CN110488506A - A kind of Automatic laser collimation adjustment device and method - Google Patents
A kind of Automatic laser collimation adjustment device and method Download PDFInfo
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- CN110488506A CN110488506A CN201910801987.XA CN201910801987A CN110488506A CN 110488506 A CN110488506 A CN 110488506A CN 201910801987 A CN201910801987 A CN 201910801987A CN 110488506 A CN110488506 A CN 110488506A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
Abstract
A kind of Automatic laser collimation adjustment device is provided, it includes: including central processing unit (1), and signal receives line (2), signal sends the data processing and feedback control system of line (3) composition；The collimation adjustment system that Z-direction stepping motor (6) and collimation lens (4) and pedestal collectively constitute；The Beam Wave-Front detection system of first triangular prism (15), the second triangular prism (16), isosceles trapezoid prism (17), area array CCD (11) composition.Apparatus of the present invention are compact-sized, easy to use, are particularly suitable for the limited-space environments such as superb vacuum cavity, and the automation beam collimation for being able to achieve laser light source is adjusted, and have and adjust advantage quick, that signal feedback criterion is succinct.
Description
Technical field
The present invention generally belongs to laser adjusting and characterization technique field, and in particular to a kind of Automatic laser collimation adjustment
Device and method.
Background technique
Laser compares ordinary light source, and monochromaticjty is good, and brightness is high, good directionality, has very strong temporal and spatial coherence.In laser
Numerous applications in, all refer to the process that the collimation of laser optical path is adjusted.The collimation quality of laser directly affects light
The using effect for learning instrument, generally for visible light wave range laser, experimenter is frequently with the far and near adjusting method of monochromatic light door screen, qualitatively
Determine beam collimation degree.For this method although easy to operate, beam collimation degree conditioned space range effects are larger, it is difficult to
There is accurate judgement to laser alignment degree in a limited space.
The wavefront of tested light beam can be divided into two by shearing interferometer using optical element appropriate, and make two wavefront that
This is mutually sheared, while utilizing the good coherence of laser, can be generated in two wavefront laps relevant with high contrast degree
Striped.The coherent fringe and laser wavefront shape are closely related, therefore can quantitatively judge laser quasi under the conditions of degree of precision
Straight degree.
In deep ultraviolet electromagnetic wave bands, beam Propagation is larger by water vapor absorption influence of fading, so such Experiments of Optics
It must be built and be adjusted under the limited sealing condition of high ultravacuum, thus bring problem the most significant is exactly, it is difficult to
Good collimation is carried out to optical path using conventional method.
Summary of the invention
It is few for laser optical path collimating apparatus and method in the prior art, and condition requires skill harsh, that collimation is not high
Art defect provides a kind of Automatic laser collimation adjustment device and method, and the apparatus structure is compact, adjusts and fast and automatically changes journey
Degree is high, the collimation adjustment being particularly suitable under the ultra-high vacuum environment of deep ultraviolet.
The technical scheme is that a kind of Automatic laser collimation adjustment device, it includes: central processing unit, signal
Receive line, signal sends line, collimation lens, laser light source, Z-direction stepping motor, lens mount and Wave-front measurement unit；In described
Central processor receives line through signal and connect with Wave-front measurement unit, the signal sent for detection unit before received wave；Centre
Reason device sends line through signal and connect with Z-direction stepping motor, for sending move to Z-direction stepping motor；The laser light source
It is set to the side of collimation lens, so that its laser beam generated passes through collimation lens；The collimation lens passes through lens mount
It is fixed in the Z-direction stepping motor, synchronous with Z-direction stepping motor to be moved in the direction of laser propagation of laser light source, the Z
To the direction for referring to that laser beam center is propagated；The Wave-front measurement unit is located at the other side of collimation lens, so as to pass through standard
The laser beam of straight lens enters wherein, generates interference fringe in the Wave-front measurement unit, and by the interference fringe picture of acquisition
Sample signal is sent to central processing unit, central processing unit based on the received interference fringe pattern change width situation according to setting finger
Enable driving Z-direction stepping motor mobile.
