CN103969824B - The method for designing of beam folding LCD self-adapting optic system - Google Patents
The method for designing of beam folding LCD self-adapting optic system Download PDFInfo
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- CN103969824B CN103969824B CN201410204007.5A CN201410204007A CN103969824B CN 103969824 B CN103969824 B CN 103969824B CN 201410204007 A CN201410204007 A CN 201410204007A CN 103969824 B CN103969824 B CN 103969824B
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Abstract
The invention belongs to adaptive optics field, is a kind of method for designing of beam folding LCD self-adapting optical imaging system.As shown in Figure 1, the present invention, by introducing multiple off axis paraboloidal mirror and arrangement of mirrors repeatedly folded light beam, reduces system bulk.Because Hartmann sensor and liquid crystal corrector are feedforward control, FEEDBACK CONTROL must be switched to when response signal is measured, light path is shifted out by the 4th off axis paraboloidal mirror 13, the parallel beam aiming at the 3rd off axis paraboloidal mirror 12 outgoing inserts 45 ° of the 5th catoptrons 18 placed at detection branch road, making to be rolled over axle by the light beam of liquid crystal corrector 10 enters in Hartman wavefront detector 17, and be cut off from the light beam of the 3rd lens 16 outgoing, with seasonal galvanometer 4 fast only as normal mirror, achieve the switching between self adaptive imaging light path and liquid crystal corrector response signal optical path, avoid the aligning problem of misalignment of light path in the middle of adaptive system before and after switching well.
Description
Technical field
The invention belongs to adaptive optics field, is the method for designing of a kind of beam folding, compact LCD self-adapting optical imaging system.Relate to the unitized construction of the key element liquid crystal wavefront corrector in the optical elements such as paraboloidal mirror, catoptron, dichronic mirror, PBS beam splitter and ADAPTIVE OPTICS SYSTEMS, Hartman wavefront detector, fast galvanometer, specifically a kind of method for designing being equipped on the LCD self-adapting optical imaging system of the telescopical beam folding optical texture of heavy caliber ground.
Background technology
LCD self-adapting optic system can carry out real-Time Compensation correction, recover telescopical high-resolution imaging atmospheric optical wavefront distortion, therefore in heavy caliber ground telescope, has important application.But along with the increase of telescope bore, the optical element dimension in LCD self-adapting optic system is corresponding increase also, if still adopt simple transmission-type structure, system bulk can significantly increase.These changes not only increase the resetting difficulty that the difficulty of processing of transmissive optical element and system prepare the later stage, it is also proposed requirements at the higher level to the service condition of LCD self-adapting optic system.Therefore, the present invention is directed to the problems referred to above, propose to adopt reflection type optical element to fold light beam, significantly reduction system structure.Owing to have employed Hartmann sensor and liquid crystal corrector is the adaptive inertia weight of feedforward control, FEEDBACK CONTROL must be switched to when measuring liquid crystal corrector response signal, this variation easily causes the aligning dislocation of light path in the middle of adaptive system, and the present invention avoids this problem well.
The preparation method of liquid crystal corrector response matrix see Chinese invention patent (ZL200610173382.3), " LCD self-adapting optic system of polarized light energy loss-free ".
Summary of the invention
The object of this invention is to provide a kind of method for designing of beam folding compact LCD self-adapting optical imaging system.
Content of the present invention is in the primary optical system shown in Fig. 1, introduce the lens that multiple off axis paraboloidal mirror (2,6,12,13) and catoptron (1,3,7,11) replace in general transmissive system, thus make beam-folding, reduction system volume; And by the 4th off axis paraboloidal mirror 13 is shifted out light path, the 5th catoptron 18 inserts light path and the optical combination with pointolite xenon lamp 19, as shown in Figure 2, switching between the response signal optical path realizing quick galvanometer 4 and liquid crystal corrector 10 in self adaptive imaging light path and system, the light path alignment precision switching former and later two correctors and Hartman wavefront detector 17 does not affect.
In order to understand the present invention better in detail, light path design thought of the present invention is described in detail below.
