CN104684686A - 具有精确成形特征部的研磨元件、用其制成的研磨制品及其制造方法 - Google Patents

具有精确成形特征部的研磨元件、用其制成的研磨制品及其制造方法 Download PDF

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Publication number
CN104684686A
CN104684686A CN201380040394.7A CN201380040394A CN104684686A CN 104684686 A CN104684686 A CN 104684686A CN 201380040394 A CN201380040394 A CN 201380040394A CN 104684686 A CN104684686 A CN 104684686A
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CN
China
Prior art keywords
major surface
abrasive
diamond
features
grinding element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201380040394.7A
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English (en)
Chinese (zh)
Inventor
D·K·勒胡
N·O·珊蒂
谢俊清
K·R·布雷舍
V·W·内林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
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3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Priority to CN202211322368.0A priority Critical patent/CN115625629A/zh
Publication of CN104684686A publication Critical patent/CN104684686A/zh
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
    • B24D3/18—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings for porous or cellular structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Carbon And Carbon Compounds (AREA)
CN201380040394.7A 2012-08-02 2013-07-31 具有精确成形特征部的研磨元件、用其制成的研磨制品及其制造方法 Pending CN104684686A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202211322368.0A CN115625629A (zh) 2012-08-02 2013-07-31 具有精确成形特征部的研磨元件、用其制成的研磨制品及其制造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261678665P 2012-08-02 2012-08-02
US61/678,665 2012-08-02
PCT/US2013/052828 WO2014022462A1 (en) 2012-08-02 2013-07-31 Abrasive elements with precisely shaped features, abrasive articles fabricated therefrom and methods of making thereof

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN202211322368.0A Division CN115625629A (zh) 2012-08-02 2013-07-31 具有精确成形特征部的研磨元件、用其制成的研磨制品及其制造方法

Publications (1)

Publication Number Publication Date
CN104684686A true CN104684686A (zh) 2015-06-03

Family

ID=50028490

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201380040394.7A Pending CN104684686A (zh) 2012-08-02 2013-07-31 具有精确成形特征部的研磨元件、用其制成的研磨制品及其制造方法
CN202211322368.0A Pending CN115625629A (zh) 2012-08-02 2013-07-31 具有精确成形特征部的研磨元件、用其制成的研磨制品及其制造方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN202211322368.0A Pending CN115625629A (zh) 2012-08-02 2013-07-31 具有精确成形特征部的研磨元件、用其制成的研磨制品及其制造方法

Country Status (8)

Country Link
US (1) US20150224625A1 (https=)
EP (1) EP2879836B1 (https=)
JP (2) JP2015530265A (https=)
KR (1) KR20150039795A (https=)
CN (2) CN104684686A (https=)
SG (1) SG11201500713PA (https=)
TW (1) TWI660816B (https=)
WO (1) WO2014022462A1 (https=)

Cited By (2)

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CN113439010A (zh) * 2019-02-13 2021-09-24 3M创新有限公司 具有精确成形特征部的磨料元件、用其制成的磨料制品及其制造方法
CN115956064A (zh) * 2020-09-07 2023-04-11 日本碍子株式会社 耐火材料

