CN106225713A - A kind of off-axis three anti-aspheric optical systems benchmaring and processing method altogether - Google Patents
A kind of off-axis three anti-aspheric optical systems benchmaring and processing method altogether Download PDFInfo
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- CN106225713A CN106225713A CN201610623679.9A CN201610623679A CN106225713A CN 106225713 A CN106225713 A CN 106225713A CN 201610623679 A CN201610623679 A CN 201610623679A CN 106225713 A CN106225713 A CN 106225713A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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Abstract
The present invention open a kind of off-axis three anti-aspheric optical systems benchmaring and processing method altogether, one, respectively principal reflection mirror and the 3rd reflecting mirror are processed until it is laser interferometer operation wavelength that the RMS value of each single mirror unified interference detection faces shape is superior to 1/10 λ, λ；Two, according to design parameter, design and process for fixing principal reflection mirror and the integrated backboard of the 3rd reflecting mirror；Three, principal reflection mirror and the 3rd reflecting mirror are fixedly mounted on integration backboard, and it is carried out common benchmaring respectively obtain principal reflection mirror and the face shape of the 3rd reflecting mirror；Four, principal reflection mirror based on common benchmaring gained and the face shape of the 3rd reflecting mirror, carries out ion beam processing by the principal reflection mirror and the 3rd reflecting mirror that are fixed on integration backboard according to design requirement；Five, the principal reflection mirror after ion beam processing and the 3rd reflecting mirror are carried out common benchmaring, until meeting design requirement.Present invention, avoiding off-axis three anti-aspheric optical systems loaded down with trivial details debug process.
Description
Technical field
The invention belongs to the technical field of optical system processing detection, be specifically related to a kind of off-axis three anti-aspherics systems
Altogether benchmaring and processing method.
Background technology
In optical system, use aspheric surface can correct aberration, improve picture element, can subtract with simplied system structure simultaneously
The weight of light system, therefore, it is all that non-spherical element is the most more and more used for survey of deep space, photoelectric tracking, astronomical observation etc.
In many optoelectronic devices.Especially in space optics field, due to off-axis three anti-astigmatisms aspheric surface system (TMA) that disappear have group less,
The excellent specific properties such as long-focus, big visual field, broadband, modulation transfer function (MTF) is high, suppression veiling glare ability is strong so that aperture aspherical
Element is widely applied in space remote sensing.
The index path of off-axis three anti-aspheric surface systems is as it is shown in figure 1, i.e. incident ray is through off-axis aspheric surface principal reflection mirror
After carry out first reflection, the light beam of reflection carries out second time and reflects after inciding secondary mirror (generally coaxial aspheric surface), second
Light beam after secondary reflection incides off-axis 3rd reflecting mirror to carry out reflecting for the third time, and the light beam after reflection is transferred through plane focusing lens
After incide imaging on CCD focal plane.Within the system, principal reflection mirror and the 3rd reflecting mirror are off-axis aspheric surface, and secondary mirror is general
For rotationally symmetrical coaxial aspherical mirror, optical axis is positioned at the geometric center of secondary mirror, and the optical axis of principal reflection mirror and the 3rd reflecting mirror is
Unified.
Off-axis three anti-aspheric surface systems typically carry out processing and the detection of single mirror body, treat that all component meets design requirement
Shi Fangke carries out debuging and checking of whole system.Each single mirror individuality has respective geometric sense mismachining tolerance, comprises summit bent
Rate radius error, off-axis amount error and mirror body right position deviation etc., need modular support when whole system is debug carrying out
Backboard and frame mechanism are revised repeatedly, carry out successive ignition convergence, just can complete debuging of whole system, and that debugs is whole
Process is numerous and diverse, and the mismachining tolerance of principal reflection mirror and the 3rd reflecting mirror is not mated sometimes, and whole optical system is extremely difficult to well
Imaging effect.
Summary of the invention
In view of this, the invention provides a kind of off-axis three anti-aspheric optical systems benchmaring and processing method altogether,
It is capable of off-axis three anti-aspheric optical system principal reflection mirrors and the processing of the 3rd reflecting mirror cobasis quasi-, it is to avoid loaded down with trivial details debuging
Process.
