CN101639338A - Detection lens used for spherical detector - Google Patents
Detection lens used for spherical detector Download PDFInfo
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- CN101639338A CN101639338A CN200910042094A CN200910042094A CN101639338A CN 101639338 A CN101639338 A CN 101639338A CN 200910042094 A CN200910042094 A CN 200910042094A CN 200910042094 A CN200910042094 A CN 200910042094A CN 101639338 A CN101639338 A CN 101639338A
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- eyeglass
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Abstract
The invention discloses a detection lens used for spherical detector, comprising a lens barrel and at least two lens slices in the lens barrel; wherein the lens slice most close to the object to be detected is a datum lens, the surface of the datum lens facing the object to be detected is a datum surface, wherein the datum surface is empty while the surfaces of other lens slices are all plated with an anti-reflection film. The invention has simple structure and low cost, the anti-reflection film is plated on the surface of each lens slice, so that laser beams can transmit to the utmost extent,thus avoiding that beams are reflected on the surface of each lens; and no film is plated on the datum surface, so that rays are reflected on the datum surface to the utmost extent, energy is equivalent to that of rays reflected on the lens to be detected, so as to form the most clear interference fringe. And the lens to be detected is avoided to dim the film.
Description
(1) technical field:
The present invention relates to a kind of detector lens that is used for spherical detector, the non-contact detection camera lens that particularly is applied to the Feisuo interferometer, uses with the surface accuracy and the radius-of-curvature of detection optical spheric glass.
(2) background technology:
In the production run of spheric glass, the detection of eyeglass precision is most important.The Feisuo interferometer is the main detecting instrument that detects the spheric glass surface accuracy.The Feisuo interferometer comprises light source A, disperses eyeglass B, Amici prism C, collimating mirror D, detector lens E and image pick-up device F.Light source A can use the gas-discharge lamp that sends single wavelength, and for example helium and sodium vapor lamp generally adopt laser; Image pick-up device F can be ccd video camera; Detector lens E is called reference field H towards the one side of determinand G.Its principle of work is such: as shown in Figure 1, the light beam that light source A produces is through after dispersing eyeglass B, Amici prism C and collimating mirror D, vertical incidence detector lens E, part light is reflected at the reference field H of detector lens E, formation enters image pick-up device F with reference to light path Ib through Amici prism C with reference to light path Ib; Part light transmission reference field H is radiated on to be measured the M, and mobile determinand G is if the light vertical irradiation is on to be measured M the time, light will form and detect light path Ia to be measured M reflection this moment, detected light path Ia and returned by former road, through Amici prism C, also reflection enters image pick-up device F.According to the interference of light principle---two row or several row have same frequency, mutual superposition when light wave that direction of vibration is identical meets in the space, strengthen all the time in some zone, then weaken all the time in other zones, form the phenomenon of stable strength distribution; Form interference fringe with reference to light path Ib and detection light path Ia on image pick-up device F, the staff observes the surface accuracy of determinand G according to shape of stripes.In addition, treating that side G moves to light beam convergence point position, the corrugated 180 degree revolutions of reflection ray are returned detector lens E later, after interfering with the generation of reference field h reflex light, can observe big interferometer striped, the distance R that this moment, determinand G moved is the radius-of-curvature of this eyeglass.
In whole interferometer, detector lens is one of most important parts, and the performance of camera lens has determined the precision of measuring.Each lens of detector lens all requires very high surface accuracy, and if reference field beam reflected and from the intensity difference of to be measured beam reflected when big, the interference that obtains will be obvious inadequately.In order to strengthen the light of reference field reflection, some manufacturers can plate reflectance coating on reference field.But owing to need mobile determinand in testing process, determinand and detector lens often bump, and may bump colored reflectance coating, even the reference field of can damaging, and therefore need a kind of cost of design low, can distribute the detector lens of two beam intensities preferably.
(3) summary of the invention:
In order to overcome the deficiencies in the prior art, the invention provides the detector lens that a kind of cost simple in structure is low, imaging effect is good.
The present invention is achieved by the following technical solutions: a kind of detector lens that is used for spherical detector, comprise in lens barrel and the lens barrel at least two lens, lens near determinand is the benchmark eyeglass, the benchmark eyeglass is a reference field towards the one side of determinand, wherein, reference field is blank, and the surface of other each lens all is coated with anti-reflection film.
Compared with prior art, the present invention is simple in structure, cost is lower, surface at each lens plates anti-reflection film, and laser beam is seen through as much as possible, avoids light beam in the consumption that is reflected of each lens surface, and on reference field, be not coated with any rete, purpose is to make the reference mirror reflection ray as much as possible, and energy is with suitable from the determinand reflection ray, to form interference fringe the most clearly.Also avoid occurring being bumped the situation appearance of colored rete by determinand.
Above-mentioned described anti-reflection film is that centre wavelength is the monofilm of 632.8nm.The surface accuracy of described reference field is less than or equal to γ/20, and wherein γ is 632.8nm.
