CN201444164U - Multi-dimensional positioning device used for heavy ion irradiation devices - Google Patents
Multi-dimensional positioning device used for heavy ion irradiation devices Download PDFInfo
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- CN201444164U CN201444164U CN 200920000952 CN200920000952U CN201444164U CN 201444164 U CN201444164 U CN 201444164U CN 200920000952 CN200920000952 CN 200920000952 CN 200920000952 U CN200920000952 U CN 200920000952U CN 201444164 U CN201444164 U CN 201444164U
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- heavy ion
- ion irradiation
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- positioning device
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Abstract
The utility model relates to a multi-dimensional positioning device used for heavy ion irradiation devices. The multi-dimensional positioning device comprises a workbench (1) and a base (3) arranged on the workbench (1), and is mainly characterized in that a slide rail (2) vertical to the workbench (1) is arranged on the base (3) and a lifting workbench (5) is arranged on the slide rail (2). The multi-dimensional positioning device has the advantages that in heavy ion irradiation experiment, a quantitative switching positioning device can be arranged on the pre-measured position quickly, thus realizing three-dimensional translation and one-dimensional rotation of micro-electronic devices in the heavy ion irradiation experiment, which is significant to data collection, data quality and improvement of experiment efficiency and conservation of beam time. The multi-dimensional positioning device has the advantages of simple and convenient operation, high position accuracy, novel and simple structure and realization of quantitative adjustment and control, and lays solid foundation for the further realization of automatic computer control.
Description
Technical field:
The utility model relates to a kind of locating device that is used for the heavy ion irradiation device.
Background technology:
Galactic comic ray, solar cosmic ray, the earth are captured band and have been constituted space radiation environment.Space radiation environment can cause displacement damage and ionization damage, is to threaten one of the spacecraft security of operation and the key factor in life-span.The single particle effect that causes of the heavy ion in space and high energy proton particularly burns etc. as single-particle inversion, single-particle bolt-lock, single-particle, will cause the soft error or the hard damage of spacecraft microelectronic component, causes the spacecraft disabler and end-of-life too early.The generation of single particle effect only needs an ion, and the damage mode of single particle effect is various, is not only soft damage, and hard damage is also arranged.The generation of single particle effect is not gradual change, but the process of a burst.Increasing the probability that single particle effect takes place with the device integrated level increases, and single particle effect all constitutes a threat to the spacecraft of multiple track.The spacecraft of various countries all has the bitter lesson that causes the tremendous economic loss because of single particle effect.Therefore be subjected to the concern and the attention of various countries especially.
The single particle effect of research device has several different methods, it is important means that the heavy ion that wherein utilizes accelerator to provide carries out ground simulation, expense is lower, research cycle is short, can artificially control and select experiment condition, can under identical conditions, test repeatedly, can carry out mechanism research comprehensively meticulously.
During the accelerator experiment, device under test is on circuit board, be accelerated the heavy ion irradiation of the Different L ET (heat input transmission) of device generation, use the single particle effect of measurement circuit detection means simultaneously, obtain the cross section and the threshold value of the single particle effect of device by the fluence of single event number of measuring and heavy ion.For heavy ion beam current is radiated on the device under test exactly, need be on the XY both direction mobile device under test.As irradiation in air, also need be on fore-and-aft direction moving device.In order to increase effective LET, device need be changed different angles, carry out the inclination angle irradiation.Must be during gyration with the central axis rotation of device, to guarantee the invariant position of device.Therefore, device under test should have the three-dimensional translation and the rotation of one dimension.The location of device under test is for the quality that obtains data and improve conventional efficient, save the line time and have great importance.
The utility model content:
The purpose of this utility model is to avoid the deficiencies in the prior art part and a kind of multidimensional locating device that is used for the heavy ion irradiation device is provided.To solve the orientation problem of microelectronic component to be measured.Designed locating device can be realized the translation and the rotation of device under test preferably, and is simple to operation, the positional precision height.
