CN104020327A - Probe station for chip total dose irradiation test - Google Patents
Probe station for chip total dose irradiation test Download PDFInfo
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- CN104020327A CN104020327A CN201410277330.5A CN201410277330A CN104020327A CN 104020327 A CN104020327 A CN 104020327A CN 201410277330 A CN201410277330 A CN 201410277330A CN 104020327 A CN104020327 A CN 104020327A
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Abstract
The invention discloses a probe station for a chip total dose irradiation test. The probe station can be applied to the field of chip irradiation tests. The probe station for the chip total dose irradiation test comprises a microscope and a probe station body. The probe station body and the microscope are arranged in a split mode, and the probe station body is located below the microscope. The probe station body comprises an anti-vibration base station, a base station vertical column and a chip bearing station, wherein the base station vertical column is fixed to the anti-vibration base station, a probe clamp is fixed to the base station vertical column, and the chip bearing station is arranged below the probe clamp. A revolving platform, a vertical lifting mechanism and a horizontal moving mechanism are sequentially connected to the lower portion of the chip bearing station, wherein the lower end of the horizontal moving mechanism is fixed to the anti-vibration base station. The probe station body is compact in structure, small in size and low in weight, wherein the probe station body and the microscope are arranged in the split mode, and the probe station body can carry chips fixed to the probe station body to enter an irradiation test cavity for the irradiation test.
Description
Technical field
The present invention relates to microelectronics irradiation technical field of measurement and test, especially a kind of probe station for the test of chip total dose irradiation.
Background technology
Probe station is mainly used in the test of semicon industry, photoelectricity industry, IC wafers, probe station is not also applied to microelectronic chip irradiation field tests at present, be mainly because traditional probe station be generally by microscope together with probe station secure bond, microscope can not be for irradiation test environment, and microscope and probe station combine, and volume is large, quality is large, carrying trouble, cannot enter irradiation test chamber and carry out irradiation test.
Summary of the invention
The object of the present invention is to provide a kind of probe station and microscope split design, can enter irradiation test chamber and carry out irradiation test.
For reaching this object, the present invention by the following technical solutions:
A kind of probe station for the test of chip total dose irradiation, comprise probe stage body, microscope, fixed support and display screen, described microscope and display screen are fixed on fixed support, described probe stage body is independent is placed on the support bracket fastened base under microscope, described probe stage body comprises vibrationproof base station, base station column and wafer-supporting platform, described base station column is fixed on vibrationproof base station, on described base station column, be fixed with probe, the described wafer-supporting platform for fixed chip is arranged on probe below, described wafer-supporting platform below is connected with revolving dial in turn, vertical lifting mechanism and horizontal mobile mechanism, described horizontal mobile mechanism lower end is fixed on vibrationproof pedestal.
Further, in described probe, be fixed with the probe of pointed end, and the screw arranging on four angles of described probe card is fixed on base station column.
Further, described chip to be measured is fixed on a substrate, and the screw arranging by substrate both sides is fixed in wafer-supporting platform in the heart.
Further, described wafer-supporting platform is fixed by screws on revolving dial, described revolving dial comprises the R axle adjusting knob that regulates revolving dial angle simultaneously to drive the angle that regulates the chip on wafer-supporting platform and the R shaft locking knob that locks revolving dial angle, the slewing area of described revolving dial is 0 °～360 °, rotation precision is 5 '.
Further, described revolving dial is fixed by screws on vertical lifting mechanism, described vertical lifting mechanism comprises the Z axis adjusting knob of chip height and the Z axis locking knob of fixed chip height regulating on wafer-supporting platform, range of adjustment 0～the 10mm of described vertical lifting mechanism, degree of regulation is 0.01mm.
Further, described vertical lifting mechanism is fixed by screws on horizontal mobile mechanism, described horizontal mobile mechanism comprises X-axis travel mechanism and y-axis shift actuation mechanism, described X-axis travel mechanism comprises the X-axis adjusting knob of chip X-axis position and the X-axis locking knob of fixed chip X-axis position regulating on wafer-supporting platform, described y-axis shift actuation mechanism comprises the Y-axis adjusting knob of chip Y-axis position and the Y-axis locking knob of fixed chip Y-axis position regulating on wafer-supporting platform, the range of adjustment of described X-axis travel mechanism and y-axis shift actuation mechanism is 0～12mm, degree of regulation is 0.01mm.
Further, the X-axis travel mechanism of described revolving dial, vertical lifting platform, horizontal mobile mechanism and y-axis shift actuation mechanism are provided with back-moving spring.
Further, described microscope lower end is also fixedly installed the LED lamp that is useful on illumination.