As shown in Figure 1,1 be the first catoptron, 2 be the first off axis paraboloidal mirror, 3 be the second catoptron, 4 be quick galvanometer, 5 be dichronic mirror, 6 be the second off axis paraboloidal mirror, 7 be the 3rd catoptron, 8 be the first lens, 9 be PBS polarization beam apparatus, 10 be liquid crystal corrector, 11 be the 4th catoptron, 12 be the 3rd off axis paraboloidal mirror, 13 be the 4th off axis paraboloidal mirror, 14 be imaging CCD camera, 15 be the second lens, 16 be the 3rd lens, 17 be Hartman wavefront detector, 20 is the telescope focuses that present system connects to light path layout.
The target light outgoing that telescope receives is focused to a little 20 at telescope focal plane place, make focus point 20 be positioned at the focus place of the first paraboloidal mirror 2 simultaneously; And then incide on the first paraboloidal mirror 2 in view of focal length longer use first catoptron 1 folded optical path of the first paraboloidal mirror 2; Owing to being the light beam that focus sends, therefore the light beam that the first paraboloidal mirror 2 reflects becomes parallel beam, and by the quick galvanometer 4 arrived after the second catoptron 3 again folded optical path with optical axis placement at 45 °, the wavetilt that quick galvanometer 4 is introduced for correcting atmospheric interference; The light beam being corrected inclination can arrive short-pass dichronic mirror 5 to non-jitter, the effect of dichronic mirror 5 is that the luminous energy that telescope is received is divided into two bundles according to wave band, the wherein light beam transmission of skip band, the light beam 90 ° folding axle reflection of long wave band, form long wave light beam vertical each other and shortwave light beam; Through shortwave light beam finally enter Hartman wavefront detector 17, with detect eliminate tilt after light wave before high-order distortion, this section of light path is called Wavefront detecting branch road; The wavefront high-order that the long wave light beam of 90 ° of folding axles reflection corrects Hartman wavefront detector 17 acquisition through liquid crystal corrector 10 distorts, finally enters CCD camera 14 imaging, and this section of light path is called correcting imaging branch road.
At Wavefront detecting branch road, light path is shorter, carries out contracting bundle, form the diameter parallel beam identical with the Receiver aperture of Hartman wavefront detector 17 and all enter wherein by second lens 15 of confocal, the 3rd lens 16; The effect of Hartman wavefront detector 17 is the residue light wave front-distortions after the quick galvanometer 4 of detection corrects wavetilt, therefore quick galvanometer 4 and Hartman wavefront detector 17 conjugation must be made, namely the optical path length of quick galvanometer 4 to the second lens 15 is the focal length of the second lens 15, and the 3rd lens 16 are the focal length of the 3rd lens 16 to the distance of Hartman wavefront detector 17.
The light beam travels of correcting imaging branch road is very long, is further divided into two sections: first paragraph is the input path reflexing to incident liquid crystal corrector 10 from dichronic mirror 5, and second segment reflexes to from liquid crystal corrector 10 reflected light path entering CCD camera 14.Second paraboloidal mirror 6 is adopted for input path, the combination of the 3rd catoptron 7 folds light beam, with seasonal second paraboloidal mirror 6 and confocal of the first lens 8, light beam is made to be adjusted to the diameter directional light identical with liquid crystal corrector 10 Receiver aperture incident on it; The reflection angle of the 3rd catoptron 7 is identical with the reflection angle of the second paraboloidal mirror 6, makes the light beam of arrival second paraboloidal mirror 6 and is parallel to each other from the optical axis of the 3rd catoptron 7 folded light beam; Make eccentric incident first lens 8 of this light beam, to make input path light beam be separated completely with reflected light path light beam, namely the axis of the first lens 8 its beam axis relatively incident moves 0.035f1 ~ 0.052f1, wherein f1 is the focal length of the first lens 8; Produce the inclination of 2 ° ~ 3 ° from the light beam of the first lens 8 outgoing, become the incident liquid crystal corrector 10 of polarized light through PBS polarization beam apparatus 9, the liquid crystal aligning direction arranging liquid crystal corrector 10 is parallel to polarization direction, makes be eliminated by the beam wavefront distortion of liquid crystal corrector 10; From liquid crystal corrector 10 reflect light beam with the vergence direction reversal dip 2 ° ~ 3 ° with not calibrated light beam again by PBS polarization beam apparatus 9, arrive the first lens 8, then arrive the 4th catoptron 11, just in time make the light beam of the 4th catoptron 11 separate completely with the input path light beam on the 3rd catoptron 7; The light path that the light path that 4th catoptron 11 and the 3rd paraboloidal mirror 12 are formed is formed with the 3rd catoptron 7 and the second paraboloidal mirror 6 is completely symmetrical, light beam becomes the parallel beam incident identical with Hartman wavefront detector 17 Receiver aperture again on the 4th paraboloidal mirror 13, converges in imaging CCD camera 14 from axle through the 4th paraboloidal mirror 13.
