CN104588353B - 大尺寸kdp晶体表面磁-射流清洗装置及清洗工艺 - Google Patents
大尺寸kdp晶体表面磁-射流清洗装置及清洗工艺 Download PDFInfo
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- CN104588353B CN104588353B CN201510020153.7A CN201510020153A CN104588353B CN 104588353 B CN104588353 B CN 104588353B CN 201510020153 A CN201510020153 A CN 201510020153A CN 104588353 B CN104588353 B CN 104588353B
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- crystal
- kdp
- rinser
- cleaning
- plane
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Detergent Compositions (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
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CN201510020153.7A CN104588353B (zh) | 2015-01-15 | 2015-01-15 | 大尺寸kdp晶体表面磁-射流清洗装置及清洗工艺 |
Applications Claiming Priority (1)
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CN201510020153.7A CN104588353B (zh) | 2015-01-15 | 2015-01-15 | 大尺寸kdp晶体表面磁-射流清洗装置及清洗工艺 |
Publications (2)
Publication Number | Publication Date |
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CN104588353A CN104588353A (zh) | 2015-05-06 |
CN104588353B true CN104588353B (zh) | 2016-06-22 |
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CN201510020153.7A Expired - Fee Related CN104588353B (zh) | 2015-01-15 | 2015-01-15 | 大尺寸kdp晶体表面磁-射流清洗装置及清洗工艺 |
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CN (1) | CN104588353B (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105252375A (zh) * | 2015-10-14 | 2016-01-20 | 中国人民解放军国防科学技术大学 | 一种离子束弹性域刻蚀提升激光损伤阈值的方法 |
CN106757346B (zh) * | 2016-12-19 | 2019-10-22 | 山东大学 | 一种保护水溶液生长晶体表面台阶的方法 |
CN106944884B (zh) * | 2017-02-09 | 2018-04-13 | 同济大学 | 一种氟化钙晶体表面清洗方法 |
CN106862134A (zh) * | 2017-02-20 | 2017-06-20 | 中国科学院长春光学精密机械与物理研究所 | 一种大口径反射镜清洗设备 |
CN107416786A (zh) * | 2017-06-02 | 2017-12-01 | 中国工程物理研究院机械制造工艺研究所 | 一种用于kdp晶体的含水有机清洗液 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5749771A (en) * | 1994-02-22 | 1998-05-12 | Nec Corporation | Polishing apparatus for finishing semiconductor wafer at high polishing rate under economical running cost |
CN101310922A (zh) * | 2008-02-29 | 2008-11-26 | 哈尔滨工业大学 | 磷酸二氢钾晶体潮解抛光方法 |
CN103014645A (zh) * | 2012-12-26 | 2013-04-03 | 哈尔滨工业大学 | 一种大尺寸磁控溅射镀膜的简易强化方法 |
CN104084849A (zh) * | 2014-06-25 | 2014-10-08 | 中国人民解放军国防科学技术大学 | 易潮解晶体的磁流变抛光方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004063796A (ja) * | 2002-07-29 | 2004-02-26 | Tatsumo Kk | 平板状角型基板の裏面洗浄装置 |
JP2004319930A (ja) * | 2003-04-21 | 2004-11-11 | Okamoto Machine Tool Works Ltd | 基板用洗浄・乾燥装置 |
-
2015
- 2015-01-15 CN CN201510020153.7A patent/CN104588353B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5749771A (en) * | 1994-02-22 | 1998-05-12 | Nec Corporation | Polishing apparatus for finishing semiconductor wafer at high polishing rate under economical running cost |
CN101310922A (zh) * | 2008-02-29 | 2008-11-26 | 哈尔滨工业大学 | 磷酸二氢钾晶体潮解抛光方法 |
CN103014645A (zh) * | 2012-12-26 | 2013-04-03 | 哈尔滨工业大学 | 一种大尺寸磁控溅射镀膜的简易强化方法 |
CN104084849A (zh) * | 2014-06-25 | 2014-10-08 | 中国人民解放军国防科学技术大学 | 易潮解晶体的磁流变抛光方法 |
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Publication number | Publication date |
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CN104588353A (zh) | 2015-05-06 |
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C53 | Correction of patent for invention or patent application | ||
CB03 | Change of inventor or designer information |
Inventor after: Liu Zengwen Inventor after: Xu Guoqiang Inventor after: Huang Chuanzhen Inventor after: Wang Jun Inventor after: Zhu Hongtao Inventor after: Liu Hanlian Inventor before: Liu Zengwen Inventor before: Huang Chuanzhen Inventor before: Wang Jun Inventor before: Zhu Hongtao Inventor before: Liu Hanlian Inventor before: Xu Guoqiang |
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COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: LIU ZENGWEN HUANG CHUANZHEN WANG JUN ZHU HONGTAO LIU HANLIAN XU GUOQIANG TO: LIU ZENGWEN XU GUOQIANG HUANG CHUANZHEN WANG JUN ZHU HONGTAO LIU HANLIAN |
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