CN104238110B - A kind of pre-compensation system of collimator tube wave front aberration based on adaptive optics - Google Patents
A kind of pre-compensation system of collimator tube wave front aberration based on adaptive optics Download PDFInfo
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Abstract
一种基于自适应光学的平行光管波前像差预补偿方法,包括:大口径长焦距平行光管和自适应光学系统;大口径长焦距平行光管包括反射镜组件和窗口玻璃;自适应光学系统包括光源组件、分束片、第一离轴反射镜、第二离轴反射镜、第三离轴反射镜、波前探测器、波前校正器和折转反射镜;本发明可以实时探测由于加工装调、温度变化、温度梯度、气流扰动、平台振动等因素给大口径长焦距平行光管引入的波前像差,并且可以将这些波前像差实时高精度地校正掉,进而大大提高大口径长焦距平行光管的检校精度和效率,大幅降低大孔径长焦距平行光管的研制难度,并节省大量试验时间和成本。
A collimator wavefront aberration pre-compensation method based on adaptive optics, including: a collimator with a large aperture and a long focal length and an adaptive optics system; the collimator with a large aperture and a long focal length includes a mirror assembly and a window glass; an adaptive optics The optical system includes a light source assembly, a beam splitter, a first off-axis reflector, a second off-axis reflector, a third off-axis reflector, a wavefront detector, a wavefront corrector and a folding reflector; the present invention can real-time Detect the wavefront aberrations introduced to the large-aperture long-focus collimator due to factors such as processing and adjustment, temperature changes, temperature gradients, airflow disturbances, and platform vibrations, and can correct these wavefront aberrations in real time with high precision, and then Greatly improve the calibration accuracy and efficiency of the large-aperture long-focus collimator, greatly reduce the difficulty of developing the large-aperture long-focus collimator, and save a lot of test time and cost.
Description
技术领域technical field
本发明涉及一种平行光管波前像差预补偿装置,特别是一种基于自适应光学的平行光管波前像差预补偿装置,属于光学检测领域。The invention relates to a collimator wavefront aberration precompensation device, in particular to a collimator wavefront aberration precompensation device based on adaptive optics, which belongs to the field of optical detection.
背景技术Background technique
平行光管是最常用光学系统检校设备,可以发出平行光,用来模拟无限远目标。高精度的平行光管通常是照相物镜和望远物镜等无限共轭成像光学系统的调校和像质检验不可缺少的测量基准。过去的平行光管口径较小,焦距较短,加工装调误差较小,受温度变化、温度梯度、气流扰动、平台振动等环境因素的影响较小,因而一般无需对波前像差进行实时补偿校正。随着口径、焦距的增大,上述环境因素对平行光管的影响也越来越大,引入的波前像差不可忽略。The collimator is the most commonly used optical system calibration device, which can emit parallel light to simulate an infinitely distant target. High-precision collimators are usually an indispensable measurement benchmark for the adjustment and image quality inspection of infinite conjugate imaging optical systems such as photographic objectives and telescopic objectives. In the past, collimator tubes had smaller apertures, shorter focal lengths, smaller processing and adjustment errors, and were less affected by environmental factors such as temperature changes, temperature gradients, airflow disturbances, and platform vibrations. Compensation correction. With the increase of aperture and focal length, the impact of the above environmental factors on the collimator is also increasing, and the introduced wavefront aberration cannot be ignored.
