CN100549753C - ADAPTIVE OPTICS SYSTEMS based on self-reference wavefront sensor and continuous surface deformable mirror - Google Patents
ADAPTIVE OPTICS SYSTEMS based on self-reference wavefront sensor and continuous surface deformable mirror Download PDFInfo
- Publication number
- CN100549753C CN100549753C CNB200710099702XA CN200710099702A CN100549753C CN 100549753 C CN100549753 C CN 100549753C CN B200710099702X A CNB200710099702X A CN B200710099702XA CN 200710099702 A CN200710099702 A CN 200710099702A CN 100549753 C CN100549753 C CN 100549753C
- Authority
- CN
- China
- Prior art keywords
- self
- wavefront sensor
- continuous surface
- semi
- deformable mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Mechanical Light Control Or Optical Switches (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
ADAPTIVE OPTICS SYSTEMS based on self-reference wavefront sensor and continuous surface deformable mirror, by wave-front corrector, self-reference wavefront sensor and industrial computer based on the Mach-Zehnder interferometric method are formed, light beam is at first by behind the wave-front corrector, reflection enters self-reference wavefront sensor based on the Mach-Zehnder interferometric method, the wavefront information that detects based on the self-reference wavefront sensor of Mach-Zehnder interferometric method through a matrix operation of industrial computer after directly output control voltage to wave-front corrector and carry out closed loop.Wave-front corrector adopts the separate unit continuous surface deformable mirror that response speed is faster arranged, wave front detector utilization principle of interference, have higher spatial resolution and detection accuracy, can greatly improve wavefront correction performance like this based on the ADAPTIVE OPTICS SYSTEMS of interfering wave front detector, enlarged the application of this ADAPTIVE OPTICS SYSTEMS, superiority is obvious.
Description
Technical field
The present invention relates to a kind of ADAPTIVE OPTICS SYSTEMS, particularly a kind of continuous surface deformable mirror adaptive optics corrective system based on self-reference wavefront sensor.
Background technology
At present among ADAPTIVE OPTICS SYSTEMS, the application of Hartmann wave front sensor is comparatively extensive, and when the corrugated of incident bore increases, survey the sub-number of perforations that needs to increase the Shack-Hartmann Wavefront sensor, and the CCD number of pixels of each corresponding some in sub-aperture, therefore on the CCD target surface, need more pixel, the CCD camera has been proposed higher requirement.Each pixel in based on the ADAPTIVE OPTICS SYSTEMS of self-reference wavefront sensor on the CCD target surface can be regarded a sub-aperture as, each pixel gets final product the part of direct corresponding wavefront like this, when incident corrugated bore increases, compare with the Shack-Hartmann Wavefront sensor, can effectively reduce the pixel count of CCD camera, and effectively improve the spatial resolution of Wavefront detecting.In ADAPTIVE OPTICS SYSTEMS based on the self-reference wavefront sensor of Mach-Zehnder interferometric method, the distorting lens corrector of continuous surface can be made into and be complementary corresponding with Wavefront sensor CCD pixel, the wavefront information that arrives by wave front detector do that front wave solutions is twined and conjugation after, just directly in the controlled deformation mirror with the corresponding driver element of CCD pixel.At article " High Order; Reconstructor-Free Adaptive Optics for 6-8meter class Telescopes " Maud Langlois, Roger Angel, MichaelLloyd-Hart, adopted the liquid crystal spatial modulator as wave-front corrector among the Venice 2001Beyond Conventional Adaptive Optics, it is not high that but the liquid crystal spatial modulator itself has the efficiency of light energy utilization, chromatic dispersion is serious, response speed waits shortcoming slowly, has seriously influenced the application of this ADAPTIVE OPTICS SYSTEMS when atmospheric disturbance.What therefore in the present invention, its corrector had adopted that material such as PZT, PMN become separate type just can well overcome above shortcoming.
Summary of the invention
Technology of the present invention is dealt with problems and is: overcome the deficiencies in the prior art, a kind of efficiency of light energy utilization height is provided, the ADAPTIVE OPTICS SYSTEMS that response speed is fast based on self-reference wavefront sensor and continuous surface deformable mirror, in this ADAPTIVE OPTICS SYSTEMS, wave front detector has adopted the self-reference wavefront sensor based on interferometric method, has promoted precision and spatial resolution that the corrugated is surveyed.