Above-mentioned described benchmark eyeglass outer cover has stationary magazine creel, and stationary magazine creel is installed in the lens barrel inner chamber, and described stationary magazine creel comprises lock pressure ring and holder, forms annular recess fixed reference eyeglass between holder and the lock pressure ring.Because the reference field of benchmark eyeglass is the superelevation precision surface, after the benchmark eyeglass is assembled into lens barrel, produce distortion because of extruding or other stress easily, influence measuring accuracy; By the benchmark eyeglass that holder and lock pressure ring fix, can avoid the benchmark eyeglass to be squeezed and stress, and assemble more convenient.
Above-mentioned described holder with the lock pressure ring between by being threaded.Between described lens barrel and the stationary magazine creel by being threaded.Above-mentioned described lens barrel inner chamber is provided with platform near an end end of determinand, and described stationary magazine creel is installed on the platform.
Above-mentioned described lens barrel inner chamber is equipped with sealing ring near an end end of light source.Sealing ring also plays the effect of diaphragm simultaneously, makes the simpler compactness of structure.
Above-mentioned described lens barrel, holder, lock pressure ring, sealing ring and spacer ring adopt aluminium to make.
Above-mentioned described camera lens comprises three lens with positive focal length, and first lens is a plano-convex lens, and its first surface is that convex surface, second surface are the plane; Second lens and benchmark eyeglass are meniscus shaped lens, and described reference field is a concave surface.
(4) description of drawings:
Fig. 1 be the Feisuo interferometer the principle of work synoptic diagram;
Fig. 2 is a structural representation of the present invention;
Fig. 3 is the spectroscopy data figure of employed anti-reflection film of the present invention;
Fig. 4 is an optical path difference reference diagram of the present invention.
Below in conjunction with accompanying drawing the present invention is done detailed explanation:
(5) embodiment:
The present invention includes in lens barrel 1 and the lens barrel 1 at least two lens, be benchmark eyeglass G3 near the lens of determinand, benchmark eyeglass G3 is reference field S7 towards the one side of determinand, and reference field S7 is blank, and the surface of other each lens all is coated with anti-reflection film.Anti-reflection film can make light beam see through each lens as much as possible and avoid light beam in the consumption that is reflected of each lens surface, and on reference field S7, be not coated with any rete, purpose is to make the reference mirror reflection ray as much as possible, energy is with suitable from eyeglass reflection ray to be measured, to form interference fringe the most clearly.
Described anti-reflection film is that centre wavelength is the monofilm of 632.8nm.As Fig. 4, shown in Figure 5, can make laser beam have transmitance more than 98%, the present invention can distribute well like this and detect the luminous energy of light path with reference to light path, make the clear wash rice of interference of light striped on the camera.
For improving accuracy of detection, reference field S7 needs the grinding of superhigh precision.Particularly, the surface accuracy of described reference field S7 is less than or equal to γ/20, and wherein γ is 632.8nm.
Because the reference field S7 of benchmark eyeglass G3 is the superelevation precision surface, in benchmark eyeglass S7 when assembling, produce distortion because of extruding or other stress easily, influences measuring accuracy, assemble for convenience and reduce the wastage, the present invention is to improving on the structure of detector lens and the assemble method.As Fig. 2, shown in Figure 3, above-mentioned described benchmark eyeglass G 3 outsides are with stationary magazine creel, and stationary magazine creel is installed in lens barrel 1 inner chamber, and described stationary magazine creel comprises lock pressure ring 3 and holder 4, form annular recess 7 fixed reference eyeglass G3 between holder 4 and the lock pressure ring 3.Above-mentioned described holder 4 with the lock pressure ring 3 between by being threaded.Between described lens barrel 1 and the stationary magazine creel by being threaded.Above-mentioned described lens barrel 1 inner chamber is provided with platform 2 near an end end of determinand, and described stationary magazine creel can be installed on the platform 2.During assembling, earlier benchmark eyeglass G3 is put into holder 4, screws lock pressure ring 3 since between holder 4 and the lock pressure ring 3 by being threaded, can control the size of annular recess 7 during installation preferably, also can avoid installing benchmark eyeglass G3 produced and push and stress.Point glue was fixed after lock pressure ring 4 pinned benchmark eyeglass G3, and at this moment benchmark eyeglass G3 can not move in stationary magazine creel, has guaranteed the right alignment of each lens.Benchmark eyeglass G3 by holder 3 and lock pressure ring 4 fix can avoid benchmark eyeglass G3 to be squeezed and stress.At last benchmark eyeglass G3 is fit in the lens barrel 1, between described lens barrel 1 and the stationary magazine creel by being threaded.Because the protection of stationary magazine creel can be eliminated 1 pair of benchmark eyeglass of lens barrel G3 produces in the assembling process extruding and stress fully, reduce the loss of eyeglass, and assemble more convenient.
Above-mentioned described lens barrel 1 inner chamber is equipped with sealing ring 5 near an end end of light source.Sealing ring 5 also plays the effect of diaphragm simultaneously, makes the simpler compactness of structure.
