CN104515880A - Inspecting jig, electrode portion, probe and manufacturing method of inspecting jig - Google Patents
Inspecting jig, electrode portion, probe and manufacturing method of inspecting jig Download PDFInfo
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- CN104515880A CN104515880A CN201410524378.1A CN201410524378A CN104515880A CN 104515880 A CN104515880 A CN 104515880A CN 201410524378 A CN201410524378 A CN 201410524378A CN 104515880 A CN104515880 A CN 104515880A
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- wick
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- 239000000523 sample Substances 0.000 title claims abstract description 308
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 238000001514 detection method Methods 0.000 claims abstract description 64
- 238000000034 method Methods 0.000 claims abstract description 35
- 238000003780 insertion Methods 0.000 claims description 57
- 230000037431 insertion Effects 0.000 claims description 57
- 239000000758 substrate Substances 0.000 claims description 37
- 238000009826 distribution Methods 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 230000009977 dual effect Effects 0.000 claims description 4
- 230000005489 elastic deformation Effects 0.000 claims description 2
- 239000012212 insulator Substances 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 description 16
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 238000007747 plating Methods 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000000470 constituent Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
- G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
The invention provides an inspecting jig which using a four-probe method on tiny detection points and provides constitution with low cost and stable electrical connection. The inspecting jig comprises multiple probes and multiple electrode portions. The probes include a core-shaped probe and a cylindrical probe, wherein the core-shaped probe is electrically connected to the detection point, and the cylindrical probe is arranged on the outer side of the core-shaped probe in a state of being insulated from the core-shaped probe and is electrically connected to the detection point. The electrode portions comprises an inner-cylinder electrode portion and an outer-cylinder electrode portion, wherein the inner-cylinder electrode portion is in contact with the outer circumferential surface of the inserted core-shaped probe to be electrically connected with the core-shaped probe, and the outer-cylinder electrode is configured on the outer side of the inner-cylinder electrode portion in a state of being insulated from the inner-cylinder electrode portion and is electrically connected with the cylindrical probe.
Description
Technical field
The present invention relates to the detection fixture for detecting the wiring graph formed on substrate.
Background technology
In the past, the substrate detection apparatus having and detect substrate wiring graph is known.Substrate detection apparatus is, by the check point of detection with holder contacts substrate, the resistance value measuring wiring closet detects wiring graph.
And the method measuring wiring closet resistance value has four probe method.Four probe method is, by the method for carrying out detecting for contact detection point while of induced current probe and mensuration voltage probe 2 probes.Use four probe method, the electric current flow through between voltage determination probe and check point can be ignored, therefore correctly can measure the voltage between two check points, can in the hope of correct resistance value.
In the past, when using four probe method, the one group of hole (2 holes) formed in arrangement uses the detection fixture being provided with probe respectively.But recently due to the miniaturization of wiring graph, check point diminishes, the required interval, hole arranging probe is just very narrow and small, in process technology, becomes and is difficult to manufacture this kind of detection fixture.
From this viewpoint, in patent documentation 1, disclose the detection fixture that also can use four probe method to this little check point.The probe of described detection fixture has tubular first contact terminal, and is inserted in bar-shaped second contact terminal of the first contact terminal.Use the probe of this dual structure, even if do not form the hole at narrow and small interval, also can obtain the conducting of 2 check points.
And this probe is, in the connecting electrode portion, end, opposition side of check point.Electrode section is by ring-type first electrode section, and be configured in the first electrode section inside and have circular cross section second electrode section form.First contact terminal contacts with the first electrode section, and the second contact terminal contacts with the second electrode section.First electrode section and the second electrode section are connected to the check processing portion performing substrate check processing.
By this formation, also four probe method can be used to very little check point.
But the detection fixture of patent documentation 1, because probe and electrode section are very little, if there is the error in a spot size, the connection that both can not be suitable, becomes electrical connectivity instability.Thus, the detection fixture of patent documentation 1 needs high dimensional accuracy, thus processing charges uprises.The detection fixture of patent documentation 1 is in this, and there is room for improvement for tool.