Beneficial effect of the present invention is:
1, the described probe station for the test of chip total dose irradiation, microscope and the split of probe stage body arrange, and the probe station body structure of described independent setting is compact, and volume is little, conveniently enters in irradiation test chamber.
2, the chip being fixed on described on probe stage body enters in irradiation test chamber and can place optional position together with probe stage body, conveniently chip is aimed to Radiation Center.
3, the revolving dial of described probe stage body, vertical lifting platform and horizontal mobile mechanism all adopt back-moving spring, have avoided the traditional high-accuracy ball-screw gap affects when rotating.
4, described probe station adopts exploration card acupuncture treatment, can complete spininess test simultaneously.
5, it is motionless that institute's probe station adopts probe, and the mode that chip is moving guarantees that microscopes focuses on probe tip accurately, does not need multi-focusing.
Accompanying drawing explanation
Fig. 1 is the front elevation of the probe station for chip total dose irradiation test that provides of the specific embodiment of the invention;
Fig. 2 is the front elevation of the probe stage body for the probe station in chip irradiation test that provides of the specific embodiment of the invention.
In figure, 1, microscope; 2, probe stage body; 3, wafer-supporting platform; 4, revolving dial; 41, R shaft locking knob; 42, R axle adjusting knob; 5, vertical lifting mechanism; 51, Z axis adjusting knob; 52, Z axis locking knob; 6, horizontal mobile mechanism; 61, X-axis adjusting knob; 62, X-axis locking knob; 63, Y-axis adjusting knob; 64, Y-axis locking knob; 7, substrate; 8, probe; 81, probe; 9, vibrationproof base station; 10 base station columns; 11, display screen; 12, fixed support; 121, base; 13, annular LED lamp.
Embodiment
Below in conjunction with accompanying drawing and by embodiment, further illustrate technical scheme of the present invention.
As shown in Figure 1 to Figure 2, the described probe station for the test of chip total dose irradiation comprises microscope 1 and probe stage body 2, described microscope 1 is fixed on fixed support 12, on described fixed support 12, be also fixed with display screen 11, described display screen 11 is electrically connected with described microscope 1, the lower end of described microscope 1 is fixed with the annular LED lamp 13 of a circle for throwing light on, described fixed support 12 also comprises on base 121, described probe stage body 2 is placed on the base 121 of microscope 1 below, described probe stage body 2 comprises vibrationproof base station 9, on described vibrationproof base station 9, be fixed with base station column 10, being fixed in probe 8 of described probe 81 pointed end, the screw that described probe 8 arranges by both sides is fixedly on base station column 10, described probe 8 belows are provided with wafer-supporting platform 3, described chip is fixed on substrate 7, and the screw arranging by the both sides that arrange on substrate 7 is fixed in wafer-supporting platform 3 in the heart together with substrate 7, described wafer-supporting platform 3 belows are fixed with revolving dial 4 successively, vertical lifting mechanism 5 and horizontal mobile mechanism 6, the lower end of described horizontal mobile mechanism 6 is fixed on vibrationproof base station 9.
Described wafer-supporting platform 3 is fixed by screws on revolving dial 4, described revolving dial 4 comprise R axle adjusting knob 42 and R shaft locking knob 41, described R axle adjusting knob 42 drives revolving dial 4 to rotate, drive chip on wafer-supporting platform 3 to rotate simultaneously, the scope of described rotation is 0 °～360 °, the precision of rotation is 5 ' and, regulate after putting in place and screw R shaft locking knob 41, lock the angle of revolving dial 4, lock the angle of chip.
Described revolving dial 4 is fixed by screws on vertical lifting mechanism 5, described vertical lifting mechanism 5 comprises the Z axis adjusting knob 51 of chip attach location and the Z axis locking knob 52 of fixed chip height and position regulating on wafer-supporting platform 3, range of adjustment 0～the 10mm of described vertical lifting mechanism 5, degree of regulation is 0.01mm.
Described vertical lifting mechanism 5 is fixed by screws on horizontal mobile mechanism 6, described horizontal mobile mechanism 6 comprises X-axis travel mechanism and y-axis shift actuation mechanism, described X-axis travel mechanism comprises the X-axis adjusting knob 61 of chip X-axis position and the X-axis locking knob 62 of fixed chip X-axis position regulating on wafer-supporting platform 3, described y-axis shift actuation mechanism comprises the Y-axis adjusting knob 63 of chip Y-axis position and the Y-axis locking knob 64 of fixed chip Y-axis position regulating on wafer-supporting platform 3, the range of adjustment of described X-axis travel mechanism and y-axis shift actuation mechanism is 0～12mm, degree of regulation is 0.01mm.