目前,大口径、长焦距的平行光管通常是在抽真空的状态下进行测试,以避免气流扰动等因素对平行光管造成的不利影响。此外,需要对平行光管进行高精度温度控制、高性能隔振、高稳定的结构支撑以避免平行光管自身产生面形误差进而给系统引入波前像差,影响检校精度。传统的大口径、长焦距平行光管具有较大的局限性,主要在于:At present, the collimator with large aperture and long focal length is usually tested in a vacuum state to avoid adverse effects on the collimator caused by factors such as airflow disturbance. In addition, high-precision temperature control, high-performance vibration isolation, and high-stable structural support for the collimator are required to avoid the surface shape error of the collimator itself and introduce wavefront aberration into the system, affecting the calibration accuracy. The traditional collimator with large aperture and long focal length has great limitations, mainly in:
1)大口径、长焦距平行光管气流扰动影响较大,需要抽真空加以消除,而抽真空的过程较长,影响测试进度,增加测试成本;1) The large-caliber and long-focus collimator has a great impact on the airflow disturbance, which requires vacuuming to eliminate it, and the vacuuming process is long, which affects the test progress and increases the test cost;
2)传统方案中,通常需要在平行光管出口处放置一块面形精度高、材料均匀性良好的窗口玻璃以实现密封,而在抽真空过程中内外的气压差会使窗口玻璃发生变形并引入新的波前像差,影响平行光管的检校精度;2) In the traditional scheme, it is usually necessary to place a window glass with high surface shape accuracy and good material uniformity at the exit of the collimator to achieve sealing. However, the difference in air pressure inside and outside during the vacuuming process will deform the window glass and introduce The new wavefront aberration affects the calibration accuracy of the collimator;
3)如果不用窗口玻璃,则一般需将平行光管与真空罐对接,将被检光学系统置于真空罐里,并将平行光管和真空罐一同抽真空,然而被检光学系统处于真空罐中,装调检测很不方便;3) If the window glass is not used, it is generally necessary to connect the collimator to the vacuum tank, place the optical system to be inspected in the vacuum tank, and evacuate the collimator and the vacuum tank together, but the optical system to be inspected is in the vacuum tank In the middle, the installation and adjustment inspection is very inconvenient;
3)传统方案中,抽真空、温度变化、平台振动等因素给平行光管引入的波前像差难以消除,影响平行光管的检校精度;3) In the traditional scheme, it is difficult to eliminate the wavefront aberration introduced by factors such as vacuuming, temperature change, and platform vibration to the collimator, which affects the calibration accuracy of the collimator;
4)传统方案中,难以在工作过程中实时监测平行光管的自身的波前像差和检校精度;4) In the traditional scheme, it is difficult to monitor the wavefront aberration and calibration accuracy of the collimator in real time during the working process;
5)传统方案中,要保证高精度温度控制,需要环境温度始终控制在一定范围内,如果环境温度发生较大变化后需要较长时间才能实现温度平衡,降低检校效率。5) In the traditional scheme, to ensure high-precision temperature control, the ambient temperature must always be controlled within a certain range. If the ambient temperature changes greatly, it will take a long time to achieve temperature balance, which will reduce the calibration efficiency.
光子学报文章编号1004-4213(2008)05—1020—3,发表日期为2008年5月,名称为“平行光管气流扰动的液晶自适应光学校正”中介绍了一种用于平行光管气流校正的液晶自适应光学系统,主要是开展了液晶自适应光学系统校正平行光管气流扰动试验,该方案采用采用夏克-哈特曼探测器探测波前像差、采用LCOS液晶校正器校正波前像差、用透镜光学系统进行光路调整,将平面反射镜置于平行光管出口处以实现光路返回。这种技术方案初步实现的平行光管的气流扰动校正,但其不足之处在于:波前探测器仅能探测平行光管的波前像差,不能探测自适应光学系统自身的波前像差,具有较大的非共光路像差,影响波校正精度和检校精度;LCOS液晶校正器,只能对线偏振光进行校正,对于自然光能量利用率低于50%;LCOS液晶校正器的校正频率低于100Hz,只能进行低频像差校正;LCOS液晶校正器具有色散效应、适用谱段窄(小于50nm),不能用于白光校正;采用透镜系统,存在色散效应、光路体积较大,有镜头表面反射杂散光等局限性;采用平面反射镜替代窗口玻璃,仅可以用于自适应光学系统对气流的校正实验,无法同时保证平行光管正常检校工作,无法在工程上实际应用。Acta Photonica Sinica article number 1004-4213 (2008) 05-1020-3, date of publication is May 2008, titled "LCD Adaptive Optics Correction for Collimator Airflow Disturbance" introduces a method for collimator airflow The corrected liquid crystal adaptive optics system mainly carried out the liquid crystal adaptive optics system to correct the collimator airflow disturbance test. The scheme uses the Shack-Hartmann detector to detect the wavefront For the front aberration, the optical path is adjusted by the lens optical system, and the plane reflector is placed at the exit of the collimator to realize the return of the optical path. This technical solution preliminarily realizes the airflow disturbance correction of the collimator, but its disadvantage is that the wavefront detector can only detect the wavefront aberration of the collimator, but cannot detect the wavefront aberration of the adaptive optics system itself , has a large non-common optical path aberration, which affects the accuracy of wave correction and calibration; LCOS liquid crystal corrector can only correct linearly polarized light, and the energy utilization rate of natural light is lower than 50%; the correction of LCOS liquid crystal corrector The frequency is lower than 100Hz, and only low-frequency aberration correction can be performed; LCOS liquid crystal corrector has dispersion effect, and the applicable spectrum band is narrow (less than 50nm), so it cannot be used for white light correction; lens system has dispersion effect, and the optical path volume is large, so there is The lens surface reflects stray light and other limitations; the use of flat mirrors instead of window glass can only be used for the correction experiment of the adaptive optics system for the airflow, and cannot guarantee the normal correction work of the collimator at the same time, so it cannot be practically applied in engineering.