In addition, in patent documentation 1, if be staggeredly located when assembling etc., may there is the situation of electrical connectivity instability in the first contact terminal and the first electrode section probe, and the second contact terminal and the second electrode section probe just contact between end face respectively.
[prior art document]
[patent documentation 1]
Japanese Patent Publication 2012-154670 publication
Summary of the invention
The present invention completes in view of above situation, and its fundamental purpose is to provide the detection fixture small check point being used to four probe method, provides low cost and the stable formation of electrical connectivity.
According to the first viewpoint of the present invention, provide the detection fixture with following formation.That is, this detection fixture comprises: the plurality of probes of check point on contact substrate; And by plurality of electrodes portion that described probe is electrically connected with the check processing portion carrying out check processing to the distribution that described substrate is formed.Described probe comprises wick-like probe and tubular probe.Described wick-like probe is electrically connected on described check point.Described tubular probe is under the state insulated with described wick-like probe, is configured in the outside of described wick-like probe, and is electrically connected on described check point.Described electrode section has inner core electrode section and outside electrode portion.Described inner core electrode section contacts with the outer peripheral face of the described wick-like probe of insertion, thus is electrically connected on described wick-like probe.Described outside electrode portion is under the state insulated with described inner core electrode section, is configured in the outside of described inner core electrode section, and is electrically connected on described tubular probe.
In described detection fixture, form the tapered portion more attenuated toward front end external diameter in the end of the electrode part side of described wick-like probe better.
In described detection fixture, it is better that the position of the end face of the probe side in described outside electrode portion is close to probe side than the end face of the probe side of described inner core electrode section.
In described detection fixture, the end face of the end face of the electrode part side of described tubular probe and the probe side in described outside electrode portion contacts, thus described tubular probe and the electrical connection of described outside electrode portion are better.
In described detection fixture, there is following formation better.That is, described detection fixture also comprises the electrode section insertion section for inserting described electrode section.Electrode section location division is formed in the end of the probe side in described outside electrode portion.The thickness of described electrode section location division and external diameter are greater than the remainder of the described probe side in described outside electrode portion.By described electrode section location division, described electrode section remains on described electrode section insertion section.
In described detection fixture, described inner core electrode section is better coated with insulator.
In described detection fixture, described tubular probe is formed with the spring of energy elastic deformation with length direction, under the state that described spring reduces, described probe is connected better with described electrode section.
In described detection fixture, there is following formation better.That is, described detection fixture also comprises probe insertion section and probe fixed part.Described probe is inserted in described probe insertion section.Described probe fixed part is that described probe is fixed on described probe insertion section.The external diameter probe positioning portion larger than the remainder of described tubular probe is formed at described tubular probe.Described probe positioning portion and described probe fixed part contact, thus described probe is fixed on described probe insertion section.
In described detection fixture, the configuration space of described probe be less than 100 μm better.
According to second and third viewpoint of the present invention, provide the electrode section identical with described formation and probe.
According to the 4th viewpoint of the present invention, for the manufacture method of described detection fixture, providing package is containing the method for following technique.That is, described manufacture method comprises: probe insertion process and probe technique for fixing.In described probe insertion process, be inserted with described electrode section electrode section insertion section and for insert described probe probe insertion section under the state of overlap, described probe is inserted described probe insertion section, to connect described probe and described electrode section.In described probe technique for fixing, probe fixed part is set, thus is fixed on the described probe inserted in described probe insertion process.
According to the present invention, even if there is skew the position of wick-like probe or inner core electrode section, because wick-like probe is inserted in inner core electrode section (decision position), thus the electrical connection of wick-like probe and inner core electrode section can be guaranteed.In addition, the contact area of inner core electrode section and wick-like probe can be made to increase, therefore can improve the stability of electrical connection.
Even if there is skew the position of wick-like probe or inner core electrode section, by the guiding of tapered portion, wick-like probe is inserted in inner core electrode section, so can improve the stability of the electrical connection of wick-like probe and inner core electrode section.
Outside electrode portion is only had, so the opening of electrode section end can be made larger in the end face of the probe side of electrode section.Therefore, wick-like probe can be guided to inner core electrode section more reliably.
