CN104487855A - Method of inspection of chip electronic components and inspection device - Google Patents
Method of inspection of chip electronic components and inspection device Download PDFInfo
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- CN104487855A CN104487855A CN201380032830.6A CN201380032830A CN104487855A CN 104487855 A CN104487855 A CN 104487855A CN 201380032830 A CN201380032830 A CN 201380032830A CN 104487855 A CN104487855 A CN 104487855A
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- 238000007689 inspection Methods 0.000 title claims abstract description 180
- 238000000034 method Methods 0.000 title claims abstract description 58
- 239000003990 capacitor Substances 0.000 claims description 142
- 238000012360 testing method Methods 0.000 claims description 51
- 238000012545 processing Methods 0.000 claims description 7
- 230000004907 flux Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 10
- 230000003321 amplification Effects 0.000 description 6
- 238000003199 nucleic acid amplification method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000033001 locomotion Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 244000144992 flock Species 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/01—Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station
- G01R31/013—Testing passive components
- G01R31/016—Testing of capacitors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
Provided is a method of inspection, with high speed and high accuracy, of the electrical characteristics of a large quantity of chip electronic components, using two or more inspection elements. The method of inspection of chip electronic components in which inspection of the electrical characteristics of the chip electronic components that are the subject of inspection is performed, includes: a step of electrically connecting mutually independent inspection elements to these respective chip electronic components, in a condition in which two or more chip electronic components to be inspected, that are manufactured so as to show prescribed identical electrical characteristics in accordance with respective identical standards are arranged in mutually adjacent fashion; and a step of applying inspection voltages mutually having the same or substantially the same frequency to respective chip electronic components from the inspection elements and detecting by the inspection elements the current values generated by the chip electronic components by application of this inspection voltage. The method is characterized in that application of the inspection voltage from the inspection elements to the chip electronic components is performed in mutually non-overlapping periods.
Description
Technical field
The present invention relates to the method checked a large amount of sheet electronic component at a high speed and device.
Background technology
Along with the increase of the turnout of the electric product representated by portable phone, liquid crystal TV set, game machine, the turnout being encased in the sheet electronic component of so electric product significantly increases.As sheet electronic component, widely known have chip capacitor (being also called flaky electric capacity part), chip resistor (comprising rheostat) and chip inductor.
Sheet electronic component such as chip capacitor has minimum size, produces the chip capacitor a large amount of like this of several ten thousand ~ hundreds of thousands in once manufacturing batch.
In order to reduce the defect rate of defect resulting from sheet electronic component of the electric product that is incorporated with sheet electronic component, about by the sheet electronic component manufactured in a large number, general is to all checking.Such as, about chip capacitor, it is all carried out to the inspection of the electrical characteristics such as electrostatic capacitance.
In the past, as the method for the electrical characteristics for checking a large amount of sheet electronic component at high speed, utilize the inspection method that the electrical characteristics of each sheet electronic component of check object are checked, this inspection method comprises following operation: under the sheet electronic component of the plural check object manufactured respectively in the mode of the same electrical characteristic that regulation is shown according to identical standard is configured to state close to each other, and each with the separate detector of this sheet electronic component is electrically connected; And from each detector, the inspection voltage with mutually identical or roughly the same frequency is applied to each sheet electronic component, the current value occurred in each sheet electronic component by applying this inspection voltage is detected with each detector.Such as, generally the sheet electronic component testing fixture possessing the disk (sheet electronic component holding plate) being formed with a lot of open-work is used for the enforcement of this inspection method.A lot of open-works of the sheet electronic component of accommodating check object are respectively provided with at disk.The adjacent open-work of disk is formed at position close to each other.Make this disc rotary and make sheet electronic component be contained in each open-work, in this condition, using the multiple sheet electronic components arranged in the radial direction at disk as one group, utilizing detector to check the electrical characteristics of sheet electronic component.
The testing fixture of sheet electronic component is generally by forming as follows: above-mentioned disk (sheet electronic component holding plate); Pair of electrodes terminal, is configured in the position close with two peristomes of each open-work of this disk; Detector, is electrically connected with each of pair of electrodes terminal; And controller, be electrically connected with each detector in the mode each detector being supplied to the signal relevant with electric flux and check processing.And, from above-mentioned detector via electrode terminal to each applying inspection voltage of sheet electronic component being contained in plural open-work, detecting the current value occurred in each sheet electronic component by applying this inspection voltage with each detector, thus the electrical characteristics of each sheet electronic component of check object being checked.
Such as, when using the detector of the electrostatic capacitance of chip capacitor as above-mentioned each detector, from each detector, the inspection voltage with mutually identical or roughly the same frequency is applied to each chip capacitor (sheet electronic component), utilizing each detector to detect the current value of the electric current occurred in each chip capacitor by applying this inspection voltage, checking with the electrostatic capacitance (electrical characteristics) of current value to each chip capacitor of check object of the electric current detected according to the magnitude of voltage of above-mentioned inspection voltage thus.In addition, be set as mutually identical from each detector at first to the frequency of the voltage that sheet electronic component applies.But, when from close to configuration multiple detectors the voltage of same frequency is applied to sheet electronic component time, from each detector to the frequency of the voltage that each sheet electronic component applies between produce interference, its result, find check result be not easily inconsistent.Thus, in recent years, the frequency deviation (not being set to identical and be set to roughly the same) a little making to be applied to the voltage of sheet electronic component from each detector has also been carried out.As the detector of the electrostatic capacitance of chip capacitor, such as can use the electrostatic capacitance analyzer (representation example is C meter: E4981A, Agilent Technologies (ア ジ レ Application ト テ Network ノ ロ ジ ー) (strain) makes) that market is sold.
Disclose at patent documentation 1 and a lot of electric line parts (such as sheet electronic component) are tested (inspection), and according to the electric line parts sorter of test findings to electric line part classification.This electric line parts sorter possesses: the breadboard (sheet electronic component holding plate) being provided with the plate-like of a lot of parts platform (open-work); The tester (detector) being configured at the contact, upside of the position close with each parts platform of breadboard and contact, downside (pair of electrodes terminal) and being electrically connected with each contact.Above-mentioned breadboard mutually possesses the row of 72 four parts platforms wherein in circumferential direction in diametric(al) across interval between the heart and outer peripheral edges.Rotate making this breadboard and under state electric line parts being contained in this parts platform (open-work), using being contained in multiple electric line parts of the parts platform of each row as one group, carry out the test of electric line parts.
Prior art document.
Patent documentation.