发明内容Contents of the invention
本发明的技术解决问题是:克服现有技术的不足,提供了一种基于自适应光学的平行光管波前像差预补偿装置,克服了目前基于抽真空方法大口径长焦距的平行光管抽真空的缺点,有效解决了温度变化、温度梯度、气流扰动、平台振动等环境因素对大口径长焦距的平行光管检校精度的影响,实现了波前像差的实时探测与预补偿,节省了大量试验时间和成本,显著提高了检校性能。The technical problem of the present invention is: to overcome the deficiencies of the prior art, to provide a collimator wavefront aberration precompensation device based on adaptive optics, to overcome the current collimator with large diameter and long focal length based on the vacuum method The shortcomings of vacuuming effectively solve the influence of environmental factors such as temperature changes, temperature gradients, airflow disturbances, and platform vibrations on the calibration accuracy of large-aperture and long-focus collimators, and realize real-time detection and pre-compensation of wavefront aberrations. It saves a lot of test time and cost, and significantly improves the calibration performance.
本发明的技术解决方案是:一种基于自适应光学的平行光管波前像差预补偿装置,包括:大口径长焦距平行光管和自适应光学系统;The technical solution of the present invention is: a collimator wavefront aberration precompensation device based on adaptive optics, including: a large-aperture long-focus collimator and an adaptive optics system;
大口径长焦距平行光管包括反射镜组件和窗口玻璃;Large aperture and long focal length collimator including mirror assembly and window glass;
自适应光学系统包括光源组件、分束片、第一离轴反射镜、第二离轴反射镜、第三离轴反射镜、波前探测器、波前校正器和折转反射镜;The adaptive optics system includes a light source assembly, a beam splitter, a first off-axis mirror, a second off-axis mirror, a third off-axis mirror, a wavefront detector, a wavefront corrector and a folding mirror;
光源组件位于自适应光学系统的焦点处;光源组件发出的光线一部分经分束片透射出去,另一部分经分束片反射后达到第二离轴反射镜,第二离轴反射镜将分束片反射的发散光反射变成准平行光后达到波前校正器;The light source component is located at the focal point of the adaptive optics system; part of the light emitted by the light source component is transmitted through the beam splitter, and the other part is reflected by the beam splitter and reaches the second off-axis reflector, and the second off-axis reflector divides the beam splitter The reflected divergent light is reflected into quasi-parallel light and reaches the wavefront corrector;
波前校正器对第二离轴反射镜反射的准平行光进行波前校正后反射至第三离轴反射镜;第三离轴反射镜将波前校正器反射的校准后准平行光会聚于平行光管的焦点后进入平行光管;The wavefront corrector performs wavefront correction on the quasi-parallel light reflected by the second off-axis reflector and then reflects it to the third off-axis reflector; the third off-axis reflector converges the calibrated quasi-parallel light reflected by the wavefront corrector on the The focus of the collimator enters the collimator;
