CN104678714B - 定位装置、光刻装置和物品制造方法 - Google Patents

定位装置、光刻装置和物品制造方法 Download PDF

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Publication number
CN104678714B
CN104678714B CN201410707257.0A CN201410707257A CN104678714B CN 104678714 B CN104678714 B CN 104678714B CN 201410707257 A CN201410707257 A CN 201410707257A CN 104678714 B CN104678714 B CN 104678714B
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China
Prior art keywords
measuring device
set value
moving body
information
control
Prior art date
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CN201410707257.0A
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English (en)
Chinese (zh)
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CN104678714A (zh
Inventor
山田雅教
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Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN104678714A publication Critical patent/CN104678714A/zh
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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G03F7/70725—Stages control
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S101/00—Printing
    • Y10S101/36—Means for registering or alignment of print plates on print press structure

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CN201410707257.0A 2013-11-29 2014-11-28 定位装置、光刻装置和物品制造方法 Active CN104678714B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013247124A JP6109049B2 (ja) 2013-11-29 2013-11-29 処理装置、位置決め装置の制御方法、物品の製造方法
JP2013-247124 2013-11-29

Publications (2)

Publication Number Publication Date
CN104678714A CN104678714A (zh) 2015-06-03
CN104678714B true CN104678714B (zh) 2018-07-10

Family

ID=53265218

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410707257.0A Active CN104678714B (zh) 2013-11-29 2014-11-28 定位装置、光刻装置和物品制造方法

Country Status (4)

Country Link
US (1) US9523569B2 (https=)
JP (1) JP6109049B2 (https=)
KR (1) KR101781253B1 (https=)
CN (1) CN104678714B (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6806509B2 (ja) * 2016-09-15 2021-01-06 キヤノン株式会社 露光装置及び物品の製造方法
CN108121166B (zh) * 2016-11-30 2020-01-24 上海微电子装备（集团）股份有限公司 一种主动吸振器及微动台
JP6338647B2 (ja) * 2016-12-21 2018-06-06 キヤノン株式会社 パターニング装置、位置決め装置の制御方法、物品の製造方法
CN107728435B (zh) * 2017-11-14 2020-03-27 扬州扬杰电子科技股份有限公司 一种硅晶片光刻曝光方法
CN108326637A (zh) * 2018-02-09 2018-07-27 江苏瑞苏科技有限公司 一种cnc高速加工中心用传动装置
CN113029009B (zh) * 2021-04-30 2022-08-02 高速铁路建造技术国家工程实验室 一种双视角视觉位移测量系统及方法
CN116934845B (zh) * 2023-07-05 2025-09-16 中国电信股份有限公司技术创新中心 定位方法、装置、设备、系统、存储介质和程序产品

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3762307B2 (ja) * 2001-02-15 2006-04-05 キヤノン株式会社 レーザ干渉干渉計システムを含む露光装置
JP3826042B2 (ja) * 2002-01-30 2006-09-27 キヤノン株式会社 ステージ装置、それを用いた半導体露光装置および位置計測方法
JP3907497B2 (ja) 2002-03-01 2007-04-18 キヤノン株式会社 位置決め装置及びその制御方法、並びに露光装置、並びにその制御方法により制御される露光装置により半導体デバイスを製造する製造方法
JP2004140290A (ja) * 2002-10-21 2004-05-13 Canon Inc ステージ装置
JP2005123255A (ja) 2003-10-14 2005-05-12 Canon Inc 位置決め装置
JP4429037B2 (ja) * 2004-02-27 2010-03-10 キヤノン株式会社 ステージ装置及びその制御方法
JP2006222312A (ja) 2005-02-10 2006-08-24 Canon Inc ステージ制御装置及びその方法、ステージ装置並びに露光装置
TWI605491B (zh) 2006-01-19 2017-11-11 尼康股份有限公司 曝光裝置及曝光方法、以及元件製造方法
KR101356270B1 (ko) 2006-02-21 2014-01-28 가부시키가이샤 니콘 패턴 형성 장치, 마크 검출 장치, 노광 장치, 패턴 형성 방법, 노광 방법 및 디바이스 제조 방법
TWI622084B (zh) * 2006-09-01 2018-04-21 尼康股份有限公司 Mobile body driving method, moving body driving system, pattern forming method and device, exposure method and device, component manufacturing method, and correction method
JP2008108906A (ja) * 2006-10-25 2008-05-08 Canon Inc 位置決め装置
US8547527B2 (en) * 2007-07-24 2013-10-01 Nikon Corporation Movable body drive method and movable body drive system, pattern formation method and pattern formation apparatus, and device manufacturing method
JP2010034331A (ja) * 2008-07-29 2010-02-12 Canon Inc 露光装置およびデバイス製造方法

Also Published As

Publication number Publication date
CN104678714A (zh) 2015-06-03
US20150153655A1 (en) 2015-06-04
KR20150063000A (ko) 2015-06-08
US9523569B2 (en) 2016-12-20
JP2015106606A (ja) 2015-06-08
KR101781253B1 (ko) 2017-10-10
JP6109049B2 (ja) 2017-04-05

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