CN104517687B - 具电磁遮蔽的无镀层铜线及其制造方法 - Google Patents
具电磁遮蔽的无镀层铜线及其制造方法 Download PDFInfo
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- CN104517687B CN104517687B CN201310466029.4A CN201310466029A CN104517687B CN 104517687 B CN104517687 B CN 104517687B CN 201310466029 A CN201310466029 A CN 201310466029A CN 104517687 B CN104517687 B CN 104517687B
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- coating
- alloy layer
- titanium
- copper cash
- gold
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- 239000010949 copper Substances 0.000 title claims abstract description 70
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 63
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 58
- 239000011248 coating agent Substances 0.000 title claims abstract description 43
- 238000000576 coating method Methods 0.000 title claims abstract description 43
- 238000000034 method Methods 0.000 title claims abstract description 40
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 51
- 229910001128 Sn alloy Inorganic materials 0.000 claims abstract description 34
- BLOIXGFLXPCOGW-UHFFFAOYSA-N [Ti].[Sn] Chemical compound [Ti].[Sn] BLOIXGFLXPCOGW-UHFFFAOYSA-N 0.000 claims abstract description 33
- 229910000990 Ni alloy Inorganic materials 0.000 claims abstract description 26
- 239000010931 gold Substances 0.000 claims abstract description 24
- MSNOMDLPLDYDME-UHFFFAOYSA-N gold nickel Chemical compound [Ni].[Au] MSNOMDLPLDYDME-UHFFFAOYSA-N 0.000 claims abstract description 24
- 230000008520 organization Effects 0.000 claims abstract description 16
- 229910052759 nickel Inorganic materials 0.000 claims description 31
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 13
- 229910052737 gold Inorganic materials 0.000 claims description 13
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 12
- 239000010936 titanium Substances 0.000 claims description 12
- 229910052719 titanium Inorganic materials 0.000 claims description 12
- 230000008569 process Effects 0.000 claims description 11
- 238000005259 measurement Methods 0.000 claims description 4
- 229910008487 TiSn Inorganic materials 0.000 abstract description 9
- 230000002500 effect on skin Effects 0.000 abstract description 7
- 239000010410 layer Substances 0.000 description 72
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 38
- 238000012360 testing method Methods 0.000 description 21
- 229910052763 palladium Inorganic materials 0.000 description 19
- 239000004065 semiconductor Substances 0.000 description 9
- 230000007797 corrosion Effects 0.000 description 8
- 238000005260 corrosion Methods 0.000 description 8
- 238000005538 encapsulation Methods 0.000 description 8
- 238000002360 preparation method Methods 0.000 description 8
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 238000007747 plating Methods 0.000 description 7
- 150000003839 salts Chemical class 0.000 description 6
- 239000007921 spray Substances 0.000 description 6
- 229910000881 Cu alloy Inorganic materials 0.000 description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5
- 230000008034 disappearance Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- 238000005987 sulfurization reaction Methods 0.000 description 5
- 239000002344 surface layer Substances 0.000 description 5
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000007613 environmental effect Effects 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 229910052717 sulfur Inorganic materials 0.000 description 4
- 239000011593 sulfur Substances 0.000 description 4
- 239000000654 additive Substances 0.000 description 3
- 230000000996 additive effect Effects 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000005541 medical transmission Effects 0.000 description 3
- 238000012536 packaging technology Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 210000001519 tissue Anatomy 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- 241000218202 Coptis Species 0.000 description 2
- 235000002991 Coptis groenlandica Nutrition 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 210000001198 duodenum Anatomy 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910000765 intermetallic Inorganic materials 0.000 description 2
- 229920002521 macromolecule Polymers 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002940 palladium Chemical class 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000005486 sulfidation Methods 0.000 description 2