入射到平行光管的光线经反射镜组件反射变成平行光后达到平行光管的窗口玻璃,平行光到达平行光管的窗口玻璃后,一部分透射,用来进行光学系统的检测,另一部分被平行光管的窗口玻璃反射后逆着入射光路依次经过反射镜组件、第三离轴反射镜、波前校正器和第二离轴反射镜后返回至分束片;The light incident on the collimator is reflected by the reflector assembly and becomes parallel light, and then reaches the window glass of the collimator. After the parallel light reaches the window glass of the collimator, part of the light is transmitted for the detection of the optical system, and the other part is passed through the window glass of the collimator. After being reflected by the window glass of the collimator, it passes through the mirror assembly, the third off-axis mirror, the wavefront corrector and the second off-axis mirror in turn against the incident light path, and then returns to the beam splitter;
返回至分束片的光线一部分经分束片反射至光源组件,另一部分经分束片透射后到达第一离轴反射镜,经第一离轴反射镜反射后变为准平行光,该准平行光经过折转反射镜进行角度折转后进入波前探测器;Part of the light returning to the beam splitter is reflected by the beam splitter to the light source assembly, and the other part is transmitted by the beam splitter and reaches the first off-axis reflector, and becomes quasi-parallel light after being reflected by the first off-axis reflector. The parallel light enters the wavefront detector after being angled by the folding mirror;
波前探测器获得入射光线的波前相位信息,并将波前相位信息转换为波前校正器的输入电压信号,波前校正器根据输入电压信号产生相应的面形,进行波前像差的校正,提高平行光管输出光线的波前精度。The wavefront detector obtains the wavefront phase information of the incident light, and converts the wavefront phase information into the input voltage signal of the wavefront corrector. The wavefront corrector generates the corresponding surface shape according to the input voltage signal, and performs the wavefront aberration Correction to improve the wavefront accuracy of the output light from the collimator.
所述反射镜组件包括一个或两个非球面反射镜,或者包括一个或两个非球面反射镜和一个或两个折转反射镜。The mirror assembly includes one or two aspheric mirrors, or one or two aspheric mirrors and one or two folding mirrors.
所述光源组件为单个光源或者由光源和靶标组成的组件。The light source component is a single light source or a component composed of a light source and a target.
所述窗口玻璃位于平行光管内部的表面反射率小于1%,位于平行光管外部的表面反射率为20%~50%;位于平行光管外部的表面的面形精度优于λ/50rms,所述λ为入射光线的波长。The surface reflectance of the window glass located inside the collimator is less than 1%, and the reflectance of the surface located outside the collimator is 20% to 50%; the surface shape accuracy of the surface located outside the collimator is better than λ/50rms, The λ is the wavelength of the incident light.
所述波前探测器为夏克-哈特曼波前探测器,波前探测精度优于λ/50rms。The wavefront detector is a Shaker-Hartmann wavefront detector, and the wavefront detection accuracy is better than λ/50rms.
所述波前校正器为MEMS变形镜,波前校正精度优于λ/20rms。The wavefront corrector is a MEMS deformable mirror, and the wavefront correction accuracy is better than λ/20rms.
所述波前校正器与波前探测器满足物像关系,且二者有效口径相匹配。The wavefront corrector and the wavefront detector satisfy the object-image relationship, and the effective apertures of the two match.