One of technical solution of the present invention is: based on the ADAPTIVE OPTICS SYSTEMS of self-reference wavefront sensor and continuous surface deformable mirror, it is characterized in that: by wave-front corrector, self-reference wavefront sensor and industrial computer based on the Mach-Zehnder interferometric method are formed, light beam is at first by behind the wave-front corrector, reflection enters self-reference wavefront sensor based on the Mach-Zehnder interferometric method, the wavefront information that detects based on the self-reference wavefront sensor of Mach-Zehnder interferometric method through a matrix operation of industrial computer after directly output control voltage to wave-front corrector and carry out closed loop.
Described wave-front corrector adopts the continuous surface deformable mirror of the separate unit with very fast response speed to constitute.
In the described self-reference wavefront sensor based on the Mach-Zehnder interferometric method, wherein one road light carries out pin hole filtering, and filtered light beam is as the reference light beam; Another road light path is constant substantially, does the decay back and interferes with reference beam, has obtained two width of cloth interference images, adopts two CCD to gather simultaneously, and outputs in the industrial computer synchronously.
In the described self-reference wave front detector, can in reference path, add phase shifter, conveniently obtain the multi-frame interferometry image and repeatedly survey based on the Mach-Zehnder interferometric method.
The unit cell arrangement of described continuous surface deformable mirror and number of unit and arrange based on detected pixel in two CCD imaging detectors in the self-reference wavefront sensor of Mach-Zehnder interferometric method is complementary, the wavefront information that obtains do that front wave solutions is twined and conjugation after just directly in the controlled deformation mirror with the corresponding driver element of CCD pixel.
Two of technical solution of the present invention is: based on the ADAPTIVE OPTICS SYSTEMS of self-reference wavefront sensor and continuous surface deformable mirror, it is characterized in that: by continuous surface deformable mirror, self-reference wavefront sensor and industrial computer based on the Mach-Zehnder interferometric method are formed, wherein the self-reference wavefront sensor based on the Mach-Zehnder interferometric method comprises: first semi-transparent semi-reflecting lens, pinhole filter, completely reflecting mirror, optical attenuator, phase shifter, first imaging detector and second imaging detector, after the aberration corrugated enters system, at first pass through the reflection of continuous surface deformable mirror, enter self-reference wavefront sensor based on the Mach-Zehnder interferometric method, through first semi-transparent semi-reflecting lens corrugated is divided into two bundles, wherein a branch of as wavefront information to be detected source through after the semi-transparent semi-reflecting mirror reflection again through completely reflecting mirror reflection after the optical attenuator decay, to the second semi-transparent semi-reflecting lens place; The light beam that first semi-transparent semi-reflecting lens is crossed in transmission has simultaneously produced reference beam through behind the pinhole filter, this reference beam is again through the last second semi-transparent semi-reflecting lens place that arrives of the reflection of phase shifter, the two-beam ripple forms interference fringe at the second semi-transparent semi-reflecting lens place, image in respectively on first imaging detector and second imaging detector, this moment, phase shifter did not produce phase differential, first imaging detector and second imaging detector will collect two width of cloth interference images simultaneously and output in the industrial computer, make phase shifter produce the phase differential of a pi/2 afterwards, two width of cloth interference images with first imaging detector and the second imaging detector collection export in the industrial computer again, after two step phase shifts, obtain 4 amplitude shift interference figure, in industrial computer, do to obtain wavefront information after the matrix operation, to output in the continuous surface deformable mirror after its conjugation, carry out the closed loop wavefront correction.
The present invention compared with prior art has following advantage:
(1) the present invention adopts the self-reference wavefront sensor based on the Mach-Zehnder interferometric method, has promoted precision and spatial resolution that the corrugated is surveyed.
(2) compare with traditional Hartmann wave front sensor, the self-reference wavefront sensor cost is lower, and can be with wavefront information as independently point source output, and subsequent treatment is comparatively convenient, and when using with distorting lens number of unit coupling, control algolithm is more or less freely.
(3) continuous surface deformable mirror of the present invention has adopted material such as PZT, PMN, compare with the liquid crystal spatial modulator, has response speed faster, capacity usage ratio is higher, characteristics such as chromatic dispersion is little, can improve this wavefront correction performance greatly, enlarge the application of this ADAPTIVE OPTICS SYSTEMS, and can when atmospheric exploration, use based on the ADAPTIVE OPTICS SYSTEMS of interfering wave front detector.
(4) light beam is earlier by behind the wave-front corrector, reflection enters the self-reference wavefront sensor based on the Mach-Zehnder interferometric method, output controlled quentity controlled variable control wave-front corrector carried out closed loop after the wavefront information that detects was made a front wave solutions winding and conjugation through industrial computer to wavefront information, can improve this wavefront correction performance based on the ADAPTIVE OPTICS SYSTEMS of interfering wave front detector greatly.