Realize technical scheme as follows:
A kind of off-axis three anti-aspheric optical systems benchmaring and processing method altogether, comprise the following steps:
Step one, single mirror processing and detection
Respectively principal reflection mirror and the 3rd reflecting mirror are processed until the RMS value of each single mirror unified interference detection faces shape
Being superior to 1/10 λ, λ is laser interferometer operation wavelength；
Step 2, backboard integrated design and making
According to design parameter, design and process for fixing principal reflection mirror and the integrated backboard of the 3rd reflecting mirror；
Step 3, cobasis standard are debug and are detected
Principal reflection mirror and the 3rd reflecting mirror are fixedly mounted on integration backboard, and it is carried out common benchmaring respectively
Obtain principal reflection mirror and the face shape of the 3rd reflecting mirror；
The quasi-ion beam processing of step 4, cobasis
Principal reflection mirror based on common benchmaring gained and the face shape of the 3rd reflecting mirror, will be fixed on the master of integration backboard
Reflecting mirror and the 3rd reflecting mirror carry out ion beam processing according to design requirement；
Step 5, altogether benchmaring
Principal reflection mirror after ion beam processing and the 3rd reflecting mirror are carried out common benchmaring, until meeting design requirement,
Complete processing and detection.
Further, step 3 particularly as follows:
Step 3.1, accurately adjusted main three mirror compensators by laser tracker and connect guiding mechanisms, make when principal reflection mirror is mended
Repay device and the 3rd reflecting mirror compensator and be all fixedly mounted on after main three mirror compensators connect guiding mechanisms, principal reflection mirror compensator and
The line at both the 3rd reflecting mirror compensators center meets design parameter with optical axis coincidence and the relative position relation of the two；
Step 3.2, principal reflection mirror is fixed on integration backboard, principal reflection mirror compensator is arranged on main three mirrors and compensates
Device connects on guiding mechanism, utilizes laser tracker accurately to adjust laser interferometer, principal reflection mirror compensator according to design parameter
And the relative position between principal reflection mirror, utilize zero compensation optical detection that principal reflection mirror is carried out interferometry and obtain principal reflection
The face shape of mirror；
Step 3.3, fixing principal reflection mirror, laser interferometer and main three mirror compensators connect guiding mechanism, remove main anti-
Penetrate mirror compensator, the 3rd reflecting mirror compensator is arranged on main three mirror compensators and connects on guiding mechanism, the 3rd reflecting mirror is propped up
Support face is fixed on integration backboard, the 3rd reflecting mirror is carried out interferometry and obtains the face shape of the 3rd reflecting mirror, thus realize
Main three mirrors benchmaring altogether.
Beneficial effect:
Inventive process ensures that reflecting mirror inspection during manufacture process is shared with optical system alignment process reference, thus ensure
Machine rear principal reflection mirror, the 3rd reflecting mirror position in systems just it has been determined that be only left when system is debug secondary mirror this
Individual link, highly shortened the follow-up of optical system and debugs the time, improves the precision and efficiency debug, and utilizes ion beam
Carrying out integration finishing polish, removal function is stable, definitiveness is high, machining stress is the least.
Accompanying drawing explanation
Fig. 1 is the index path of off-axis three anti-aspheric surface systems.
Fig. 2 is the flow chart of the off-axis three anti-quasi-machining and detecting methods of aspheric optical system cobasis of the present invention.
Fig. 3 is the apparatus structure signal of the off-axis three anti-quasi-machining and detecting methods of aspheric optical system cobasis of the present invention
Figure.
Fig. 4 is principal reflection mirror and the 3rd reflecting mirror quasi-machining sketch chart of ion beam cobasis.
Wherein, 1-laser interferometer, 2-standard flat mirror, 3-laser tracker, 4-ion beam processing center, 5-principal reflection
Mirror compensator, 6-the 3rd reflecting mirror compensator, 7-principal reflection mirror, 8-the 3rd reflecting mirror, 9-integration backboard, 10-integration is carried on the back
Plate guiding mechanism, 11-laser interferometer guiding mechanism, 12-master three mirror compensator connects guiding mechanism.
Detailed description of the invention
Develop simultaneously embodiment below in conjunction with the accompanying drawings, describes the present invention.