Till the end face in tubular probe and outside electrode portion contacts with each other, wick-like probe is inserted in inner core electrode section, thus can guarantee the electrical connection in tubular probe and outside electrode portion.
Be electrode insertion portion in electrode section insertion section, just can keep this electrode section.In addition, by increasing the thickness in outside electrode portion, the stability of the electrical connection in tubular probe and outside electrode portion can be improved.
Simply to be formed, inner core electrode section and outside electrode portion mutual insulating can be made.
The contact in tubular probe and outside electrode portion can be increased, thus the stability of the electrical connection in tubular probe and outside electrode portion can be improved.
Behind probe electrode insertion portion, use probe fixed part can stationary probe.Therefore, the electrical connection of probe and electrode section can be guaranteed.
When being difficult to be arranged the formation of probe, also four probe method can be used.
Accompanying drawing explanation
Fig. 1 is the key diagram of the substrate detection apparatus briefly showing the detection fixture with the present invention one example.
Fig. 2 A to Fig. 2 C is outboard profile and sectional drawing that probe and constituent element thereof are shown.
Fig. 3 A to Fig. 3 E is outboard profile and sectional drawing that electrode section constituent element is shown.
Fig. 4 A and Fig. 4 B is the outboard profile of electrode section.
Fig. 5 A to Fig. 5 D is the key diagram of the assemble method that detection fixture is shown.
Fig. 6 A to Fig. 6 C is the side cross-sectional view of the connection status that probe and electrode section are shown.
Fig. 7 is the outboard profile of the connection status that electrode section and connector portion are shown.
[description of reference numerals]
1: detect with fixture 2: check processing portion
20: probe 21: wick-like probe
22: insulating wrapped portion 24: tubular probe
25: probe positioning portion 30: electrode section
31: inner core electrode section 32: insulating wrapped portion
34: outside electrode portion 35: insulating wrapped portion
100: substrate detection apparatus
Embodiment
Then, by reference to the accompanying drawings example of the present invention is described.First, with reference to figure 1, the overview of detection fixture 1 and substrate detection apparatus 100 is described.
Substrate detection apparatus 100 performs detection to detected object substrate.Specifically, substrate detection apparatus 100 be ask substrate institute's regular inspection measuring point between resistance value, and detection resistance value and whether conducting etc.In addition, the substrate as detected object not only comprises general printed board, also comprises flexible base, board and multilager base plate etc.
Substrate detection apparatus 100 has detection fixture 1 and check processing portion 2.Four probe method is used, so detection fixture 1 contacts two places at each check point of substrate at this example.As shown in Figure 1, detection fixture 1 has basal part 11, support portion 12, electrode section insertion section 13, probe insertion section 14 and probe fixed head (probe fixed part) 15.
Basal part 11 forms the substrate of detection fixture 1, in its connection support portion, side 12, connects connector portion 40 at opposite side simultaneously.
Support portion 12 is the columnar parts upwards extended from basal part 11.Detection fixture 1 such as has 4 support portions 12.Electrode section insertion section 13 is connected with in the upside of support portion 12.
Electrode section insertion section 13 is the rectangular-shaped parts being formed with numerous through hole.In the through hole electrode insertion portion 30 of electrode section insertion section 13.In addition, electrode section 30 is inserted and is remained on electrode section insertion section 13, and its formation will be aftermentioned.Probe insertion section 14 is connected with in the upside of electrode section insertion section 13.
Probe insertion section 14 is the rectangular-shaped parts position corresponding with the through hole that electrode section insertion section 13 is formed being formed with through hole.Through hole in probe insertion section 14 inserts probe 20.Thus, probe 20 and electrode section 30 are electrically connected.In addition, electrode section insertion section 13 and probe insertion section 14 are not rectangular parallelepipeds, but a plurality of plate-shaped member overlaps and also can.
Probe fixed head 15 is the plate-shaped members position corresponding with the through hole that electrode section insertion section 13 and probe insertion section 14 are formed being formed with through hole.Probe fixed head 15 is the probes 20 (describing in detail will be aftermentioned) being fixedly inserted in probe insertion section 14.