For doing the response measurement of the wave front detector relative correction device before adaptively correcting imaging, the 3rd paraboloidal mirror 12 and the first lens 8 need be made to combine the microlens array position aperture plane of liquid crystal corrector 10 being imaged in Hartman wavefront detector 17, the design detecting light path has in addition made quick galvanometer 4 and Hartman wavefront detector 17 conjugation, again pointolite xenon lamp 19 is placed on telescopical go out optical focus 20 place, be also the focus place of the first paraboloidal mirror 2, the light that telescope receives blocked simultaneously and can not adaptive inertia weight be entered.First the response data of quick galvanometer 4 is measured; Then the response measurement of liquid crystal corrector 10 is carried out: as shown in Figure 2,4th paraboloidal mirror 13 is upwards shifted out light path, and parallel beam 45° angle in detection branch road that corresponding 3rd paraboloidal mirror 13 reflects inserts the 5th catoptron 18, the reflected light path light beam now modulated through liquid crystal corrector 10 is entered Hartman wavefront detector 17 by 90 °, the 5th catoptron 18 folding axle, blocks light beam from the 3rd lens 16 outgoing simultaneously, can complete and measure the response signal of liquid crystal corrector 10; Finally shift out the 5th catoptron 18 from detection branch road, and the 4th paraboloidal mirror 13 is moved down the position be returned to shown in Fig. 1, pointolite xenon lamp 19 is shifted out light path, recover to be connected with telescope.The self-adaptation wavefront correction imaging of extraterrestrial target can be carried out.
System of the present invention not only volume is little, and pass through the optical combination of removable 4th off axis paraboloidal mirror 13, the 5th catoptron 18, pointolite xenon lamp 19, achieve the switching of the FEEDBACK CONTROL light path that Hartmann sensor 17 is measured to liquid crystal corrector 10 response signal with the feedforward control light path of liquid crystal corrector 10, avoid the aligning problem of misalignment of light path in the middle of adaptive system before and after switching well.
Accompanying drawing explanation
Fig. 1 is LCD self-adapting correcting imaging light path design schematic diagram of the present invention.1 be the first catoptron, 2 is the first paraboloidal mirror, and 3 is the second catoptron, and 4 is quick galvanometer, 5 is with the short-pass dichronic mirror of 700nm wavelength color separation, and 6 is the second paraboloidal mirror, and 7 is the 3rd catoptron, 8 is the first lens, and 9 is PBS polarization beam apparatus, and 10 is liquid crystal corrector, 11 is the 4th catoptron, 12 is the 3rd paraboloidal mirror, and 13 is removable 4th paraboloidal mirror, and 14 is imaging CCD, 15,16 be respectively second, third lens, 17 is Hartman wavefront detector.
Fig. 2 is the light path schematic diagram measuring liquid crystal corrector 10 response signal.19 is pointolite xenon lamp, is positioned at the focus place of the first paraboloidal mirror 2; 4th paraboloidal mirror 13 shifts out from light path, and 18 is 45 ° of the 5th catoptrons arranged, and enters Hartman wavefront detector 17 to enable the light beam through liquid crystal corrector 10, blocks light beam from the 3rd lens 16 outgoing simultaneously.
Embodiment
The design of the reflection type liquid crystal ADAPTIVE OPTICS SYSTEMS of mating with 2 meters of Aperture Telescopes, telescope focal length 196 meters.In Fig. 1, Fig. 2, the design parameter of each element is as follows:
1) the first paraboloidal mirror 2, second paraboloidal mirror 6, the 3rd paraboloidal mirror 12, the 4th paraboloidal mirror 13 are off-axis parabolic mirror, bore is respectively 100mm, 50mm, 50mm, 50mm, radius-of-curvature is respectively 3332mm, 1940mm, 1940mm, 920mm, focal length is respectively 1666mm, 970mm, 970mm, 460mm, is respectively 300mm, 120mm, 120mm, 150mm from axle amount; 4th paraboloidal mirror 13 times arranges the guide rail perpendicular to optical axis between itself and the second off axis paraboloidal mirror 12, makes it can shift out light path upward along guide rail.