Further, above-mentioned Wave-front measurement unit includes the first triangular prism, the second triangular prism, Dove prism and face battle array
CCD；First triangular prism and the second triangular prism are the identical isosceles right triangle of size, the Dove prism
Shape be isosceles trapezoid；The bevel edge of second triangular prism is parallel to collimation lens setting, and light beam is provided on bevel edge
Entrance window enters wherein so as to pass through collimation lens；First triangular prism is with its bevel edge perpendicular to second triangular prism
The mode of mirror bevel edge, which is bonded, to be arranged below the second triangular prism, is provided with sealed airspace between two right-angle sides being bonded to each other,
Filled with high purity inert gas in the sealed airspace；The joint place of first triangular prism and the second triangular prism, the one or three
Highly transmissive film is coated on the right-angle side of angle prism；Highly reflecting films are coated on the right-angle side of second triangular prism；First triangle
Another right-angle side of prism and another right-angle side of the second triangular prism mutually extends and the bottom edge gluing with the Dove prism
Fitting；Interference fringe detection window is provided on the bevel edge of above-mentioned first triangular prism, for detecting the laser interference of exiting parallel
Striped；The area array CCD is located at the light direction of interference fringe detection window, connect with central processing unit, for obtaining interference item
Line pattern width Data Concurrent is sent to central processing unit, the foundation as central processing unit control Z-direction stepping motor movement.
Further, the width range of the sealed airspace between above-mentioned two right-angle sides being bonded to each other is in 2-10mm range
It is interior.
Also further, above-mentioned central processing unit is built-in with data processing module, and the data processing module is for choosing
Make one-dimensional Fourier transform with vertical every row of interference fringe trend or every column data, obtains every row or each column period profile, then
It is averaged to every row or the summation of each column period profile curve, the value in maximum value corresponding period is proportional to this in period profile curve
Width of fringe in interference fringe, i.e., using the corresponding periodic quantity of maximum value in period profile curve as fringe-width index,
Central processing unit forms the move of control Z-direction stepping motor according to the variation tendency of width of fringe index.
Also further, above-mentioned first triangular prism and the second triangular prism are respectively arranged with a direction adjusting knob,
For fine-tuning the structure direction of the prism group of the first triangular prism, the second triangular prism and Dove prism composition.
Also further, the minimum of the movement of above-mentioned Z-direction stepping motor effectively step-length is 0.01 micron.
Further, it when laser light source described above is deep ultraviolet laser light source, is pasted on the interference fringe detection window
There is fluorescent film, the laser coherence pattern for detecting interference fringe in window is converted into the interference item that area array CCD can capture
Line pattern；The collimation lens, the first triangular prism, the second triangular prism and Dove prism are by CaF2Material production；It is described
Automatic laser collimation adjustment device is integrally placed in ultra-high vacuum environment.
Further, the reflectivity of above-mentioned highly reflecting films is greater than 80%, and the transmissivity of the high transmittance film is greater than 80%.
The present invention also provides a kind of Automatic laser collimation adjustment methods, it is using such as any power in claim 1-8
Benefit requires the Automatic laser collimation adjustment device, comprising the following steps:
S1, basic optical element are placed: placing collimation lens, laser light source is made to issue the prime focal beam spot of laser substantially
At the focal length of collimation lens, collimate laser substantially；It is put into Wave-front measurement unit in collimation laser optical path, examines wavefront
The laser light incident window for surveying unit is vertical with direction of laser propagation；
S2, starting central processing unit carry out the reception of data and instruction is sent: central processing unit first triggers Z to any direction
To the mobile slight distance of stepper motor, at the same judge to be fed back by area array CCD to the width of fringe of central processing unit be increase or
Reduce, sends movement directive in the same direction to Z-direction stepping motor if increasing, it is complete bright until occurring one in the area array CCD visual field
When spot, stepper motor stops movement；If width of fringe reduces, reverse movement order is sent to Z-direction stepping motor；By above-mentioned
Real-time continuous adjusting, original optical path, which will be rapidly achieved, approaches entirely collimated state.
Further, make light beam entrance window vertical in above-mentioned steps S1 and be directed at the laser beam by collimation lens (4).
The present invention compared with the prior art, it is advantageous that:
The present invention devises a set of radial-shear interferometer based on prism structure, and small volume is compact-sized, adjusts
Simplicity is particularly suitable for the closing confined space such as high ultravacuum.
The present invention is using fringe-width size caused by shearing interferometer as the finger for measuring beam collimation degree
Mark has discriminant approach intuitionistic and concise, signal-obtaining rapidly and accurately advantage.