Description of drawings
Fig. 1 is the principle schematic based on the self-reference wavefront sensor of Mach-Zehnder interferometric method.
Embodiment
As shown in Figure 1, after the aberration corrugated enters system, at first pass through the reflection of continuous surface deformable mirror 10, enter self-reference wavefront sensor based on the Mach-Zehnder interferometric method, through first semi-transparent semi-reflecting lens 1 corrugated is divided into two bundles, wherein a branch of as wavefront information to be detected source through after semi-transparent semi-reflecting lens 1 reflection again through completely reflecting mirror 4 reflections after optical attenuator 5 decay, to second semi-transparent semi-reflecting lens, 6 places; The light beam that first semi-transparent semi-reflecting lens 1 is crossed in transmission has simultaneously produced with reference to the corrugated through behind the pinhole filter 2, this reference wavefront is again through last second semi-transparent semi-reflecting lens, 6 places that arrive of the reflection of phase shifter 3, the two-beam ripple images in respectively on first ccd detector 7 and second ccd detector 8 in second semi-transparent semi-reflecting lens, 6 place's interference fringes.In implementation process, first step phase shifter does not produce phase differential, first ccd detector 7 and second ccd detector 8 will collect two width of cloth interference images simultaneously and output in the industrial computer 9, make phase shifter 3 produce the phase differential of a pi/2 afterwards, that first ccd detector 7 and second ccd detector 8 are gathered exporting in the industrial computer 9 again, obtain 4 amplitude shift interference figure in two steps after the phase shifts, establish the incident corrugated and be:
Wherein, A
0(x y) is complex amplitude,
Be incident corrugated phase place, in the ideal case, through after the reference path, the corrugated becomes plane wave, and is as follows:
U
r(x,y)=A
r(x,y)e
iθ (2)
Wherein, θ is differing of phase shifter generation, and is relevant through behind the interference system when two bundles like this, when light meets once more, will produce interference:
Wherein, I
1(x y) is the interference light intensity of surveying on first ccd detector 7, I
2(x y) is the interference light intensity of surveying on second ccd detector 8, and two-way phase of light wave phase difference of pi is to work as owing to reference path in first ccd detector, the 8 detection light paths experiences primary event more
The time,
Obtain four step phase shift light intensity, can inverting obtain phase front thus:
(9) in the formula
Be the wavefront information that is directly obtained by inverse trigonometric function arctan θ, (π π) need separate winding to it, establishes: unwrap () owing to arctan θ ∈; For separating the winding function, then:
Phase unwrapping around, can adopt least square (difference) method, find the solution a Poisson equation that satisfies the Neumann boundary condition, multiple method for solving is arranged, dct transform, FFT fast fourier transform etc.
In industrial computer, at first calculated recovery matrix p
-1, the corrugated matrix after the detection is input in the industrial computer 9 to multiply each other with recovery matrix separates winding, and the corrugated matrix after the recovery that obtains outputs to continuous surface deformable mirror 10, carries out the closed loop wavefront correction.
Claims (3)
1, ADAPTIVE OPTICS SYSTEMS based on self-reference wavefront sensor and continuous surface deformable mirror, it is characterized in that: by continuous surface deformable mirror, self-reference wavefront sensor and industrial computer based on the Mach-Zehnder interferometric method are formed, wherein the self-reference wavefront sensor based on the Mach-Zehnder interferometric method comprises: first semi-transparent semi-reflecting lens, pinhole filter, completely reflecting mirror, optical attenuator, phase shifter, first imaging detector and second imaging detector, after the aberration corrugated enters system, at first pass through the reflection of continuous surface deformable mirror, enter self-reference wavefront sensor based on the Mach-Zehnder interferometric method, through first semi-transparent semi-reflecting lens corrugated is divided into two bundles, wherein a branch of as wavefront information to be detected source through after the semi-transparent semi-reflecting mirror reflection again through completely reflecting mirror reflection after the optical attenuator decay, to the second semi-transparent semi-reflecting lens place; The light beam that first semi-transparent semi-reflecting lens is crossed in transmission has simultaneously produced reference beam through behind the pinhole filter, this reference beam is again through the last second semi-transparent semi-reflecting lens place that arrives of the reflection of phase shifter, the two-beam ripple forms interference fringe at the second semi-transparent semi-reflecting lens place, image in respectively on first imaging detector and second imaging detector, this moment, phase shifter did not produce phase differential, first imaging detector and second imaging detector will collect two width of cloth interference images simultaneously and output in the industrial computer, make phase shifter produce the phase differential of a pi/2 afterwards, two width of cloth interference images with first imaging detector and the second imaging detector collection export in the industrial computer again, after two step phase shifts, obtain 4 amplitude shift interference figure, in industrial computer, do to obtain wavefront information after the matrix operation, to output in the continuous surface deformable mirror after its conjugation, carry out the closed loop wavefront correction.
