CN102525379B - Optical probe with improved optical quality - Google Patents
Optical probe with improved optical quality Download PDFInfo
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- CN102525379B CN102525379B CN2012100391881A CN201210039188A CN102525379B CN 102525379 B CN102525379 B CN 102525379B CN 2012100391881 A CN2012100391881 A CN 2012100391881A CN 201210039188 A CN201210039188 A CN 201210039188A CN 102525379 B CN102525379 B CN 102525379B
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Abstract
The invention discloses an optical probe with improved optical quality, which comprises a connector, a probe base, a flexible circuit board, an optical component, an MEMS (micro electro mechanical system) micromirror, a probe end cap and a window plate. The optical component comprises an optical fiber and a lens, and three optical end surfaces including an end surface of the optical fiber and endsurfaces of two ends of the lens are coated with anti-reflection films or are chamfered. In the optical probe, the optical fiber, the lens, the MEMS micromirror and an optical interface of the windowplate are successfully designed after an optical path source is designed, and the inner surface of the probe base and a frame of the periphery of the MEMS micromirror are coated with film layer materials capable of absorbing infrared light, so that the optical quality of the optical probe is improved advantageously; loss of light of various optical interfaces is reduced; and reflecting light signals, which affect a system, of the various optical interfaces can be reduced and even eliminated. In addition, collimation of an optical path and simple assembly of the optical probe can be guaranteedby a mechanical structure of the probe base and a mechanical structure of the probe end cap.
Description
Technical field
The present invention relates to a kind of armarium technical field that belongs to, particularly relate to a kind of optic probe that improves optical quality.
Background technology
With micro electro mechanical system (MEMS) technology (microelectromechanical systems, abbreviation MEMS) scanning micro-mirror and optical coherent chromatographic imaging (Optical Coherence Tomography, OCT) technology combines, and carrying out the endoscopic imaging system exploitation is the main exploration project of patent application unit.In the world first MEMS-OCT optic probe just by one of member of R﹠D team of applying unit in calendar year 2001 research and development, this optic probe adopts the one dimension MEMS scanning micro-mirror of electrothermal drive, has successfully showed the two-dimensional section OCT image of vivo porcine bladder.This probe has been obtained the United States Patent (USP) (patent No.: US7,450244 Full circumferential scanning OCT intravascular imaging probe based on scanning MEMS mirror), Fig. 1 is probe three dimensional design figure, and it comprises probe base 14, lens 12, Transmission Fibers 13, carries out flexible PCB 15 and MEMS micro mirror 11 that the MEMS micro mirror is electrically connected.Probe base designs according to each element size, adopts spark cutting processing; The Transmission Fibers fore-end adopts gapless to be assembled in the corresponding hole slot of probe with Green lens after removing crust; MEMS micro mirror and flexible PCB are bonded in respectively in the groove on 45 ° of slopes of probe one end band; Finish at last the assembling of plastic bushing 16.
Endoscopic imaging probe (the patent No.: 2011100711137) significant improvement has been done in the assembling of optical element, Transmission Fibers 21 packed into be assembled into the assembly with particular job distance with lens 23 after glass capillary 22 hole enlargements, reinstall probe, reduced probe assembling difficulty.But optical quality is not improved, particularly can turn back by the generating portion reflection of light in the Green lens outer face, can cause on the one hand the part loss of luminous power, can form with the light that sample is reflected back on the other hand and interfere, thereby not only so that transfer to the signal weakening of OCT imaging system, can increase unnecessary interfering signal to system simultaneously.
Summary of the invention
The object of the invention is to improve the optical texture design of optic probe part, optimizes the optical quality of each optical interface in the probe, optimizes the part-structure of probe.Thereby realize on the one hand accurate assembling and the calibration of each optical component in the probe, reduced on the other hand the light loss in the probe, so that use the system of this probe can gather stable and stronger signal, thus obtain more satisfactory result.
The present invention adopts following technical scheme for achieving the above object:
A kind of optic probe that improves optical quality, comprise connector, probe base, flexible PCB, optical module, MEMS micro mirror, probe end cap and window, it is characterized in that: described optical module comprises optical fiber and lens, and three optics end faces of the end face at described fiber end face and lens two ends are coated with to be carried out anti-reflection film or carry out the end face chamfering.
