CN104178749A - Two-gas isolate type central uniform gas dividing and spraying device - Google Patents
Two-gas isolate type central uniform gas dividing and spraying device Download PDFInfo
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- CN104178749A CN104178749A CN201410370562.5A CN201410370562A CN104178749A CN 104178749 A CN104178749 A CN 104178749A CN 201410370562 A CN201410370562 A CN 201410370562A CN 104178749 A CN104178749 A CN 104178749A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The invention discloses a two-gas isolate type central uniform gas dividing and spraying device, and mainly solves such problems as complex structure and high processing cost in the prior art. The two-gas isolate type central uniform gas dividing and spraying device comprises a gas inlet flange, a gas dividing part, a dispersion pole and a gas spraying disc surface part. The gas inlet flange is welded at the upper end of the gas dividing part; a gas inlet and a gas inlet A are formed in the gas inlet flange; and the gas inlet is communicated with a circular hole in the gas dividing part. The gas inlet A is communicated with an annular groove; the dispersion pole is welded in the position of a hole A of the gas dividing part, so that a blind hole of the dispersion pole is communicated with the hole A; the gas inlet flange, the dispersion pole and the gas dividing part form a first part; the first part is brazed with the gas spraying disc surface part; and holes of the gas dividing part are communicated with holes B in a gas guide pole on the gas spraying disc surface part one to one, so that the gas dividing part and the gas spraying disc surface part form a cavity. The functions of quickly and uniformly dispersing multiple process gases in the device and spraying out the spraying device are realized through the effects of the arranged gas guide pole and dispersion pole. The time of the multiple process gases totally covering a reaction area is shortened; and the yield is improved.
Description
Technical field
The present invention relates to the spray equipment that a kind of semiconductor coated film equipment adopts.In this spray equipment, two kinds of gas autonomous channels are set, realize two kinds of gases and flow flowing out before spray equipment isolation mutually, and simultaneously and evenly flow out spray equipment and carry out coating process process, the invention belongs to semiconductor film deposition applications and manufacturing technology field.
Background technology
Existing semiconductor coated film equipment, react because often need two or more gases to pass into cavity in technological process simultaneously, but pass into before cavity at described two or more gases, when described two or more gases are in the spray equipment being entered by different pipelines, can not meet, if meet, can be at the inner chemical reaction that occurs of spray equipment, cause described two or more gases chemical reaction occurs before cavity to generate other single kinds or number of chemical material and lose the chemical property of described two or more gases as technological reaction thing entering, and because described two or more gases are at the granular by product that mostly is of the inner antedating response formation of spray equipment, make wafer or other forms of thin-film carrier surface form the defect of product with particle, cause the good article rate of product greatly to reduce.For reaching current atom layer deposition process requirement, people have proposed the rear mixed type spray equipment of various ways, but, these spray equipments adopt multilayered structure and laminate inner duct to form the gas passage of mutual isolation more, and between each laminate, weld the parts such as intensive air guide post, like this, every kind of gas mobile path length difference in spray equipment, in the time that the jet aperture spray equipment card is jet, meeting generation time is poor, the time that causes kinds of processes gas to cover whole conversion zone completely lengthens, and can cause the process gas waste of first ejection, directly affect production capacity.
Summary of the invention
The present invention is that to address the above problem be object, mainly solves prior art complex structure, tooling cost high and because of the low problem of different in size the caused production capacity of gas path.