2, the ADAPTIVE OPTICS SYSTEMS based on self-reference wavefront sensor and continuous surface deformable mirror according to claim 1 is characterized in that: the unit cell arrangement of described continuous surface deformable mirror and number of unit and arrange based on detected pixel in two imaging detectors in the self-reference wavefront sensor of Mach-Zehnder interferometric method is complementary.
3, the ADAPTIVE OPTICS SYSTEMS based on self-reference wavefront sensor and continuous surface deformable mirror according to claim 1 is characterized in that: described continuous surface deformable mirror adopts PZT or PMN material to make.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB200710099702XA CN100549753C (en) | 2007-05-29 | 2007-05-29 | ADAPTIVE OPTICS SYSTEMS based on self-reference wavefront sensor and continuous surface deformable mirror |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB200710099702XA CN100549753C (en) | 2007-05-29 | 2007-05-29 | ADAPTIVE OPTICS SYSTEMS based on self-reference wavefront sensor and continuous surface deformable mirror |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101055348A CN101055348A (en) | 2007-10-17 |
CN100549753C true CN100549753C (en) | 2009-10-14 |
Family
ID=38795272
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB200710099702XA Expired - Fee Related CN100549753C (en) | 2007-05-29 | 2007-05-29 | ADAPTIVE OPTICS SYSTEMS based on self-reference wavefront sensor and continuous surface deformable mirror |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN100549753C (en) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101963765B (en) * | 2010-08-17 | 2012-04-18 | 中国科学院光电技术研究所 | Light beam stabilizing device in projection mask aligner |
CN102494785B (en) * | 2011-10-21 | 2013-04-24 | 中国科学院光电技术研究所 | Device and method for measuring transfer matrix of adaptive optics system based on Hadamard matrix multi-channel method |
CN102621687B (en) * | 2012-04-09 | 2014-05-28 | 中国科学院光电技术研究所 | Solar multi-conjugate adaptive optical system |
CN102788681B (en) * | 2012-07-18 | 2015-04-01 | 中国科学院光电技术研究所 | Sine modulation synchronous measuring device and method for self-adaptive optical system transfer matrix |
CN102889935A (en) * | 2012-09-14 | 2013-01-23 | 中国科学院光电技术研究所 | Self-adaptation optical system near-field wave-front sensor calibration device and calibration method based on phase-diversity method |
CN102967379B (en) * | 2012-12-10 | 2014-06-18 | 中国科学院光电技术研究所 | Wavefront sensor used for solar self-adaptive optical system |
CN102981270A (en) * | 2012-12-25 | 2013-03-20 | 中国科学院长春光学精密机械与物理研究所 | Unblocked adaptive varifocal optical system and calibration method thereof |
CN104238110B (en) * | 2014-09-19 | 2016-06-01 | 北京空间机电研究所 | A kind of pre-compensation system of collimator tube wave front aberration based on adaptive optics |
CN105223691B (en) * | 2015-11-02 | 2017-05-24 | 中国人民解放军国防科学技术大学 | Adaptive optical correcting device and method based on sodium layer structured beacon |
CN109163814B (en) * | 2018-07-06 | 2019-12-27 | 中国工程物理研究院激光聚变研究中心 | Device for improving wavefront measurement and correction precision and using method thereof |
CN109683312B (en) * | 2019-01-22 | 2021-03-12 | 中国工程物理研究院激光聚变研究中心 | Method for adjusting image transfer relationship of adaptive optical system |
CN110109245B (en) * | 2019-05-21 | 2021-05-04 | 中国工程物理研究院激光聚变研究中心 | Method for improving wavefront correction spatial resolution of deformable mirror |
CN113029365B (en) * | 2021-03-11 | 2022-11-11 | 中国科学院光电技术研究所 | Large-view-field high-order composite wavefront sensor for solar adaptive optics |
CN112987321B (en) * | 2021-03-22 | 2022-08-02 | 中国科学院光电技术研究所 | Method and device for generating high-power vortex laser |
CN114265199A (en) * | 2021-12-17 | 2022-04-01 | 中国科学院上海光学精密机械研究所 | Wave-front correction device and method based on filtering aperture modulation |
CN115128797B (en) * | 2022-07-04 | 2023-07-18 | 中国科学院光电技术研究所 | Adaptive optical system optimization calibration and control method |
CN116819912B (en) * | 2023-08-31 | 2023-11-21 | 光科芯图(北京)科技有限公司 | Adaptive optics system, exposure system, wave aberration adjusting method and apparatus |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1664650A (en) * | 2005-03-14 | 2005-09-07 | 中国科学院光电技术研究所 | Double wave front calibrator self-adaptive optical system |