It is further characterized in that: described probe base left end is the T-slot hole, and the T-slot stenosis is used for optical module is installed, and then makes things convenient for stretching out of flexible PCB than sipes; The probe base right side is an irregularly-shaped hole, and the probe end cap inserts with it and cooperates; Each surface of probe base endoporus all is coated with the material that shoe can attract infrared light; Probe end cap left side has the slope groove, is used for laying flexible PCB, and the flexible PCB pad area is bonded with the MEMS micro mirror; With the MEMS micro mirror over against probe base on have window, window is equipped with window, the two-sided shoe anti-reflection film that is coated with of described window, perhaps window adopts the ir transmitting material processing and fabricating.
Each optical interface in optical module all adopts and is coated with the shoe anti-reflection film, and optical module is placed in probe base slotted eye centre position, becomes 95 degree-175 degree directive MEMS micro mirrors through the parallel probe base axis of the focused beam of optical module outgoing and with the MEMS micro mirror.
Optical fiber components in optical module and GRIN Lens adopt to be coated with by the optical fiber components end face carries out anti-reflection film or end face chamfering, and lens adopt the end face chamfering by MEMS micro mirror side end face, emergent light on the lower side, optical module is placed on the upper side position of probe base slotted eye, becomes 95 degree-175 degree directive MEMS micro mirrors under the focused beam of optical module outgoing is oblique and with the MEMS micro mirror.
When optical module outer face chamfering emergent light on the upper side, optical module is placed on the lower side position of probe base slotted eye, becomes 95 degree-175 degree directive MEMS micro mirrors obliquely and with the MEMS micro mirror through the focused beam of optical module outgoing.
The chamfering emergent light is taken back or is taken over when the optical module outer face, becomes 95 degree-175 degree directive MEMS micro mirrors with MEMS micro mirror minute surface through the focused beam of optical module outgoing.
Probe end cap and the circumferential location fit system of probe base are that D shape cross section is realized cooperating, any mode in shell fragment/Spring sheet clip cooperation, pin or screw fit, the key/keyway cooperation.
Aforementioned MEMS micro mirror comprises top layer printing opacity cover plate, micro mirror minute surface, micro mirror framework and bottom substrate all around; Frame upper surface is coated with the material that shoe can absorb infrared light around the two-sided shoe optical anti-reflective film that is coated with of top layer printing opacity cover plate in the described MEMS micro mirror, micro mirror.
Optic probe of the present invention not only can be applicable to the OCT of endoscope imaging, also can be used for the application of the directions such as co-focusing imaging and two-photon.The optic probe of the present invention's design is set about from the light path source, successively the optical interface of optical fiber, lens, MEMS micro mirror and the window of optic probe designed, and framework all is coated with to carry out to have and can absorbs infrared rete around probe base inner surface and the MEMS micro mirror, thereby is conducive to the raising of optical quality in the optic probe; Reduced the loss by each optical interface light; And can reduce even eliminate each optical interface produces interference to system reflected light signal.And aim at and debug to start with and designed sonde configuration from light path, will improve the alignment precision of the light path in the probe, and then improve optical quality; Can reduce simultaneously probe assembling difficulty, simplify probe packaging technology process.
Description of drawings
Fig. 1 is MEMS-OCT old edition probe three dimensional design;
Among the figure, 11, the MEMS micro mirror; 12, lens; 13, Transmission Fibers; 14, probe base; 15, flexible PCB; 16, plastic bushing.
Fig. 2 is the optical module in the prior art endoscopic imaging probe;
Among the figure, 21, Transmission Fibers; 22, glass capillary; 23, lens.
Fig. 3 is MEMS-OCT imaging system schematic diagram;
Among the figure, 1, scanning light source; 2, reference arm reflecting mirror; 3, photodetector; 4, endoscope probe; 5, sample.
