CN104238110B - A kind of pre-compensation system of collimator tube wave front aberration based on adaptive optics - Google Patents
A kind of pre-compensation system of collimator tube wave front aberration based on adaptive optics Download PDFInfo
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Abstract
Based on a collimator tube wave front aberration precompensation method for adaptive optics, comprising: large-aperture long-focus collimator tube and ADAPTIVE OPTICS SYSTEMS; Large-aperture long-focus collimator tube comprises mirror assembly and window glass; ADAPTIVE OPTICS SYSTEMS comprises light source assembly, beam splitting chip, the first off axis reflector mirror, the 2nd off axis reflector mirror, the 3rd off axis reflector mirror, wave front detector, wave-front corrector and refluxing reflection mirror; The present invention can detect the wave front aberration owing to processing is debug, temperature variation, thermograde, flow perturbation, the factor such as platform vibration are introduced to large-aperture long-focus collimator tube in real time, and these wave front aberration real-time high-precisions can be corrected, and then greatly improve calibration precision and the efficiency of large-aperture long-focus collimator tube, the development difficulty of much slower wide aperture long-focus collimator, and save a large amount of test period and cost.
Description
Technical field
The present invention relates to a kind of pre-compensation system of collimator tube wave front aberration, particularly a kind of pre-compensation system of collimator tube wave front aberration based on adaptive optics, belongs to field of optical detection.
Background technology
Collimator tube is the most frequently used optical system calibration equipment, it is possible to send parallel light, is used for simulating unlimited target far away. The collimator tube of high precision is the adjustment of the infinite conjugate imaging optical system such as photograph object lens and telescopic objective and the indispensable measuring basis of pixel soil loss normally. The collimator tube bore in past is less, and focal length is shorter, and processing alignment error is less, and the impact by environmental factorss such as temperature variation, thermograde, flow perturbation, platform vibrations is less, thus general without the need to wave front aberration is carried out real-Time Compensation correction. Along with the increase of bore, focal length, above-mentioned environmental factors is also increasing on the impact of collimator tube, and the wave front aberration of introducing be can not ignore.
At present, the collimator tube of heavy caliber, long-focus is normally tested when vacuumizing, with the disadvantageous effect avoiding the factors such as flow perturbation to be caused by collimator tube. Further, it is desirable that collimator tube is carried out high accuracy temperature control, high-performance vibration isolation, high stable support structure with avoid collimator tube self produce face shape error to system introduce wave front aberration, affect calibration precision. Traditional heavy caliber, long-focus collimator have bigger limitation, are mainly:
1) heavy caliber, long-focus collimator flow perturbation affect bigger, it is necessary to vacuumize and eliminated, and the process vacuumized is longer, affects testing progress, increase testing cost;
2) in traditional scheme, usually the window glass placing one piece of surface figure accuracy height in collimator tube exit, material homogeneity is good is needed to seal to realize, and air pressure missionary society inside and outside in vacuum makes window glass deform and introduce new wave front aberration, affect the calibration precision of collimator tube;
3) if without window glass, then generally collimator tube need to be docked with vacuum tank, tested optical system is placed in vacuum tank, and collimator tube and vacuum tank are together vacuumized, but tested optical system is in vacuum tank, debug detection very inconvenient;
3), in traditional scheme, vacuumize, temperature variation, the factor such as platform vibration be difficult to eliminate to the wave front aberration that collimator tube is introduced, affect the calibration precision of collimator tube;
4) in traditional scheme, it is difficult to the wave front aberration of self of Real-Time Monitoring collimator tube and calibration precision in working process;
5) in traditional scheme, high accuracy temperature control to be ensured, it is necessary to envrionment temperature controls within the specific limits all the time, if envrionment temperature needs the long period could realize temperature equilibrium after there is bigger change, reduce calibration efficiency.
