CN104396081B - 电化学装置的微波快速热处理 - Google Patents

电化学装置的微波快速热处理 Download PDF

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Publication number
CN104396081B
CN104396081B CN201380032074.7A CN201380032074A CN104396081B CN 104396081 B CN104396081 B CN 104396081B CN 201380032074 A CN201380032074 A CN 201380032074A CN 104396081 B CN104396081 B CN 104396081B
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China
Prior art keywords
layer
microwave
annealing
cathode
substrate
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201380032074.7A
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English (en)
Chinese (zh)
Other versions
CN104396081A (zh
Inventor
宋道英
冲·蒋
秉-圣·利奥·郭
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Applied Materials Inc
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Applied Materials Inc
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Priority claimed from US13/533,927 external-priority patent/US9136569B2/en
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to CN201710248875.7A priority Critical patent/CN107256945A/zh
Publication of CN104396081A publication Critical patent/CN104396081A/zh
Application granted granted Critical
Publication of CN104396081B publication Critical patent/CN104396081B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H01M4/0421—Methods of deposition of the material involving vapour deposition
    • H01M4/0423—Physical vapour deposition
    • H01M4/0426—Sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0471—Processes of manufacture in general involving thermal treatment, e.g. firing, sintering, backing particulate active material, thermal decomposition, pyrolysis
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/052—Li-accumulators
    • H01M10/0525—Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139—Processes of manufacture
    • H01M4/1391—Processes of manufacture of electrodes based on mixed oxides or hydroxides, or on mixtures of oxides or hydroxides, e.g. LiCoOx
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/48—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides
    • H01M4/52—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides of nickel, cobalt or iron
    • H01M4/525—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides of nickel, cobalt or iron of mixed oxides or hydroxides containing iron, cobalt or nickel for inserting or intercalating light metals, e.g. LiNiO2, LiCoO2 or LiCoOxFy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M6/00—Primary cells; Manufacture thereof
    • H01M6/40—Printed batteries, e.g. thin film batteries
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/058—Construction or manufacture
    • H01M10/0585—Construction or manufacture of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Secondary Cells (AREA)
  • Battery Electrode And Active Subsutance (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Cell Electrode Carriers And Collectors (AREA)
CN201380032074.7A 2012-06-26 2013-06-25 电化学装置的微波快速热处理 Expired - Fee Related CN104396081B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710248875.7A CN107256945A (zh) 2012-06-26 2013-06-25 电化学装置的微波快速热处理

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/533,927 US9136569B2 (en) 2008-05-21 2012-06-26 Microwave rapid thermal processing of electrochemical devices
US13/533,927 2012-06-26
PCT/US2013/047632 WO2014004518A1 (en) 2012-06-26 2013-06-25 Microwave rapid thermal processing of electrochemical devices

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201710248875.7A Division CN107256945A (zh) 2012-06-26 2013-06-25 电化学装置的微波快速热处理

Publications (2)

Publication Number Publication Date
CN104396081A CN104396081A (zh) 2015-03-04
CN104396081B true CN104396081B (zh) 2017-05-10

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CN201380032074.7A Expired - Fee Related CN104396081B (zh) 2012-06-26 2013-06-25 电化学装置的微波快速热处理
CN201710248875.7A Pending CN107256945A (zh) 2012-06-26 2013-06-25 电化学装置的微波快速热处理

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201710248875.7A Pending CN107256945A (zh) 2012-06-26 2013-06-25 电化学装置的微波快速热处理

Country Status (6)

Country Link
EP (2) EP2865042B1 (enExample)
JP (2) JP6276259B2 (enExample)
KR (1) KR20150032312A (enExample)
CN (2) CN104396081B (enExample)
TW (2) TWI610367B (enExample)
WO (1) WO2014004518A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9007674B2 (en) 2011-09-30 2015-04-14 View, Inc. Defect-mitigation layers in electrochromic devices
US20170038658A1 (en) 2011-09-30 2017-02-09 View, Inc. Particle removal during fabrication of electrochromic devices
EP3761112B1 (en) * 2014-04-22 2024-03-27 View, Inc. Particle removal during fabrication of electrochromic devices
KR20170078795A (ko) * 2014-10-31 2017-07-07 어플라이드 머티어리얼스, 인코포레이티드 전기화학 디바이스 층들의 증착과 레이저 프로세싱의 통합
CN107209432B (zh) * 2014-12-19 2021-09-03 唯景公司 减少电致变色装置中汇流条下方的缺陷
US11623433B2 (en) 2016-06-17 2023-04-11 View, Inc. Mitigating defects in an electrochromic device under a bus bar
CN109686915A (zh) * 2018-12-26 2019-04-26 蜂巢能源科技有限公司 锂离子电池正极片及制备方法、锂离子电池
CN116411251A (zh) * 2021-12-30 2023-07-11 日扬科技股份有限公司 一种快速退火设备