Fig. 4 is the probe schematic diagram that contains the coated optics assembly;
Fig. 5 is coated optics modular construction schematic diagram;
Fig. 6 is outgoing beam outer face chamfering optical module probe schematic diagram on the lower side;
Fig. 7 is outgoing beam outer face chamfering optical assembly structure schematic diagram on the lower side;
Fig. 8 is outgoing beam outer face chamfering optical module probe schematic diagram on the upper side;
Fig. 9 is outgoing beam outer face chamfering optical assembly structure schematic diagram on the upper side;
Among the figure, 41, connector; 42, probe base; 43, flexible PCB; 44, optical module; 45, focused beam; 46, MEMS micro mirror; 47, probe end cap; 48, window, 51, Transmission Fibers; 52, bare fibre; 53, glass capillary; 54, coated optics assembly; 55, outer tube.
Figure 10 is MEMS micro-mirror structure schematic diagram;
Among the figure, 101, the optical anti-reflective film coating; 102, top layer printing opacity cover plate; 103, micro mirror minute surface; 104, framework around the micro mirror; 105, bottom substrate.
Figure 11 cooperates schematic diagram for the probe end cap with pedestal D shape cross section;
Among the figure, 111, probe base; 112, spherical crown shape hole; 113, D shape cross section axis; 114, probe end cap.
Figure 12 cooperates schematic diagram for the probe end cap with pedestal shell fragment/Spring sheet clip;
Among the figure, 121, probe base; 122, shell fragment groove; 123, probe end cap; 124, Spring sheet clip.
Figure 13 is probe end cap and pedestal pin or screw fit schematic diagram;
Among the figure, 131, probe base; 132, probe base pin hole or screw hole; 133, sound end lid pin hole or screw hole; 134, pin or screw; 135, probe end cap.
Figure 14 cooperates schematic diagram for the probe end cap with pedestal key/keyway;
Among the figure, 141, probe base; 142, keyway; 143, key; 144, probe end cap.
The specific embodiment
A kind of MEMS-OCT imaging system as shown in Figure 3, what its utilized is Michelson Interference Principle.Swept light source 1 is divided into the two-way that two-way is inputted respectively reference arm reflecting mirror 2 and sample arm miniature endoscope probe 4 with light, the two-way light that all passes through after reflecting gathers in beam splitter port generation interference and by photodetector (PD) 3, just can obtain the sample depth information through anti-phase Fourier Tranform, scan depths and depth resolution are relevant with swept light source.Sample arm adopts the MEMS micro mirror that can do horizontal two-dimensional scan to realize the sector scanning of 4 pairs of samples 5 of miniature endoscope probe, just can realize the three-dimensional imaging of sample 5.The key of based endoscopic imaging is to realize the horizontal rapid scanning of optic probe, this just requires to have can design the miniature endoscope probe (2-5mm) that enters the narrow and small chamber of human body, can obtain more sample message simultaneously and it stable is transferred to outside OCT imaging system.
The key problem that the OCT technology is applied to endoscope is the microminiaturization that its endoscopic optical is popped one's head in, and along with the development of MEMS technology, just can realize the microminiaturization of optic probe in conjunction with the MEMS micro mirror.For improving the image quality of OCT imaging system, need to carry out precision optical design to a whole set of OCT imaging system.The particularly light path of optic probe and optical interface design, and optic probe structural design optimization.
The present invention probe primary structure shown in Fig. 4,6,8 comprises: connector 41 probe bases 42, flexible PCB 43, optical module 44, focused beam 45, MEMS micro mirror 46, probe end cap 47, window 48.Probe base 42 left ends are the T-slot hole, and the T-slot stenosis is used for optical module 44 is installed, and then makes things convenient for stretching out of flexible PCB 43 than sipes; Probe base 42 right sides are an irregularly-shaped hole, and probe end cap 47 inserts with it and cooperates; Each surface of probe base 42 endoporus all is coated with the material that shoe can attract infrared light, effectively reduces the interfering signal that veiling glare brings; Probe end cap 47 left sides have the slope groove, are used for laying flexible PCB 43, and flexible PCB 43 pad areas are bonded with MEMS micro mirror 46; With MEMS micro mirror 46 over against probe base 42 on have window, be used for window 48 and lay.The window 48 two-sided shoe anti-reflection films that are coated with, perhaps window 48 adopts the ir transmitting material processing and fabricating.
