CN104583763B - 传感器元件及其制备和使用方法 - Google Patents

传感器元件及其制备和使用方法 Download PDF

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Publication number
CN104583763B
CN104583763B CN201380033684.9A CN201380033684A CN104583763B CN 104583763 B CN104583763 B CN 104583763B CN 201380033684 A CN201380033684 A CN 201380033684A CN 104583763 B CN104583763 B CN 104583763B
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China
Prior art keywords
conductive electrode
conductive
sensor element
carbon
porous dielectric
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Expired - Fee Related
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CN201380033684.9A
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English (en)
Chinese (zh)
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CN104583763A (zh
Inventor
S·H·格里斯卡
K·A·莱温斯基
M·C·帕拉佐托
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3M Innovative Properties Co
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3M Innovative Properties Co
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/228—Circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/226—Construction of measuring vessels; Electrodes therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/0047—Organic compounds
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0062—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
CN201380033684.9A 2012-06-25 2013-06-03 传感器元件及其制备和使用方法 Expired - Fee Related CN104583763B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261663688P 2012-06-25 2012-06-25
US61/663,688 2012-06-25
PCT/US2013/043861 WO2014003979A1 (en) 2012-06-25 2013-06-03 Sensor element, method of making, and method of using the same

Publications (2)

Publication Number Publication Date
CN104583763A CN104583763A (zh) 2015-04-29
CN104583763B true CN104583763B (zh) 2017-03-08

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Family Applications (1)

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CN201380033684.9A Expired - Fee Related CN104583763B (zh) 2012-06-25 2013-06-03 传感器元件及其制备和使用方法

Country Status (6)

Country Link
US (1) US10267758B2 (cg-RX-API-DMAC7.html)
EP (1) EP2864770B1 (cg-RX-API-DMAC7.html)
JP (1) JP6289454B2 (cg-RX-API-DMAC7.html)
KR (1) KR102131314B1 (cg-RX-API-DMAC7.html)
CN (1) CN104583763B (cg-RX-API-DMAC7.html)
WO (1) WO2014003979A1 (cg-RX-API-DMAC7.html)

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CN106716152A (zh) 2014-07-22 2017-05-24 布鲁尔科技公司 薄膜型基于电阻的传感器
WO2016121952A1 (ja) * 2015-01-29 2016-08-04 アラム株式会社 液体センサ
EP3078964B1 (en) * 2015-04-09 2017-05-24 Honeywell International Inc. Relative humidity sensor and method
EP3211408B1 (en) * 2016-02-29 2019-04-10 Honeywell International Inc. Relative humidity sensor and method
US10801985B2 (en) 2016-06-03 2020-10-13 Texas Instruments Incorporated Sensing capacitor with a permeable electrode
TWI601954B (zh) * 2016-09-09 2017-10-11 長庚大學 電容式感濕元件及其使用方法
US11287395B2 (en) 2016-09-09 2022-03-29 Hokuriku Electric Industry Co., Ltd. Capacitive gas sensor
JP2019168289A (ja) * 2018-03-22 2019-10-03 株式会社東芝 ガスセンシング方法、ガスセンサ、及びガスセンシングシステム
GB2583739B (en) 2019-05-07 2022-05-18 Sensorhut Ltd Detection of analytes in gases using porous sorbents
US11828718B2 (en) 2020-05-07 2023-11-28 Electronics And Telecommunications Research Institute Humidity sensor and button device including the same
KR102583269B1 (ko) * 2020-05-07 2023-10-04 한국전자통신연구원 습도 센서 및 그를 포함하는 버튼 장치
US12480556B2 (en) * 2021-04-15 2025-11-25 Korea Advanced Institute Of Science And Technology Composite material capable of measuring bending deformation, spring including the same, and manufacturing method thereof
CN116857785A (zh) * 2023-06-30 2023-10-10 珠海格力节能环保制冷技术研究中心有限公司 一种家用电器、空气净化的控制方法及空气净化控制装置

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KR20140026469A (ko) 2011-04-13 2014-03-05 쓰리엠 이노베이티브 프로퍼티즈 컴파니 일체형 가열을 갖는 센서 요소를 포함하는 증기 센서
CN103492872B (zh) 2011-04-13 2016-04-06 3M创新有限公司 使用吸收性传感器元件的方法
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WO2010075333A2 (en) * 2008-12-23 2010-07-01 3M Innovative Properties Company Organic chemical sensor with microporous organosilicate material
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Also Published As

Publication number Publication date
KR20150023785A (ko) 2015-03-05
EP2864770B1 (en) 2017-09-27
CN104583763A (zh) 2015-04-29
US10267758B2 (en) 2019-04-23
US20150168330A1 (en) 2015-06-18
WO2014003979A1 (en) 2014-01-03
JP6289454B2 (ja) 2018-03-07
JP2015525362A (ja) 2015-09-03
KR102131314B1 (ko) 2020-07-07
EP2864770A1 (en) 2015-04-29

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Granted publication date: 20170308