The present invention is fed back using beam interference signal, is realized laser beam automation collimation adjustment algorithm, can sealed
Closed loop fast implements beam collimation in border.
Detailed description of the invention
From the detailed description with reference to the accompanying drawing to the embodiment of the present invention, these and/or other aspects of the invention and
Advantage will become clearer and be easier to understand, in which:
Fig. 1 is the structure composition schematic diagram of the Automatic laser collimation adjustment device of the embodiment of the present invention；Wherein, 1: center
Processor, 2: signal receives line, and 3: signal sends line, and 4: collimation lens, 5: laser beam light source, 6:Z is to stepper motor, and 7: thoroughly
Mirror pedestal, 8: wavefront to be measured, 9: light beam entrance window, 10: fluorescent film, 11: area array CCD, 12: highly reflecting films, 13: highly transmissive film,
14: prism adjusting knob, 15: the first triangular prisms, 16: the second triangular prisms, 17: isosceles trapezoid prism.
Fig. 2 is to go out after the light splitting of the wave band detection unit of the Automatic laser collimation adjustment device of the embodiment of the present invention
Interfere schematic diagram before penetrating the laser wave formed on face；
Fig. 3 is that the central processing unit of the Automatic laser collimation adjustment device of the embodiment of the present invention carries out automation collimation tune
The algorithmic procedure of section is intended to.
Specific embodiment
In order to make those skilled in the art more fully understand the present invention, with reference to the accompanying drawings and detailed description to this hair
It is bright to be described in further detail.
Embodiment 1
A kind of Automatic laser collimation adjustment device, structural schematic diagram as shown in Figure 1, it include: central processing unit 1,
Signal receives line 2, signal sends line 3, collimation lens 4, laser light source 5, Z-direction stepping motor 6, lens mount 7, the first triangular prism
Mirror 15, the second triangular prism 16, Dove prism 17 and area array CCD 11, the connection relationship and architectural characteristic of each section are as follows:
The central processing unit 1 receives line 2 through signal and connect with area array CCD 11, sends for receiving plane battle array CCD11 dry
Relate to stripe width data；Central processing unit 1 sends line 3 through signal and connect with Z-direction stepping motor 6, for according to interference item
Line pattern width data variation sends move to Z-direction stepping motor 6, and the Z-direction refers in the propagation of laser beam center
Direction；
The laser light source 5 is set to the side of collimation lens 4, so that its laser beam generated passes through collimation lens 4；Institute
Collimation lens 4 is stated to be fixed in the Z-direction stepping motor 6 by lens mount 7, it is synchronous with Z-direction stepping motor 6 in laser light source
It is moved in 5 direction of laser propagation,
First triangular prism 15, the second triangular prism 16, Dove prism 17, fluorescent film 10 and area array CCD 11 form
Wave-front measurement unit is respectively positioned on the other side of collimation lens 4, so that the laser beam for passing through collimation lens 4 enters the first triangular prism
In the prism group that mirror 15, the second triangular prism 16, Dove prism 17 form, interference fringe, interference fringe pattern are generated wherein
Quilt cover battle array CCD11 obtains and is sent to central processing unit 1, the interference fringe pattern change width based on the received of central processing unit 1
Situation is mobile according to the order-driven Z-direction stepping motor 6 of setting: thus it is the first triangular prism 15, the second triangular prism 16, trapezoidal
The prism group that prism 17 forms is the core component that laser generates interference fringe, and specific structure is as follows: first triangular prism
Mirror 15 and the second triangular prism 16 are the identical isosceles right triangle of size, and the shape of the Dove prism 17 is isosceles
It is trapezoidal；The bevel edge of second triangular prism 16 is parallel to the setting of collimation lens 4, and light beam entrance window 9 is provided on bevel edge, with
Make to enter wherein across collimation lens 4；First triangular prism 15 is oblique perpendicular to second triangular prism 16 with its bevel edge
The mode on side, which is bonded, to be arranged below the second triangular prism 16, is provided with sealed airspace between two right-angle sides being bonded to each other, institute
It states in sealed airspace filled with high purity inert gas；The joint place of first triangular prism 15 and the second triangular prism 16, first
Highly transmissive film 13 is coated on the right-angle side of triangular prism 15；Highly reflecting films 12 are coated on the right-angle side of second triangular prism 16；Institute
Another right-angle side of another right-angle side and the second triangular prism 16 of stating the first triangular prism 15 mutually extend and with it is described trapezoidal
The bottom edge gluing of prism 17 is bonded；Interference fringe detection window is provided on the bevel edge of above-mentioned first triangular prism 15, for detecting
The laser interferencefringes of exiting parallel；The area array CCD 11 is located at the light direction of interference fringe detection window, with central processing unit
1 connection, for obtaining interference fringe pattern width data and being sent to central processing unit 1, as central processing unit control Z-direction step
Into the foundation of motor movement.