2) the first lens 8, second lens 15, the 3rd lens 16 are two gummed achromat, and bore is respectively 60mm, 20mm, 20mm, and focal length is respectively 350mm, 62mm, 62mm.
3) galvanometer 4 is the S330 type product of German PI Corp. fast, diameter is 25mm, initially places with miter angle, and corresponding exit pupil diameter is 17mm, become miter angle to place relative to the parallel beam of the second catoptron 3 outgoing, make incident beam roll over 90 °, axle and can enter Hartman wavefront detector 17.
4) Hartman wavefront detector 17 has 17mm receiving aperture, and detectable wave band is from 350nm ~ 1000nm.
5) the first, second, third, fourth, the 5th catoptron 1,3,7,11,18, bore is respectively 100mm, 70mm, 30mm, 30mm, 35mm; 5th catoptron 18 is placed with the incident light axis angle at 45 ° of Hartman wavefront detector 17, and the guide rail being parallel to the 3rd off axis paraboloidal mirror 12 optical axis is set under the 5th catoptron 18,5th catoptron 18 can be moved left and right along guide rail direction, wherein moving right is for shifting out light path, and being moved to the left is for entering light path.
6) liquid crystal corrector 10 is pure position phase LCOS type liquid crystal corrector, and receive window is 6.14mm × 6.14mm, number of picture elements 256 × 256, Spatial transmission degree of depth 800nm.
7) PBS polarization beam apparatus 9, is of a size of 50mm × 50mm × 50mm, and the extinction ratio of its P polarized light is 1 × 10
-3.
8) imaging CCD camera 14 is the product of Britain ANDOR company DV897 model, pixel count 512 × 512, and bore is 13mm × 13mm.
9) pointolite xenon lamp 19 is halogen light sources of fiber bundle coupling, has xenon lamp spectrum, fibre bundle diameter 1mm.
10) dichronic mirror 5 is the short-pass dichronic mirror of color separation wavelength 700nm, bore 35mm.
11) utilize 1) ~ 10) described in element build LCD self-adapting optic system according to light path shown in Fig. 1.First catoptron 1 is 1000mm with telescope focus 20 spacing, first paraboloidal mirror 2 and the first catoptron 1 spacing are 666mm, second catoptron 3 and the first paraboloidal mirror 2 spacing 850mm, second catoptron 3 and quick galvanometer 4 spacing 920mm, quick galvanometer 4 is 31mm with dichronic mirror 5 spacing, dichronic mirror 5 and the second paraboloidal mirror 6 spacing are 570mm, second paraboloidal mirror 6 and the 3rd catoptron 7 spacing are 440mm, 3rd catoptron 7 and the first lens 8 spacing are 880mm, first lens 8 are 100mm with PBS polarization beam apparatus 9 spacing, PBS polarization beam apparatus 9 and liquid crystal corrector 10 spacing are 150mm, first lens 8 and the 4th catoptron 11 spacing are 880mm, 4th catoptron 11 and the 3rd paraboloidal mirror 12 spacing are 440mm, 3rd paraboloidal mirror 12 and the 4th paraboloidal mirror 13 spacing are 440mm, 4th paraboloidal mirror 13 is 460mm with imaging CCD camera 14 spacing, dichronic mirror 5 and the second lens 15 spacing are 31mm, second lens 15 and the 3rd lens 16 spacing are 124mm, 3rd lens 16 are 62mm with Hartman wavefront detector 17 spacing.
12) galvanometer 4, Hartman wavefront detector 17, liquid crystal corrector 10, imaging CCD camera 14 are all connected with the industrial computer having auto-adaptive controling software fast.Below the system designed by the present invention can mated with 2 meters of Aperture Telescopes is namely formed.