Photon journal article numbering 1004-4213 (2008) 05 1,020 3, date issued is in May, 2008, name is called in " the LCD self-adapting optical correction of collimator tube flow perturbation " to describe a kind of LCD self-adapting optic system for the correction of collimator tube air-flow, mainly carry out LCD self-adapting optic system correction collimator tube flow perturbation test, the program adopts Shaclc-Hartmann sensor detection wave front aberration, adopt LCOS liquid crystal adjuster correction wave front aberration, light path adjustment is carried out with lens optical system, plane mirror is placed in collimator tube exit, and to realize, light path returns. the flow perturbation correction of the collimator tube that this kind of technical scheme tentatively realizes, but its weak point is: wave front detector only can detect the wave front aberration of collimator tube, the wave front aberration of ADAPTIVE OPTICS SYSTEMS self can not be detected, there is bigger non-co-light path aberration, affect ripple correction accuracy and calibration precision, LCOS liquid crystal adjuster, can only correct line polarized light, for natural light capacity usage ratio lower than 50%, the emending frequency of LCOS liquid crystal adjuster, lower than 100Hz, can only carry out low frequency aberration correction, LCOS liquid crystal adjuster has dispersion effect, is suitable for spectrum section narrow (being less than 50nm), can not be used for white light correction, adopt lens system, there is dispersion effect, light path volume relatively big, have the limitation such as camera lens surface reflect stray light, adopt plane mirror to substitute window glass, only may be used for ADAPTIVE OPTICS SYSTEMS and the correction of air-flow is tested, the normal calibration work of collimator tube cannot be ensured simultaneously, cannot practical application in engineering.
Summary of the invention
The technology of the present invention is dealt with problems and is: overcome the deficiencies in the prior art, provide a kind of pre-compensation system of collimator tube wave front aberration based on adaptive optics, overcome the shortcoming vacuumized at present based on the collimator tube of vacuum pumping method large-aperture long-focus, efficiently solve the environmental factorss such as temperature variation, thermograde, flow perturbation, platform vibration to the impact of the collimator tube calibration precision of large-aperture long-focus, the real-time detection achieving wave front aberration compensates with pre-, save a large amount of test period and cost, significantly improve calibration performance.
The technical solution of the present invention is: a kind of pre-compensation system of collimator tube wave front aberration based on adaptive optics, comprising: large-aperture long-focus collimator tube and ADAPTIVE OPTICS SYSTEMS;
Large-aperture long-focus collimator tube comprises mirror assembly and window glass;
ADAPTIVE OPTICS SYSTEMS comprises light source assembly, beam splitting chip, the first off axis reflector mirror, the 2nd off axis reflector mirror, the 3rd off axis reflector mirror, wave front detector, wave-front corrector and refluxing reflection mirror;
Light source assembly is positioned at the focal point of ADAPTIVE OPTICS SYSTEMS; The light part that light source assembly sends is gone out through beam splitting chip transmission, and another part reaches the 2nd off axis reflector mirror after beam splitting chip reflects, and the diverging light reflection that beam splitting chip is reflected by the 2nd off axis reflector mirror reaches wave-front corrector after becoming quasi-parallel light;
Wave-front corrector reflexes to the 3rd off axis reflector mirror after the quasi-parallel light that the 2nd off axis reflector mirror reflects is carried out wavefront correction; After the calibration that wave-front corrector is reflected by the 3rd off axis reflector mirror, quasi-parallel light enters collimator tube after converging at the focus of collimator tube;
The light inciding collimator tube reaches the window glass of collimator tube after mirror assembly reflection becomes parallel light, after parallel light arrives the window glass of collimator tube, part transmission, the detection being used for carrying out optical system, another part is back to beam splitting chip successively against input path after the window glass reflection of collimator tube after mirror assembly, the 3rd off axis reflector mirror, wave-front corrector and the 2nd off axis reflector mirror;
The light part being back to beam splitting chip reflexes to light source assembly through beam splitting chip, another part arrives the first off axis reflector mirror after beam splitting chip transmission, turning into quasi-parallel light after the first off axis reflector mirror reflects, this quasi-parallel light carries out entering wave front detector after angle is turned back through refluxing reflection mirror;
Wave front detector obtains the Wave-front phase information of incident beam, and Wave-front phase information is converted to the input voltage signal of wave-front corrector, wave-front corrector produces corresponding face shape according to input voltage signal, carries out the correction of wave front aberration, it is to increase collimator tube exports the wavefront precision of light.
Described mirror assembly comprises one or two non-spherical reflector, or comprises one or two non-spherical reflector and one or two refluxing reflection mirror.
The assembly that described light source assembly is single source or is made up of light source and target.
The surface albedo that described window glass is positioned at collimator tube inside is less than 1%, and the surface albedo being positioned at collimator tube outside is 20%��50%; The surface figure accuracy on the surface being positioned at collimator tube outside is better than ��/50rms, and described �� is the wavelength of incident beam.
Described wave front detector is Shack-Hartmann wave front detector, and wavefront sensing accuracy is better than ��/50rms.