本发明与现有技术相比的优点在于:The advantage of the present invention compared with prior art is:
(1)本发明波前探测器能够探测包括平行光管和自适应光学系统在内的整个光学系统的波前像差,可以消除波前探测支路与光源照明支路之间的非共光路像差,提高了波前像差的校正精度和平行光管的检校精度;现有文献中所述的波前探测器仅能探测平行光管的波前像差,不能探测自适应光学系统自身的波前像差,具有较大的非共光路像差,影响波校正精度和检校精度;(1) The wavefront detector of the present invention can detect the wavefront aberration of the entire optical system including the collimator and the adaptive optics system, and can eliminate the non-common optical path between the wavefront detection branch and the light source illumination branch Aberration, which improves the correction accuracy of the wavefront aberration and the calibration accuracy of the collimator; the wavefront detector described in the existing literature can only detect the wavefront aberration of the collimator, and cannot detect the adaptive optics system Its own wavefront aberration has a large non-common optical path aberration, which affects the accuracy of wave correction and calibration;
(2)本发明的波前校正器采用MEMS变形镜,具有光能利用率高(95%以上)、校正频率高(1000Hz以上)、无色散效应、校正谱段宽(全光学谱段)等优点;现有文献中所述方案,采用LCOS液晶校正器,只能对线偏振光进行校正,对于自然光能量利用率低于50%,校正频率低于100Hz,只能进行低频像差校正,具有色散效应、适用谱段窄(小于50nm),不能用于白光校正,因而具有较大的局限性;(2) The wavefront corrector of the present invention adopts MEMS deformable mirror, which has high utilization rate of light energy (above 95%), high correction frequency (above 1000Hz), no dispersion effect, wide correction spectrum (full optical spectrum), etc. Advantages: The scheme described in the existing literature uses LCOS liquid crystal correctors, which can only correct linearly polarized light. The energy utilization rate of natural light is lower than 50%, and the correction frequency is lower than 100Hz. Only low-frequency aberrations can be corrected. Dispersion effect, narrow applicable spectrum (less than 50nm), cannot be used for white light correction, so it has great limitations;
(3)本发明的自适应光学系统采用离轴反射光学系统,具有无色散效应、结构紧凑、无镜头表面反射杂散光等优点;现有文献中所述方案,采用透镜系统,存在色散效应、光路体积较大,有镜头表面反射杂散光等局限性;(3) The adaptive optics system of the present invention adopts an off-axis reflective optical system, which has the advantages of no dispersion effect, compact structure, and no lens surface reflection stray light; the scheme described in the existing literature adopts a lens system, which has dispersion effects, The volume of the optical path is large, and there are limitations such as reflection of stray light on the lens surface;
(4)本发明的自适应光学系统可以对加工装调、温度变化、温度梯度、气流扰动、平台振动等各因素给大口径长焦距平行光管引入的各种波前像差进行补偿校正;现有文献中所述方案仅能用于低频气流扰动引入波前像差的补偿校正,对于高频气流扰动或其他因素引入的波前像差无能为力;(4) The adaptive optics system of the present invention can compensate and correct various wavefront aberrations introduced by various factors such as processing and adjustment, temperature changes, temperature gradients, airflow disturbances, and platform vibrations to the large-aperture long-focus collimator; The schemes described in the existing literature can only be used for compensation and correction of wavefront aberrations introduced by low-frequency airflow disturbances, and are helpless for wavefront aberrations introduced by high-frequency airflow disturbances or other factors;
(5)本发明对平光光管的窗口玻璃进行优化设计,既保证自适应光学系统对波前像差的高精度探测与补偿校正,又保证平行光管正常检校工作;现有文献中所述方案采用平面反射镜替代窗口玻璃,仅可以用于自适应光学系统对气流的校正实验,无法同时保证平行光管正常检校工作,无法在工程上实际应用;(5) The present invention optimizes the design of the window glass of the flat light tube, which not only ensures the high-precision detection and compensation correction of the wavefront aberration by the adaptive optics system, but also ensures the normal calibration work of the collimator; The above scheme uses a plane reflector to replace the window glass, which can only be used for the correction experiment of the airflow by the adaptive optics system, and cannot guarantee the normal correction work of the collimator at the same time, and cannot be practically applied in engineering;
(6)本发明利用自适应光学系统将加工装调、温度变化、温度梯度、气流扰动、平台振动等因素给大口径长焦距平行光管引入的各种波前像差进实时补偿校正掉,省去了大孔径长焦距平行光管的抽真空、温度平衡、调试、振动衰减等环节,大大降低大孔径长焦距平行光管的温度控制要求和加工装调难度,节省了大量试验时间和成本,并显著提高了检校精度;(6) The present invention uses an adaptive optical system to compensate and correct various wavefront aberrations introduced by factors such as processing and adjustment, temperature changes, temperature gradients, airflow disturbances, and platform vibrations to the large-aperture long-focus collimator in real time. It eliminates the vacuuming, temperature balance, debugging, vibration attenuation and other links of the large-aperture long-focus collimator, greatly reduces the temperature control requirements and processing and adjustment difficulties of the large-aperture long-focus collimator, and saves a lot of test time and cost. , and significantly improved the calibration accuracy;
(7)本发明实现了在工作过程中波前像差的实时探测和预补偿,也可以根据要求产生已知的满足特殊波前要求的光束以满足特殊检测要求,显著提高了大口径长焦距平行光管的检校性能。(7) The present invention realizes the real-time detection and pre-compensation of wavefront aberrations in the working process, and can also generate known beams that meet special wavefront requirements to meet special detection requirements, which significantly improves the long focal length of large apertures. Calibration performance of collimators.