Particularly, described camera lens comprises three lens with positive focal length, and the first lens G1 is a plano-convex lens, and its first surface S2 is that convex surface, second surface S3 are the plane; The second lens G2 and benchmark eyeglass G3 are meniscus shaped lens, and described reference field S7 is a concave surface.Also be provided with spacer ring 6 between the described first lens G1 and the second lens G2.For making camera lens have enough intensity light again, described lens barrel 1, holder 3, lock pressure ring 4, sealing ring 5 and spacer ring 6 adopt aluminium to make.
Below be specific embodiments of the invention:
Present embodiment adopts the structure of three-chip type, is respectively a slice planoconvex lens and the two bent moon eyeglasses that all have positive refractive power from source ends.Preferred parameter value of the present invention is as shown in table 1:
Table 1
Among the present invention, each lens adopts the material of high refraction, and wherein the first lens G1 and the second lens G2 all adopt the H-ZF52A glass material, and benchmark eyeglass G3 adopts the H-ZF7LA glass material.
The foregoing description is a better embodiment of the present invention; but embodiments of the present invention are not limited thereto; other are any not to deviate from change, the modification done under spirit of the present invention and the principle, substitute, combination, simplify; be the substitute mode of equivalence, be included within protection scope of the present invention.
Claims (10)
1. detector lens that is used for spherical detector, comprise in lens barrel and the lens barrel at least two lens, lens near determinand is the benchmark eyeglass, the benchmark eyeglass is a reference field towards the one side of determinand, it is characterized in that: reference field is blank, and the surface of other each lens all is coated with anti-reflection film.
2. a kind of detector lens that is used for spherical detector according to claim 1 is characterized in that: described anti-reflection film is that centre wavelength is the monofilm of 632.8nm.
3. a kind of detector lens that is used for spherical detector according to claim 1, it is characterized in that: the surface accuracy of described reference field is less than or equal to γ/20, and wherein γ is 632.8nm.
4. a kind of detector lens that is used for spherical detector according to claim 2, it is characterized in that: described benchmark eyeglass outer cover has stationary magazine creel, stationary magazine creel is installed in the lens barrel inner chamber, described stationary magazine creel comprises lock pressure ring and holder, forms annular recess fixed reference eyeglass between holder and the lock pressure ring.
5. a kind of detector lens that is used for spherical detector according to claim 4 is characterized in that: described holder with the lock pressure ring between by being threaded.
6. a kind of detector lens that is used for spherical detector according to claim 4 is characterized in that: between described lens barrel and the stationary magazine creel by being threaded.
7. a kind of detector lens that is used for spherical detector according to claim 5 is characterized in that: described lens barrel inner chamber is provided with platform near an end end of determinand, and described stationary magazine creel is installed on the platform.
8. a kind of detector lens that is used for spherical detector according to claim 5 is characterized in that: described lens barrel inner chamber is equipped with sealing ring near an end end of light source.
9. a kind of detector lens that is used for spherical detector according to claim 8 is characterized in that: described lens barrel, holder, lock pressure ring and sealing ring adopt aluminium to make.
10. according to any described a kind of detector lens that is used for spherical detector in the claim 1 to 9, it is characterized in that: described camera lens comprises three lens with positive focal length, first lens is a plano-convex lens, and its first surface is that convex surface, second surface are the plane; Second lens and benchmark eyeglass are meniscus shaped lens, and described reference field is a concave surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910042094A CN101639338A (en) | 2009-08-18 | 2009-08-18 | Detection lens used for spherical detector |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910042094A CN101639338A (en) | 2009-08-18 | 2009-08-18 | Detection lens used for spherical detector |
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| CN101639338A true CN101639338A (en) | 2010-02-03 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103207442A (en) * | 2013-01-29 | 2013-07-17 | 谭少沛 | Relay lens and lens module detection device and detection method |
| CN105445750A (en) * | 2015-11-25 | 2016-03-30 | 中国科学院上海光学精密机械研究所 | Doppler frequency shift frequency discriminator |
| CN111351425A (en) * | 2020-03-10 | 2020-06-30 | 南通大学 | Method for determining dynamic range of interferometer during spherical defocus detection |
| WO2020211477A1 (en) * | 2019-04-15 | 2020-10-22 | 深圳市速腾聚创科技有限公司 | Laser radar |
-
2009
- 2009-08-18 CN CN200910042094A patent/CN101639338A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103207442A (en) * | 2013-01-29 | 2013-07-17 | 谭少沛 | Relay lens and lens module detection device and detection method |
| CN105445750A (en) * | 2015-11-25 | 2016-03-30 | 中国科学院上海光学精密机械研究所 | Doppler frequency shift frequency discriminator |
| WO2020211477A1 (en) * | 2019-04-15 | 2020-10-22 | 深圳市速腾聚创科技有限公司 | Laser radar |
| CN111351425A (en) * | 2020-03-10 | 2020-06-30 | 南通大学 | Method for determining dynamic range of interferometer during spherical defocus detection |
| CN111351425B (en) * | 2020-03-10 | 2022-06-03 | 南通大学 | Method for determining dynamic range of interferometer during spherical defocus detection |
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Application publication date: 20100203 |