Patent documentation 1: special table 2000-501174 publication.
Summary of the invention
The problem that invention will solve
As described above, in the past, there will be a known the electrical characteristics in order to check a large amount of sheet electronic component at high speed, use the detector of more than two, simultaneously the technology that checks of (mutually repeat period) electrical characteristics to the multiple sheet electronic components kept at discoid sheet electronic component holding plate.
But, according to the research of the present inventor, distinguish: when checking the sheet electronic component of minimum (such as width is about 0.3mm and length is the size of about 0.6mm or less size) that usually utilizing in recent years, when using multiple detector to check the electrical characteristics of the multiple sheet electronic components close to configuration of two or more simultaneously, even if when making to be applied to that the frequency departure of the voltage of sheet electronic component is this prevents the method for interference between frequency from each detector, the precision of the check result of electrical characteristics also declines.
The result that the present inventor conducts a research further is, find that the reason of the inspection precise decreasing of electrical characteristics is as described above, such as in order to the electrical characteristics of the sheet electronic component of the plural very small dimensions to configuration close to each other detect, when applying that there is the inspection voltage of mutually identical or roughly the same frequency from each period mutually repeating of separate detector to each sheet electronic component, according to the electric signal (voltage occurred in a sheet electronic component of adjacent configuration, electric current) and the noise that occurs be mixed into the sheet electronic component of the very small dimensions configured under state closely another in the electric signal (voltage that occurs, electric current) (electric signal occurred in each sheet electronic component disturbs mutually).
Problem of the present invention is to provide a kind of use two or more detector to come with high speed and the method for the electrical characteristics of a large amount of sheet electronic component of high precision inspection (particularly the sheet component of very small dimensions).Problem of the present invention is also to provide a kind of use two or more detector to come with high speed and the device of the electrical characteristics of a large amount of sheet electronic component of high precision inspection (particularly the sheet component of very small dimensions) in addition.
For the scheme of dealing with problems
The present invention is the inspection method of the sheet electronic component that a kind of electrical characteristics of each sheet electronic component to check object check, comprises following operation: be electrically connected by each with the separate detector of this sheet electronic component under the state that the sheet electronic component of the plural check object manufactured in the mode of the same electrical characteristic that regulation is shown according to identical standard respectively is closely configured; And from each detector, the inspection voltage with mutually identical or roughly the same frequency is applied to each sheet electronic component, detecting the current value occurred in each sheet electronic component by applying this inspection voltage with each detector, the invention reside in the inspection method being applied for the sheet electronic component of feature to carry out the inspection voltage from each detector to each sheet electronic component in the mutual unduplicated period.
The optimal way of the inspection method of sheet electronic component of the present invention is following.
(1) above-mentioned sheet electronic component is in the state of the open-work group being held in sheet electronic component holding plate, described sheet electronic component holding plate possesses on disk with the open-work group that the mutual concentrically ringed mode forming more than four row with interval configures, around central shaft, the rotatable earth's axis is supported on base station, but the open-work of each row is on the straight line that therefrom axle extends in the radial direction, carry out successively in the mutual unduplicated period for being in from the open-work group the straight line that central shaft extends in the radial direction to the applying of the inspection voltage of sheet electronic component.
(2) open-work group is configured on disk in the concentrically ringed mode forming six row, checked by the sheet electronic component of detector A to the three row open-work groups being kept closer to disk periphery possessing total three pairs of electrode terminals, and by the detector B possessing total three pairs of electrode terminals, the sheet electronic component of three row open-work groups of the central shaft being kept closer to disk is checked.
(3) open-work group is configured on disk in the concentrically ringed mode forming eight row, checked by the sheet electronic component of detector A to the four row open-work groups being kept closer to disk periphery possessing total four pairs of electrode terminals, and by the detector B possessing total four pairs of electrode terminals, the sheet electronic component of four row open-work groups of the central shaft being kept closer to disk is checked.
(4) open-work group is configured on disk in the concentrically ringed mode forming 12 row, checked by the sheet electronic component of detector A to the four row open-work groups being kept closer to disk periphery possessing total four pairs of electrode terminals, by the detector B possessing total four pairs of electrode terminals, the sheet electronic component of four row open-work groups of the central shaft being kept closer to disk is checked, and by the detector C possessing total four pairs of electrode terminals, the sheet electronic component being maintained at the four row open-work groups be between the above-mentioned four row open-work groups close to outer circumferential side and the four row open-work groups close to central shaft is checked.
In addition, also open-work flock mating can be placed on disk to form the concentrically ringed mode of nine row, in this case, use three detectors possessing three pairs of electrode terminals separately to carry out same inspection.
(5) checked sheet electronic component is the parts possessing pair of electrodes on relative surface.
(6) checked sheet electronic component is chip capacitor.
(7) checked electrical characteristics are electrostatic capacitance.
In addition, in the inspection method of the invention described above, above-mentioned " sheet electronic component of plural check object is configured at position close to each other " means " sheet electronic component configuring plural check object in the mode comprising at least two sheet electronic components being configured in position close to each other ".
In addition, above-mentioned " position close to each other " means " when from separate (different) detector of each electrical connection from two sheet electronic components the period mutually repeated to each sheet electronic component apply electrical characteristics inspection there is the inspection voltage of mutually identical or roughly the same frequency, according to the electric signal (voltage occurred in a sheet electronic component, electric current) noise that occurs is mixed into the electric signal (voltage occurred in another sheet electronic component, electric current) (disturbing between the electric signal occurred in each sheet electronic component) position ".
In addition, the present invention is a kind of testing fixture of sheet electronic component, comprising: sheet electronic component holding plate, board-like material is formed in position close to each other the plural open-work temporarily can accommodating sheet electronic component and forms, pair of electrodes terminal, is configured in the position close with two peristomes of each open-work of this sheet electronic component holding plate, detector, is electrically connected with each of this pair of electrodes terminal, and controller, be electrically connected with each detector in the mode each detector being supplied to the signal relevant with electric flux and check processing, the testing fixture of described sheet electronic component be caught can: the inspection voltage applying to have mutually identical or roughly the same frequency from each detector via each period in regulation of electrode terminal to the sheet electronic component being accommodated in plural open-work, the current value occurred in each sheet electronic component by applying this inspection voltage is detected with each detector, the present invention is also with the sheet electronic component testing fixture that to possess with the control system controlled the period mutual unduplicated mode of each applying inspection voltage of sheet electronic component of the plural open-work being accommodated in sheet electronic component holding plate be feature at this controller.