附图说明Description of drawings
图1为本发明大口径平行光管及自适应光学系统示意图。FIG. 1 is a schematic diagram of a large-aperture collimator and an adaptive optics system of the present invention.
具体实施方式detailed description
下面结合附图对本发明的具体实施方式进行进一步地详细阐述。The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings.
如图1所示为本发明大口径平行光管及自适应光学系统示意图,由图1可知,本发明提供的一种基于自适应光学的平行光管波前像差预补偿装置,包括:大口径长焦距平行光管和自适应光学系统;As shown in Figure 1, it is a schematic diagram of a large-aperture collimator and an adaptive optics system of the present invention. It can be seen from Figure 1 that a collimator wavefront aberration precompensation device based on adaptive optics provided by the present invention includes: Aperture long focal length collimator and adaptive optics system;
大口径长焦距平行光管包括平行光组件10和窗口玻璃11,所述的平行光管通光口径大于1.5m,焦距大于30m;所述平行光组件10包括一个或两个非球面反射镜,或者包括一个或两个非球面反射镜和一个或两个折转反射镜,所述窗口玻璃11位于平行光管内部的表面反射率小于1%,位于平行光管外部的表面反射率为20%~50%,位于平行光管外部的表面的面形精度优于λ/50rms,所述λ为入射光线的波长。The large diameter and long focal length collimator includes a parallel light assembly 10 and a window glass 11. The light aperture of the collimator is greater than 1.5m and the focal length is greater than 30m; the parallel light assembly 10 includes one or two aspheric mirrors, Or include one or two aspheric mirrors and one or two folding mirrors, the reflectance of the surface of the window glass 11 located inside the collimator is less than 1%, and the reflectance of the surface located outside the collimator is 20% ~50%, the surface shape accuracy of the surface located outside the collimator is better than λ/50rms, where λ is the wavelength of the incident light.
自适应光学系统包括光源组件4、分束片5、第一离轴反射镜3、第二离轴反射镜6、第三离轴反射镜9、波前探测器1、波前校正器7和折转反射镜2;所述光源组件4一般为单个光源或者由光源和靶标组成的组件,所述波前探测器1为波前探测精度优于λ/50rms的夏克-哈特曼波前探测器;The adaptive optics system includes a light source assembly 4, a beam splitter 5, a first off-axis mirror 3, a second off-axis mirror 6, a third off-axis mirror 9, a wavefront detector 1, a wavefront corrector 7 and Refracting mirror 2; the light source component 4 is generally a single light source or a component composed of a light source and a target, and the wavefront detector 1 is a Shack-Hartmann wavefront with a wavefront detection accuracy better than λ/50rms detector;
光源组件4位于自适应光学系统的焦点处;光源组件4发出的光线一部分经分束片5透射出去,另一部分经分束片5反射后达到第二离轴反射镜6,第二离轴反射镜6将分束片5反射的发散光反射变成准平行光后达到波前校正器7;所述的离轴反射镜表面单次反射具有99%以上的反射率,所述的分束片5具有50%的反射率和50%的透射率。The light source assembly 4 is located at the focal point of the adaptive optics system; part of the light emitted by the light source assembly 4 is transmitted through the beam splitter 5, and the other part is reflected by the beam splitter 5 and reaches the second off-axis mirror 6, and the second off-axis reflection The divergent light reflected by the beam splitter 5 is reflected by the mirror 6 into a quasi-parallel light and reaches the wavefront corrector 7; the single reflection of the off-axis mirror surface has a reflectivity of more than 99%, and the beam splitter 5 has 50% reflectivity and 50% transmittance.