As shown in Figure 1, a part for probe 20 is exposed from probe fixed head 15.Detection fixture 1 makes the contact of these exposed portion at the check point of substrate.From the electric signal that check point obtains, be communicated to electrode section 30 by probe 20.Electrode section 30 be from probe 20 junction to downward-extension, simultaneously directed in forward direction direction (left side of Fig. 1) of basal part 11.Electrode section 30 is electrically connected on the connector portion 40 that basal part 11 is formed.
Connector portion 40 can be electrically connected with electrode section 30, and its inside is formed with distribution simultaneously.Connector portion 40 is connected to check processing portion 2 by these distributions and the electric wire etc. that extends to the outside in connector portion 40.
According to formation as above, check processing portion 2 is electrically connected with substrate.Check processing portion 2 measures voltage on substrate between institute's regular inspection measuring point and electric current to calculate resistance value.Check processing portion 2 judges whether the result calculated meets predetermined specification.
Then, the formation of composition graphs 2 pairs of probes 20 and manufacture method are described.Fig. 2 is outboard profile and sectional drawing that probe 20 and constituent element thereof are shown.In addition, in the explanation of probe 20, as shown in Figure 2, the side being connected to the check point of substrate is called substrate-side, and the side being connected to electrode section 30 is called electrode part side.
As shown in Fig. 2 A to Fig. 2 C, probe 20 is made up of wick-like probe 21 and tubular probe 24.Wick-like probe 21 shown in Fig. 2 A is elongate parts of circular cross section, with have electric conductivity material (such as, gold, copper and nickel etc., below all with) form.Wick-like probe 21 is formed check point contact site 21a, electrode connecting portion 21b and tapered portion 21c.
Check point contact site 21a is the hemispherical part formed in the end of the substrate-side of wick-like probe 21, the part of check point on connection substrate.Check point contact site 21a takes semi-spherical shape, can make the check point of check point contact site 21a suitably connection substrate.Electrode connecting portion 21b is the part formed near the end of electrode part side, for the part in connecting electrode portion 30.Be formed with tapered portion 21c being closer to electrode part side (leading portion side) part compared to electrode connecting portion 21b.Tapered portion 21c more attenuates toward its external diameter of electrode part side.In addition, tapered portion 21c is not limited to the taper of rectilinear form, and the taper of curved shape also can.
In addition, insulating wrapped portion 22 is formed with in the part of wick-like probe 21 except check point contact site 21a and electrode connecting portion 21b.Such as, insulating wrapped portion 22 can be formed with plating.
Tubular probe 24 shown in Fig. 2 B is tubular electroconductive components.Check point contact site 24a, electrode contact 24b, adhesive part 24c and spring 24d is formed at tubular probe 24.Check point contact site 24a is the end of substrate-side, for connecting the part with check point contact site 21a same detection point.Electrode contact 24b is the part formed in the end of electrode part side, for the part in connecting electrode portion 30.
Adhesive part 24c is the part that the central portion on the length direction of tubular probe 24 is formed.Spring 24d is formed in the both sides of adhesive part 24c.Tubular probe 24 is formed with spiral-shaped cutting by spring 24d, has elasticity along its length.
Such as, tubular probe 24 can with following method manufacture.That is, first, electroformed layer and the resist layers such as nickel is formed in the periphery of superfine core.Then, after described resist layer is with spiral-shaped irradiating laser, the resist layer of illuminated portion is eliminated.Then, etch, resist layer is eliminated the electroformed layers such as the nickel of part and eliminates, then eliminate core.
In addition, near the end of the substrate-side of tubular probe 24, the probe positioning portion 25 with insulativity is formed by plating etc. mode.And the external diameter in probe positioning portion 25 is greater than the remainder of tubular probe 24.
Bondings such as shown in Figure 2 C, probe 20 is, inserts wick-like probe 21 in the inside of tubular probe 24, the sticker with epoxy (Epoxy) be by the outside in the inner side of adhesive part 24c and insulating wrapped portion 22 and manufacturing.Insulating wrapped portion 22 is formed, so wick-like probe 21 and both tubular probes 24 are connected under the state of insulation around wick-like probe 21.