As in figure 2 it is shown, the invention provides a kind of off-axis three anti-aspheric optical systems benchmaring and processing method altogether,
Needed for the inventive method device mainly include laser interferometer, standard flat reference mirror, compensator, principal reflection mirror, the 3rd
Reflecting mirror, integration backboard, ion beam processing center, laser tracker and guiding mechanism etc..Comprise the following steps:
Step one, single mirror processing and detection
Utilize computer control optical surface formation (CCOS, Computer Controlled Optical
Surfacing) principal reflection mirror and the 3rd being determined property of reflecting mirror are processed by technology respectively, i.e. grind and rough polishing, in processing
During, by contourograph or three-coordinates measuring machine, principal reflection mirror and the 3rd reflecting mirror are carried out contact type measurement respectively, when
Detection obtains the peak-to-valley value (PV value, Peak to valley) of principal reflection mirror and the 3rd reflecting mirror surface shape when being superior to 2 μm, to it
It is polished processing, the principal reflection mirror after polishing and the 3rd reflecting mirror is carried out zero compensation respectively and interferes detection, according to detection
Principal reflection mirror and the 3rd reflecting mirror are processed by result respectively, until the RMS (Root of each single mirror unified interference detection faces shape
Mean Squares root-mean-square) value is better than 1/10 λ (λ=632.8nm, for laser interferometer operation wavelength).
Step 2, backboard integrated design and making
According to optical system parameter, design and process for fixing principal reflection mirror and the integrated backboard of the 3rd reflecting mirror；
Step 3, cobasis standard are debug and are detected
As it is shown on figure 3, the optical system schematic diagram debug for cobasis standard.Step 3 detailed process is:
Step 3.1, accurately measured and adjust main three mirror compensators by laser tracker and connect guiding mechanisms, make when main anti-
Penetrating mirror compensator and the 3rd reflecting mirror compensator is all fixedly mounted on after leading three mirror compensators connection guiding mechanisms, principal reflection mirror is mended
Repay the line at both device and the 3rd reflecting mirror compensator center and optical axis coincidence (i.e. leading three mirror common optical axis) and the two is relative
Position relationship meets design parameter；
Step 3.2, principal reflection mirror is fixed on integration backboard, principal reflection mirror compensator is arranged on main three mirrors and compensates
Device connects on guiding mechanism, utilizes laser tracker accurately to measure and adjust laser interferometer, principal reflection mirror according to design parameter
Relative position between compensator and principal reflection mirror, utilizes zero compensation optical detection that principal reflection mirror is carried out interferometry and obtains
The face shape of principal reflection mirror；
Step 3.3, fixing principal reflection mirror, laser interferometer and main three mirror compensators connect guiding mechanism, remove main anti-
Penetrate mirror compensator, the 3rd reflecting mirror compensator is arranged on main three mirror compensators and connects on guiding mechanism, the 3rd reflecting mirror is propped up
Support face is fixed on integration backboard, the 3rd reflecting mirror is carried out interferometry and obtains the face shape of the 3rd reflecting mirror, thus realize
Main three mirrors benchmaring altogether；
Step 4, the integration principal reflection mirror of backboard will be fixed on and the 3rd reflecting mirror carries out ion beam processing；
We carry out backboard integration to the principal reflection mirror after common benchmaring and the 3rd reflecting mirror and fix and be installed, then
Carry out cobasis quasi-integration ion beam finishing polish processing.Ion beam polishing technology is a kind of high accuracy definitiveness process technology, should
Technology utilizes under vacuum conditions, ion beam bombard optical surface specific region, by ion beam and optical element
The physical sputtering effect of surfacing realizes the molecular level to non-spherical surface material and removes, through accurately controlling ion beam energy
Metric density and processing residence time, be finally completed the aspherical optical surface face shape processing of superhigh precision.Ion beam polisher
Ultimate principle belongs to sub-aperture process technology, and its basic controlling algorithm is similar with CCOS technology, and this technology is according to quantitative face shape
Measurement result, is controlled ion beam by computer, is processed optical surface according to certain machining locus, straight through successive ignition
To meeting required precision.In the course of processing, the removal function of ion beam is highly stable, it is not necessary to be removed function correction, its
The accurate removal to minute surface molecular level can be realized, and machining stress is the least, substantially without causing main three mirror integration positions
Change.
As shown in Figure 4, first the face shape distribution of the principal reflection mirror measured and the 3rd reflecting mirror is interfered comprehensively according to cobasis standard
Analyze select suitable bore ion beam source, plan rational machining locus and carry out the calculating of residence time, then utilize from
Principal reflection mirror and the 3rd reflecting mirror are carried out precise polished within the same process-cycle by son bundle successively.
