CN104342638A - 等离子体气相沉积用半自动插片机 - Google Patents
等离子体气相沉积用半自动插片机 Download PDFInfo
- Publication number
- CN104342638A CN104342638A CN201310333710.1A CN201310333710A CN104342638A CN 104342638 A CN104342638 A CN 104342638A CN 201310333710 A CN201310333710 A CN 201310333710A CN 104342638 A CN104342638 A CN 104342638A
- Authority
- CN
- China
- Prior art keywords
- substrate
- sheet machine
- rail car
- semi
- gas phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310333710.1A CN104342638B (zh) | 2013-08-03 | 2013-08-03 | 等离子体气相沉积用半自动插片机 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310333710.1A CN104342638B (zh) | 2013-08-03 | 2013-08-03 | 等离子体气相沉积用半自动插片机 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104342638A true CN104342638A (zh) | 2015-02-11 |
CN104342638B CN104342638B (zh) | 2017-04-05 |
Family
ID=52499074
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310333710.1A Expired - Fee Related CN104342638B (zh) | 2013-08-03 | 2013-08-03 | 等离子体气相沉积用半自动插片机 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN104342638B (zh) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201975408U (zh) * | 2010-12-22 | 2011-09-14 | 浙江昱辉阳光能源有限公司 | 自动插片机 |
CN202736960U (zh) * | 2012-05-19 | 2013-02-13 | 东莞市启天自动化设备有限公司 | 一种自动装片机 |
CN202749350U (zh) * | 2012-05-18 | 2013-02-20 | 南京华伯仪器科技有限公司 | 一种硅片裝卸篮设备 |
CN103369951A (zh) * | 2013-07-31 | 2013-10-23 | 钜鼎(扬州)光电显示科技有限公司 | Lcd自动贴片生产线及其lcd自动贴片生产方法 |
CN103569629A (zh) * | 2012-07-26 | 2014-02-12 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 料盒更换装置、插片机和半导体设备 |
CN203602710U (zh) * | 2013-08-03 | 2014-05-21 | 沙嫣 | 等离子体气相沉积用半自动插片机 |
-
2013
- 2013-08-03 CN CN201310333710.1A patent/CN104342638B/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201975408U (zh) * | 2010-12-22 | 2011-09-14 | 浙江昱辉阳光能源有限公司 | 自动插片机 |
CN202749350U (zh) * | 2012-05-18 | 2013-02-20 | 南京华伯仪器科技有限公司 | 一种硅片裝卸篮设备 |
CN202736960U (zh) * | 2012-05-19 | 2013-02-13 | 东莞市启天自动化设备有限公司 | 一种自动装片机 |
CN103569629A (zh) * | 2012-07-26 | 2014-02-12 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 料盒更换装置、插片机和半导体设备 |
CN103369951A (zh) * | 2013-07-31 | 2013-10-23 | 钜鼎(扬州)光电显示科技有限公司 | Lcd自动贴片生产线及其lcd自动贴片生产方法 |
CN203602710U (zh) * | 2013-08-03 | 2014-05-21 | 沙嫣 | 等离子体气相沉积用半自动插片机 |
Also Published As
Publication number | Publication date |
---|---|
CN104342638B (zh) | 2017-04-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101498957B (zh) | 固定结构 | |
CN106393932B (zh) | 一种方便送料的贴合机 | |
CN204528746U (zh) | 双板移载及取纸的板件收放装置 | |
CN106973503B (zh) | 一种pcb分板机用pcb板体固定模具装置 | |
CN106466958B (zh) | 一种缓冲吸膜的贴合机 | |
CN203602710U (zh) | 等离子体气相沉积用半自动插片机 | |
CN104342638A (zh) | 等离子体气相沉积用半自动插片机 | |
CN106427169B (zh) | 一种具有双模治具机构的贴合机 | |
CN109545726B (zh) | 一种物料移取装置和物料封装生产线 | |
CN106427160B (zh) | 一种具有移膜机构的贴合机 | |
CN205183561U (zh) | 秒轮组装机 | |
CN215626099U (zh) | 一种气管式真空吸吊机的吸盘机构 | |
CN207360068U (zh) | 一种电动大巴车电池箱固定锁止机构 | |
CN216155947U (zh) | 一种电子真空器件制造用镀膜设备 | |
CN208110506U (zh) | 一种用于大数据一体机的定位装置 | |
CN204527931U (zh) | 一种瓶体转移盒 | |
KR100823430B1 (ko) | 카세트 반송 방법 및 카세트 반송 시스템 | |
CN103811397B (zh) | 一种基板翻转对中装置 | |
CN106299029B (zh) | 一种基于不锈钢基底的太阳能薄膜拾取装置 | |
CN203728187U (zh) | 一种掩模取放装置 | |
CN206734888U (zh) | 一种烟气汞采样器存放收集装置 | |
CN202364507U (zh) | 电子设备的快速起拔锁定机构 | |
CN208790696U (zh) | 一种用于板材自动上下料的龙门式上下料机 | |
CN207373716U (zh) | 高周波热压自动上下料设备 | |
CN207161504U (zh) | 一种智能终端的简易固定机构 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20170111 Address after: 226400 Rudong Jiangsu Economic Development Zone, Rudong, Jialing River Road on the north side Applicant after: Nantong Johnson Photoelectric Technology Co., Ltd. Address before: 200050 Shanghai city Changning District East Ronghua Road No. 128 room 1704 Applicant before: Sha Yan Applicant before: Sha Xiaolin |
|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170405 Termination date: 20170803 |
|
CF01 | Termination of patent right due to non-payment of annual fee |