Can know that from Fig. 3 light beam inputs to endoscope probe left end Transmission Fibers by an end of Michelson interference circulator the OCT system, then by optical module directive MEMS micro mirror, after the reflection of MEMS micro mirror, see through the probe window and converge at window upper surface 0-2mm place.
Main optical component is optical module in the invention probe, it is focused into one than the function of small light spot by having of forming of optical fiber and lens with transmitting beam, thereby can realize that stronger light beam is incident to the sample nexine and receives stronger sample return information after optical module focuses on.Therefore the light path design of optical module is particularly important, and it directly affects the image quality of OCT.Here mainly contain three optical interfaces in the optical module: two end faces at optical fiber components end face and lens two ends.Be the light loss that reduces optical interface and the generation interfering signal of turning back, each optical interface of optical module can be carried out anti-reflection film or carries out the end face chamfering and realize by being coated with.
Optical module is shown in Fig. 5,7,9, the bare fibre 52 that Transmission Fibers 51 1 end parts are removed crust is packed in the glass capillary 53, then these parts are carried out end face and be coated with the left side of carrying out the outer tube 55 of packing into after anti-reflection film or the chamfering, lens 54 1 ends also can be coated with carries out anti-reflection film or end face chamfering and insertion outer tube 55 correct positions parallel with the optical fiber components fillet surface, and the other end can be coated with carries out anti-reflection film or end face chamfering.The endoscope's optic probe (such as Fig. 4, Fig. 6, shown in Figure 8) that adopts this optical module to assemble can reduce the loss of light effectively, and imaging causes signal to disturb to OCT effectively to stop simultaneously reflected light to turn back.
According to the difference of optical assembly structure design, the invention probe has multiple implementation:
Mode one as shown in Figure 4, when all adopting, each optical interface in the optical module 44 is coated with when carrying out anti-reflection film, optical module 44 is placed in probe base 42 slotted eye centre positions, through the focused beam 45 parallel probe base axis of optical module 44 outgoing penetrate and with MEMS micro mirror 46 (95 degree-175 degree) directive MEMS micro mirror 46 at angle.
Mode two as shown in Figure 6, optical fiber components in optical module 44 and lens adopt to be coated with by the optical fiber components end face carries out anti-reflection film or end face chamfering, and lens adopt the end face chamfering by MEMS micro mirror 46 side end faces, emergent light on the lower side, optical module 44 can be placed on the upper side position of probe base 42 slotted eyes, through the focused beam 45 of optical module 44 outgoing oblique lower and with MEMS micro mirror 46 (95 degree-175 degree) directive MEMS micro mirror 46 at angle.
Mode three as shown in Figure 8, optical module 44 outer face chamfering emergent lights on the upper side, optical module 44 is placed on the lower side position of probe base 42 slotted eyes, through the focused beam 45 of optical module 44 outgoing obliquely and with MEMS micro mirror 46 (95 degree-175 degree) directive MEMS micro mirror 46 at angle.
Optical module outer face chamfering emergent light is taken back or is taken over, and becomes 95 degree-175 degree directive MEMS micro mirrors with MEMS micro mirror minute surface through the focused beam of optical module outgoing.
Directive MEMS micro mirror after light path focuses on via optical module in the optic probe, the MEMS micro mirror is comprised of framework 104 and bottom substrate 105 around top layer printing opacity cover plate 102, micro mirror minute surface 103, the micro mirror as shown in figure 10.Wherein 102 two-sided being coated with of the top layer printing opacity cover plate in the MEMS micro mirror are carried out optical anti-reflective film 101, also can remove this top layer printing opacity cover plate according to optic probe to the design requirement of MEMS micro mirror.MEMS micro mirror minute surface can form by the mode of sputter the metallic diaphragm with high light reflectance, improves the optical interface quality.Framework 104 upper surfaces are coated with the material that shoe can absorb infrared light around the MEMS micro mirror, can reflect the stray light signal that produces through frame upper surface by the establishment veiling glare.