The purpose of this utility model can be by realizing by the following technical solutions: a kind of multidimensional locating device that is used for the heavy ion irradiation device, include worktable (1), which is provided with base (3), its principal feature is to be provided with the slide rail (2) vertical with worktable (1) on base (3); On slide rail (2), be provided with self-powered platform (5).
The described multidimensional locating device that is used for the heavy ion irradiation device, also include and on described worktable (1), be connected with longitudinal moving mechanism (4), described longitudinal moving mechanism (4) includes and vertically moves slide rail (4-4), which is provided with tooth bar (4-1) and mesh, on moving handle axle (4-2), be provided with handle (4-5) with being connected in the gear (4-3) that vertically moves that vertically moves on the Handle axis (4-2).
The described multidimensional locating device that is used for the heavy ion irradiation device, described self-powered platform (5) includes lifting cantilever (5-4), on lifting cantilever (5-4), be provided with bracing frame (5-1), lifting handle axle (5-5) is located on the bracing frame (5-1), gear (5-2) that is connected with lifting handle axle (5-5) and the tooth bar (2-1) that is provided with on slide rail (2) engagement; Lifting handle (5-3) is located on the lifting handle axle (5-5).
Described self-powered platform (5) also includes and be provided with bottom disc (5-6) on lifting cantilever (5-4), which is provided with rotary disk (5-7).
Described self-powered platform (5) further includes and be provided with guide rail (5-9) on rotary disk (5-7), and its top is provided with slide block (5-10); On slide block (5-10), be provided with U-shaped anchor clamps (5-11).
The described multidimensional locating device that is used for the heavy ion irradiation device is at described U-shaped anchor clamps (5-11) or/and guide rail (5-9) or/and bottom disc (5-6) or/and be provided with scale label on the slide rail (2).
The beneficial effects of the utility model are: in the heavy ion irradiation experiment, carry out quantitative switching locating device according to measuring good position in advance apace, realized that the three-dimensional translating of microelectronic component in the heavy ion irradiation experiment and one dimension rotate.For image data with obtain the quality of data and improve conventional efficient, save the line time and have great importance.Simple to operation, the positional precision height, novel structure, simple and realized quantitative adjustment and control has been laid architecture basics for further realizing computer controlled automatic from now on.
(1), at different size, thickness circuit board, comprise circuit board with diverse location and height chip, all can make institute's irradiation chip realize target position original position rotation apace, need not carry out loaded down with trivial details position and angle calibration system can satisfy the different angle radiation parameter.
(2), not only the space three-dimensional of having realized circuit board moves and rotates, and can utilize scale that the relative distance that is moved accurately is shifted easily, guarantees the quick switching of different experiments chip on the same circuit board.
(3), this device can carry out the heavy ion irradiation experiment with the circuit board of being satisfied with different size specification and structure by changing circuit board U-shaped anchor clamps, has very strong dirigibility.
Description of drawings:
Fig. 1 is a structural representation stereographic map of the present invention;
Fig. 2 is the schematic isometric of self-powered platform of the present invention;
Fig. 3 is rotating disk signal stereo amplification figure for the present invention.
Embodiment:
Be described in further detail below in conjunction with the most preferred embodiment shown in the accompanying drawing:
Embodiment 1, sees Fig. 1, Fig. 2, and Fig. 3, a kind of multidimensional locating device that is used for the heavy ion irradiation device includes worktable 1, which is provided with base 3, is provided with the slide rail 2 vertical with worktable 1 on base 3; On slide rail 2, be provided with self-powered platform 5.On described worktable 1, be connected with longitudinal moving mechanism 4, described longitudinal moving mechanism 4 includes and vertically moves slide rail 4-4, which is provided with tooth bar 4-1 and mesh, on moving handle axle 4-2, be provided with handle 4-5 with being connected in the gear 4-3 that vertically moves that vertically moves on the Handle axis 4-2.