Tubular probe 24 has elasticity by spring 24d, and therefore exert pressure to the end of the substrate-side of probe 20, tubular probe 24 can reduce, and as shown in Fig. 6 C described later, can expose check point contact site 21a.Thus, wick-like probe 21 and tubular probe 24 can be made to contact at same detection point simultaneously.In addition, one in wick-like probe 21 and tubular probe 24 is that another is the probe for measuring voltage for the probe for induced current.
Then, with reference to Fig. 3, the formation of electrode section 30 and manufacture method are described.Fig. 3 A to Fig. 3 E is outboard profile and sectional drawing that electrode section 30 constituent element is shown.In addition, in the explanation of electrode section 30, as shown in Fig. 3 A to Fig. 3 E, the side being connected to probe 20 is called probe side, and the side being connected to connector portion 40 is called connector side.
Electrode section 30 is made up of inner core electrode section 31 and outside electrode portion 34.
Inner core electrode section 31 shown in Fig. 3 A be have electric conductivity and reelability cartridge.Inner core electrode section 31 is the same with tubular probe 24, is formed have the parts of electric conductivity around core with plating, then eliminates this core etc. and is formed.In addition, probe connecting portion 31a and connector connection part 31b is formed with in inner core electrode section 31.
Probe connecting portion 31a is the part formed in the end of probe side, is electrically connected with probe 20 (particularly wick-like probe 21).Connector connection part 31b is the part formed in the end of connector side, is connected to connector portion 40.In addition, as shown in Figure 3 B, the part in inner core electrode section 31 except connector connection part 31b is formed with insulating wrapped portion 32.
Outside electrode portion 34 shown in Fig. 3 C be have electric conductivity and reelability cartridge.Outside electrode portion 34 is the same with tubular probe 24 grade, forms the parts with electric conductivity, then eliminate this core and formed around core with plating.In addition, probe connecting portion 34a and connector connection part 34b is formed with in urceolus electrode section 34.Probe connecting portion 34a forms to obtain part in the end of probe side, is electrically connected with probe 20 (particularly tubular probe 24).Connector connection part 34b is the part formed in the end of connector side, is connected to connector portion 40.
In addition, as shown in Figure 3 D, have in the probe side end of urceolus electrode section 34 than the thickness of other parts and the large electrode section location division 34c of external diameter.Electrode section location division 34c is by formation such as plating.In addition, as shown in (e) of Fig. 3, the part in urceolus electrode section 34 except connector connection part 34b is formed with insulating wrapped portion 35 by plating etc.
Electrode section 30 described inner core electrode section 31 is inserted to be fixed on outside electrode portion 34 (A with reference to Fig. 4), and carry out gold-plated etc. (arrow with reference to Fig. 4 B) at the connector connection part 31b exposed and connector connection part 34b and manufacture.Now, in this example, fixing on the end of the probe side in outside electrode portion 34 is closer to probe side position than the end of the probe side of inner core electrode section 31, but aligned position and fixingly also can between the end of the probe side in inner core electrode section 31 and outside electrode portion 34.In addition, be formed with insulating wrapped portion 32 in the outside of inner core electrode section 31, therefore inner core electrode section 31 and outside electrode portion 34 can be fixed under the state of insulation.In addition, that can carry out except gold is gold-plated, maybe can omit gold-plated.
Then, with reference to Fig. 5 A to Fig. 5 D and Fig. 6 A to Fig. 6 C, the assemble method of detection fixture 1 is described.Fig. 5 A to Fig. 5 D is the key diagram of the assemble method that detection fixture 1 is shown.Fig. 6 A to Fig. 6 C illustrates the side cross-sectional view of the connection status being probe 20 and electrode section 30.
In this example, in advance, electrode section 30 is inserted in the patchhole 13a (with reference to Fig. 5 A and Fig. 6 A) of electrode section insertion section 13.In this case, by electrode section location division 34c, holding electrode portion 30 causes it can not depart from from electrode section insertion section 13.
Then, probe insertion section 14 is positioned in the top of electrode section insertion section 13, with fixing (with reference to Fig. 5 B) such as bolts.Then, probe 20 is inserted in the patchhole 14a (with reference to Fig. 5 C and Fig. 6 A) of probe insertion section 14.
