CN210720593U - Low-temperature magnetic field probe station - Google Patents

Low-temperature magnetic field probe station Download PDF

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Publication number
CN210720593U
CN210720593U CN201921192354.5U CN201921192354U CN210720593U CN 210720593 U CN210720593 U CN 210720593U CN 201921192354 U CN201921192354 U CN 201921192354U CN 210720593 U CN210720593 U CN 210720593U
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platform
probe station
magnetic field
field probe
bottoms
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CN201921192354.5U
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Chinese (zh)
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杨海东
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Blue Ocean Instrument Tianjin Co Ltd
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Blue Ocean Instrument Tianjin Co Ltd
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Abstract

The utility model belongs to the technical field of check out test set, especially, be a probe station of low temperature magnetic field, which comprises a platform, the top fixed mounting of platform has probe station body, and the bottom fixed mounting of platform has four support columns, and four support columns are two bisymmetry settings, and the spout has all been seted up to the bottom of four support columns, and equal slidable mounting has movable post in four spouts, and outside the bottom of four movable posts extended to corresponding spout respectively, the equal fixed mounting in bottom of four movable posts had the balancing weight, and the equal fixed mounting in bottom of four balancing weights has the backing plate, and the thread groove has all been seted up at the top of four movable posts, and the lead screw is installed to equal screw thread in. The utility model discloses simple structure, the simple operation can be respectively to the height fine setting of four support columns for platform and probe platform body are in horizontal position, guarantee probe platform body normal work, guarantee the accuracy of testing work result.