For guaranteeing the accurate directive MEMS of optical module focused beam micro mirror center, the fit system that is used for MEMS micro mirror the probe end cap of laying and the probe base that is used for the assembling optical module can have following several mode: mode one, probe base 111 right sides processing cross section is spherical crown shape hole 112, probe end cap inserting paragraph is processed into D shape cross section axis 113, can realize both circumferential location after probe end cap 114 inserts.Mode two, the some shell fragment grooves 122 of processing on the probe base 121 right circles hole walls, some Spring sheet clips 124 that distribute around the probe end cap 123 insertion axles, Spring sheet clip and probe base shell fragment groove tightened the circumferential location of realizing both after the probe end cap inserted.Mode three, have pin hole or screw hole 132 on probe base 131 right side walls, probe end cap 135 right side correct positions also have onesize pin hole or screw hole 134, when probe end cap insertion pedestal is adjusted to two pin holes or screw hole coincidence, inserts pin or the screw 133 of screwing on and to realize both circumferential location.Mode four, circular hole bottom, probe base 141 right side is a keyway 142, and probe end cap inserting paragraph leaves the key 143 that cooperates with it, and probe end cap 144 inserts the circumferential location that can realize both.
Claims (8)
1. optic probe that improves optical quality, comprise connector, probe base, flexible PCB, optical module, MEMS micro mirror, probe end cap and window, it is characterized in that: described optical module comprises Transmission Fibers, glass capillary, glass envelope and lens; Transmission Fibers is inserted in the glass capillary, is inserted in lens and forms optical module in the glass envelope; Three optics end faces of the end face at described fiber end face and lens two ends are coated with to be carried out anti-reflection film or carries out the end face chamfering.
2. a kind of optic probe that improves optical quality according to claim 1, it is characterized in that: described probe base left end is the T-slot hole, the T-slot stenosis is used for optical module is installed, and then makes things convenient for stretching out of flexible PCB than sipes; The probe base right side is an irregularly-shaped hole, and the probe end cap inserts with it and cooperates; Each surface of probe base endoporus all is coated with the material that shoe can absorb infrared light; Probe end cap left side has the slope groove, is used for laying flexible PCB, and the flexible PCB pad area is bonded with the MEMS micro mirror; With the MEMS micro mirror over against probe base on have window, window is equipped with window, the two-sided shoe anti-reflection film that is coated with of described window, perhaps window adopts the ir transmitting material processing and fabricating.
3. a kind of optic probe that improves optical quality according to claim 2, it is characterized in that: each optical interface in the optical module all adopts and is coated with the shoe anti-reflection film, optical module is placed in probe base slotted eye centre position, becomes 95 degree-175 degree directive MEMS micro mirrors through the parallel probe base axis of the focused beam of optical module outgoing and with MEMS micro mirror minute surface.
4. a kind of optic probe that improves optical quality according to claim 2, it is characterized in that: the optical fiber components in the optical module and lens adopt to be coated with by the optical fiber components end face carries out anti-reflection film or end face chamfering, and lens adopt the end face chamfering by MEMS micro mirror side end face, emergent light on the lower side, optical module is placed on the upper side position of probe base slotted eye, becomes 95 degree-175 degree directive MEMS micro mirrors under the focused beam of optical module outgoing is oblique and with the MEMS micro mirror.
5. a kind of optic probe that improves optical quality according to claim 1, it is characterized in that: the lens of optical module by MEMS micro mirror side outer face chamfering emergent light on the upper side, optical module is placed on the lower side position of probe base slotted eye, becomes 95 degree-175 degree directive MEMS micro mirrors obliquely and with MEMS micro mirror minute surface through the focused beam of optical module outgoing.
6. a kind of optic probe that improves optical quality according to claim 1, it is characterized in that: the lens of optical module are taken back or are taken over by MEMS micro mirror side outer face chamfering emergent light, become 95 degree-175 to spend directive MEMS micro mirrors with MEMS micro mirror minute surface through the focused beam of optical module outgoing.