X-axis travel mechanism and the y-axis shift actuation mechanism of described revolving dial 4, vertical lifting platform 5, horizontal mobile mechanism 6 are provided with back-moving spring.
When the described probe station for the test of chip total dose irradiation is used, first display screen 11 and microscope 1 are fixed on fixed support 12, and be electrically connected display screen 11 and microscope 1, make the interior image correctly receiving from microscope 1 of display screen 11, again the substrate 7 that is fixed with chip is fixed on wafer-supporting platform 3, and by the probe of probe 8 81 tips being fixed on base station column 10 down, after fixedly completing, probe stage body 2 is placed on the base under microscope 1, regulate microscope 1, microscope 1 is focused on the tip of probe 81, the operation of finally having an acupuncture treatment, described acupuncture treatment operation, adjusting vertical lifting mechanism 5 of elder generation, rotation Z axis adjusting knob 51, regulate the height and position of chip, chip is entered in the visual field of microscope 1, screw Z axis locking knob 52, fixed chip height and position, regulate again revolving dial 4 and horizontal mobile mechanism 6, rotate respectively X-axis adjusting knob 61, Y-axis adjusting knob 63 and R axle adjusting knob 42 move under probe 81 tips the test point on chip, after putting in place, screw X-axis locking knob 62, Y-axis locking knob 64 and R shaft locking knob 41, the horizontal level of fixed chip and angle, and then adjusting Z axis adjusting knob 51, make chip increase, allow chip contact with probe 81, realize acupuncture treatment, when chip touches probe 81, the slight tilting of probe 81 meeting, now explanation has been had an acupuncture treatment, after having had an acupuncture treatment, probe stage body 2 is put into together with chip fixed thereon to irradiation chamber and carried out irradiation test, while carrying out next chip testing, need to be by R shaft locking knob 41, Z axis locking knob 52, X-axis locking knob 62 and Y-axis locking knob 64 all unscrew, described revolving dial 4, vertical lifting mechanism 5 and horizontal mobile mechanism 6 are got back to original position under the effect of spring reset mechanism, chip is taken off from substrate, change another chip block, repeated test operation.
Below only with embodiment, describe the present invention, but the present invention is not limited to above-mentioned size and outward appearance illustration, more should not form any restriction of the present invention.As long as within any improvement that the present invention is done or modification all belong to the protection domain of the claims in the present invention opinion.
Claims (8)
1. the probe station for chip total dose irradiation test, comprise probe stage body, microscope, fixed support and display screen, it is characterized in that: described microscope and display screen are fixed on fixed support, described probe stage body is independent is placed on the support bracket fastened base under microscope, described probe stage body comprises vibrationproof base station, base station column and wafer-supporting platform, described base station column is fixed on vibrationproof base station, on described base station column, be fixed with probe, the described wafer-supporting platform for fixed chip is arranged on probe below, described wafer-supporting platform below is connected with revolving dial in turn, vertical lifting mechanism and horizontal mobile mechanism, described horizontal mobile mechanism lower end is fixed on vibrationproof pedestal.
2. the probe station for the test of chip total dose irradiation according to claim 1, is characterized in that: described probe is fixed on base station column by the screw arranging on four angles, is fixed with the probe of pointed end on described probe lower surface.
3. the probe station for chip total dose irradiation test according to claim 1, is characterized in that: described chip to be measured is fixed on a substrate, and the screw arranging by substrate both sides is fixed in wafer-supporting platform in the heart.
4. the probe station for chip total dose irradiation test according to claim 1, it is characterized in that: described wafer-supporting platform is fixed by screws on revolving dial, described revolving dial comprises the R axle adjusting knob that regulates revolving dial angle simultaneously to drive the angle that regulates the chip on wafer-supporting platform and the R shaft locking knob that locks revolving dial angle, the slewing area of described revolving dial is 0 °～360 °, rotation precision is 5 '.
5. the probe station for chip total dose irradiation test according to claim 1, it is characterized in that: described revolving dial is fixed by screws on vertical lifting mechanism, described vertical lifting mechanism comprises the Z axis adjusting knob of chip height and the Z axis locking knob of fixed chip height regulating on wafer-supporting platform, range of adjustment 0～the 10mm of described vertical lifting mechanism, degree of regulation is 0.01mm.
6. the probe station for chip total dose irradiation test according to claim 1, it is characterized in that: described vertical lifting mechanism is fixed by screws on horizontal mobile mechanism, described horizontal mobile mechanism comprises X-axis travel mechanism and y-axis shift actuation mechanism, described X-axis travel mechanism comprises the X-axis adjusting knob of chip X-axis position and the X-axis locking knob of fixed chip X-axis position regulating on wafer-supporting platform, described y-axis shift actuation mechanism comprises the Y-axis adjusting knob of chip Y-axis position and the Y-axis locking knob of fixed chip Y-axis position regulating on wafer-supporting platform, the range of adjustment of described X-axis travel mechanism and y-axis shift actuation mechanism is 0～12mm, degree of regulation is 0.01mm.