波前校正器7对第二离轴反射镜6反射的准平行光进行波前校正后反射至第三离轴反射镜9;第三离轴反射镜9将波前校正器7反射的校准后准平行光会聚于平行光管的焦点8后进入平行光管;所述波前校正器7为波前校正精度优于λ/20rms的MEMS变形镜;The wavefront corrector 7 performs wavefront correction on the quasi-parallel light reflected by the second off-axis reflector 6 and then reflects it to the third off-axis reflector 9; The quasi-parallel light converges at the focal point 8 of the collimator and then enters the collimator; the wavefront corrector 7 is a MEMS deformable mirror with a wavefront correction accuracy better than λ/20rms;
入射到平行光管的光线经平行光组件10反射变成平行光后达到平行光窗口玻璃11,平行光到达平行光窗口玻璃11后,一部分透射,用来进行光学系统的检测,另一部分被平行光窗口玻璃11反射后逆着入射光路依次经过平行光组件10、第三离轴反射镜9、波前校正器7和第二离轴反射镜6后返回至分束片5;The light incident on the parallel light pipe is reflected by the parallel light component 10 and becomes parallel light, and then reaches the parallel light window glass 11. After the parallel light reaches the parallel light window glass 11, part of the light is transmitted for the detection of the optical system, and the other part is paralleled. After being reflected by the light window glass 11, it passes through the parallel light assembly 10, the third off-axis mirror 9, the wavefront corrector 7 and the second off-axis mirror 6 in turn against the incident light path, and then returns to the beam splitter 5;
返回至分束片5的光线一部分经分束片5反射至光源组件4,另一部分经分束片5透射后到达第一离轴反射镜3,经第一离轴反射镜3反射后变为准平行光,该准平行光经过折转反射镜2进行角度折转后进入波前探测器1;Part of the light returning to the beam splitter 5 is reflected by the beam splitter 5 to the light source assembly 4, and the other part is transmitted by the beam splitter 5 and reaches the first off-axis reflector 3, and is reflected by the first off-axis reflector 3 to become quasi-parallel light, the quasi-parallel light enters the wavefront detector 1 after being angle-refracted by the folding mirror 2;
波前探测器1获得入射光线的波前相位信息,并将波前相位信息转换为波前校正器7的输入电压信号,波前校正器7根据输入电压信号产生相应的面形,进行波前像差的校正,提高平行光管输出光线的波前精度(优于λ/14rms)。所述波前校正器7与波前探测器1满足物像关系,且二者有效口径相匹配。The wavefront detector 1 obtains the wavefront phase information of the incident light, and converts the wavefront phase information into the input voltage signal of the wavefront corrector 7, and the wavefront corrector 7 generates a corresponding surface shape according to the input voltage signal to perform wavefront Aberration correction improves the wavefront accuracy of the light output from the collimator (better than λ/14rms). The wavefront corrector 7 and the wavefront detector 1 satisfy the object-image relationship, and the effective apertures of the two match.
本发明的技术方案可以使大口径、长焦距平行光管的检校准备时间(传统方案包括抽真空、温度稳定等)由现在的8-12小时,缩短为30分钟以内;使平行光管输出光线的波前精度由现在的λ/10rms以下,提高到λ/14rms以上。The technical scheme of the present invention can shorten the calibration preparation time (traditional solutions include vacuuming, temperature stabilization, etc.) of large-diameter and long-focus collimators from the current 8-12 hours to within 30 minutes; The wavefront accuracy of light is improved from below λ/10rms to above λ/14rms.
本发明可以用于通光口径大于1.5m、焦距大于30m的大口径长焦距平行光管的像差实时校正,可以显著提高大口径长焦距平行光管的检校精度和检校效率。The invention can be used for real-time correction of aberrations of large-diameter and long-focus collimator tubes with a clear aperture of more than 1.5 m and a focal length of more than 30 m, and can significantly improve the calibration accuracy and calibration efficiency of the large-diameter long-focus collimator tube.
本发明未作详细描述的内容属本领域技术人员的公知技术。The contents not described in detail in the present invention belong to the well-known technology of those skilled in the art.
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