7. a kind of optic probe that improves optical quality according to claim 1 and 2 is characterized in that: probe end cap and the circumferential location fit system of probe base are that D shape cross section is realized cooperating, any mode in shell fragment/Spring sheet clip cooperation, pin or screw fit, the key/keyway cooperation.
8. each described a kind of optic probe that improves optical quality according to claim 1-6 is characterized in that: described MEMS micro mirror comprises top layer printing opacity cover plate, micro mirror minute surface, micro mirror framework and bottom substrate all around; Frame upper surface is coated with the material that shoe can absorb infrared light around the two-sided shoe optical anti-reflective film that is coated with of top layer printing opacity cover plate in the described MEMS micro mirror, micro mirror.
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| CN2012100391881A CN102525379B (en) | 2012-02-21 | 2012-02-21 | Optical probe with improved optical quality |
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| CN2012100391881A CN102525379B (en) | 2012-02-21 | 2012-02-21 | Optical probe with improved optical quality |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102846302A (en) * | 2012-09-04 | 2013-01-02 | 无锡微奥科技有限公司 | Optical coherence tomography (OCT) endoscope imaging device |
| CN102894947B (en) * | 2012-09-26 | 2015-04-15 | 无锡微奥科技有限公司 | Micro electromechanical system (MEMS) optical probe |
| CN103054544B (en) * | 2012-10-18 | 2014-11-05 | 无锡微奥科技有限公司 | Double-working-mode micro electro mechanical system (MEMS) optical probe |
| CN103033929B (en) * | 2012-12-06 | 2014-11-26 | 无锡微奥科技有限公司 | Micro electro mechanical system (MEMS) scanning probe |
| US9195044B2 (en) * | 2013-08-15 | 2015-11-24 | Siemens Energy, Inc | Optical probe having an inner tube with separable tube sections to house optical elements |
| CN105193379B (en) * | 2015-07-31 | 2017-09-01 | 浙江大学 | A kind of all -fiber endoscopic OCT probe based on drawing wimble structure |
| CN107822600A (en) * | 2017-12-14 | 2018-03-23 | 天津海仁医疗技术有限公司 | Device and system and method for work applied to hyperplasic vascular dermatosis detection, positioning |
| CN113237850A (en) * | 2021-04-29 | 2021-08-10 | 广州永士达医疗科技有限责任公司 | Optical fiber collimator for OCT (optical coherence tomography), manufacturing method and OCT equipment |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7450244B2 (en) * | 2005-01-12 | 2008-11-11 | University Of Florida Research Foundation, Inc. | Full circumferential scanning OCT intravascular imaging probe based on scanning MEMS mirror |
| US7944566B2 (en) * | 2005-02-04 | 2011-05-17 | University Of Florida Research Foundation, Inc. | Single fiber endoscopic full-field optical coherence tomography (OCT) imaging probe |
| JP2009201969A (en) * | 2008-02-01 | 2009-09-10 | Fujifilm Corp | Oct optical probe and optical tomography imaging apparatus |
| CN102342825B (en) * | 2011-03-23 | 2013-04-03 | 无锡微奥科技有限公司 | Low-cost endoscope miniature optical probe |
| CN202589483U (en) * | 2012-02-21 | 2012-12-12 | 无锡微奥科技有限公司 | Optical probe for improving optical quality |
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Address after: 214028 Jiangsu province Wuxi City Linghu Road No. 200 Chinese Sensor Network International Innovation Park building C Auxiliary Building Room 302 Patentee after: WUXI WIO TECHNOLOGY Co.,Ltd. Address before: Room 16, software park, 8905 Changjiang Road, New District, Jiangsu, Wuxi, 214028 Patentee before: WUXI WIO TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20221216 Address after: B2-305, No. 200, Linghu Avenue, Xinwu District, Wuxi City, Jiangsu Province, 214000 Patentee after: Wuxi Weiwen Semiconductor Technology Co.,Ltd. Address before: Room 302, Auxiliary Building C, China Sensor Network International Innovation Park, No. 200, Linghu Avenue, Wuxi City, Jiangsu Province, 214028 Patentee before: WUXI WIO TECHNOLOGY Co.,Ltd. |