Described wave-front corrector is MEMS distorting lens, and wavefront correction precision is better than ��/20rms.
Described wave-front corrector and wave front detector meet object-image relation, and the two effective bore mates mutually.
The present invention's advantage compared with prior art is:
(1) wave front detector of the present invention can detect the wave front aberration of the whole optical system comprising collimator tube and ADAPTIVE OPTICS SYSTEMS, the non-co-light path aberration between Wavefront detecting branch road and light illumination branch road can be eliminated, it is to increase the correction accuracy of wave front aberration and the calibration precision of collimator tube; Wave front detector described in existing document only can detect the wave front aberration of collimator tube, can not detect the wave front aberration of ADAPTIVE OPTICS SYSTEMS self, has bigger non-co-light path aberration, affects ripple correction accuracy and calibration precision;
(2) wave-front corrector of the present invention adopts MEMS distorting lens, has the advantages such as efficiency of light energy utilization height (more than 95%), emending frequency height (more than 1000Hz), non-dispersive effect, calibration spectrum section wide (full optical spectrum section); Scheme described in existing document, adopt LCOS liquid crystal adjuster, line polarized light can only be corrected, for natural light capacity usage ratio lower than 50%, emending frequency, lower than 100Hz, can only carry out low frequency aberration correction, has dispersion effect, is suitable for spectrum section narrow (being less than 50nm), white light correction can not be used for, thus there is bigger limitation;
(3) ADAPTIVE OPTICS SYSTEMS of the present invention adopts off-axis reflection optical system, have non-dispersive effect, compact construction, without advantages such as the surperficial reflect stray light of camera lens; Scheme described in existing document, adopts lens system, there is dispersion effect, light path volume relatively big, has the limitation such as camera lens surface reflect stray light;
(4) ADAPTIVE OPTICS SYSTEMS of the present invention processing can be debug, temperature variation, thermograde, flow perturbation, each factor such as platform vibration compensate correction to the various wave front aberrations that large-aperture long-focus collimator tube is introduced; Scheme described in existing document only can be used for the compensation correction that low frequency flow perturbation introduces wave front aberration, and the wave front aberration introduced for high-frequency air flow disturbance or other factors is helpless;
(5) window glass of zero diopter light pipe is optimized design by the present invention, has both ensured that ADAPTIVE OPTICS SYSTEMS is to the detected with high accuracy of wave front aberration and compensation correction, ensures again the normal calibration work of collimator tube; Scheme described in existing document adopts plane mirror to substitute window glass, only may be used for ADAPTIVE OPTICS SYSTEMS and the correction of air-flow test, cannot ensure that the normal calibration of collimator tube works simultaneously, cannot practical application in engineering;
(6) the present invention utilizes that processing is debug by ADAPTIVE OPTICS SYSTEMS, temperature variation, thermograde, flow perturbation, the factor such as platform vibration enter real-Time Compensation to the various wave front aberrations that large-aperture long-focus collimator tube is introduced and correct, eliminate the links such as the vacuumizing of wide aperture long-focus collimator, temperature equilibrium, debugging, vibration damping, greatly reduce temperature control requirement and the processing resetting difficulty of wide aperture long-focus collimator, save a large amount of test period and cost, and significantly improve calibration precision;
(7) present invention achieves the real-time detection of wave front aberration in working process and pre-compensation, the known light beam meeting the front requirement of special Wave can also be produced as requested to meet special detection requirement, significantly improve the calibration performance of large-aperture long-focus collimator tube.
Accompanying drawing explanation
Fig. 1 is heavy caliber collimator tube of the present invention and ADAPTIVE OPTICS SYSTEMS schematic diagram.
Embodiment
Carry out elaborating further to the specific embodiment of the present invention below in conjunction with accompanying drawing.
It is illustrated in figure 1 heavy caliber collimator tube of the present invention and ADAPTIVE OPTICS SYSTEMS schematic diagram, as shown in Figure 1, a kind of pre-compensation system of collimator tube wave front aberration based on adaptive optics provided by the invention, comprising: large-aperture long-focus collimator tube and ADAPTIVE OPTICS SYSTEMS;
Large-aperture long-focus collimator tube comprises parallel optical assembly 10 and window glass 11, and described collimator tube clear aperture is greater than 1.5m, and focal length is greater than 30m; Described parallel optical assembly 10 comprises one or two non-spherical reflector, or comprise one or two non-spherical reflector and one or two refluxing reflection mirror, the surface albedo that described window glass 11 is positioned at collimator tube inside is less than 1%, the surface albedo being positioned at collimator tube outside is 20%��50%, the surface figure accuracy on the surface being positioned at collimator tube outside is better than ��/50rms, and described �� is the wavelength of incident beam.