7. according to the probe station for the test of chip total dose irradiation described in claim 4 to 6 Arbitrary Term, it is characterized in that: X-axis travel mechanism and the y-axis shift actuation mechanism of described revolving dial, vertical lifting platform, horizontal mobile mechanism are provided with back-moving spring.
8. the probe station for the test of chip total dose irradiation according to claim 1, is characterized in that: described microscope lower end is also fixedly installed the annular LED lamp that is useful on illumination.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410277330.5A CN104020327A (en) | 2014-06-19 | 2014-06-19 | Probe station for chip total dose irradiation test |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410277330.5A CN104020327A (en) | 2014-06-19 | 2014-06-19 | Probe station for chip total dose irradiation test |
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| CN104020327A true CN104020327A (en) | 2014-09-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410277330.5A Pending CN104020327A (en) | 2014-06-19 | 2014-06-19 | Probe station for chip total dose irradiation test |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105182209A (en) * | 2015-09-23 | 2015-12-23 | 深圳市星火辉煌系统工程有限公司 | Micro display chip production detection system and method |
| CN105976888A (en) * | 2016-07-04 | 2016-09-28 | 中国科学院新疆理化技术研究所 | X-ray irradiation method for ionization irradiation of components |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN87201004U (en) * | 1987-02-05 | 1988-05-18 | 中国科学院上海冶金研究所 | Transistor chip measurement and observation unit |
| CN201145728Y (en) * | 2007-11-27 | 2008-11-05 | 比亚迪股份有限公司 | Apparatus for testing chip |
| CN101413988A (en) * | 2008-11-06 | 2009-04-22 | 信息产业部电子第五研究所 | MCM / HIC circuit total dose irradiation testing method based on low energy X ray |
| CN201444164U (en) * | 2009-01-20 | 2010-04-28 | 中国科学院近代物理研究所 | Multi-dimensional positioning device used for heavy ion irradiation devices |
| KR101242633B1 (en) * | 2011-07-19 | 2013-03-20 | 주식회사 쎄믹스 | Vertical and Horizontal movement apparatus with approved strength |
| CN202929165U (en) * | 2012-08-17 | 2013-05-08 | 中国电子科技集团公司第五十八研究所 | Anti-irradiation detection system of integrated circuit |
| CN103675648A (en) * | 2013-12-12 | 2014-03-26 | 中国电子科技集团公司第五十八研究所 | Device applied to phase-locked loop irradiation experiment |
| CN203616356U (en) * | 2013-12-06 | 2014-05-28 | 扬州飞堑电子设备有限公司 | Manual probe bench for testing semiconductor chip |
-
2014
- 2014-06-19 CN CN201410277330.5A patent/CN104020327A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87201004U (en) * | 1987-02-05 | 1988-05-18 | 中国科学院上海冶金研究所 | Transistor chip measurement and observation unit |
| CN201145728Y (en) * | 2007-11-27 | 2008-11-05 | 比亚迪股份有限公司 | Apparatus for testing chip |
| CN101413988A (en) * | 2008-11-06 | 2009-04-22 | 信息产业部电子第五研究所 | MCM / HIC circuit total dose irradiation testing method based on low energy X ray |
| CN201444164U (en) * | 2009-01-20 | 2010-04-28 | 中国科学院近代物理研究所 | Multi-dimensional positioning device used for heavy ion irradiation devices |
| KR101242633B1 (en) * | 2011-07-19 | 2013-03-20 | 주식회사 쎄믹스 | Vertical and Horizontal movement apparatus with approved strength |
| CN202929165U (en) * | 2012-08-17 | 2013-05-08 | 中国电子科技集团公司第五十八研究所 | Anti-irradiation detection system of integrated circuit |
| CN203616356U (en) * | 2013-12-06 | 2014-05-28 | 扬州飞堑电子设备有限公司 | Manual probe bench for testing semiconductor chip |
| CN103675648A (en) * | 2013-12-12 | 2014-03-26 | 中国电子科技集团公司第五十八研究所 | Device applied to phase-locked loop irradiation experiment |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105182209A (en) * | 2015-09-23 | 2015-12-23 | 深圳市星火辉煌系统工程有限公司 | Micro display chip production detection system and method |
| CN105976888A (en) * | 2016-07-04 | 2016-09-28 | 中国科学院新疆理化技术研究所 | X-ray irradiation method for ionization irradiation of components |
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Application publication date: 20140903 |
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