Under the conditions of laser does not collimate also, in order to keep fringe-width sufficiently wide, to make area array CCD 11 that can clearly divide
Distinguish fringe period, the width range of the sealed airspace between two right-angle sides being bonded to each other is preferably provided at 2-10mm range
It is interior.
As can be seen that central processing unit 1 is built-in with data processing module, the data processing module is for choosing and interfering
The vertical every row or every column data of striped trend make one-dimensional Fourier transform, obtain every row or each column period profile, then to every row
Or the summation of each column period profile curve is averaged, the value in maximum value corresponding period is proportional to the interference item in period profile curve
Width of fringe in line, i.e., using the corresponding periodic quantity of maximum value in period profile curve as fringe-width index, centre
Manage the move that device 1 forms control Z-direction stepping motor 6 according to the variation tendency of width of fringe index.
Preferably, the reflectivity of above-mentioned highly reflecting films 12 is greater than 80%, and the transmissivity of the high transmittance film 13 is greater than 80%.
In order to fine-tune the knot for the prism group that the first triangular prism 15, the second triangular prism 16 and Dove prism 17 form
Structure direction is respectively arranged with a direction adjusting knob 14 in the first triangular prism 15 and the second triangular prism 16.
In order to more accurately adjust collimation, the minimum effectively step-length for being preferably provided with the movement of Z-direction stepping motor 6 is 0.01 micro-
Rice.
Because beam Propagation is larger by water vapor absorption influence of fading in deep ultraviolet electromagnetic wave bands, so such optics
Experimental system must be built and be adjusted under the limited sealing condition of high ultravacuum, and the device of the present embodiment is to deep ultraviolet band
It is especially suitable: when the laser light source 5 is deep ultraviolet laser light source, fluorescent film 10 is posted on the interference fringe detection window,
Laser coherence pattern for detecting interference fringe in window is converted into the interference fringe pattern that area array CCD can capture；Institute
Collimation lens 4, the first triangular prism 15, the second triangular prism 16 and Dove prism 17 are stated by CaF2Material production；It is described to swash
Light automation collimation adjustment device is integrally placed in ultra-high vacuum environment.
The present invention measures the laser beam wave-front curvature half after the collimation of lens 4 using lens type radial-shear interferometer
Diameter.The exit end of radial interference can be expressed as attached form shown in Fig. 2.
The wavefront of Gaussian beam should be paraboloid on stricti jurise, but sufficiently large in radius of curvature, i.e., laser is opposite collimates
In the case where, wavefront can use Spherical wave approximation.As shown in Fig. 2, after prismatic decomposition, two wavefront on exit facet are bent
Rate center O, O ' at a distance of δ, the optical path difference of this i.e. two parts light splitting light beam.It is produced in two light beam laps (2 shaded side of attached drawing)
Raw interference fringe should meet:
Wherein r is wave-front curvature radius, and s is the shearing displacement provided by slit between triangular prism, and λ is measured laser wavelength, m
For fringe order.
It is a small amount of that δ and r is comparably high-order, then formula (1-1) can abbreviation are as follows:
Peer-to-peer both sides differential obtains:
Wherein, the physical significance of b is fringe-width.Therefore under the conditions of light beam aligns straight, laser interference item
Radius of curvature proportional before line width and collimated light waves, when light beam strictly collimates, wave-front curvature radius should tend to
Infinity will then will appear the situation of complete light in field of view, i.e. fringe-width tends to be infinitely great.
The present invention is based on formula (1-3) principle, automation beam collimation regulating system shown in embodiment 1 is constructed, is had
Adjust advantage quick, that signal feedback criterion is succinct.