ADAPTIVE OPTICS SYSTEMS comprises light source assembly 4, beam splitting chip 5, first off axis reflector mirror 3, the 2nd off axis reflector mirror 6, the 3rd off axis reflector mirror 9, wave front detector 1, wave-front corrector 7 and refluxing reflection mirror 2; The assembly that described light source assembly 4 is generally single source or is made up of light source and target, described wave front detector 1 is better than the Shack-Hartmann wave front detector of ��/50rms for wavefront sensing accuracy;
Light source assembly 4 is positioned at the focal point of ADAPTIVE OPTICS SYSTEMS; Light that light source assembly 4 a sends part is gone out through beam splitting chip 5 transmission, and another part reaches after beam splitting chip 5 reflects after the diverging light reflection that beam splitting chip 5 reflects by the 2nd off axis reflector mirror the 6, two off axis reflector mirror 6 becomes quasi-parallel light and reaches wave-front corrector 7; Described off axis reflector mirror surface individual reflection has the reflectivity of more than 99%, and described beam splitting chip 5 has the reflectivity of 50% and the transmissivity of 50%.
Wave-front corrector 7 reflexes to the 3rd off axis reflector mirror 9 after the quasi-parallel light that the 2nd off axis reflector mirror 6 reflects is carried out wavefront correction; After the calibration that wave-front corrector 7 is reflected by the 3rd off axis reflector mirror 9, quasi-parallel light enters collimator tube after converging at the focus 8 of collimator tube; Described wave-front corrector 7 is better than the MEMS distorting lens of ��/20rms for wavefront correction precision;
The light inciding collimator tube reaches parallel smooth window glass 11 after the reflection of parallel optical assembly 10 becomes parallel light, after parallel light arrives parallel smooth window glass 11, part transmission, the detection being used for carrying out optical system, another part is back to beam splitting chip 5 successively against input path after being reflected by parallel smooth window glass 11 after parallel optical assembly 10, the 3rd off axis reflector mirror 9, wave-front corrector 7 and the 2nd off axis reflector mirror 6;
The light part being back to beam splitting chip 5 reflexes to light source assembly 4 through beam splitting chip 5, another part arrives the first off axis reflector mirror 3 after beam splitting chip 5 transmission, turning into quasi-parallel light after the first off axis reflector mirror 3 reflects, this quasi-parallel light carries out entering wave front detector 1 after angle is turned back through refluxing reflection mirror 2;
Wave front detector 1 obtains the Wave-front phase information of incident beam, and Wave-front phase information is converted to the input voltage signal of wave-front corrector 7, wave-front corrector 7 produces corresponding face shape according to input voltage signal, carry out the correction of wave front aberration, it is to increase collimator tube exports the wavefront precision (being better than ��/14rms) of light. Described wave-front corrector 7 meets object-image relation with wave front detector 1, and the two effective bore mates mutually.
The technical scheme of the present invention can make the calibration setup time (traditional scheme comprise vacuumize, temperature-stable etc.) of heavy caliber, long-focus collimator by present 8-12 hour, within shortening to 30 minutes; Make the wavefront precision of collimator tube output light by present ��/below 10rms, it is to increase to ��/more than 14rms.
The aberration that the present invention may be used for the large-aperture long-focus collimator tube that clear aperture is greater than 1.5m, focal length is greater than 30m corrects in real time, it is possible to significantly improve calibration precision and the calibration efficiency of large-aperture long-focus collimator tube.
The content that the present invention is not described in detail belongs to the known technology of those skilled in the art.