Described self-powered platform 5 includes lifting cantilever 5-4, is provided with bracing frame 5-1 on lifting cantilever 5-4, and lifting handle axle 5-5 is located on the bracing frame 5-1, gear 5-2 that is connected with lifting handle axle 5-5 and the tooth bar 2-1 that is provided with on slide rail 2 engagement; Lifting handle 5-3 is located on the lifting handle axle 5-5.Described self-powered platform 5 also includes on lifting cantilever 5-4 and is provided with bottom disc 5-6, which is provided with rotary disk 5-7.Described self-powered platform 5 also includes and be provided with guide rail 5-9 on rotary disk 5-7, and its top is provided with slide block 5-10; On slide block 5-10, be provided with U-shaped anchor clamps 5-11.
The described multidimensional locating device that is used for the heavy ion irradiation device is equipped with scale label on described U-shaped anchor clamps 5-11, guide rail 5-9, bottom disc 5-6, slide rail 2.
During use, circuit board under test 8 is clamped among the U-shaped anchor clamps 5-11, clamps by set bolt 14.Worktable 1 supports whole locating device, shake handle 4-5, vertically move gear 4-3 drive and vertically move the tooth bar 4-1 that slide rail 4-4 bottom is connected, make to vertically move slide rail 4-4 and move along the longitudinal direction, and drive base 3 and the self-powered platform 5 that is arranged on the base 3 moves horizontally along the beam line direction; Gear 5-2 that lifting handle axle 5-5 is connected and the tooth bar 2-1 that is provided with on slide rail 2 move up and down self-powered platform 5, have microelectronic component 7 vertical heights that graduated scale is used for quantitative adjusting circuit board under test 8 on the slide rail 2; The bottom disc 5-6 that the other end of self-powered platform 5 is provided with, be fixed on the self-powered platform 5, there is the central shaft of the rotary disk 5-7 of a manhole on to be connected at the circle centre position of bottom disc 5-6 with it, make rotary disk 5-7 carry out 360 ° of rotations around concentric shafts, indicate the angle orientation scale that 360 ° of evenly divideds and rotary disk 5-7 outside surface indicate at bottom disc 5-6 lateral surface, realized positioning and adjusted and the one dimension rotation according to needed angle; Rotary disk 5-7 goes up the slide block 5-10 that the guide rail 5-9 that is provided with has trapezoidal dovetail cross section and T type contour structures, has realized vertically moving.Be carved with scale in guide rail 5-9 outer surface of upper, realize quantitatively control and adjust; U-shaped anchor clamps 5-11 has scale, can make clamping circuit board under test 8 or chip to be measured 7, realizes laterally moving.
Claims (6)
1. a multidimensional locating device that is used for the heavy ion irradiation device includes worktable (1), which is provided with base (3), it is characterized in that being provided with on base (3) slide rail (2) vertical with worktable (1); On slide rail (2), be provided with self-powered platform (5).
2. the multidimensional locating device that is used for the heavy ion irradiation device as claimed in claim 1, it is characterized in that also including and on described worktable (1), be connected with longitudinal moving mechanism (4), described longitudinal moving mechanism (4) includes and vertically moves slide rail (4-4), which is provided with tooth bar (4-1) and mesh, on moving handle axle (4-2), be provided with handle (4-5) with being connected in the gear (4-3) that vertically moves that vertically moves on the Handle axis (4-2).
3. the multidimensional locating device that is used for the heavy ion irradiation device as claimed in claim 1 or 2, it is characterized in that described self-powered platform (5) includes lifting cantilever (5-4), on lifting cantilever (5-4), be provided with bracing frame (5-1), lifting handle axle (5-5) is located on the bracing frame (5-1), gear (5-2) that is connected with lifting handle axle (5-5) and the tooth bar (2-1) that is provided with on slide rail (2) engagement; Lifting handle (5-3) is located on the lifting handle axle (5-5).