For achieving the above object, the present invention adopts following technical proposals: two kinds of evenly point gas blowout shower devices of gas barrier formula middle part, comprise inlet flange, point gas parts, diffsuin stack and four parts of air-jeting disk face component.The upper end welding inlet flange of described point of gas parts, inlet flange seals cannelure, inlet mouth and inlet mouth A are set on above-mentioned inlet flange, inlet mouth communicates with the circular hole of point gas parts, above-mentioned inlet mouth A communicates with cannelure, diffsuin stack is welded on the position of hole A of point gas parts, the blind hole of diffsuin stack is communicated with hole A, inlet flange, diffsuin stack and point gas parts just become first part, first part and air-jeting disk face component are brazed together, point hole of gas parts is communicated one by one with the hole B in air guide post in air-jeting disk face component, make point gas parts and air-jeting disk face component form cavity.Described spray equipment inside is provided with two gas passages of mutual isolation, two gas inletes of two kinds of gases are arranged on a point upper end for gas parts, described point gas parts are circular tabular, be provided with therein and replace radial some gas passages adjacent and that length is different, replace in radial some gas passages adjacent and that length is different described, longer gas passage is started to extend by a point gas parts center, shorter gas passage is by slightly starting to extend away from the position of point gas parts center, two kinds of described passages all extend to a point edge for gas parts, difference is: longer gas passage is connected with the some diffsuin stacks that are evenly arranged in spray equipment cavity, shorter gas passage communicates with radial some ducts of not boring of one-tenth radially in air-jeting disk face component, the radial middle part, some ducts of not boring of the position communicating one-tenth radially in air-jeting disk face component, the method communicating connects realization by the some air guide posts that arrange between point gas parts and air-jeting disk face component, the below, some ducts of not boring in described air-jeting disk face component, half through hole of processing one row or different array way.Between some ducts of not boring in described air-jeting disk face component, process some through holes, described through hole communicates with the cavity of spray equipment.Above-mentioned through hole and half through hole are all drilled in shower tray face component, and, adjust in air-jeting disk face component quantity and the position in the radial some ducts of not boring of one-tenth radially, adjust arranging and array format of through hole and half through hole, the through hole of air-jeting disk face component and half through hole are uniformly distributed as far as possible.Like this, the first gas is entered by the first entrance of point gas parts center of spray equipment, in point gas parts, after longer gas passage flows into all diffsuin stacks, be uniformly dispersed in the cavity of point gas parts and the formation of air-jeting disk face component, then flowed out by some through holes of processing between the some ducts of not boring in air distribution disk face component.The second gas is entered by the second entrance of point gas parts center of spray equipment, in point gas parts, flow into along shorter gas passage in some air guide posts, enter jet card central diameter to the radial some ducts of not boring of one-tenth in, flow to the radial two ends, some ducts of not boring of described one-tenth radially from the middle part in the radial some ducts of not boring of one-tenth radially more simultaneously, in flow process, flow out from bored row or half through hole of different array way.
Beneficial effect of the present invention and feature: the present invention adopts the form of several simple components welding, and, every kind of parts all adopt turning common in industry, milling, brill etc. to remove the processing mode of material, realize the desired multiple gases of technique and mutually isolated spray, simultaneously owing to being arranged on the air guide post of spray equipment medium position, the effect of diffsuin stack, kinds of processes gas is spread fast and evenly in spray equipment, and the function that simultaneously sprays spray equipment is achieved.Shorten the time that kinds of processes gas covers conversion zone completely, improved production capacity.
Brief description of the drawings
Fig. 1 is of the present invention point of gas parts front view.
Fig. 2 is the left view of Fig. 1.
Fig. 3 is the sectional view of B-B in Fig. 2.
Fig. 4 is the revolved sectional view of A-A in Fig. 1.
Fig. 5 is the front view of air-jeting disk face component of the present invention.
Fig. 6 is the revolved sectional view of C-C in Fig. 5.
Fig. 7 is structural representation of the present invention.
Fig. 8 is the revolved sectional view of D-D in Fig. 7.
Fig. 9 is the front view of diffsuin stack of the present invention.
Figure 10 is the sectional view of E-E in Fig. 9.