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999024637A1 (en) * 1997-11-07 1999-05-20 Applied Komatsu Technology, Inc. Method for annealing an amorphous film using microwave energy
WO1999051526A1 (de) * 1998-04-07 1999-10-14 Riedel-De Haen Gmbh Verfahren zur herstellung von lithium-metall-oxiden
CN102037586A (zh) * 2008-05-21 2011-04-27 应用材料股份有限公司 薄膜电池及其制造方法

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DE4239355A1 (de) * 1992-11-24 1994-05-26 Leybold Ag Transparentes Substrat mit einem transparenten Schichtsystem und Verfahren zur Herstellung eines solchen Schichtsystems
US5995271A (en) 1997-10-07 1999-11-30 Optical Coating Laboratory, Inc. Protective coating materials for electrochromic devices
TW442992B (en) * 1998-10-06 2001-06-23 Toshiba Battery Separator used for battery, its manufacturing method and alkaline secondary battery installed with the separator
US6795226B2 (en) * 2000-05-04 2004-09-21 Schott Corporation Chromogenic glazing
JP4479221B2 (ja) 2003-11-05 2010-06-09 株式会社ブリヂストン 薄膜の処理方法
JP4438381B2 (ja) * 2003-11-05 2010-03-24 株式会社ブリヂストン 結晶性ｉｔｏ膜、ｉｔｏ膜の結晶化方法、透明導電性フィルム、タッチパネル及び色素増感型太陽電池
JP4779321B2 (ja) 2004-08-20 2011-09-28 株式会社Ｉｈｉ 薄膜のマイクロ波加熱方法
WO2006063308A2 (en) * 2004-12-08 2006-06-15 Symmorphix, Inc. DEPOSITION OF LICoO2
US20060141138A1 (en) * 2004-12-29 2006-06-29 3M Innovative Properties Company Microwave annealing of membranes for use in fuel cell assemblies
US20070175020A1 (en) * 2006-01-27 2007-08-02 Matsushita Electric Industrial Co., Ltd. Method for producing solid state battery
JP2009048778A (ja) * 2007-08-13 2009-03-05 Kawai Musical Instr Mfg Co Ltd 透明導電層の形成方法及び積層構造体の形成方法
TWI547999B (zh) 2007-09-17 2016-09-01 Ｄｓｇｉ公司 微波退火半導體材料的系統及方法
JP2010283339A (ja) * 2009-05-02 2010-12-16 Semiconductor Energy Lab Co Ltd 光電変換装置及びその作製方法
US8289610B2 (en) * 2009-08-27 2012-10-16 Guardian Industries Corp. Electrochromic devices, assemblies incorporating electrochromic devices, and/or methods of making the same
US8580332B2 (en) * 2009-09-22 2013-11-12 Applied Materials, Inc. Thin-film battery methods for complexity reduction
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WO1999024637A1 (en) * 1997-11-07 1999-05-20 Applied Komatsu Technology, Inc. Method for annealing an amorphous film using microwave energy
WO1999051526A1 (de) * 1998-04-07 1999-10-14 Riedel-De Haen Gmbh Verfahren zur herstellung von lithium-metall-oxiden
CN102037586A (zh) * 2008-05-21 2011-04-27 应用材料股份有限公司 薄膜电池及其制造方法

Also Published As

Publication number Publication date
EP2865042A4 (en) 2016-03-02
KR20150032312A (ko) 2015-03-25
EP3379635A1 (en) 2018-09-26
TWI587398B (zh) 2017-06-11
JP6276259B2 (ja) 2018-02-07
CN107256945A (zh) 2017-10-17
TWI610367B (zh) 2018-01-01
TW201409576A (zh) 2014-03-01
JP2018092939A (ja) 2018-06-14
WO2014004518A1 (en) 2014-01-03
JP2015522927A (ja) 2015-08-06
EP2865042A1 (en) 2015-04-29
EP2865042B1 (en) 2018-05-16
TW201729297A (zh) 2017-08-16
CN104396081A (zh) 2015-03-04

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Granted publication date: 20170510

Termination date: 20190625