Embodiment 2
A kind of Automatic laser collimation adjustment method, it utilizes Automatic laser collimation adjustment device shown in embodiment 1,
The following steps are included:
S1, basic optical element are placed: placing collimation lens 4, the prime focal beam spot for making laser light source 5 issue laser is big
It causes to be located at the focal length of collimation lens 4, collimates laser substantially；It is put into Wave-front measurement unit in collimation laser optical path, makes wave
The laser light incident window of preceding detection unit is vertical with direction of laser propagation；
S2, starting central processing unit 1 carry out the reception of data and instruction is sent: central processing unit 1 is first touched to any direction
The mobile slight distance of Z-direction stepping motor 6 is sent out, while judging that being fed back by area array CCD 11 to the width of fringe of central processing unit 1 is to increase
Add or reduce, send movement directive in the same direction to Z-direction stepping motor 6 if increasing, until occurring one in 11 visual field of area array CCD
When complete speck, stepper motor 6 stops movement；If width of fringe reduces, reverse movement life is sent to Z-direction stepping motor 6
It enables；By above-mentioned real-time continuous adjusting, original optical path, which will be rapidly achieved, approaches entirely collimated state.
Wherein, make light beam entrance window 9 vertical in step S1 and be directed at the laser beam by collimation lens 4.The present embodiment
In, the algorithmic procedure for carrying out automation collimation adjustment of Automatic laser collimation adjustment device is intended to as shown in Fig. 3, to see
Out, which relies primarily on the fringe-width for judging that area array CCD 11 obtains, and beam collimation degree is judged, to realize collimation
The iteration adjustment of 4 position of lens, it is i.e. complete when showing a complete speck on final fluorescent film 10 for deep ultraviolet band
At laser alignment adjustment process.
Various embodiments of the present invention are described above, above description is exemplary, and non-exclusive, and
It is not limited to disclosed each embodiment.Without departing from the scope and spirit of illustrated each embodiment, for this skill
Many modifications and changes are obvious for the those of ordinary skill in art field.Therefore, protection scope of the present invention is answered
This is subject to the protection scope in claims.
Claims (10)
1. a kind of Automatic laser collimation adjustment device, which is characterized in that it includes: central processing unit (1), signal reception line
(2), signal sends line (3), collimation lens (4), laser light source (5), Z-direction stepping motor (6), lens mount (7) and wavefront inspection
Survey unit；
The central processing unit (1) receives line (2) through signal and connect with Wave-front measurement unit, sends out for detection unit before received wave
The signal sent；Central processing unit (1) sends line (3) through signal and connect with Z-direction stepping motor (6), is used for Z-direction stepping motor
(6) move is sent；
The laser light source (5) is set to the side of collimation lens (4), so that its laser beam generated passes through collimation lens (4)；
The collimation lens (4) is fixed on the Z-direction stepping motor (6) by lens mount (7), with Z-direction stepping motor (6)
Synchronization is moved in the direction of laser propagation of laser light source (5)；The Z-direction refers to the direction propagated at laser beam center；
The Wave-front measurement unit is located at the other side of collimation lens (4), so that the laser beam for passing through collimation lens (4) enters it
In, interference fringe is generated in the Wave-front measurement unit, and the interference fringe pattern signal of acquisition is sent to central processing unit
(1), interference fringe pattern change width situation generates move driving Z-direction stepping electricity to central processing unit (1) based on the received
Machine (6) is mobile.
2. Automatic laser collimation adjustment device as described in claim 1, which is characterized in that the Wave-front measurement unit includes
First triangular prism (15), the second triangular prism (16), Dove prism (17) and area array CCD (11)；
First triangular prism (15) and the second triangular prism (16) are the identical isosceles right triangle of size, described
The shape of Dove prism (17) is isosceles trapezoid；
The bevel edge of second triangular prism (16) is parallel to collimation lens (4) setting, and light beam entrance window is provided on bevel edge
(9), enter wherein so as to pass through collimation lens (4)；First triangular prism (15) is with its bevel edge perpendicular to the described 2nd 3
The mode of angle prism (16) bevel edge is bonded setting below the second triangular prism (16), is arranged between two right-angle sides being bonded to each other
There is sealed airspace, the sealed airspace is interior filled with high purity inert gas；
The joint place of first triangular prism (15) and the second triangular prism (16), on the right-angle side of the first triangular prism (15)
It is coated with highly transmissive film (13)；Highly reflecting films (12) are coated on the right-angle side of second triangular prism (16)；
Another right-angle side of first triangular prism (15) and another right-angle side of the second triangular prism (16) mutually extend simultaneously
It is bonded with the bottom edge gluing of the Dove prism (17)；
Interference fringe detection window is provided on the bevel edge of above-mentioned first triangular prism (15), the laser for detecting exiting parallel is dry
Relate to striped；
The area array CCD (11) is located at the light direction of interference fringe detection window, connect with central processing unit (1), for obtaining
Interference fringe pattern width data is simultaneously sent to central processing unit (1).