Embodiment
Embodiment
With reference to Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 9 and Figure 10, point gas parts 1 of spray equipment be that circle is tabular, there is step cutting pattern at plectane center, processes circular hole 4, circular hole 4 does not bore on step.Process an annular groove 2 in circular hole 4 outsides, the bottom land of annulus groove 2 is opened some waist shaped holes 3 of circumference array, and waist shaped hole 3 does not bore.Dividing the edge of gas parts 1 to center position, bore some slotted hole A6, some slotted hole A6 are drilled in some waist shaped holes 3, and some slotted hole A6 are consistent with some waist shaped hole 3 quantity.Dividing the edge of gas parts to center position, bore some slotted hole B7, some slotted hole B7 are drilled in circular hole 4.Slotted hole A6 and slotted hole B7 are alternately adjacent, radially, be distributed in point gas parts 1.Process some cylinders 5, the diameter of cylinder 5 is consistent with the aperture of slotted hole A6, slotted hole B7, by all slotted hole A6, slotted hole B7 cylinder 5 in edge's repair welding of point gas parts 1, shutoff slotted hole A6, slotted hole B7.On the axis direction of point gas parts 1, bore uniform some holes 8,8 positions, some holes are on one division circle, and described calibration circular diameter is 1/2 of point gas parts 1 diameter, the described reference circle center of circle is also the center of point gas parts 1, and hole 8 communicates one by one with slotted hole A6.On the axis direction of point gas parts 1, bore uniform some hole A9, A9 position, some holes is also on described reference circle, 1 diffsuin stack 21 of each hole A9 below welding, in diffsuin stack 21, there is blind hole 22, in the direction perpendicular to diffsuin stack 21 axis on the sidewall of diffsuin stack 21, have and be uniformly distributed some through holes 23.
With reference to Fig. 5, Fig. 6, the air-jeting disk face component 10 of spray equipment is circular tabular, and there is annular boss 11 in plectane edge.The some gussets 15 of radial distribution in air-jeting disk face component 10, some gussets 15 join with the root of annular boss 11.Bore uniform radially in the long blind hole 16 of air-jeting disk face component 10 from the outer side wall of annular boss 11 along gusset 15, an air guide post 12 is set on each gusset 15, these air guide posts 12 are all on 1/2 reference circle of air-jeting disk face component 10 diameters at diameter, the height of air guide post 12 is identical with the height of annular boss 11, on the end face of each air guide post 12, bore a hole 20, hole 20 is drilled in long blind hole 16.In direction below long blind hole 16 in all gussets 15 and perpendicular to long blind hole 16 axis, bore a row spray aperture A17.Process some plugs 19, the diameter of plug 19 is consistent with the aperture of long blind hole 16, and one end repair welding upper plug head 19 by all long blind holes 16 at boss 11 outer side walls, blocks long blind hole 16.Avoid all gussets 15,, between each gusset 15 in air-jeting disk face component 10, axially evenly bore some spray apertures 13 in air-jeting disk face component 10.
With reference to Fig. 7, Fig. 8, spray equipment is made up of inlet flange 14, point gas parts 1, diffsuin stack 21,10 4 parts of air-jeting disk face component.At the upper end of point gas parts 1 welding inlet flange 14, inlet flange 14 seals cannelure 2.Inlet mouth 25 and inlet mouth A18 are set on inlet flange 14, inlet mouth 25 communicates with the circular hole 4 of point gas parts 1, inlet mouth A18 communicates with cannelure 2, and diffsuin stack 21 is welded on the position of hole A9 of point gas parts 1, and the blind hole 22 of diffsuin stack 21 is communicated with hole A9.Inlet flange 14, diffsuin stack 21 and point gas parts 1 just become first part.First part and air-jeting disk face component 10 are brazed together, point hole of gas parts 18 is communicated one by one with the hole B20 in air guide post 12 in air-jeting disk face component 10, make point gas parts 1 and air-jeting disk face component 10 form cavity 24.Like this, the first gas enters spray equipment from the inlet mouth 25 of inlet flange 14, in the circular hole 4 of point gas parts 1, start to flow into all slotted hole B7, in slotted hole B7, flow, because meeting with cylinder 5, so from porose B7 enter the blind hole 22 in diffsuin stack 21 and from through hole 23 fully and be evenly diffused into the cavity 24 of whole spray equipment, finally flow out equably spray equipment from spray aperture 13.The second gas enters spray equipment from the inlet mouth A18 of inlet flange, interior the flowing of cannelure 2 of point gas parts 1, enter all waist shaped holes 3, all slotted hole A6 through communicating with all waist shaped holes 3 again, flow to the edge of point gas parts 1, because meeting with cylinder 5, so from porose 8 enter with the porose 8 air guide posts 12 that communicate one by one, after the hole B20 in air guide post 12, arrive the middle part of the interior long blind hole 16 of gusset 15, flow to the two ends of long blind hole 16 at long blind hole 16 middle parts, finally, because meeting with plug 19, and be full of fast all long blind holes 16 to the mobile the second gas in long blind hole 16 two ends, flow out spray equipment from the spray aperture A17 of long blind hole 16 belows equably.