Description

Low-temperature magnetic field probe station
Technical Field
The utility model relates to a check out test set technical field especially relates to a low temperature magnetic field probe station.
Background
The probe station is mainly applied to the test of the semiconductor industry, the photoelectric industry, integrated circuits and packaging, is widely applied to the research and development of precise electrical measurement of complex and high-speed devices, and aims to ensure the quality and the reliability and reduce the research and development time and the cost of the device manufacturing process, wherein the 4K one-dimensional magnetic field probe station is one of the probe stations which are commonly used, the 4K one-dimensional magnetic field probe station is designed for nondestructive agility test, the low-temperature magnetic field probe station provides a magnetic field of 6000Gs, and the magnetic field reversal is easily realized through the control of a bipolar power supply.
However, in the prior art, when the probe platform works, the levelness of the 4K one-dimensional magnetic field probe platform is not convenient to adjust, if the ground is uneven or the levelness of the ground is poor, the 4K one-dimensional magnetic field probe platform can be unstable when being placed on the ground, or the probe platform can slightly shake when being used, so that the normal use of the probe platform is affected, and the result of detection work has errors.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defects existing in the prior art and providing a low-temperature magnetic field probe station.
In order to achieve the above purpose, the utility model adopts the following technical scheme: the low-temperature magnetic field probe station comprises a platform, wherein a probe station body is fixedly installed at the top of the platform, four supporting columns are fixedly installed at the bottom of the platform, the four supporting columns are symmetrically arranged in pairs, sliding grooves are formed in the bottoms of the four supporting columns, movable columns are slidably installed in the four sliding grooves, the bottoms of the four movable columns respectively extend out of the corresponding sliding grooves, balancing weights are fixedly installed at the bottoms of the four movable columns, backing plates are fixedly installed at the bottoms of the four balancing weights, thread grooves are formed in the tops of the four movable columns, screw rods are installed in the four thread grooves in a threaded mode and drive the top ends to extend out of the thread grooves, first bevel gears are fixedly sleeved on the four screw rods and located outside the thread grooves, mounting holes are formed in the inner walls of one sides of the four sliding grooves, rotating shafts are installed in the four mounting holes in a rotating mode, and two ends of, and one ends of the four rotating shafts in the corresponding sliding grooves are fixedly provided with second bevel gears, the four second bevel gears are respectively meshed with the corresponding first bevel gears, and the top of the platform is fixedly provided with two gradienters.
Preferably, the inner walls of the two sides of the sliding groove are provided with limiting grooves, the two sides of the movable column are fixedly provided with limiting blocks, and the limiting blocks are slidably arranged in the corresponding limiting grooves.
Preferably, a bearing seat is fixedly installed on the inner wall of the top of the sliding groove, and the top end of the screw rod is rotatably installed on the bearing seat.
Preferably, the bottoms of the four base plates are fixedly provided with anti-skid pads.
Preferably, the inner wall of the mounting hole is provided with an annular groove, the rotating shaft is fixedly sleeved with an annular block, and the annular block is rotatably mounted in the annular groove.
Preferably, a rotating disc is fixedly installed at one end, away from the second bevel gear, of the rotating shaft, and a butterfly-shaped handle is fixedly installed at one end, away from the rotating shaft, of the rotating disc.
Compared with the prior art, the beneficial effects of the utility model are that: firstly, the device comprises a platform, a probe station body, a support column, a sliding groove, a movable column, a balancing weight, a backing plate, a thread groove, a screw rod, a first bevel gear, a mounting hole, a rotating shaft, a second bevel gear and gradienters which are matched, wherein the levelness of the platform is judged by using the two gradienters, the height position of the corresponding support column can be adjusted, during adjustment, a butterfly handle on the corresponding support column is clockwise rotated, the butterfly handle drives a rotating disc, the rotating shaft and the second bevel gear to rotate, the second bevel gear drives the first bevel gear and the screw rod to rotate, under the limit matching of a limit block and a limit groove, the movable column slides towards the direction in the sliding groove, the movable column drives the limit block to slide in the limit groove, the movable column drives the balancing weight and the backing plate to move upwards, and similarly, the butterfly handle is anticlockwise rotated, the, according to the data measured by the two gradienters, the heights of the four supporting columns can be respectively finely adjusted, so that the levelness of the platform is adjusted, and the probe station body is in a horizontal position;
the utility model discloses simple structure, the simple operation can be respectively to the height fine setting of four support columns for platform and probe platform body are in horizontal position, guarantee probe platform body normal work, guarantee the accuracy of testing work result.
Drawings
FIG. 1 is a schematic sectional view of the main view of the present invention;
fig. 2 is an enlarged schematic view of a portion a in fig. 1.
In the figure: 1. a platform; 2. a probe station body; 3. a support pillar; 4. a chute; 5. a movable post; 6. a balancing weight; 7. a base plate; 8. a thread groove; 9. a screw rod; 10. a first bevel gear; 11. mounting holes; 12. a rotating shaft; 13. a second bevel gear; 14. a level gauge.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-2, the present invention provides a technical solution: the probe station for the low-temperature magnetic field comprises a platform 1, a probe station body 2 is fixedly installed at the top of the platform 1, four support columns 3 are fixedly installed at the bottom of the platform 1, the four support columns 3 are arranged in a pairwise symmetry manner, sliding grooves 4 are formed in the bottoms of the four support columns 3, movable columns 5 are slidably installed in the four sliding grooves 4, the bottoms of the four movable columns 5 respectively extend out of the corresponding sliding grooves 4, balancing weights 6 are fixedly installed at the bottoms of the four movable columns 5, backing plates 7 are fixedly installed at the bottoms of the four balancing weights 6, thread grooves 8 are formed in the tops of the four movable columns 5, lead screws 9 are threadedly installed in the four thread grooves 8, the top ends of the lead screws 9 are driven to extend out of the thread grooves 8, first conical gears 10 are fixedly sleeved on the four lead screws 9, the first conical gears 10 are located out of the thread grooves 8, and installation holes 11 are formed in, rotating shafts 12 are rotatably mounted in the four mounting holes 11, two ends of each rotating shaft 12 extend out of the mounting holes 11, two conical gears 13 are fixedly mounted at one ends of the four rotating shafts 12, which are located in the corresponding sliding grooves 4, the four second conical gears 13 are respectively meshed with the corresponding first conical gears 10, and two gradienters 14 are fixedly mounted at the top of the platform 1;
the inner walls of two sides of the sliding groove 4 are respectively provided with a limiting groove, two sides of the movable column 5 are respectively fixedly provided with a limiting block, the limiting blocks are slidably arranged in the corresponding limiting grooves, the inner wall of the top of the sliding groove 4 is fixedly provided with a bearing seat, the top end of the screw rod 9 is rotatably arranged on the bearing seats, the bottoms of the four backing plates 7 are respectively fixedly provided with an anti-slip pad, the inner wall of the mounting hole 11 is provided with a ring-shaped groove, the rotating shaft 12 is fixedly sleeved with a ring-shaped block, the ring-shaped block is rotatably arranged in the ring-shaped groove, one end of the rotating shaft 12 far away from the second bevel gear 13 is fixedly provided with a turntable, one end of the turntable far away from the rotating shaft 12 is fixedly provided with a butterfly-shaped handle, the device is matched with the level gauge 14 through the platform 1, the probe table body 2, the supporting column 3, the, two gradienters 14 are used for judging the levelness of the platform 1, the height position of the corresponding support column 3 can be adjusted, when the levelness is adjusted, the butterfly handle on the corresponding support column 3 is rotated clockwise, the butterfly handle drives the rotating disc, the rotating shaft 12 and the second bevel gear 13 to rotate, the second bevel gear 13 drives the first bevel gear 10 and the screw rod 9 to rotate, under the limit coordination of the limit block and the limit groove, the movable column 5 slides towards the direction in the sliding groove 4, the movable column 5 drives the limit block to slide in the limit groove, the movable column 5 drives the balancing weight 6 and the backing plate 7 to move upwards, similarly, the butterfly handle is rotated anticlockwise, the movable column 5 drives the balancing weight 6 and the backing plate 7 to move downwards, so that the height of the four support columns 3 can be respectively finely adjusted according to the data measured by the two gradienters 14, and the levelness of the platform, make probe platform body 2 be in horizontal position, the utility model discloses simple structure, the simple operation can be respectively to the height fine setting of four support columns 3 for platform 1 and probe platform body 2 are in horizontal position, guarantee probe platform body 2 and normally work, guarantee the accuracy of testing work result.
The working principle is as follows: the probe station body 2 is a 4K one-dimensional magnetic field probe station, the two gradienters 14 are mini electronic digital display gradienters, the two gradienters 14 are convenient to detach and replace electrons, when the levelness of the probe station body 2 needs to be adjusted, the levelness of the platform 1 is judged by using the two gradienters 14, so that the height position of the corresponding support column 3 is adjusted, a butterfly handle on the corresponding support column 3 is clockwise rotated during adjustment, the butterfly handle drives a rotating disc, a rotating shaft 12 and a second conical gear 13 to rotate, the rotating shaft 12 drives an annular block to rotate in an annular groove, the second conical gear 13 drives a first conical gear 10 and a screw rod 9 to rotate, as the screw rod 9 is in threaded connection and matching with a threaded groove 8, under the limit matching of a limit block and a limit groove, the movable column 5 slides towards the direction in the sliding groove 4, and the movable column 5 drives the limit block, the movable column 5 drives the balancing weight 6 and the backing plate 7 to move upwards, and in the same way, the butterfly handle rotates anticlockwise, and the movable column 5 drives the balancing weight 6 and the backing plate 7 to move downwards, so that the height of the four support columns 3 can be finely adjusted respectively according to the data measured by the two gradienters 14, the levelness of the platform 1 is adjusted, the probe station body 2 is in the horizontal position, the normal work of the probe station body 2 is ensured, and the accuracy of a detection work result is ensured.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims (6)