Along with probe 20 is inserted into patchhole 14a, the wick-like probe 21 of probe 20 is inserted in electrode section 30.In addition, in this example, only has outside electrode portion 34 in the end of the probe side of electrode section 30, so peristome is larger.Thus, wick-like probe 21 electrode insertion portion 30 can be guaranteed.Even if there is skew position, guide probe 20 to suitable position by tapered portion 21c.
Then along with the insertion of probe 20, wick-like probe 21 (electrode connecting portion 21b) is inserted in the inside of inner core electrode section 31 (probe connecting portion 31a) then.Thus, wick-like probe 21 and inner core electrode section 31 are electrically connected.In addition, due to wick-like probe 21 being formed with tapered portion 21c, even if when the position of wick-like probe 21 or inner core electrode section 31 slightly offsets, location revision relation, can be inserted in inner core electrode section 31 inner by wick-like probe 21.Therefore, the stability of both electrical connections can be improved.
In addition, from Fig. 6 A condition, be pressed into probe 20 again, thus the end face of the probe side in the end face of the electrode part side of tubular probe 24 (electrode contact 24b) and outside electrode portion 34 (probe connecting portion 34a) contacts.Thus, tubular probe 24 and outside electrode portion 34 are electrically connected.In addition, due to probe connecting portion 34a than the thickness of other parts and external diameter large, the electrical connection with tubular probe 24 can be guaranteed.In addition, as mentioned above, because the position relationship of wick-like probe 21 and inner core electrode section 31 can be modified, under the state that position relationship is suitable, tubular probe 24 and outside electrode portion 34 can be electrically connected.Therefore, the stability of both electrical connections can be improved.
Then, probe fixed head 15 is arranged on the top (with reference to Fig. 5 D and Fig. 6 B) of probe insertion section 14.Now, pressurizeed by the end difference 15a that the through hole of probe fixed head 15 is formed in probe positioning portion 25.Thus, spring 24d shrinks and is out of shape, and with bolt etc., probe fixed head 15 is fixed on probe insertion section 14 (with reference to Fig. 6 C) in this case.By exerting pressure of being produced by the contraction of spring 24d, tubular probe 24 is pressurized to electrode part side.Thus, the stability of the electrical connection in tubular probe 24 and outside electrode portion 34 can be improved.
In the past, under the state that probe insertion section keeps probe, probe insertion section was inserted into electrode section insertion section and assembled.In this situation, according to positional precision and the installation accuracy of probe and electrode section, there is the situation that some probe can not be connected with electrode section.In this viewpoint, as this example, under the state in holding electrode portion, electrode section insertion section 13 30, insert probe 20, thus can guarantee that probe 20 is connected to electrode section 30.
In addition, the end of the side, connector portion of electrode section 30 is that inner core electrode section 31 and outside electrode portion 34 are connected to connector portion 40 separately.In addition, as shown in Figure 7, if inner core electrode section 31 and outside electrode portion 34 mutually insulated, the connector portion 40 formed with same substrate can be connected to.Fig. 7 is, the connector connection part 31b of inner core electrode section 31 is brazed in connector portion 40, and the connector connection part 34b in outside electrode portion 34 is brazed in connector portion 40.Connector connection part 31b and connector connection part 34b is, by the circuit that formed in inside, connector portion 40 and electric wire etc., is connected to check processing portion 2 separately.
In this example, so, the detection of substrate can be realized by four probe method.In addition, the formation of this example is, such as, the distance between probe 20, more than about 20 or 30 μm, when less than 100 μm, can realize.
As mentioned above, the detection fixture 1 of this example has plurality of probes 20 and plurality of electrodes portion 30.Probe 20 has wick-like probe 21 and tubular probe 24.Wick-like probe 21 is electrically connected on check point.Tubular probe 24 is under the state insulated with wick-like probe 21, is configured in the outside of described wick-like probe 21, and is electrically connected on same check point.Electrode section 30 has inner core electrode section 31 and outside electrode portion 34.Inner core electrode section 31 contacts with the outer peripheral face of the wick-like probe 21 inserted and is electrically connected on described wick-like probe 21.Outside electrode portion 34 is under the state insulated with inner core electrode section 31, is configured in the outside of described inner core electrode section 31, and is electrically connected with tubular probe 24.