In addition, in the testing fixture of the invention described above, above-mentioned " plural open-work is formed at position close to each other " means " sheet electronic component of the plural check object of accommodating at plural open-work is configured in such position, position close to each other, forms above-mentioned plural open-work ".
The effect of invention
By implementing inspection method of the present invention, two or more detector can be used with (short time) at a high speed and the electrical characteristics of a large amount of sheet electronic component of high precision inspection.
The testing fixture of the application of the invention, can use two or more detector with (short time) at a high speed and the electrical characteristics of a large amount of sheet electronic component of high precision inspection.
Accompanying drawing explanation
Fig. 1 is the stereographic map of the configuration example of the chip capacitor of an example of the sheet electronic component illustrated as check object.
Fig. 2 is that illustrate can in order to implement the front view (FV) of the configuration example of the sheet electronic component testing fixture that inspection method of the present invention preferably uses.
Fig. 3 be circumferentially direction illustrate the sheet electronic component resettlement section 31 of the testing fixture 10 of Fig. 2, the open-work group of sheet electronic component holding plate 11 configuration and be kept (collecting) in the amplification sectional view of the movement of the sheet electronic component of each open-work.
Fig. 4 is being configured at close for the electrode of detector the amplification sectional view that maintenance (collecting) illustrates the sheet electronic component inspection portion 32 of the testing fixture 10 of Fig. 2 under each state of sheet electronic component (total of 19a, 19b, 19c, 19d, 19e, 19f six) being configured to the open-work group extended in radial directions on the disk of sheet electronic component holding plate 11.
Fig. 5 illustrates that the sheet electronic component discharge portion 33 by the testing fixture 10 of Fig. 2 discharges the amplification sectional view of the appearance of checked sheet electronic component.
Fig. 6 summarily illustrates be configured to the block diagram of status of electrically connecting of sheet electronic component (total of 19a, 19b, 19c, 19d, 19e, 19f six) of the open-work group extended in radial directions on the disk of sheet electronic component holding plate 11 in testing fixture 10 middle controller 15 of Fig. 2, detector 14a, 14b and maintenance (collecting).
Fig. 7 is the electric line figure of the status of electrically connecting summarily illustrated between each parts corresponding with the block diagram of Fig. 6.
Fig. 8 is about in order to implement the basic structure of the sheet electronic component testing fixture that inspection method of the present invention uses, the block diagram of its status of electrically connecting can be summarily shown.
Fig. 9 is the figure that the period from each detector, each sheet electronic component being applied to inspection voltage in the inspection method of sheet electronic component of the present invention is shown.
Figure 10 is the figure that the period from each detector, each sheet electronic component being applied to inspection voltage in the inspection method of sheet electronic component is in the past shown.
Embodiment
First, can in order to implement the inspection method of sheet electronic component of the present invention and the constitute example of testing fixture that uses with reference to annexed drawings explanation on one side.
Fig. 1 is the stereographic map of the configuration example of the chip capacitor (example of sheet electronic component) that check object is shown.The chip capacitor 19 of Fig. 1 is by forming as follows: the capacitor main body 21 be made up of dielectric; And be arranged at pair of electrodes 22a, the 22b at two ends of this capacitor main body 21.Chip capacitor 19 is the flaky pottery capacitors using pottery as dielectric.Capacitor main body is formed by pottery, and its inside possesses from electrode 22a, 22b separately alternately and the multiple electrode layers extended in parallel to each other.The sheet electronic components such as the effective especially chip capacitor 19 of the inspection method of sheet electronic component of the present invention and the use of testing fixture are width for 0.3mm or its following and length are 0.6mm or its following such atomic little sheet electronic component.
Fig. 2 is that illustrate can in order to implement the front view (FV) of the configuration example of the sheet electronic component testing fixture that inspection method of the present invention uses.Fig. 3 is the amplification sectional view that the sheet electronic component resettlement section 31 of the testing fixture 10 of Fig. 2 is shown along the circumferential direction of sheet electronic component holding plate 11.Fig. 4 is the amplification sectional view cutting off the sheet electronic component inspection portion 32 of the testing fixture 10 of Fig. 2 along the diametric(al) of sheet electronic component holding plate 11.Fig. 5 is the amplification sectional view cutting off the sheet electronic component discharge portion 33 of the testing fixture 10 of Fig. 2 along the diametric(al) of sheet electronic component holding plate 11.Fig. 6 is the block diagram of the status of electrically connecting of the testing fixture 10 that Fig. 2 is summarily shown.And Fig. 7 is the electric line figure of the status of electrically connecting of the testing fixture 10 that Fig. 2 is summarily shown.
Sheet electronic component testing fixture 10 shown in Fig. 2 ~ Fig. 7 is by forming as follows: sheet electronic component holding plate 11, board-like material is formed in position close to each other the plural open-work 11a that temporarily can accommodate sheet electronic component (such as chip capacitor) and forms; Pair of electrodes terminal 12a, 12b, be configured in the position close with two peristomes of each open-work 11a of sheet electronic component holding plate 11; Detector 14a, 14b, with each electrical connection of pair of electrodes terminal 12a, 12b; And controller 15, be electrically connected with each detector in the mode each detector being supplied to the signal relevant with electric flux and check processing.
The relevant signal of the electric flux supplied each detector with controller 15 is the signal with each detector, the inspection electricity consumption that each chip capacitor applies being pressed with to pass, as its representation example, can enumerate the signal that instruction starts to apply inspection voltage.
The relevant signal of the check processing supplied each detector with controller 15 is the signal relevant with the inspection of the electrical characteristics of each chip capacitor undertaken by each detector, as its representation example, the signal that instruction starts the current value detecting the electric current occurred in each chip capacitor by applying inspection voltage from each detector can be enumerated.
Sheet electronic component testing fixture 10 is configured to: applying the inspection voltage with the frequency of identical (or roughly the same) mutually from each of detector 14a, 14b via electrode terminal 12a, 12b each period in regulation to the sheet electronic component (chip capacitor 19a, 19b, 19c, 19d, 19e, 19f such as shown in Fig. 4) being contained in plural open-work 11a, can detecting the current value occurred in each sheet electronic component by applying its inspection voltage with each detector.
In testing fixture 10, such as, as detector 14a, 14b each of the electrical characteristics of sheet electronic component, such as, use the detector of electrostatic capacitance (electrical characteristics).
And above-mentioned sheet electronic component inspection device 10 has following feature: possess at described controller 15 with the control system 15a controlled the period mutual unduplicated mode of each applying inspection voltage of sheet electronic component of the plural open-work 11a being contained in sheet electronic component holding plate 11.