1. Cryogenic magnetic field probe station, including platform (1), its characterized in that: the probe station comprises a platform (1), a probe station body (2) is fixedly installed at the top of the platform (1), four supporting columns (3) are fixedly installed at the bottom of the platform (1), the four supporting columns (3) are arranged in a pairwise symmetrical mode, sliding grooves (4) are formed in the bottoms of the four supporting columns (3), movable columns (5) are slidably installed in the four sliding grooves (4), the bottoms of the four movable columns (5) respectively extend out of the corresponding sliding grooves (4), balancing weights (6) are fixedly installed at the bottoms of the four movable columns (5), backing plates (7) are fixedly installed at the bottoms of the four balancing weights (6), thread grooves (8) are formed in the tops of the four movable columns (5), lead screws (9) are installed in the four thread grooves (8) in a threaded mode, the lead screws (9) drive the top ends to extend out of the thread grooves (8), first bevel gears (10) are fixedly sleeved on the, outside first conical gear (10) were located thread groove (8), mounting hole (11) had all been seted up on one side inner wall of four spout (4), all rotate in four mounting hole (11) and install pivot (12), the both ends of pivot (12) all extend to outside mounting hole (11), the equal fixed mounting of one end that four pivot (12) are located corresponding spout (4) has second conical gear (13), four second conical gear (13) mesh with corresponding first conical gear (10) respectively mutually, the top fixed mounting of platform (1) has two spirit levels (14).
2. The cryogenic magnetic field probe station of claim 1, wherein: limiting grooves are formed in the inner walls of the two sides of the sliding groove (4), limiting blocks are fixedly mounted on the two sides of the movable column (5), and the limiting blocks are slidably mounted in the corresponding limiting grooves.
3. The cryogenic magnetic field probe station of claim 1, wherein: a bearing seat is fixedly installed on the inner wall of the top of the sliding groove (4), and the top end of the screw rod (9) is rotatably installed on the bearing seat.
4. The cryogenic magnetic field probe station of claim 1, wherein: the bottoms of the four backing plates (7) are fixedly provided with non-slip mats.
5. The cryogenic magnetic field probe station of claim 1, wherein: the inner wall of the mounting hole (11) is provided with an annular groove, the rotating shaft (12) is fixedly sleeved with an annular block, and the annular block is rotatably mounted in the annular groove.
6. The cryogenic magnetic field probe station of claim 1, wherein: and a turntable is fixedly mounted at one end of the rotating shaft (12) far away from the second bevel gear (13), and a butterfly handle is fixedly mounted at one end of the turntable far away from the rotating shaft (12).
CN201921192354.5U 2019-07-26 2019-07-26 Low-temperature magnetic field probe station Active CN210720593U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921192354.5U CN210720593U (en) 2019-07-26 2019-07-26 Low-temperature magnetic field probe station

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921192354.5U CN210720593U (en) 2019-07-26 2019-07-26 Low-temperature magnetic field probe station

Publications (1)

Publication Number Publication Date
CN210720593U true CN210720593U (en) 2020-06-09

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Application Number Title Priority Date Filing Date
CN201921192354.5U Active CN210720593U (en) 2019-07-26 2019-07-26 Low-temperature magnetic field probe station

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CN (1) CN210720593U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113049881A (en) * 2021-04-09 2021-06-29 中国电子技术标准化研究院 Extension resistance tester for epitaxial layer of integrated circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113049881A (en) * 2021-04-09 2021-06-29 中国电子技术标准化研究院 Extension resistance tester for epitaxial layer of integrated circuit

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