Claims (7)
1. the pre-compensation system of collimator tube wave front aberration based on adaptive optics, it is characterised in that comprising: large-aperture long-focus collimator tube and ADAPTIVE OPTICS SYSTEMS;
Large-aperture long-focus collimator tube comprises parallel optical assembly (10) and window glass (11);
ADAPTIVE OPTICS SYSTEMS comprises light source assembly (4), beam splitting chip (5), the first off axis reflector mirror (3), the 2nd off axis reflector mirror (6), the 3rd off axis reflector mirror (9), wave front detector (1), wave-front corrector (7) and refluxing reflection mirror (2);
Light source assembly (4) is positioned at the focal point of ADAPTIVE OPTICS SYSTEMS; The light part that light source assembly (4) sends is gone out through beam splitting chip (5) transmission, another part reaches the 2nd off axis reflector mirror (6) after beam splitting chip (5) reflects, and the diverging light reflection that beam splitting chip (5) is reflected by the 2nd off axis reflector mirror (6) reaches wave-front corrector (7) after becoming quasi-parallel light;
Wave-front corrector (7) reflexes to the 3rd off axis reflector mirror (9) after the quasi-parallel light that the 2nd off axis reflector mirror (6) reflects is carried out wavefront correction; After the calibration that wave-front corrector (7) is reflected by the 3rd off axis reflector mirror (9), quasi-parallel light enters collimator tube after converging at the focus (8) of collimator tube;
The light inciding collimator tube reaches the window glass (11) of collimator tube after parallel optical assembly (10) reflection becomes parallel light, after parallel light arrives the window glass (11) of collimator tube, part transmission, the detection being used for carrying out optical system, another part is back to beam splitting chip (5) successively against input path after window glass (11) reflection of collimator tube after parallel optical assembly (10), the 3rd off axis reflector mirror (9), wave-front corrector (7) and the 2nd off axis reflector mirror (6);
The light part being back to beam splitting chip (5) reflexes to light source assembly (4) through beam splitting chip (5), another part arrives the first off axis reflector mirror (3) after beam splitting chip (5) transmission, turning into quasi-parallel light after the first off axis reflector mirror (3) reflects, this quasi-parallel light carries out entering wave front detector (1) after angle is turned back through refluxing reflection mirror (2);
Wave front detector (1) obtains the Wave-front phase information of incident beam, and Wave-front phase information is converted to the input voltage signal of wave-front corrector (7), wave-front corrector (7) produces corresponding face shape according to input voltage signal, carry out the correction of wave front aberration, it is to increase collimator tube exports the wavefront precision of light.
2. a kind of pre-compensation system of collimator tube wave front aberration based on adaptive optics according to claim 1, it is characterized in that: described parallel optical assembly (10) comprises one or two non-spherical reflector, or comprise one or two non-spherical reflector and one or two refluxing reflection mirror.
3. a kind of pre-compensation system of collimator tube wave front aberration based on adaptive optics according to claim 1, it is characterised in that: described light source assembly (4) is single source or the assembly that is made up of light source and target.
4. a kind of pre-compensation system of collimator tube wave front aberration based on adaptive optics according to claim 1, it is characterized in that: the surface albedo that described window glass (11) is positioned at collimator tube inside is less than 1%, the surface albedo being positioned at collimator tube outside is 20%��50%; The surface figure accuracy on the surface being positioned at collimator tube outside is better than ��/50rms, and described �� is the wavelength of incident beam.
5. a kind of pre-compensation system of collimator tube wave front aberration based on adaptive optics according to claim 1, it is characterised in that: described wave front detector (1) is Shack-Hartmann wave front detector, and wavefront sensing accuracy is better than ��/50rms.
6. a kind of pre-compensation system of collimator tube wave front aberration based on adaptive optics according to claim 1, it is characterised in that: described wave-front corrector (7) is MEMS distorting lens, and wavefront correction precision is better than ��/20rms.
7. a kind of pre-compensation system of collimator tube wave front aberration based on adaptive optics according to claim 1, it is characterized in that: described wave-front corrector (7) and wave front detector (1) meet object-image relation, and the two effective bore mates mutually.
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| CN109883542A (en) * | 2019-03-29 | 2019-06-14 | 中国科学院长春光学精密机械与物理研究所 | No Wavefront detecting expands the laser beam expanding transmission method and system of optical path compensation |
| CN110018563A (en) * | 2019-03-29 | 2019-07-16 | 中国科学院长春光学精密机械与物理研究所 | The laser beam expanding Transmission system for expanding optical path compensation and method based on self-reflection light |
| CN111811430B (en) * | 2020-07-22 | 2021-09-14 | 中国科学院西安光学精密机械研究所 | Optical element surface shape measuring device and method in low-temperature environment |
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| CN101021616B (en) * | 2007-03-23 | 2011-07-20 | 中国科学院光电技术研究所 | Multi-deformable-mirror series-connection combined wavefront corrector based on conjugate imaging |
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