Above-mentioned " control system " means " recording the robot calculator made it possible to the program controlled the period mutual unduplicated mode of each applying voltage electricity of chip capacitor of the plural open-work being contained in sheet electronic component holding plate ".
In the sheet electronic component testing fixture 10 shown in Fig. 6 and Fig. 7, the sheet electronic component (chip capacitor) be electrically connected with a detector is three.Three chip capacitors 19a, 19b, 19c are electrically connected with via switch 23a at detector 14a.And, be electrically connected with three chip capacitors 19d, 19e, 19f at detector 14b via switch 23b.
And the control system that above-mentioned controller 15 possesses is to control the control of each detector from each detector to period whole mutual unduplicated mode that each sheet electronic component (chip capacitor) applies inspection voltage.。
Fig. 8 is about in order to implement the basic structure of the sheet electronic component testing fixture that inspection method of the present invention preferably uses, the block diagram of its status of electrically connecting can be summarily shown.
The control object being one and controller 25 except the sheet electronic component (chip capacitor) be electrically connected with a detector is only except each detector (not comprising above-mentioned switch), and the structure of the sheet electronic component testing fixture 80 shown in Fig. 8 is identical with the structure of the sheet electronic component testing fixture shown in Fig. 6.
Do not use switch as described above at detector 14a but be electrically connected with a chip capacitor 19a.And do not use switch as described above at detector 14b but be electrically connected with a chip capacitor 19b.
Like this, sheet electronic component testing fixture also can have the structure that the sheet electronic component be electrically connected with (each) detector is.But in order to the quantity reducing the detector of use reduces the manufacturing cost of testing fixture thus, the sheet electronic component be preferably electrically connected with a detector is two or more.
Then, the testing fixture 10 shown in Fig. 2 ~ Fig. 7 is used, and with the situation of the inspection carrying out the chip capacitor 19 shown in Fig. 1 for representation example is to illustrate the inspection method of sheet electronic component of the present invention.
The inspection method of sheet electronic component of the present invention comprises following inspection method: the sheet electronic component of the plural check object manufactured respectively in the mode of the same electrical characteristic that regulation is shown according to identical standard is configured at position close to each other and (is configured on straight line in the radial direction particularly, such as, at discoid chip type electronic holding plate, Fig. 4, chip capacitor 19a shown in Fig. 6 and Fig. 7, 19b, 19c, 19d, 19e, 19f), chip capacitor 19a is being checked with detector 14a, 19b, 19c, detector 14b checks chip capacitor 19d, 19e, the mode of 19f is separate detector 14a, after 14b is electrically connected with each chip capacitor, from each detector, the inspection voltage with mutually identical or roughly the same frequency is applied to each sheet electronic component, can detecting with each detector the current value occurred in each sheet electronic component by applying this inspection voltage, checking the electrical characteristics of each sheet electronic component of check object thus.
And the inspection method of sheet electronic component of the present invention has following feature: implement from the applying of each detector to the inspection voltage of each sheet electronic component (chip capacitor) in mutual unduplicated period.
Fig. 9 illustrates in the inspection method of sheet electronic component of the present invention from the figure that each detector applies during inspection voltage to each chip capacitor (sheet electronic component).Charge to the horizontal axis representing time in Fig. 9.Below, reference Fig. 7 and Fig. 9 is while be described.
Detector 14a is from time t
11to time t
12till during P
11inspection voltage is applied to chip capacitor 19a.In addition, similarly, detector 14a is from time t
21to time t
22till during P
21inspection voltage is applied to chip capacitor 19b.And similarly, detector 14a is from time t
31to time t
32till during P
31inspection voltage is applied to chip capacitor 19c.
Detector 14b is from time t
41to time t
42till during P
41inspection voltage is applied to chip capacitor 19d.In addition, similarly, detector 14b is from time t
51to time t
52till during P
51inspection voltage is applied to chip capacitor 19e.And similarly, detector 14b is from time t
61to time t
62till during P
61inspection voltage is applied to chip capacitor 19f.
And, in above-mentioned period P11, from detector 14a, inspection voltage is applied to chip capacitor 19a, detecting the current value occurred in chip capacitor 19a by applying this inspection voltage with detector 14a, thus the electrical characteristics (being electrostatic capacitance when using above-mentioned testing fixture 10) of the chip capacitor 19a of check object being checked.
Similarly, at above-mentioned period P
21, P
31, P
41, P
51, P
61each in, to checking that each electrical characteristics (electrostatic capacitance) of chip capacitor 19b, 19c, 19d, 19e, 19f check.
As shown in Figure 9, in the inspection method of sheet electronic component of the present invention, implement the applying from each inspection voltage to each chip capacitor of detector 14a, 14b in the mutual unduplicated period.
Therefore, do not have such as according at period P
41in the electric signal (voltage, electric current) that occurs in the chip capacitor 19d being applied in inspection voltage and the noise that occurs is mixed at period P
11in occur in the other chip capacitor 19a being applied in inspection voltage electric signal (voltage, electric current), namely do not have the electric signal occurred at each chip capacitor and mutually disturb.
Thus, by implementing the inspection method of sheet electronic component of the present invention, thus the detector of more than two can be used with at a high speed (short time) and high precision to check the electrical characteristics (electrostatic capacitance of such as chip capacitor) of a large amount of sheet electronic component.
Preferably in the inspection method (or testing fixture) of sheet electronic component of the present invention, checked electronic unit is the parts possessing pair of electrodes on relative surface.
As the representation example of checked electronic unit, chip capacitor, chip resistor (comprising sheet rheostat) and chip inductor can be enumerated.Particularly preferably being checked electronic unit is chip capacitor.
In the inspection method (or testing fixture) of sheet electronic component of the present invention, the electrical characteristics of checked electronic unit mean the electrical characteristics that can decide according to the magnitude of voltage of inspection voltage (alternating voltage) and the current value of electric current (alternating current) that occurs in sheet electronic component by applying this inspection voltage being applied to sheet electronic component.
As the representation example of such a electrical characteristics, electrostatic capacitance (electric capacity), inductance, impedance, admittance etc. can be enumerated.
In addition, kind and the electrical characteristics that will measure of the sheet electronic component of above-mentioned determination object are not must be corresponding one to one.Such as, about the sheet electronic component (in detail, the capacitor about the equivalent electric circuit of the sheet electronic component be shown in beyond chip capacitor) beyond above-mentioned chip capacitor, its electrostatic capacitance can also be measured.Such as can also measure the rheostatic electrostatic capacitance of sheet.