Step 5, altogether benchmaring
Principal reflection mirror and the 3rd reflecting mirror after processing ion beam integration cobasis standard carry out common benchmaring, until full
Foot design requirement, the i.e. RMS value of principal reflection mirror and the 3rd reflecting mirror surface shape are better than 1/50 λ, complete processing and detection.
In sum, these are only presently preferred embodiments of the present invention, be not intended to limit protection scope of the present invention.
All within the spirit and principles in the present invention, any modification, equivalent substitution and improvement etc. made, should be included in the present invention's
Within protection domain.
Claims (2)
1. off-axis three anti-aspheric optical systems benchmaring and processing method altogether, it is characterised in that comprise the following steps:
Step one, single mirror processing and detection
Respectively principal reflection mirror and the 3rd reflecting mirror are processed until the RMS value of each single mirror unified interference detection faces shape is the most excellent
It is laser interferometer operation wavelength in 1/10 λ, λ；
Step 2, backboard integrated design and making
According to design parameter, design and process for fixing principal reflection mirror and the integrated backboard of the 3rd reflecting mirror；
Step 3, cobasis standard are debug and are detected
Principal reflection mirror and the 3rd reflecting mirror are fixedly mounted on integration backboard, and it is carried out common benchmaring respectively obtain
Principal reflection mirror and the face shape of the 3rd reflecting mirror；
The quasi-ion beam processing of step 4, cobasis
Principal reflection mirror based on common benchmaring gained and the face shape of the 3rd reflecting mirror, will be fixed on the principal reflection of integration backboard
Mirror and the 3rd reflecting mirror carry out ion beam processing according to design requirement；
Step 5, altogether benchmaring
Principal reflection mirror after ion beam processing and the 3rd reflecting mirror being carried out common benchmaring, until meeting design requirement, completing
Processing and detection.
2. a kind of off-axis three anti-aspheric optical systems benchmaring and processing method, its feature altogether as claimed in claim 1
Be, step 3 particularly as follows:
Step 3.1, accurately adjusted main three mirror compensators by laser tracker and connect guiding mechanisms, make when principal reflection mirror compensator
After being all fixedly mounted on main three mirror compensators connection guiding mechanisms with the 3rd reflecting mirror compensator, principal reflection mirror compensator and the 3rd
The line at both reflecting mirror compensators center meets design parameter with optical axis coincidence and the relative position relation of the two；
Step 3.2, principal reflection mirror is fixed on integration backboard, principal reflection mirror compensator is arranged on main three mirror compensators even
Connect on guiding mechanism, utilize laser tracker accurately to adjust laser interferometer, principal reflection mirror compensator and master according to design parameter
Relative position between reflecting mirror, utilizes zero compensation optical detection that principal reflection mirror is carried out interferometry and obtains principal reflection mirror
Face shape；
Step 3.3, fixing principal reflection mirror, laser interferometer and main three mirror compensators connect guiding mechanism, remove principal reflection mirror
Compensator, is arranged on the 3rd reflecting mirror compensator main three mirror compensators and connects on guiding mechanism, by the 3rd mirror support face
It is fixed on integration backboard, the 3rd reflecting mirror is carried out interferometry and obtains the face shape of the 3rd reflecting mirror, thus realize main three
Mirror benchmaring altogether.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106225712A (en) * | 2016-08-01 | 2016-12-14 | 中国科学院长春光学精密机械与物理研究所 | A kind of off-axis three anti-aspheric optical systems benchmaring and processing method altogether |
| CN108204885A (en) * | 2018-01-30 | 2018-06-26 | 北京空间机电研究所 | A kind of titanium alloy precision optical support structure stability verification method |
| CN113485024A (en) * | 2021-07-15 | 2021-10-08 | 中国科学院长春光学精密机械与物理研究所 | Off-axis three-mirror aspheric optical system assembling and adjusting method |
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| CN108204885A (en) * | 2018-01-30 | 2018-06-26 | 北京空间机电研究所 | A kind of titanium alloy precision optical support structure stability verification method |
| CN113485024A (en) * | 2021-07-15 | 2021-10-08 | 中国科学院长春光学精密机械与物理研究所 | Off-axis three-mirror aspheric optical system assembling and adjusting method |
| CN113485024B (en) * | 2021-07-15 | 2022-12-27 | 中国科学院长春光学精密机械与物理研究所 | Off-axis three-mirror aspheric optical system assembling and adjusting method |
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