4. the multidimensional locating device that is used for the heavy ion irradiation device as claimed in claim 1 is characterized in that described self-powered platform (5) also includes to be provided with bottom disc (5-6) on lifting cantilever (5-4), which is provided with rotary disk (5-7).
5. the multidimensional locating device that is used for the heavy ion irradiation device as claimed in claim 1 is characterized in that described self-powered platform (5) also includes to be provided with guide rail (5-9) on rotary disk (5-7), and its top is provided with slide block (5-10); On slide block (5-10), be provided with U-shaped anchor clamps (5-11).
6. the multidimensional locating device that is used for the heavy ion irradiation device as claimed in claim 5, it is characterized in that also including at described U-shaped anchor clamps (5-11) or/and guide rail (5-9) or/and bottom disc (5-6) or/and be provided with scale label on the slide rail (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200920000952 CN201444164U (en) | 2009-01-20 | 2009-01-20 | Multi-dimensional positioning device used for heavy ion irradiation devices |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200920000952 CN201444164U (en) | 2009-01-20 | 2009-01-20 | Multi-dimensional positioning device used for heavy ion irradiation devices |
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| Publication Number | Publication Date |
|---|---|
| CN201444164U true CN201444164U (en) | 2010-04-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200920000952 Expired - Lifetime CN201444164U (en) | 2009-01-20 | 2009-01-20 | Multi-dimensional positioning device used for heavy ion irradiation devices |
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| CN (1) | CN201444164U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104020327A (en) * | 2014-06-19 | 2014-09-03 | 中国电子科技集团公司第五十八研究所 | Probe station for chip total dose irradiation test |
| CN106546894A (en) * | 2016-10-09 | 2017-03-29 | 中国原子能科学研究院 | A kind of heavy ion microbeam localization method and the chip for the method |
| CN108528838A (en) * | 2018-05-08 | 2018-09-14 | 汪通鲜 | A kind of fertilizer packaging machine |
| CN109782102A (en) * | 2017-11-13 | 2019-05-21 | 中国科学院沈阳自动化研究所 | A kind of single particle effect automatization test system |
| CN109900986A (en) * | 2019-03-07 | 2019-06-18 | 中国科学院近代物理研究所 | A kind of single particle effect test device and method based on mobile platform |
| CN109917204A (en) * | 2019-03-07 | 2019-06-21 | 中国科学院近代物理研究所 | A kind of single particle effect test device and method based on articulated robot |
-
2009
- 2009-01-20 CN CN 200920000952 patent/CN201444164U/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104020327A (en) * | 2014-06-19 | 2014-09-03 | 中国电子科技集团公司第五十八研究所 | Probe station for chip total dose irradiation test |
| CN106546894A (en) * | 2016-10-09 | 2017-03-29 | 中国原子能科学研究院 | A kind of heavy ion microbeam localization method and the chip for the method |
| CN106546894B (en) * | 2016-10-09 | 2019-05-24 | 中国原子能科学研究院 | A kind of heavy ion microbeam localization method and the chip for this method |
| CN109782102A (en) * | 2017-11-13 | 2019-05-21 | 中国科学院沈阳自动化研究所 | A kind of single particle effect automatization test system |
| CN108528838A (en) * | 2018-05-08 | 2018-09-14 | 汪通鲜 | A kind of fertilizer packaging machine |
| CN108528838B (en) * | 2018-05-08 | 2020-07-10 | 佛山市布龙斯包装机械有限公司 | Chemical fertilizer packaging machine |
| CN109900986A (en) * | 2019-03-07 | 2019-06-18 | 中国科学院近代物理研究所 | A kind of single particle effect test device and method based on mobile platform |
| CN109917204A (en) * | 2019-03-07 | 2019-06-21 | 中国科学院近代物理研究所 | A kind of single particle effect test device and method based on articulated robot |
| CN109917204B (en) * | 2019-03-07 | 2021-08-17 | 中国科学院近代物理研究所 | Single event effect testing device and method based on joint robot |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20100428 |