As the plural sheet electronic component of check object, the sheet electronic component that the mode using the same electrical characteristic that regulation is shown manufactures according to identical standard.
Thus, although the plural sheet electronic component of check object above-mentioned in a lot of situation is the sheet electronic component of same manufacture batch, it also can be the sheet electronic component being mixed with the sheet electronic component of other batch at the sheet electronic component of so same manufacture batch.But, these two sheet electronic components to manufacture batch are that sheet electronic component that the mode of mutual same electrical characteristic manufactures according to identical standard (usual, to be using the sheet electronic component manufactured for the purpose of selling as mutually identical product) is shown.
By the sheet electronic component of plural check object being such as contained in each of the plural open-work 11a of the sheet electronic component holding plate 11 of testing fixture 10, thus position close to each other can be configured at.
As described above, above-mentioned " sheet electronic component of plural check object is configured at position close to each other " means " sheet electronic component configuring plural check object in the mode comprising at least two sheet electronic components be configured on position close to each other ".
Preferably above-mentioned " position close to each other " is " distance of the sheet electronic component of two check objects becomes the position of below 100mm ", more preferably " distance of the sheet electronic component of two check objects becomes the position of below 50mm ", particularly preferably be " distance of the sheet electronic component of two check objects becomes the position of below 30mm ".More preferably in arbitrary mode, the distance of the sheet electronic component of two check objects is more than 1mm.
Inspection voltage is given from each sheet electronic component to plural check object of separate (different) detector 14a, 14b.If do not use separate detector (using a detector), then the electric signal not producing each chip capacitor that as above aforementioned such each detector detects disturbs this problem (solution problem of the present invention) mutually.
From each detector, the inspection voltage with mutually identical or roughly the same frequency is applied to the sheet electronic component of plural check object.
The inspection voltage that the sheet electronic component of plural check object is applied roughly mutually identical mean the frequency of each inspection voltage be higher than minimum frequency wherein and below 1.1 times, frequency preferably below 1.05 times.
In addition, as described in shown in Fig. 7 and Fig. 9, sheet electronic component testing fixture 10 is at period P
11in can apply inspection voltage to chip capacitor 19a, therefore controller 15 carries out following control like that.
First, controller 15 is at time t
0switch 23a supply is designated as and closes the shutter 24a (being set to electric conducting state) be connected with chip capacitor 19a, the signal opening shutter 24b, 24c (being set to non-electric conducting state).Then, controller 15 is at time t
11supply instruction to detector 14a start to apply the signal (signal relevant with electric flux) of inspection voltage and indicate the signal (signal relevant with check processing) starting the current value detecting the electric current occurred in chip capacitor 19a.
In addition, controller 15 is at time t
0switch 23b supply is designated as and closes the shutter 24d (being set to electric conducting state) be electrically connected with chip capacitor 19d, the signal opening shutter 24e, 24f (being set to non-electric conducting state).Then, controller 15 is at time t
41instruction is supplied to detector 14b and starts to apply the signal that the signal of inspection voltage and instruction start the current value detecting the electric current occurred in chip capacitor 19d.
In addition, P between mutual unduplicated period implementation period
11in from detector 14a, inspection voltage and period P are applied to chip capacitor 19a
41in from detector 14b, inspection voltage is applied to chip capacitor 19d, therefore from terminating time t chip capacitor 19a being applied to inspection voltage
12play the time t after period D
41, start to apply inspection voltage to chip capacitor 19d.
And similarly, be set to and can apply inspection voltage to chip capacitor 19d, chip capacitor 19b, chip capacitor 19e, chip capacitor 19c and chip capacitor 19f, therefore controller 15 carries out the control identical with above-mentioned control.
In addition, period S
1be required till closed shutter 24a after above-mentioned signal is supplied to switch 23a during (hereinafter referred to as " during shutter action ").That is, shutter 24a is at time t
11closed, and become electric conducting state.Similarly, period S
2, S
3, S
4, S
5, S
6during being respectively the shutter action of shutter 24b, 24c, 24d, 24e, 24f.
And, in the inspection method of sheet electronic component of the present invention, preferably after above-mentioned each detector terminates to apply inspection voltage to each sheet electronic component (such as chip capacitor), before deciding the electrical characteristics of this sheet electronic component according to the magnitude of voltage of above-mentioned inspection voltage and the current value of electric current that applies the above-mentioned sheet electronic component that above-mentioned inspection voltage detects, start to apply inspection voltage from from above-mentioned different detector pair with above-mentioned different sheet electronic component.Thus, and check compared with the situation of plural sheet electronic component successively with a detector, in order to the time needed for checking the sheet electronic component of complete inspection object shortens.
As shown in figures 7 and 9, when using above-mentioned sheet electronic component inspection device 10, detector 14a is such as at time t
11start to apply inspection voltage to chip capacitor 19a, and at time t
12terminate the applying of inspection voltage.Then, detector 14a according to the magnitude of voltage of above-mentioned inspection voltage and the current value of electric current that occurs in chip capacitor 19a by applying this inspection voltage, at time t
13determine the electrostatic capacitance (electrical characteristics) of chip capacitor.
Like this, detector 14a is at above-mentioned time t
11with time t
13between during P
12(hereinafter referred to as " during electrical characteristics inspection "), usually at time t
12with time t
13between during, according to above-mentioned magnitude of voltage and current value, such as, determine electrostatic capacitance by data processing (calculation process).In addition, period P
22, P
32, P
42, P
52, P
62during being respectively the electrical characteristics inspection of chip capacitor 19b, 19c, 19d, 19e, 19f.
And as described above, detector 14a is at time t
12at time t after terminating to apply inspection voltage to chip capacitor 19a
13before determining the electrostatic capacitance (electrical characteristics) of capacitor according to above-mentioned magnitude of voltage and current value, particularly, at time t
41start to apply inspection voltage from from above-mentioned different detector 14b pair with above-mentioned different chip capacitor 19d.
That is, time t chip capacitor 19a being applied to inspection voltage is preferably terminated
12with start the time t next chip capacitor 19d being applied to inspection voltage
41between during D than above-mentioned time t
12the time t of the electrostatic capacitance of chip capacitor 19a is determined with detector 14a
13between during short.
Similarly, above-mentioned detector 14b is at time t
42at time t after terminating to apply inspection voltage to chip capacitor 19d
43before determining the electrostatic capacitance of chip capacitor 19d, particularly at time t
21, start to apply inspection voltage from from above-mentioned different detector 14a pair with above-mentioned different chip capacitor 19b.And, afterwards also by identical process, start to apply inspection voltage to chip capacitor 19e, chip capacitor 19c and chip capacitor 19f.