Thus, such as there is skew the position of wick-like probe 21 or inner core electrode section 31, because wick-like probe 21 is inserted in inner core electrode section 31 (decision position), can guarantee the electrical connection of wick-like probe 21 and inner core electrode section 31.In addition, the contact area of inner core electrode section 31 and wick-like probe 21 can be made to increase, just can improve the stability of electrical connection.
Be explained above better example of the present invention, but described formation, such as, can change as follows.
As long as wick-like probe 21 enters the formation of inner core electrode section 31 and electrical connection, the shape of probe 20 and electrode section 30 can be changed.
Also probe positioning portion 25 or electrode section location division 34c can not be formed, and stationary probe 20 and electrode section 30.
In described example, electrode section 30 is along basal part 11 formation directed to side, but this part guided to side to be formed with the circuit that substrate is formed and also can.In this situation, electrode section 30 is, is connected to this substrate from electrode section insertion section 13 to downward-extension.And, by the circuit that this substrate is formed, be connected to check processing portion 2.
Claims (13)
1. a detection fixture, comprising:
Plurality of probes, the check point of contact substrate; And
Plurality of electrodes portion, is electrically connected by described probe with to the check processing portion that the distribution that described substrate is formed carries out check processing,
Described probe comprises:
Wick-like probe, is electrically connected on described check point; And
Tubular probe, under the state insulated, is configured in the outside of described wick-like probe, and is electrically connected on described check point with described wick-like probe,
Described electrode section comprises:
Inner core electrode section, contacts with the outer peripheral face of the described wick-like probe inserted, thus is electrically connected on described wick-like probe; And
Outside electrode portion, under the state insulated, is configured in the outside of described inner core electrode section, and is electrically connected on described tubular probe with described inner core electrode section.
2. detection fixture according to claim 1, is characterized in that,
Formed more toward the tapered portion that front end external diameter attenuates in the end of the electrode part side of described wick-like probe.
3. detection fixture according to claim 1 and 2, is characterized in that,
The position of the end face of the probe side in described outside electrode portion is close to probe side than the end face of the probe side of described inner core electrode section.
4. detection fixture according to claim 1 and 2, is characterized in that,
The end face of the end face of the electrode part side of described tubular probe and the probe side in described outside electrode portion contacts, thus described tubular probe and the electrical connection of described outside electrode portion.
5. detection fixture according to claim 1 and 2, is characterized in that,
Also comprise the electrode section insertion section for inserting described electrode section,
Electrode section location division is formed in the end of the probe side in described outside electrode portion,
By described electrode section location division, described electrode section remains on described electrode section insertion section.
6. detection fixture according to claim 5, is characterized in that,
The thickness of described electrode section location division and external diameter are greater than the remainder of the described probe side in described outside electrode portion.
7. detection fixture according to claim 1 and 2, is characterized in that,
Described inner core electrode section is coated with insulator.
8. detection fixture according to claim 1 and 2, is characterized in that,
Described tubular probe is formed with the spring of energy elastic deformation with length direction, under the state that described spring reduces, described probe is connected with described electrode section.
9. detection fixture according to claim 1 and 2, is characterized in that, also comprise:
Probe insertion section, for inserting described probe; And
Probe fixed part, is fixed on described probe insertion section by described probe,
The external diameter probe positioning portion larger than the remainder of described tubular probe is formed at described tubular probe,
Described probe positioning portion and described probe fixed part contact, thus described probe is fixed on described probe insertion section.
10. detection fixture according to claim 1 and 2, is characterized in that,
The configuration space of described probe is less than 100 μm.
11. 1 kinds of electrode section, are electrically connected by the probe of the dual structure of check point on contact substrate with to the check processing portion that the distribution that described substrate is formed carries out check processing, it is characterized in that described electrode section comprises:
Inner core electrode section, is inserted with the wick-like probe of the inner side of described dual structure, and contacts with the outer peripheral face of described wick-like probe, thus is electrically connected on described wick-like probe; And
Outside electrode portion, under the state insulated, is configured in the outside of described inner core electrode section, and is electrically connected with the tubular probe in the outside of described dual structure with described inner core electrode section.
