体素子 |
| US20070221065A1 (en) | 2006-03-23 | 2007-09-27 | Adisorn Aroonwilas | Heat recovery gas absorption process |
| JP5202836B2 (ja) * | 2006-12-01 | 2013-06-05 | 日本エア・リキード株式会社 | キセノンの回収システムおよび回収装置 |
| KR20090080609A (ko) * | 2008-01-22 | 2009-07-27 | 삼성전기주식회사 | 양면 발광 소자 패키지 및 그 제조 방법 |
| US8118914B2 (en) | 2008-09-05 | 2012-02-21 | Alstom Technology Ltd. | Solid materials and method for CO2 removal from gas stream |
| US8444749B2 (en) | 2009-06-10 | 2013-05-21 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Method and system for membrane-based gas recovery |
| US8308854B2 (en) * | 2009-12-15 | 2012-11-13 | Thermo Finnigan Llc | Helium reclamation systems and methods for a gas chromatograph |
| US8591634B2 (en) * | 2010-01-28 | 2013-11-26 | Air Products And Chemicals, Inc. | Method and equipment for selectively collecting process effluent |
| GB2477322B (en) * | 2010-02-01 | 2015-10-21 | Gas Recovery & Recycle Ltd | Inert gas recovery system |
| CN203048598U (zh) * | 2013-01-20 | 2013-07-10 | 廊坊黎明气体有限公司 | 一种高纯度氩气净化装置 |
-
2014
- 2014-12-11 US US14/567,353 patent/US9649590B2/en active Active
- 2014-12-23 SG SG10201408623TA patent/SG10201408623TA/en unknown
-
2015
- 2015-01-07 TW TW104100449A patent/TWI617343B/zh active
- 2015-01-08 MY MYPI2015700052A patent/MY172889A/en unknown
- 2015-01-09 EP EP15150696.1A patent/EP2893968B1/en active Active
- 2015-01-09 JP JP2015002878A patent/JP6224633B2/ja active Active
- 2015-01-13 KR KR1020150006021A patent/KR101713116B1/ko active Active
- 2015-01-13 CN CN201510017698.2A patent/CN104772008B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| MY172889A (en) | 2019-12-13 |
| EP2893968B1 (en) | 2021-02-24 |
| TW201526976A (zh) | 2015-07-16 |
| EP2893968A1 (en) | 2015-07-15 |
| US20150196870A1 (en) | 2015-07-16 |
| CN104772008A (zh) | 2015-07-15 |
| KR101713116B1 (ko) | 2017-03-07 |
| TWI617343B (zh) | 2018-03-11 |
| US9649590B2 (en) | 2017-05-16 |
| KR20150084676A (ko) | 2015-07-22 |
| JP6224633B2 (ja) | 2017-11-01 |
| SG10201408623TA (en) | 2015-08-28 |
| JP2015163573A (ja) | 2015-09-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104772008B (zh) | 用于气体回收和再利用的系统和方法 | |
| CN104147892B (zh) | 用于选择性收集过程流出物的方法和设备 | |
| TW409170B (en) | Large quantity supply apparatus for the gas in semiconductor process | |
| EP1455918A2 (en) | Generation, distribution, and use of molecular fluorine within a fabrication facility | |
| KR102236032B1 (ko) | 헬륨 회수장치 | |
| CN104550198B (zh) | 氙回收系统及方法 | |
| CN1553969A (zh) | 整体块、化学输送系统及用于输送超纯化学制品的方法 | |
| CN110410662A (zh) | 一种超高纯气体的钢瓶处理系统及方法 | |
| CN103649661A (zh) | 一种回收供重新使用的六氟化硫的装置和方法 | |
| US20140196664A1 (en) | System and method for tungsten hexafluoride recovery and reuse | |
| JP6375255B2 (ja) | 水素充填設備、及び、水素充填設備での品質管理方法 | |
| CN103771362B (zh) | 光纤制造废氦气在线式纯化系统 | |
| CN114082731B (zh) | 一种电子级正硅酸乙酯返回钢瓶的处理方法及装置 | |
| CN210676247U (zh) | 一种去除超高纯正硅酸乙酯钢瓶中固体颗粒的装置 | |
| CN215240987U (zh) | 一种气体净化系统及手套箱设备 | |
| CN110357053A (zh) | 一种氦气生产系统 | |
| CN210219313U (zh) | 一种钢瓶处理系统 | |
| CN223209233U (zh) | 一种混合废气处理设备及半导体工艺系统 | |
| CN110420943A (zh) | 一种去除超高纯正硅酸乙酯钢瓶中固体颗粒的装置及方法 | |
| CN104587758B (zh) | 一种sf6气体回收充装设备的循环净化系统 | |
| KR102794205B1 (ko) | 막탈기장치에 대한 성능평가방법 | |
| CN202440317U (zh) | 一种带有超纯氨净化器的连接管 | |
| CN106746051A (zh) | 一种超纯水生产系统 | |
| CN121401850A (zh) | 用于特气设备的尾气回收再利用装置、方法及半导体工艺系统 | |
| CN120733510A (zh) | 一种氙气在线回收提纯系统 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| EXSB | Decision made by sipo to initiate substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20170606 Address after: Arizona, USA Applicant after: Versum Materials US, LLC Address before: American Pennsylvania Applicant before: Air Products and Chemicals, Inc. |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant |