CN104768868B - 超疏油表面和制备其的方法 - Google Patents

超疏油表面和制备其的方法 Download PDF

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Publication number
CN104768868B
CN104768868B CN201380042768.9A CN201380042768A CN104768868B CN 104768868 B CN104768868 B CN 104768868B CN 201380042768 A CN201380042768 A CN 201380042768A CN 104768868 B CN104768868 B CN 104768868B
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CN
China
Prior art keywords
substrate
article
photoresist
nanoparticles
pillars
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201380042768.9A
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English (en)
Chinese (zh)
Other versions
CN104768868A (zh
Inventor
杨军
李庭杰
马克西姆·帕利
王晓龙
纳塔莉·苏汉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Western Ontario
Arlanxeo Canada Inc
Original Assignee
University of Western Ontario
Lanxess Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Western Ontario, Lanxess Inc filed Critical University of Western Ontario
Publication of CN104768868A publication Critical patent/CN104768868A/zh
Application granted granted Critical
Publication of CN104768868B publication Critical patent/CN104768868B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0037—Production of three-dimensional images
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00206—Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00031—Regular or irregular arrays of nanoscale structures, e.g. etch mask layer
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B17/00—Methods preventing fouling
    • B08B17/02—Preventing deposition of fouling or of dust
    • B08B17/06—Preventing deposition of fouling or of dust by giving articles subject to fouling a special shape or arrangement
    • B08B17/065—Preventing deposition of fouling or of dust by giving articles subject to fouling a special shape or arrangement the surface having a microscopic surface pattern to achieve the same effect as a lotus flower
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0361—Tips, pillars
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/76—Hydrophobic and oleophobic coatings
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G03F7/2024—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure of the already developed image
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y10T428/24372—Particulate matter
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y10T428/24372—Particulate matter
    • Y10T428/24405—Polymer or resin [e.g., natural or synthetic rubber, etc.]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Health & Medical Sciences (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Micromachines (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
CN201380042768.9A 2012-06-18 2013-06-18 超疏油表面和制备其的方法 Expired - Fee Related CN104768868B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261661035P 2012-06-18 2012-06-18
US61/661,035 2012-06-18
PCT/CA2013/000583 WO2013188958A1 (en) 2012-06-18 2013-06-18 Superoleophobic surfaces and methods of making same

Publications (2)

Publication Number Publication Date
CN104768868A CN104768868A (zh) 2015-07-08
CN104768868B true CN104768868B (zh) 2017-09-12

Family

ID=49767968

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380042768.9A Expired - Fee Related CN104768868B (zh) 2012-06-18 2013-06-18 超疏油表面和制备其的方法

Country Status (8)

Country Link
US (1) US9442375B2 (enExample)
EP (1) EP2861525A4 (enExample)
JP (1) JP6297544B2 (enExample)
CN (1) CN104768868B (enExample)
CA (1) CA2877244C (enExample)
SA (1) SA113340656B1 (enExample)
TW (1) TWI632430B (enExample)
WO (1) WO2013188958A1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015048504A2 (en) 2013-09-27 2015-04-02 The Regents Of The University Of California Liquid-repellent surfaces made of any materials
US9976039B1 (en) * 2013-10-04 2018-05-22 Hrl Laboratories, Llc Surface-structured coatings
WO2016060723A2 (en) * 2014-07-25 2016-04-21 University Of Florida Research Foundation, Inc. Durable superhydrophobic surfaces
EP3178889A1 (en) * 2015-12-11 2017-06-14 Lanxess Inc. Elastomeric coatings
US10487403B2 (en) * 2016-12-13 2019-11-26 Silcotek Corp Fluoro-containing thermal chemical vapor deposition process and article
EP3539887B1 (en) * 2018-03-16 2021-05-26 Schott AG Hollow body, in particular for packaging a pharmaceutical composition, having a layer of glass and a surface region with a contact angle for wetting with water
CN109292730B (zh) * 2018-09-03 2020-07-24 山东科技大学 一种超滑表面的制备方法
CN110065925B (zh) * 2019-03-22 2021-10-22 中国科学院化学研究所 微纳材料自组装的方法和基板与应用
US11473010B2 (en) 2019-08-22 2022-10-18 Saudi Arabian Oil Company Nanoparticle coated proppants and methods of making and use thereof
CN111003685A (zh) * 2019-12-12 2020-04-14 无锡物联网创新中心有限公司 一种宽光谱极低透射结构及其制备工艺
EP3839000A1 (en) 2019-12-20 2021-06-23 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. A liquid repellent fibrillar dry adhesive material and a method of producing the same
CN113184802B (zh) * 2021-05-20 2023-10-03 西安交通大学 一种阶梯状环形超疏水槽的制备方法
TWI775589B (zh) * 2021-09-03 2022-08-21 國立臺灣科技大學 用於三維列印的樹脂槽底板