13) in laboratory simulation operation adaptively correcting process:
First the response signal of quick galvanometer 4, liquid crystal corrector 10 Hartman wavefront detector 17 under standard drive singal is measured, the xenon lamp and pointolite xenon lamp 19 with stable spectra are placed on focus, i.e. telescope focus 20 place of the first off axis paraboloidal mirror 2, the virtual light beam by telescope outgoing blocks and can not enter present system;
Measure the response signal of quick galvanometer 4 Hartman wavefront detector 17 under standard drive singal: make industrial computer apply series voltage V respectively to the A axle of quick galvanometer 4 and B axle
x, V
y, wherein V
x, V
yvoltage range at [0V, 9V], be divided into 60 scale division values, and in Hartman wavefront detector 17, read corresponding microlens array facula mass center mean deviation value A
x, A
y, make two two-dimentional response matrix A
x(V
x), A
y(V
y), be then stored in the database of industrial computer, the response signal completing quick galvanometer 4 is measured;
Again light path is changed into the response signal light path measuring liquid crystal corrector 10, shown in Fig. 2, 4th paraboloidal mirror 13 is upwards shifted out light path, and the 5th catoptron 18 is moved into detection branch road left by the parallel beam that corresponding 3rd paraboloidal mirror 12 reflects, the reflected light path light beam modulated through liquid crystal corrector 10 is made to be entered Hartman wavefront detector 17 by 90 °, the 5th catoptron 18 folding axle, block the light beam from the 3rd lens 16 outgoing simultaneously, make quick galvanometer 4 only as normal mirror, measure the response signal of liquid crystal corrector 10: the spread voltage applying 19 rank Zernike patterns with industrial computer to liquid crystal corrector 10, in Hartman wavefront detector 17, obtain corresponding microlens array facula mass center response signal simultaneously, make response matrix D, by matrix D stored in the database of industrial computer, complete the measurement of the response signal of liquid crystal corrector 10,
Shift out the 5th catoptron 18 to the right from detection branch road, and the 4th paraboloidal mirror 13 is moved down the position be returned to shown in Fig. 1; By virtual for pointolite xenon lamp 19 be the picture of the extraterrestrial target that 2 meters of Aperture Telescopes receive, its light beam enters imaging CCD camera 14 through its reflection, proves to revert to the adaptive system be connected with telescope;
Between the second catoptron 3 and quick galvanometer 4, insert overfall simulator, utilize the auto-adaptive controling software in industrial computer to carry out the adaptively correcting imaging of pointolite xenon lamp 19.
In imaging CCD camera 14, the result of display proves that the reflection type liquid crystal ADAPTIVE OPTICS SYSTEMS of mating with 2 meters of Aperture Telescopes designed by the present invention can normally work.
System bulk designed by invention is about 1400mm × 1000mm, and old-fashioned transmission-type volume is then about 3400mm × 2600mm.New design can make system area occupied be reduced into original 16%.
Claims (1)
1. one kind is applicable to the method for designing of the beam folding LCD self-adapting optic system of large aperture telescope, it is characterized in that: primary optical system is by the first catoptron (1), first off axis paraboloidal mirror (2), second catoptron (3), quick galvanometer (4), dichronic mirror (5), second off axis paraboloidal mirror (6), 3rd catoptron (7), first lens (8), PBS polarization beam apparatus (9), liquid crystal corrector (10), 4th catoptron (11), 3rd off axis paraboloidal mirror (12), 4th off axis paraboloidal mirror (13), imaging CCD camera (14), second lens (15), 3rd lens (16), Hartman wavefront detector (17) forms,
The front focus of the first off axis paraboloidal mirror (2) overlaps with telescopical exit focus (20); Dichronic mirror (5) is short-pass dichronic mirror, is Wavefront detecting branch road vertical each other and correcting imaging branch road after dichronic mirror (5);
At Wavefront detecting branch road, second lens (15) and confocal of the 3rd lens (16), quick galvanometer (4) is the focal length of the second lens (15) to the optical path length of the second lens (15), and the 3rd lens (16) are the focal length of the 3rd lens (16) to the distance of Hartman wavefront detector (17);