12. 1 kinds of probes, the check point on contact substrate, and the electrode section by being made up of inner core electrode section and outside electrode portion, be electrically connected on the check processing portion distribution that described substrate is formed being carried out to check processing, it is characterized in that described probe comprises:
Wick-like probe, at one end side is electrically connected on described check point, the inner peripheral surface of inner core electrode section described in other end side contacts, thus is electrically connected on described inner core electrode section; And
Tubular probe, under the state insulated, be configured in the outside of described wick-like probe, and at one end side is electrically connected on described check point, is electrically connected in another side with described outside electrode portion with described wick-like probe.
13. 1 kinds of manufacture methods detected with fixture, wherein said detection fixture comprises plurality of probes and plurality of electrodes portion,
Described probe comprises: wick-like probe, is electrically connected on the check point of substrate; And tubular probe, be configured in the outside of described wick-like probe under the state insulated with described wick-like probe, and be electrically connected on described check point,
Described electrode section comprises: inner core electrode section, contacts and be electrically connected with the outer peripheral face of described wick-like probe; And outside electrode portion, be configured in the outside of described inner core electrode section under the state insulated with described inner core electrode section, and be electrically connected with described tubular probe,
It is characterized in that described manufacture method, comprise:
Probe insertion process, be inserted with described electrode section electrode section insertion section and for insert described probe probe insertion section under the state of overlap, described probe is inserted described probe insertion section, to connect described probe and described electrode section; And
Probe technique for fixing, by arranging probe fixed part, thus is fixed on the described probe inserted in described probe insertion process.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-211000 | 2013-10-08 | ||
| JP2013211000A JP6283929B2 (en) | 2013-10-08 | 2013-10-08 | Inspection jig and method for manufacturing inspection jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104515880A true CN104515880A (en) | 2015-04-15 |
Family
ID=52791491
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410524378.1A Pending CN104515880A (en) | 2013-10-08 | 2014-10-08 | Inspecting jig, electrode portion, probe and manufacturing method of inspecting jig |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6283929B2 (en) |
| KR (1) | KR20150041591A (en) |
| CN (1) | CN104515880A (en) |
| TW (1) | TW201520560A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114487518A (en) * | 2021-12-13 | 2022-05-13 | 渭南高新区木王科技有限公司 | Double-end double-acting probe capable of independently adjusting spring resistance |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101729069B1 (en) | 2015-11-13 | 2017-05-02 | 주식회사 새한마이크로텍 | A probe having a barrel with heat release holes |
| JP7098886B2 (en) * | 2017-07-04 | 2022-07-12 | 日本電産リード株式会社 | Contact terminals, inspection jigs, and inspection equipment |
| TWI647456B (en) * | 2018-04-20 | 2019-01-11 | 超極生技股份有限公司 | MINIATURIZED pH PROBE |
| TWI748171B (en) * | 2018-04-27 | 2021-12-01 | 日商日本電產理德股份有限公司 | Cylindrical body and its manufacturing method |
| CN110828762B (en) * | 2019-11-05 | 2022-04-19 | 联动天翼新能源有限公司 | Detection welding device and detection welding method for cylindrical battery module |
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- 2014-10-06 TW TW103134751A patent/TW201520560A/en unknown
- 2014-10-07 KR KR20140135029A patent/KR20150041591A/en not_active Application Discontinuation
- 2014-10-08 CN CN201410524378.1A patent/CN104515880A/en active Pending
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| JP2007192554A (en) * | 2006-01-17 | 2007-08-02 | Onishi Denshi Kk | Coaxial probe for four-probe measurement and probe jig provided with same |
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| CN114487518A (en) * | 2021-12-13 | 2022-05-13 | 渭南高新区木王科技有限公司 | Double-end double-acting probe capable of independently adjusting spring resistance |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20150041591A (en) | 2015-04-16 |
| TW201520560A (en) | 2015-06-01 |
| JP2015075370A (en) | 2015-04-20 |
| JP6283929B2 (en) | 2018-02-28 |
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Application publication date: 20150415 |