Claims (5)
1. two kinds of evenly point gas blowout shower devices of gas barrier formula middle part, comprise inlet flange, divide gas parts, diffsuin stack and air-jeting disk face component, it is characterized in that: the upper end welding inlet flange of described point of gas parts, inlet flange seals cannelure, inlet mouth and inlet mouth A are set on above-mentioned inlet flange, inlet mouth communicates with the circular hole of point gas parts, above-mentioned inlet mouth A communicates with cannelure, diffsuin stack is welded on the position of hole A of point gas parts, the blind hole of diffsuin stack is communicated with hole A, inlet flange, diffsuin stack and point gas parts just become first part, first part and air-jeting disk face component are brazed together, point hole of gas parts is communicated one by one with the hole B in air guide post in air-jeting disk face component, make point gas parts and air-jeting disk face component form cavity, described spray equipment inside is provided with two gas passages of mutual isolation, two gas inletes of two kinds of gases are arranged on a point upper end for gas parts, described point gas parts are circular tabular, be provided with therein and replace radial some gas passages adjacent and that length is different, replace in radial some gas passages adjacent and that length is different described, longer gas passage is started to extend by a point gas parts center, shorter gas passage is by slightly starting to extend away from the position of point gas parts center, two kinds of described passages all extend to a point edge for gas parts, above-mentioned longer gas passage is connected with the some diffsuin stacks that are evenly arranged in spray equipment cavity, shorter gas passage and jet card central diameter to the radial some ducts of not boring of one-tenth communicate, the position communicating jet card central diameter to the radial middle part, some ducts of not boring of one-tenth, the method communicating connects realization by the some air guide posts that arrange between point gas parts and air-jeting disk face component.
2. evenly point gas blowout shower device of two kinds of gas barrier formulas as claimed in claim 1 middle part, it is characterized in that: the below, some ducts of not boring in described air-jeting disk face component, half through hole of processing one row or different array way, between some ducts of not boring in described air-jeting disk face component, process some through holes, described through hole communicates with the cavity of spray equipment, and above-mentioned through hole and half through hole are all drilled in shower tray face component.
3. evenly point gas blowout shower device of two kinds of gas barrier formulas as claimed in claim 1 middle part, is characterized in that: described point of gas parts are for circular tabular, and there is step cutting pattern at plectane center, processes circular hole, circular hole does not bore on step.At circular hole outside processing one annular groove, the bottom land of annulus groove is opened some waist shaped holes of circumference array, waist shaped hole does not bore, dividing the edge of gas parts to center position, bore some slotted hole A, some slotted hole A are drilled in some waist shaped holes, some slotted hole A are consistent with some waist shaped hole quantity, dividing the edge of gas parts to center position, bore some slotted hole B7, some slotted hole B are drilled in circular hole, slotted hole A6 and slotted hole B are alternately adjacent, radially, be distributed in point gas parts, process some cylinders, the diameter of cylinder and slotted hole A6, the aperture of slotted hole B is consistent, by all slotted hole A, slotted hole B is cylinder in edge's repair welding of point gas parts, shutoff slotted hole A, slotted hole B, on the axis direction of point gas parts, bore uniform some holes, position, some holes is on one division circle.