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010022107A2 (en) * 2008-08-18 2010-02-25 The Regents Of The University Of California Nanostructured superhydrophobic, superoleophobic and/or superomniphobic coatings, methods for fabrication, and applications thereof
CN102140218A (zh) * 2010-01-28 2011-08-03 中国科学院化学研究所 仿生结构的超疏油的水下自清洁的聚合物复合膜及其制法
CN102239224A (zh) * 2008-07-02 2011-11-09 微粉公司 用于制备耐用疏水和/或疏油表面的组合物和方法
CN102311672A (zh) * 2011-09-16 2012-01-11 无锡市顺业科技有限公司 一种超疏水导电涂层及其加工方法
WO2012064745A2 (en) * 2010-11-08 2012-05-18 University Of Florida Research Foundation, Inc. Articles having superhydrophobic and oleophobic surfaces

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US4882245A (en) 1985-10-28 1989-11-21 International Business Machines Corporation Photoresist composition and printed circuit boards and packages made therewith
WO2009009185A2 (en) * 2007-05-09 2009-01-15 Massachusetts Institute Of Technology Tunable surfaces
US20100304086A1 (en) * 2009-05-29 2010-12-02 Alain Robert Emile Carre Super non-wetting, anti-fingerprinting coatings for glass
WO2012087352A2 (en) * 2010-12-20 2012-06-28 The Regents Of The University Of California Superhydrophobic and superoleophobic nanosurfaces
EP2681259A4 (en) * 2011-02-28 2018-02-21 Research Foundation Of The City University Of New York Polymers having superhydrophobic surfaces

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102239224A (zh) * 2008-07-02 2011-11-09 微粉公司 用于制备耐用疏水和/或疏油表面的组合物和方法
WO2010022107A2 (en) * 2008-08-18 2010-02-25 The Regents Of The University Of California Nanostructured superhydrophobic, superoleophobic and/or superomniphobic coatings, methods for fabrication, and applications thereof
US20110229667A1 (en) * 2008-08-18 2011-09-22 The Regents Of The University Of California Nanostructured superhydrophobic, superoleophobic and/or superomniphobic coatings, methods for fabrication, and applications thereof
CN102140218A (zh) * 2010-01-28 2011-08-03 中国科学院化学研究所 仿生结构的超疏油的水下自清洁的聚合物复合膜及其制法
WO2012064745A2 (en) * 2010-11-08 2012-05-18 University Of Florida Research Foundation, Inc. Articles having superhydrophobic and oleophobic surfaces
CN102311672A (zh) * 2011-09-16 2012-01-11 无锡市顺业科技有限公司 一种超疏水导电涂层及其加工方法

Non-Patent Citations (2)

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Conformal ZnO nanocomposite coatings on micro-patterned surfaces for superhydrophobicity;Adam Steele et al.;《Thin Solid Films》;20100330;全文 *
Surface Microfluidics Fabricated by Superhydrophobic Nanocomposite Photoresist;Lingfei Hong;《IEEE》;20101231;第421页左栏第2段至右栏最后1段，图1-3 *

Also Published As

Publication number Publication date
EP2861525A1 (en) 2015-04-22
WO2013188958A1 (en) 2013-12-27
TW201413384A (zh) 2014-04-01
CA2877244A1 (en) 2013-12-27
US9442375B2 (en) 2016-09-13
SA113340656B1 (ar) 2016-06-15
JP6297544B2 (ja) 2018-03-20
TWI632430B (zh) 2018-08-11
CN104768868A (zh) 2015-07-08
US20150153642A1 (en) 2015-06-04
JP2015523227A (ja) 2015-08-13
CA2877244C (en) 2022-07-12
EP2861525A4 (en) 2015-08-05

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Granted publication date: 20170912