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WO2012092590A2 (en) 2010-12-31 2012-07-05 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
CN108262695A (zh) 2011-06-30 2018-07-10 圣戈本陶瓷及塑料股份有限公司 包括氮化硅磨粒的磨料制品
CN103764349B (zh) 2011-06-30 2017-06-09 圣戈本陶瓷及塑料股份有限公司 液相烧结碳化硅研磨颗粒
EP2760639B1 (en) 2011-09-26 2021-01-13 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles including abrasive particulate materials, coated abrasives using the abrasive particulate materials and methods of forming
EP2797716B1 (en) 2011-12-30 2021-02-17 Saint-Gobain Ceramics & Plastics, Inc. Composite shaped abrasive particles and method of forming same
KR102074138B1 (ko) 2011-12-30 2020-02-07 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 형상화 연마입자 및 이의 형성방법
EP3705177A1 (en) 2012-01-10 2020-09-09 Saint-Gobain Ceramics & Plastics Inc. Abrasive particles having complex shapes and methods of forming same
WO2013106602A1 (en) 2012-01-10 2013-07-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
WO2013149209A1 (en) 2012-03-30 2013-10-03 Saint-Gobain Abrasives, Inc. Abrasive products having fibrillated fibers
KR102534897B1 (ko) 2012-05-23 2023-05-30 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 형상화 연마입자들 및 이의 형성방법
US10106714B2 (en) 2012-06-29 2018-10-23 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
JP6715006B2 (ja) 2012-08-02 2020-07-01 スリーエム イノベイティブ プロパティズ カンパニー 精密に成形された構造部を有する研磨物品及びその作製方法
SG11201500800XA (en) 2012-08-02 2015-04-29 3M Innovative Properties Co Abrasive element precursor with precisely shaped features and method of making thereof
KR101736085B1 (ko) 2012-10-15 2017-05-16 생-고뱅 어브레이시브즈, 인코포레이티드 특정한 형태들을 가진 연마 입자들 및 이러한 입자들을 형성하는 방법들
US9074119B2 (en) 2012-12-31 2015-07-07 Saint-Gobain Ceramics & Plastics, Inc. Particulate materials and methods of forming same
EP2969394B1 (en) * 2013-03-12 2020-08-05 3M Innovative Properties Company Bonded abrasive article
CN105073343B (zh) 2013-03-29 2017-11-03 圣戈班磨料磨具有限公司 具有特定形状的磨粒、形成这种粒子的方法及其用途
TW201502263A (zh) 2013-06-28 2015-01-16 Saint Gobain Ceramics 包含成形研磨粒子之研磨物品
CN105764653B (zh) 2013-09-30 2020-09-11 圣戈本陶瓷及塑料股份有限公司 成形磨粒及其形成方法
EP3089851B1 (en) 2013-12-31 2019-02-06 Saint-Gobain Abrasives, Inc. Abrasive article including shaped abrasive particles
US9771507B2 (en) 2014-01-31 2017-09-26 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle including dopant material and method of forming same
WO2015160855A1 (en) 2014-04-14 2015-10-22 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
MX394114B (es) 2014-04-14 2025-03-24 Saint Gobain Ceramics Articulo abrasivo que incluye particulas abrasivas conformadas.
US9902045B2 (en) 2014-05-30 2018-02-27 Saint-Gobain Abrasives, Inc. Method of using an abrasive article including shaped abrasive particles
US20160144477A1 (en) * 2014-11-21 2016-05-26 Diane Scott Coated compressive subpad for chemical mechanical polishing
US9707529B2 (en) 2014-12-23 2017-07-18 Saint-Gobain Ceramics & Plastics, Inc. Composite shaped abrasive particles and method of forming same
US9914864B2 (en) 2014-12-23 2018-03-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and method of forming same
US9676981B2 (en) 2014-12-24 2017-06-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle fractions and method of forming same
CN116967949A (zh) 2015-03-31 2023-10-31 圣戈班磨料磨具有限公司 固定磨料制品和其形成方法
TWI634200B (zh) 2015-03-31 2018-09-01 聖高拜磨料有限公司 固定磨料物品及其形成方法
US10711171B2 (en) 2015-06-11 2020-07-14 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
CN121249321A (zh) 2016-05-10 2026-01-02 圣戈本陶瓷及塑料股份有限公司 磨料颗粒及其形成方法
US11718774B2 (en) 2016-05-10 2023-08-08 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles and methods of forming same
TWI621502B (zh) * 2016-08-18 2018-04-21 中國砂輪企業股份有限公司 Double chemical mechanical polishing trimming system and method thereof
US11230653B2 (en) 2016-09-29 2022-01-25 Saint-Gobain Abrasives, Inc. Fixed abrasive articles and methods of forming same
US10759024B2 (en) 2017-01-31 2020-09-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
US10563105B2 (en) 2017-01-31 2020-02-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
WO2018236989A1 (en) 2017-06-21 2018-12-27 Saint-Gobain Ceramics & Plastics, Inc. Particulate materials and methods of forming same
WO2019012388A1 (en) * 2017-07-11 2019-01-17 3M Innovative Properties Company ABRASIVE ARTICLES COMPRISING CONFORMABLE COATINGS AND POLISHING SYSTEM COMPRISING THE SAME
WO2019012389A1 (en) 2017-07-11 2019-01-17 3M Innovative Properties Company ABRASIVE ARTICLES COMPRISING ADAPTABLE COATINGS AND POLISHING SYSTEM MANUFACTURED THEREFROM
WO2021133888A1 (en) 2019-12-27 2021-07-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles and methods of forming same
WO2021133876A1 (en) 2019-12-27 2021-07-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles and methods of forming same
US11926019B2 (en) 2019-12-27 2024-03-12 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles and methods of forming same
TWI738304B (zh) * 2020-04-23 2021-09-01 台灣積體電路製造股份有限公司 半導體晶圓加工方法及清潔刷頭
CN111546247B (zh) * 2020-04-30 2022-03-25 郑州力弘超硬材料有限公司 一种用于光纤插针的金刚石磨具低温陶瓷结合剂及其制备方法
US11919115B2 (en) * 2021-10-13 2024-03-05 Dalian University Of Technology Flexible dot matrix bonding apparatus and adaptive clamping method for disk-type planar component
US12508688B2 (en) 2021-12-30 2025-12-30 Saint-Gobain Abrasives, Inc. Abrasive articles and methods of forming same
CN118541241A (zh) 2021-12-30 2024-08-23 圣戈班磨料磨具有限公司 磨料制品及其形成方法
KR20240148817A (ko) 2021-12-30 2024-10-11 세인트-고바인 아브라시브즈 인크. 연마 물품 및 이의 형성 방법
TWI856689B (zh) * 2023-06-07 2024-09-21 吉而特科技股份有限公司 循環再使用的研磨裝置

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Also Published As

Publication number Publication date
CN115625629A (zh) 2023-01-20
SG11201500713PA (en) 2015-02-27
TWI660816B (zh) 2019-06-01
JP2015530265A (ja) 2015-10-15
EP2879836A4 (en) 2016-05-25
EP2879836B1 (en) 2019-11-13
EP2879836A1 (en) 2015-06-10
TW201410391A (zh) 2014-03-16
KR20150039795A (ko) 2015-04-13
WO2014022462A1 (en) 2014-02-06
JP2019063989A (ja) 2019-04-25
US20150224625A1 (en) 2015-08-13

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Application publication date: 20150603

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