4. evenly point gas blowout shower device of two kinds of gas barrier formulas as claimed in claim 3 middle part, is characterized in that: described calibration circular diameter is 1/2 of point gas parts diameter, and the described reference circle center of circle is also the center of point gas parts, and hole communicates with slotted hole A.On the axis direction of point gas parts, bore uniform some hole A, A position, some holes is also on described reference circle, and each hole A welds 1 diffsuin stack in below, in diffsuin stack, there is blind hole, in the direction perpendicular to diffsuin stack axis on the sidewall of diffsuin stack, have equally distributed some through holes.
5. evenly point gas blowout shower device of two kinds of gas barrier formulas as claimed in claim 1 middle part, it is characterized in that: described air-jeting disk face component is for circular tabular, there is annular boss in plectane edge, the some gussets of radial distribution in air-jeting disk face component, the root of some gussets and annular boss joins, bore uniform radially in the long blind hole of air-jeting disk face component from the outer side wall of annular boss along gusset, an air guide post is set on each gusset, these air guide posts are all on 1/2 reference circle of air-jeting disk face component diameter at diameter, the height of air guide post is identical with the height of annular boss, on the end face of each air guide post, bore a hole, hole drill is to long blind hole, in direction below long blind hole in all gussets and perpendicular to long blind hole axis, bore a row spray aperture A, process some plugs, the diameter of plug is consistent with the aperture of long blind hole, by all long blind holes at one end of boss outer side wall repair welding upper plug head, block long blind hole, avoid all gussets, between each gusset in air-jeting disk face component, axially evenly bore some spray apertures in air-jeting disk face component.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410370562.5A CN104178749B (en) | 2014-07-30 | 2014-07-30 | Gas blowout shower device is uniformly divided in the middle part of two kinds of gas barrier formulas |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410370562.5A CN104178749B (en) | 2014-07-30 | 2014-07-30 | Gas blowout shower device is uniformly divided in the middle part of two kinds of gas barrier formulas |
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| Publication Number | Publication Date |
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| CN104178749A true CN104178749A (en) | 2014-12-03 |
| CN104178749B CN104178749B (en) | 2016-09-28 |
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Cited By (3)
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| WO2020063429A1 (en) * | 2018-09-29 | 2020-04-02 | 北京北方华创微电子装备有限公司 | Air inlet apparatus for atomic layer deposition process and atomic layer deposition device |
| CN115505904A (en) * | 2022-10-27 | 2022-12-23 | 拓荆科技股份有限公司 | Spray set of many gas flow channel |
| CN115896751A (en) * | 2023-01-30 | 2023-04-04 | 拓荆科技(上海)有限公司 | Cavity-divided spray plate |
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| CN115505904A (en) * | 2022-10-27 | 2022-12-23 | 拓荆科技股份有限公司 | Spray set of many gas flow channel |
| CN115505904B (en) * | 2022-10-27 | 2023-11-24 | 拓荆科技股份有限公司 | Spray set of many air current passageway |
| CN115896751A (en) * | 2023-01-30 | 2023-04-04 | 拓荆科技(上海)有限公司 | Cavity-divided spray plate |
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| CN104178749B (en) | 2016-09-28 |
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Address after: No.900 Shuijia, Hunnan District, Shenyang City, Liaoning Province Patentee after: Tuojing Technology Co.,Ltd. Address before: 110179 3rd floor, No.1-1 Xinyuan street, Hunnan New District, Shenyang City, Liaoning Province Patentee before: PIOTECH Co.,Ltd. |