CN1818739A (en) * | 2006-03-16 | 2006-08-16 | 中国地质大学(武汉) | Deformative reflector |
CN1831499A (en) * | 2006-04-10 | 2006-09-13 | 中国科学院光电技术研究所 | Adaptive optical system based on micro-prism sharck Harteman wave-front sensor |
-
2007
- 2007-05-29 CN CNB200710099702XA patent/CN100549753C/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1664650A (en) * | 2005-03-14 | 2005-09-07 | 中国科学院光电技术研究所 | Double wave front calibrator self-adaptive optical system |
CN1818739A (en) * | 2006-03-16 | 2006-08-16 | 中国地质大学(武汉) | Deformative reflector |
CN1831499A (en) * | 2006-04-10 | 2006-09-13 | 中国科学院光电技术研究所 | Adaptive optical system based on micro-prism sharck Harteman wave-front sensor |
Non-Patent Citations (1)
Title |
---|
波前校正器和波前传感器的匹配. 胡朝晖,姜文汉.强激光与粒子束,第8卷第3期. 1996 * |
Also Published As
Publication number | Publication date |
---|---|
CN101055348A (en) | 2007-10-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100549753C (en) | ADAPTIVE OPTICS SYSTEMS based on self-reference wavefront sensor and continuous surface deformable mirror | |
CN101762331B (en) | Common-path radial shear interferometer based on four-step spatial digital phase-shift | |
CN103245285B (en) | A kind of reflection type point diffraction carrier synchronization movable phase interfere pick-up unit and detection method | |
CN101270975B (en) | Combined interference device for aspheric surface measurement | |
CN102288305B (en) | Wave-front sensor of self-adaptive optical system and detecting method thereof | |
CN102954842B (en) | Common optical path interference detecting device based on synchronous carrier phase shift and a detecting method of common optical path interference detecting device | |
CN102889853B (en) | Spectral synchronous phase-shift common-path interference microscopic-detection device and detection method | |
CN102914257A (en) | Light-splitting synchronous phase shifting interference microscopy device and detection method | |
CN102865811A (en) | Orthogonal double grating based synchronous phase shifting common-path interference microscopy detection device and detection method | |
CN203298878U (en) | Fringe contrast and carrier frequency adjustable loop point diffraction interference wavefront sensor | |
CN103454712A (en) | Wave plate array based on pixels and preparation methods of wave plate array | |
CN103245423B (en) | Light path polarized point diffraction movable phase interfere Wavefront sensor altogether | |
CN102954757A (en) | Microscopic interference detecting device based on synchronous carrier phase shift and detecting method of microscopic interference detecting device | |
CN102680117B (en) | Common-path radial cutting liquid crystal phase shift interference wave-front sensor | |
US20210364814A1 (en) | Integrated imaging display device | |
CN104713494A (en) | Testing device and method for dual-wavelength tuning interference marked by Fourier transforming phase shifting | |
CN104655291A (en) | Method for realizing programmable multi-wave lateral shearing interferometer | |
CN101949768A (en) | Processor of Hartmann -Shack front slope relative to point target and manufacture method | |
CN107388986A (en) | Double-view field digital holographic detection device and method based on two-dimensional phase grating and point diffraction | |
CN107462150A (en) | Double-view field digital holographic detection device and method based on One Dimension Periodic grating and point diffraction | |
CN102914259A (en) | Interference detection device based on light-splitting synchronous phase shifting and detection method | |
CN102954758B (en) | Interference detecting device based on synchronous carrier phase shift and detecting method of interference detecting device | |
CN104913848A (en) | All-Stokes parameter white light double-Sagnac polarization imaging interferometer | |
CN104931141B (en) | A kind of white light double Sagnac polarization imaging methods of full stokes parameter | |
CN102914258A (en) | Synchronous phase shifting interference microscopy detection device and detection method based on orthogonal double-grating |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091014 Termination date: 20150529 |
|
EXPY | Termination of patent right or utility model |