3. Automatic laser collimation adjustment device as claimed in claim 2, which is characterized in that two right angles being bonded to each other
The width range of sealed airspace between side is within the scope of 2-10mm.
4. Automatic laser collimation adjustment device as claimed in claim 3, which is characterized in that in the central processing unit (1)
It is equipped with data processing module, the data processing module is used to choose to be made with vertical every row of interference fringe trend or every column data
One-dimensional Fourier transform obtains every row or each column period profile, then is averaged to every row or the summation of each column period profile curve, week
The value in maximum value corresponding period is proportional to width of fringe in the interference fringe in phase distribution curve, i.e., will be in period profile curve
The corresponding periodic quantity of maximum value becomes as fringe-width index, central processing unit (1) according to the variation of width of fringe index
Gesture forms the move of control Z-direction stepping motor (6).
5. Automatic laser collimation adjustment device as claimed in claim 4, which is characterized in that first triangular prism (15)
It is respectively arranged with a direction adjusting knob (14) with the second triangular prism (16), for fine-tuning the first triangular prism
(15), the structure direction of the prism group of the second triangular prism (16) and Dove prism (17) composition.
6. Automatic laser collimation adjustment device as claimed in claim 5, which is characterized in that the Z-direction stepping motor (6)
Mobile minimum effectively step-length is 0.01 micron.
7. Automatic laser collimation adjustment device as claimed in claim 2, which is characterized in that when the laser light source (5) is
When deep ultraviolet laser light source, fluorescent film (10) are posted on the interference fringe detection window, for detecting interference fringe in window
Laser coherence pattern is converted into the interference fringe pattern that area array CCD can capture；The collimation lens (4), the first triangular prism
Mirror (15), the second triangular prism (16) and Dove prism (17) are by CaF2Material production；The Automatic laser collimation adjustment
Device is integrally placed in ultra-high vacuum environment.
8. Automatic laser collimation adjustment device as claimed in claim 2, which is characterized in that the highly reflecting films (12) it is anti-
Rate is penetrated greater than 80%, the transmissivity of the high transmittance film (13) is greater than 80%.
9. a kind of Automatic laser collimation adjustment method, which is characterized in that it is using such as any claim in claim 1-8
The Automatic laser collimation adjustment device, comprising the following steps:
S1, basic optical element are placed: being placed collimation lens (4), the prime focal beam spot for making laser light source (5) to issue laser is big
It causes to be located at the focal length of collimation lens (4), collimates laser substantially；It is put into Wave-front measurement unit in collimation laser optical path, makes
The laser light incident window of Wave-front measurement unit is vertical with direction of laser propagation；
S2, starting central processing unit (1) carry out the reception of data and instruction is sent: central processing unit (1) is first touched to any direction
Z-direction stepping motor (6) mobile slight distance is sent out, while judging to be fed back by area array CCD (11) wide to the striped of central processing unit (1)
Degree is to increase or reduce, and movement directive in the same direction is sent to Z-direction stepping motor (6) if increasing, until area array CCD (11) visual field
When one complete speck of middle appearance, stepper motor (6) stops movement；If width of fringe reduces, to Z-direction stepping motor (6)
Send reverse movement order；By above-mentioned real-time continuous adjusting, original optical path, which will be rapidly achieved, approaches entirely collimated state.
10. Automatic laser collimation adjustment method as claimed in claim 9, which is characterized in that make light beam in the step S1
Entrance window (9) is vertical and is directed at laser beam by collimation lens (4).
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| CN113740925A (en) * | 2021-09-09 | 2021-12-03 | 吉林大学 | Self-adaptive optical system calibration device and method |
| CN115663570A (en) * | 2022-12-14 | 2023-01-31 | 成都量芯集成科技有限公司 | Laser spot distribution adjusting structure and method |
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