- CXWXQJXEFPUFDZ-UHFFFAOYSA-N tetralin Chemical compound C1=CC=C2CCCCC2=C1 CXWXQJXEFPUFDZ-UHFFFAOYSA-N 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001839 endoscopy Methods 0.000 description 1
- 210000002615 epidermis Anatomy 0.000 description 1
- 210000003238 esophagus Anatomy 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- 238000009920 food preservation Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 210000001035 gastrointestinal tract Anatomy 0.000 description 1
- 238000002575 gastroscopy Methods 0.000 description 1
- 238000009940 knitting Methods 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/43—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/43—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
Description
样品 | 盐雾试验 | 硫化处理 | 电磁屏蔽 |
覆(Coated)Pd(100%) | X | X | X |
覆(Coated)Au(100%) | X | X | X |
覆(Coated)99%Au1%Ni | X | X | O |
覆(Coated)97%Au3%Ni | O | O | O |
覆(Coated)94%Au6%Ni | O | O | O |
覆(Coated)55%Au45%Ni | O | O | X |
覆(Coated)10%Au90%Ni | O | O | X |
覆(Coated)Ni(100%) | O | O | X |
样品 | 盐雾试验 | 硫化处理 | 电磁屏蔽 |
覆(Coated)99%Au1%Ni | O | O | O |
覆(Coated)97%Au3%Ni | O | O | O |
覆(Coated)94%Au6%Ni | O | O | O |
覆(Coated)55%Au45%Ni | O | O | X |
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310466029.4A CN104517687B (zh) | 2013-09-30 | 2013-09-30 | 具电磁遮蔽的无镀层铜线及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310466029.4A CN104517687B (zh) | 2013-09-30 | 2013-09-30 | 具电磁遮蔽的无镀层铜线及其制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104517687A CN104517687A (zh) | 2015-04-15 |
CN104517687B true CN104517687B (zh) | 2017-01-04 |
Family
ID=52792865
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310466029.4A Active CN104517687B (zh) | 2013-09-30 | 2013-09-30 | 具电磁遮蔽的无镀层铜线及其制造方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN104517687B (zh) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1575512A (zh) * | 2001-10-23 | 2005-02-02 | 住友电工运泰克株式会社 | 键合线 |
CN101204860A (zh) * | 2007-12-12 | 2008-06-25 | 山东天诺光电材料有限公司 | 一种复合金属的铝箔带及制备方法和用途 |
US7820913B2 (en) * | 2005-01-05 | 2010-10-26 | Nippon Steel Materials Co., Ltd. | Bonding wire for semiconductor device |
TW201326435A (zh) * | 2013-02-19 | 2013-07-01 | Truan-Sheng Lui | 固相擴散反應銅鈀合金線及其製造方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01259541A (ja) * | 1988-04-11 | 1989-10-17 | Kobe Steel Ltd | 複合ボンディングワイヤの製造方法 |
-
2013
- 2013-09-30 CN CN201310466029.4A patent/CN104517687B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1575512A (zh) * | 2001-10-23 | 2005-02-02 | 住友电工运泰克株式会社 | 键合线 |
US7820913B2 (en) * | 2005-01-05 | 2010-10-26 | Nippon Steel Materials Co., Ltd. | Bonding wire for semiconductor device |
CN101204860A (zh) * | 2007-12-12 | 2008-06-25 | 山东天诺光电材料有限公司 | 一种复合金属的铝箔带及制备方法和用途 |
TW201326435A (zh) * | 2013-02-19 | 2013-07-01 | Truan-Sheng Lui | 固相擴散反應銅鈀合金線及其製造方法 |
Also Published As
Publication number | Publication date |
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CN104517687A (zh) | 2015-04-15 |
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C06 | Publication | ||
PB01 | Publication | ||
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SE01 | Entry into force of request for substantive examination | ||
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Effective date of registration: 20201231 Address after: 4th floor, No.20, Lane 22, Daxue Road, Eastern District, Tainan, Taiwan, China Patentee after: Hong Feiyi Address before: Taiwan, Taipei, China Zhongshan District, No. 34 Xingan street, No. 1 Patentee before: Lv Chuansheng Patentee before: Hong Feiyi |
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Effective date of registration: 20210209 Address after: Unit 8, 21 / F, Futura Plaza, 111-113 Haoming street, Kwun Tong, Hong Kong, China Patentee after: Zhuowang International Ltd. Address before: 4th floor, No.20, Lane 22, Daxue Road, Eastern District, Tainan, Taiwan, China Patentee before: Hong Feiyi |
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Effective date of registration: 20210309 Address after: Room 208, New Territories apartment, Pak Shek Kok, Hong Kong Science Park, lakeside phase I phase II, Hong Kong, China Patentee after: JUNMA SCIENCE AND TECHNOLOGY (HONG KONG) Co.,Ltd. Address before: Unit 8, 21 / F, Futura Plaza, 111-113 Haoming street, Kwun Tong, Hong Kong, China Patentee before: Zhuowang International Ltd. |