At correcting imaging branch road, the second off axis paraboloidal mirror (6) and confocal of the first lens (8); The reflection angle of the 3rd catoptron (7) is identical with the reflection angle of the second off axis paraboloidal mirror (6), makes light beam front and be parallel to each other from the optical axis after the 3rd catoptron (7) outgoing at arrival second off axis paraboloidal mirror (6); Beam axis after relative 3rd catoptron (7) of axis of the first lens (8) moves a segment distance, this segment distance is 0.035 ~ 0.052 times of the first lens (8) focal length, making by the light beam of the first lens (8) is eccentric incidence, then the inclination outgoing of 2 ° ~ 3 ° is produced, be divided into transmitting P-type polarisation light and reflect s-polarized light with this incident angle by PBS polarization beam apparatus (9), e light optical axis, i.e. the liquid crystal aligning direction of liquid crystal corrector (10) are set in parallel P polarization direction; P light beam after liquid crystal corrector (10) corrects is reflected back toward PBS polarization beam apparatus (9), and again eccentric by the first lens (8) with the vergence direction reversal dip 2 ° ~ 3 ° of not calibrated light beam, just in time separate with the incident beam on the 3rd catoptron (7) when making light beam arrive the 4th catoptron (11); The light path that the light path that 4th catoptron (11) and the 3rd off axis paraboloidal mirror (12) are formed is formed with the 3rd catoptron (7) and the second off axis paraboloidal mirror (6) is completely symmetrical, after the correction that the 4th catoptron (11) reflects, light beam is after the 3rd off axis paraboloidal mirror (12), again become the parallel beam incident identical with Hartman wavefront detector (17) Receiver aperture on the 4th off axis paraboloidal mirror (13), converge in imaging CCD camera (14) through the 4th off axis paraboloidal mirror (13);
Quick galvanometer (4) in above-mentioned light path, Hartman wavefront detector (17), liquid crystal corrector (10) are all connected with the industrial computer having auto-adaptive controling software with imaging CCD camera (14);
Before adaptively correcting imaging process, the standard driving response signal of quick galvanometer (4) and liquid crystal corrector (10) need be measured with Hartman wavefront detector (17), therefore pointolite xenon lamp (19) is placed on the front focus place of the first off axis paraboloidal mirror (2), the light beam that telescope receives is blocked making it not enter system light path simultaneously, the standard measuring quick galvanometer (4) drives response signal, and by the response signal that records stored in the database of industrial computer, then the response signal of liquid crystal corrector (10) is measured: shifted out from light path by the 4th off axis paraboloidal mirror (13), then the 5th catoptron (18) is moved into light path, the incident light axis angle at 45 ° of itself and Hartman wavefront detector (17) is placed, then enter Hartman wavefront detector (17) from the parallel beam of the 3rd off axis paraboloidal mirror (12) outgoing through the 5th catoptron (18) reflection, and be cut off from the light beam of the 3rd lens (16) outgoing, with seasonal galvanometer (4) fast only as normal mirror, guarantee only has and enters Hartman wavefront detector (17) by the light beam of liquid crystal corrector (10), with a series of Zernike mode activated liquid crystal corrector (10), in the corresponding a series of response signal of the upper acquisition of Hartman wavefront detector (17), by a series of response signals of liquid crystal corrector (10) of recording stored in the database of industrial computer, pointolite xenon lamp (19), the 5th catoptron (18) are shifted out light path, the 4th off axis paraboloidal mirror (13) shift-in light path, revert to the optical wavefront adaptively correcting imaging system be connected with telescope.
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| CN103969825B (en) * | 2014-05-14 | 2016-06-01 | 中国科学院长春光学精密机械与物理研究所 | Beam folding LCD self-adapting optical imagery system |
| CN105425392B (en) * | 2015-12-09 | 2017-10-31 | 中国科学院长春光学精密机械与物理研究所 | Improved beam folding LCD self-adapting optical imaging system |
| CN105758428B (en) * | 2016-03-31 | 2018-07-03 | 中国科学院西安光学精密机械研究所 | Utilize the method for caliberating device calibration dynamic target dynamic deformation angle error |
| CN106526829B (en) * | 2016-09-28 | 2018-09-21 | 中国科学院长春光学精密机械与物理研究所 | With the matched liquid crystal of 2 meters of telescopes-distorting lens hybrid self-adaption system |
| ES2905048A1 (en) * | 2020-10-06 | 2022-04-06 | Voptica S L | Wave front manipulation instrument and light wave front manipulation method (Machine-translation by Google Translate, not legally binding) |
| CN113612534B (en) * | 2021-07-01 | 2022-05-20 | 中国科学院西安光学精密机械研究所 | Optical system of miniaturized space laser communication terminal and using method |
| CN114062315B (en) * | 2021-11-16 | 2023-01-03 | 中国科学院合肥物质科学研究院 | Tunable semiconductor laser absorption spectrum system |
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