Figure 10 illustrates the figure from each detector, each chip capacitor (sheet electronic component) being applied to the period of inspection voltage in the inspection method of sheet electronic component in the past when checksum six sheet electronic components 19a, 19b, 19c, 19d, 19e, 19f.Charge to the horizontal axis representing time in Figure 10.
Detector 14a is from time t
11to time t
12till during P
11, inspection voltage is applied to chip capacitor 19a.In addition, similarly, detector 14a is from time t
21to time t
22till during P
21inspection voltage is applied to chip capacitor 19b.And similarly, detector 14a is from time t
31to time t
32till during P
31inspection voltage is applied to chip capacitor 19c.
Detector 14b is from time t
41to time t
42till during P
41inspection voltage is applied to chip capacitor 19d.In addition, similarly, detector 14b is from time t
51to time t
52till during P
51inspection voltage is applied to chip capacitor 19e.And similarly, detector 14b is from time t
61to time t
62till during P
61inspection voltage is applied to chip capacitor 19f.
In the inspection method of the sheet electronic component in the past using Figure 10 to illustrate, the object of plural detector is used to be, in the period mutually repeated, inspection voltage is applied to two chip capacitors (sheet electronic component), check the electrostatic capacitance of chip capacitor by twos simultaneously, make the supervision time shorten thus.
Such as, by implementing at period P in the period mutually repeated
11in from detector 14a, inspection voltage and at period P is applied to chip capacitor 19a
41in from detector 14b, inspection voltage is applied to chip capacitor 19d, thus realize the inspection carried out with (short time) at a high speed.
But, such as, as described above, according at period P
41in the electric signal (voltage, electric current) that occurs in the chip capacitor 19d being applied in inspection voltage and the noise that occurs is mixed at period P
11in the electric signal (voltage, electric current) that occurs in the chip capacitor 19a being applied in inspection voltage.In addition, the noise occurred according to the electric signal occurred in chip capacitor 19a is also mixed into the electric signal occurred in chip capacitor 19d.Namely the electric signal occurred in each chip capacitor disturbs mutually.Similarly, the electric signal occurred in chip capacitor 19b, 19e is yet interference mutually, and the electric signal occurred in chip capacitor 19c, 19f is in addition yet interference mutually.
Thus, in the inspection method of sheet electronic component in the past, two or more detector can be used to check the electrical characteristics of plural chip capacitor with (short time) at a high speed.Such as shown in Figure 10, at time t
0with time t
1between during (time) six chip capacitors can be checked.But as described above, because the electric signal occurred in each chip capacitor disturbs mutually, therefore the inspection precision of the electrical characteristics of each chip capacitor reduces.
On the other hand, in the inspection method of sheet electronic component of the present invention, as shown in Figure 9, such as, at time t
0with time t
2between during (time) check six chip capacitors.Thus, compared with the inspection method of above-mentioned sheet electronic component in the past, in the inspection method of sheet electronic component of the present invention, check elongated (time t of required time
2> time t
1).But in the inspection method of sheet electronic component of the present invention, owing to implementing in the mutual unduplicated period to apply inspection voltage to the chip capacitor of check object, therefore, as described above, the electric signal occurred in each chip capacitor does not interfere with each other mutually.Therefore, by implementing inspection method of the present invention, although the supervision time is elongated a little compared with the inspection method of above-mentioned sheet electronic component in the past, the detector of more than two can be used with high speed (short time) and the electrical characteristics of a large amount of chip capacitor of high precision inspection (sheet electronic component).
Below, the inspection method in order to implement sheet electronic component of the present invention is described in detail and the structure of the testing fixture (testing fixture of sheet electronic component of the present invention) used and preferred implementation.
Although the shape of the sheet electronic component holding plate 11 that the sheet electronic component testing fixture 10 shown in Fig. 2 possesses is not particularly limited, be usually set as discoid shape.
The plural open-work 11a of sheet electronic component holding plate 11 to be configured on the surface of sheet electronic component holding plate on multiple concentric circles the position of this concentric circles equalization segmentation.
In sheet electronic component testing fixture 10, to each inspection carrying out the electrical characteristics of chip capacitor of six sheet electronic components that the total arranged in diametric(al) between the center and periphery of sheet electronic component holding plate 11 six open-works are accommodated.The quantity of the open-work preferably arranged in diametric(al) between the center and periphery of sheet electronic component holding plate 11 is in the scope of 2 ~ 20, is more preferably in the scope of 4 ~ 12.
Sheet electronic component holding plate 11 is such as rotatably arranged (fixing) in base station 41 via substrate 45 and central shaft 42, by making the rotating driving device 43 being disposed in its rear side carry out action, thus intermittently rotate around central shaft 42.In addition, sheet electronic component holding plate 11 " intermittently rotating " means that each of angle (acute angle) formed by two straight lines that the rotation center position of each and sheet electronic component holding plate 11 of two open-works adjoined each other in the sense of rotation (circumferential direction of rotation) of sheet electronic component holding plate 11 is linked rotates.
Sheet electronic component holding plate 11 open-work each in, in order to the electrical characteristics of the chip capacitor (sheet electronic component) to check object check, the chip capacitor (sheet electronic component) of interim collecting check object in sheet electronic component resettlement section 31.
As shown in Figure 3, in sheet electronic component resettlement section 31, be equipped with sheet electronic component at the front side (in figure 3 left side) of above-mentioned sheet electronic component holding plate 11 and keep lid 44.Substrate 45 is equipped at the rear side (in figure 3 right side) of sheet electronic component holding plate 11.Multiple air discharge passage 45a of the surface opening respectively in sheet electronic component holding plate 11 side are formed at substrate 45.Each air discharge passage is connected with gas exhausting device (representation example is vacuum pump) 46.When making gas exhausting device 46 carry out action, from air discharge passage 45a Exhaust Gas, the gap between sheet electronic component holding plate 11 and substrate 45 becomes the state (becoming the pressure less than atmospheric pressure) be depressurized.
And, make sheet electronic component holding plate 11 while keep the inner side of lid 44 to supply chip capacitor 19 by sheet electronic component feedway (Fig. 2: 47) to sheet electronic component charging to the direction shown in the arrow 49 in Fig. 3 intermittently carries out rotating on one side, make gas exhausting device 46 carry out action and make the gap between sheet electronic component holding plate 11 and substrate 45 be decompression state.Thus, accommodate chip capacitor at each open-work 11a of sheet electronic component holding plate 11 temporarily.In addition, because the gap between sheet electronic component holding plate 11 and substrate 45 is in the state be depressurized, even if therefore when the chip capacitor 19 that sheet electronic component holding plate 11 is accommodated moves to position more closer to the top than the air discharge passage 45a of topmost in figure 3, chip capacitor 19 also out can not fall from open-work 11a.
Intermittent in rotary moving by above-mentioned sheet electronic component holding plate 11, thus the chip capacitor that the open-work of sheet electronic component holding plate is accommodated is sent to the sheet electronic component inspection portion 32 of the sheet electronic component testing fixture 10 shown in Fig. 2 and Fig. 4.
As shown in Figure 4, in order to be electrically connected with the detector of its electrical characteristics by each chip capacitor, the position close at two peristomes of each open-work 11a with sheet electronic component holding plate is configured with pair of electrodes terminal 12a, 12b.
Electrode terminal 12a is fixed on substrate 45 via the cylindrical shell 51 of the electrical insulating property arranged around it.Such as implement attrition process with the surface of the mode forming a level and smooth plane to sheet electronic component holding plate 11 side of electrode terminal 12a and substrate 45.
Electrode terminal 12b is fixed in electrode terminal support plate 53.Electrode terminal support plate 53 is fixed in actuating device of the linear motion (Fig. 2: 54).
Make above-mentioned actuating device of the linear motion carry out action, make electrode terminal support plate 53 move to sheet electronic component holding plate 11 side, each electrode terminal 12b supported by electrode terminal support plate 53 thus yet moves to sheet electronic component holding plate 11 side.Thus, each chip capacitor is clamped between electrode terminal 12a, 12b.Thus, the electrode 22a of each chip capacitor is electrically connected with electrode terminal 12a, and electrode 22b is electrically connected with electrode terminal 12b.Thus, each chip capacitor is electrically connected with each detector via pair of electrodes terminal 12a, 12b.
In addition, the position that each electrode terminal is electrically connected with each sheet electronic component when each open-work contains sheet electronic component is meaned with two peristomes " close position " of each open-work of the sheet electronic component holding plate being configured with pair of electrodes terminal, or the position that can be electrically connected with each sheet electronic component thus by making each electrode terminal move when being set to the moveable structure of each electrode terminal.
And, in sheet electronic component inspection portion 32, by six chip capacitors 19a, 19b, 19c, 19d, 19e, 19f each being arranged in row in the diametric(al) of sheet electronic component holding plate 11, according to above-mentioned inspection method of the present invention, its electrical characteristics are checked.
Detector 14a, 14b that sheet electronic component testing fixture 10 shown in Fig. 7 possesses are the detector of electrostatic capacitance.Detector 14a, 14b possess power supply 55, voltmeter 56 and galvanometer 57 respectively.The inspection voltage occurred in power supply 55 is applied to each chip capacitor by via switch 23a or switch 23b.The magnitude of voltage of inspection voltage is measured by voltmeter 56.Measured by the current value of galvanometer 57 to the electric current occurred in each chip capacitor by giving inspection voltage.In order to the above-mentioned magnitude of voltage of high-precision measuring and current value, possess amplifier 58 and resistor 59 at each detector.
In addition, in the circumferential direction of the sheet electronic component inspection portion 32 of the sheet electronic component testing fixture shown in Fig. 2, the pair of electrodes terminal be electrically connected from other detector (detectors of the inspection electrical characteristics different with above-mentioned detector 14a, 14b) can also be arranged further.
By the sheet electronic component discharge portion 33 chip capacitor that checked electrical characteristics being delivered to the sheet electronic component testing fixture 10 shown in Fig. 2 and Fig. 5 intermittent in rotary moving of sheet electronic component holding plate 11.
As shown in Figure 5, in sheet electronic component discharge portion 33, arrange at the front side (in Figure 5 downside) of above-mentioned sheet electronic component holding plate 11 the piping support lid 61 being formed with multiple open-work 61a.The pipe 62 of each path with forming chip capacitor (such as chip capacitor 19a) of the open-work 61a of piping support lid 61 is connected.But, in fig. 2, only charged to and the part pipe in each pipe 62 be connected of the open-work 61a of piping support lid 61.
In addition, multiple gas feeding path 45b of the surface opening of shape in sheet electronic component holding plate 11 side are respectively formed at the substrate 45 of the rear side (in Figure 5 upside) being configured at sheet electronic component holding plate 11.Each gas feeding path 45b is connected with pressurized gas supply device 63.
When making pressurized gas supply device 63 carry out action, gas-pressurized is supplied to gas feeding path 45b, such as, gas-pressurized is sprayed to the chip capacitor 19a of the open-work 11a being contained in sheet electronic component holding plate 11.Thus, chip capacitor is expelled to pipe 62.
Such as, above-mentioned chip capacitor 19a is by being in total ten open-work 61a of most peripheral side in multiple open-work 61a of being formed at the piping support lid 61 shown in Fig. 2.These ten open-work 61a are connected with sheet electronic component accepting container 64 via pipe 62 respectively.
Thus, above-mentioned chip capacitor 19a is accommodated in the sheet electronic component accepting container 64 corresponding with the electrical characteristics checked via any one in total ten pipes 62 connected to ten open-work 61a of above-mentioned piping support lid 61.
description of reference numerals
10: sheet electronic component testing fixture; 11: sheet electronic component holding plate; 11a: open-work; 12a, 12b: electrode terminal; 14a, 14b: detector; 15: controller; 15a control system; 19,19a, 19b, 19c, 19d, 19e, 19f: chip capacitor; 21: capacitor main body; 22a, 22b: electrode; 23a, 23b: switch; 24a, 24b, 24c, 24d, 24e, 24f: shutter; 25: controller; 31: sheet electronic component resettlement section; 32: sheet electronic component inspection portion; 33: sheet electronic component discharge portion; 41: base station; 42: central shaft; 43: rotating driving device; 44: sheet electronic component keeps lid; 45: substrate; 45a: air discharge passage; 45b: gas feeding path; 46: gas exhausting device; 47: sheet electronic component feedway (feed appliance); 49: the arrow that the sense of rotation of sheet electronic component holding plate is shown; 51: cylindrical shell; 52: electrode support plate; 53: electrode terminal support plate; 54: actuating device of the linear motion; 55: power supply; 56: voltmeter; 57: galvanometer; 58: amplifier; 59: resistor; 61: piping support lid; 61a: open-work; 62: pipe; 63: pressurized gas supply device; 64: sheet electronic component accepting container; 80: sheet electronic component testing fixture.
Claims (9)
1. the inspection method of a sheet electronic component, the electrical characteristics of each sheet electronic component of check object are checked, comprises following operation: under the state that the sheet electronic component of the plural check object manufactured in the mode of the same electrical characteristic that regulation is shown according to identical standard respectively is closely configured, each with the separate detector of this sheet electronic component is electrically connected; And from each detector, the inspection voltage with mutually identical or roughly the same frequency is applied to each sheet electronic component, the current value occurred in each sheet electronic component by applying this inspection voltage is detected with each detector, the feature of the inspection method of described sheet electronic component is, carries out the applying of the inspection voltage from each detector to each sheet electronic component in the mutual unduplicated period.
2. the inspection method of sheet electronic component according to claim 1,
Above-mentioned sheet electronic component is in the state of the open-work group being held in sheet electronic component holding plate, described sheet electronic component holding plate possesses on disk with the open-work group that the mutual concentrically ringed mode forming more than four row with interval configures, around central shaft, the rotatable earth's axis is supported on base station, but the open-work of each row is on the straight line that therefrom axle extends in the radial direction, carry out successively in the mutual unduplicated period for being in from the open-work group the straight line that central shaft extends in the radial direction to the applying of the inspection voltage of sheet electronic component.
3. the inspection method of sheet electronic component according to claim 2,
Open-work group is configured on disk in the concentrically ringed mode forming six row, checked by the sheet electronic component of detector A to the three row open-work groups being kept closer to disk periphery possessing total three pairs of electrode terminals, and by the detector B possessing total three pairs of electrode terminals, the sheet electronic component of three row open-work groups of the central shaft being kept closer to disk is checked.
4. the inspection method of sheet electronic component according to claim 2,
Open-work group is configured on disk in the concentrically ringed mode forming eight row, checked by the sheet electronic component of detector A to the four row open-work groups being kept closer to disk periphery possessing total four pairs of electrode terminals, and by the detector B possessing total four pairs of electrode terminals, the sheet electronic component of four row open-work groups of the central shaft being kept closer to disk is checked.
5. the inspection method of sheet electronic component according to claim 2,
Open-work group is configured on disk in the concentrically ringed mode forming 12 row, checked by the sheet electronic component of detector A to the four row open-work groups being kept closer to disk periphery possessing total four pairs of electrode terminals, by the detector B possessing total four pairs of electrode terminals, the sheet electronic component of four row open-work groups of the central shaft being kept closer to disk is checked, and by the detector C possessing total four pairs of electrode terminals, the sheet electronic component being maintained at the four row open-work groups be between the above-mentioned four row open-work groups close to outer circumferential side and the four row open-work groups close to central shaft is checked.
6. the inspection method of sheet electronic component according to claim 1,
Checked sheet electronic component is the parts possessing pair of electrodes on relative surface.
7. the inspection method of sheet electronic component according to claim 1,
Checked sheet electronic component is chip capacitor.
8. the inspection method of sheet electronic component according to claim 2,
Checked electrical characteristics are electrostatic capacitance.
9. a testing fixture for sheet electronic component, comprising: sheet electronic component holding plate, board-like material is formed in position close to each other the plural open-work temporarily can accommodating sheet electronic component and forms, pair of electrodes terminal, is configured in the position close with two peristomes of each open-work of this sheet electronic component holding plate, detector, is electrically connected with each of this pair of electrodes terminal, and controller, be electrically connected with each detector in the mode each detector being supplied to the signal relevant with electric flux and check processing, the testing fixture of described sheet electronic component be caught can: the inspection voltage applying to have mutually identical or roughly the same frequency from each detector via each period in regulation of electrode terminal to the sheet electronic component being accommodated in plural open-work, the current value occurred in each sheet electronic component by applying this inspection voltage is detected with each detector, it is characterized in that, possess at this controller with the control system controlled the period mutual unduplicated mode of each applying inspection voltage of sheet electronic component of the plural open-work being accommodated in sheet electronic component holding plate.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911355085.4A CN110837021A (en) | 2012-07-10 | 2013-07-10 | Method and apparatus for inspecting chip electronic component |
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|---|---|---|---|
| JP2012-154649 | 2012-07-10 | ||
| JP2012154649 | 2012-07-10 | ||
| PCT/JP2013/068857 WO2014010623A1 (en) | 2012-07-10 | 2013-07-10 | Method of inspection of chip electronic components and inspection device |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911355085.4A Division CN110837021A (en) | 2012-07-10 | 2013-07-10 | Method and apparatus for inspecting chip electronic component |
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|---|---|
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| KR (1) | KR102168907B1 (en) |
| CN (2) | CN110837021A (en) |
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| JP6312200B2 (en) * | 2014-02-07 | 2018-04-18 | 株式会社ヒューモラボラトリー | Chip capacitor inspection and sorting equipment |
| JP6496151B2 (en) * | 2014-02-19 | 2019-04-03 | 株式会社ヒューモラボラトリー | Chip electronic component inspection and sorting device with three or more electrodes |
| JP6370599B2 (en) * | 2014-05-02 | 2018-08-08 | 株式会社ヒューモラボラトリー | Continuous inspection method for electrical characteristics of chip electronic components |
| JP6417137B2 (en) | 2014-07-14 | 2018-10-31 | 株式会社ヒューモラボラトリー | Capacitor insulation resistance measuring device |
| TWI636265B (en) * | 2014-09-05 | 2018-09-21 | 慧萌高新科技有限公司 | Device for inspection and classification of characteristics of chip electronic parts |
| JP6506552B2 (en) | 2014-12-26 | 2019-04-24 | 株式会社ヒューモラボラトリー | Chip electronic parts inspection and sorting device |
| CN109459634B (en) * | 2018-11-07 | 2024-05-24 | 深圳振华富电子有限公司 | Chip component testing module |
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Also Published As
| Publication number | Publication date |
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| TWI598598B (en) | 2017-09-11 |
| TW201418727A (en) | 2014-05-16 |
| JP6370707B2 (en) | 2018-08-08 |
| JPWO2014010623A1 (en) | 2016-06-23 |
| CN110837021A (en) | 2020-02-25 |
| KR20150035728A (en) | 2015-04-07 |
| KR102168907B1 (en) | 2020-10-22 |
| WO2014010623A1 (en) | 2014-01-16 |
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