CN208704692U - A kind of wafer sampling observation device - Google Patents

A kind of wafer sampling observation device Download PDF

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Publication number
CN208704692U
CN208704692U CN201821579483.5U CN201821579483U CN208704692U CN 208704692 U CN208704692 U CN 208704692U CN 201821579483 U CN201821579483 U CN 201821579483U CN 208704692 U CN208704692 U CN 208704692U
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wafer
fixedly installed
workbench
rotary shaft
shell
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CN201821579483.5U
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柯武生
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Guangxi Cinnamon Semiconductor Technology Co Ltd
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Guangxi Cinnamon Semiconductor Technology Co Ltd
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Abstract

The utility model relates to wafer detection equipment technical fields, and disclose a kind of wafer sampling observation device, including shell, the middle part movable sleeve of the shell inner cavity bottom surface is connected to rotary shaft, the top of the rotary shaft is fixedly installed with workbench, it is fixedly installed with fixed block between the upper and lower surface of the workbench inner cavity, is fixedly installed with locating slide rod between the side of the fixed block and the inner wall of workbench.The wafer inspects device by random samples, pass through the cooperation of four card adapter plates, so that the center of circle of wafer is overlapped with the center of circle of bench top and fixes wafer, pass through the cooperation of driving motor, reduction gearbox, driving bevel gear and driven wheel of differential, a power is provided for rotary shaft, rotary shaft is rotated by workbench with wafer, so that rangefinder can continuously be detected on the surface of wafer, increase the point of sample detection, the accuracy for increasing wafer sampling observation device improves the practicability of wafer sampling observation device.

Description

A kind of wafer sampling observation device
Technical field
The utility model relates to wafer detection equipment technical field, specially a kind of wafer inspects device by random samples.
Background technique
Wafer refers to silicon chip used in silicon semiconductor production of integrated circuits, since its shape is circle, therefore referred to as wafer, Wafer is the carrier for producing used in integrated circuits, and general significance wafer refers to monocrystalline silicon wafer more, and monocrystalline silicon wafer is by common silica sand It drawing and refines, silicon single crystal rod is made by dissolution, purification, distillation a series of measures, silicon single crystal rod passes through after polishing, slice, Just become wafer, need to inspect the thickness of wafer by random samples later, to improve the quality of wafer.
Wafer is directly placed on monitor station by existing wafer thickness detection device, by mobile optical detection machinery come The thickness for measuring wafer, since the point of sample detection is limited, the resultant error for causing wafer thickness to detect is bigger, and cannot The flatness for detecting crystal column surface, causes second-rate wafer to be mixed into standard wafer, influences the qualification rate of product wafer, because This needs to design a kind of accuracy height and the wafer sampling observation device for being able to detect wafer surface flatness.
Summary of the invention
In view of the deficiencies of the prior art, the utility model provides a kind of wafer sampling observation device, has accuracy height and can The advantages that detecting wafer surface flatness, solves existing wafer thickness detection device and wafer is directly placed on monitor station On, cause wafer thickness to detect since the point of sample detection is limited to measure the thickness of wafer by mobile optical detection machinery Resultant error it is bigger, and the flatness of crystal column surface cannot be detected, second-rate wafer is caused to be mixed into standard wafer It is interior, the problem of influencing the qualification rate of product wafer.
To realize above-mentioned accuracy height and being able to detect the purpose of wafer surface flatness, the utility model provides following skill Art scheme: a kind of wafer sampling observation device, including shell, the middle part movable sleeve of the shell inner cavity bottom surface are connected to rotary shaft, the rotation The top of shaft is fixedly installed with workbench, is fixedly installed with fixed block between the upper and lower surface of the workbench inner cavity, described Locating slide rod is fixedly installed between the side of fixed block and the inner wall of workbench, the external activity of the locating slide rod is socketed with Sliding block, the external activity of the locating slide rod are socketed with clamping spring, the both ends of the clamping spring respectively with fixed block and cunning Two close sides of block are fixedly connected, and the top surface of the sliding block is fixedly installed with card adapter plate, and the external of the rotary shaft is fixed It is socketed with driven wheel of differential, the bottom surface of the shell inner cavity is fixedly installed with the driving motor on the right side of rotary shaft, described outer The bottom surface of shell inner cavity is fixedly installed with the reduction gearbox on the left of driving motor, the output shaft of the driving motor and reduction gearbox Right side is fixedly connected, and the output shaft fixing sleeve of the reduction gearbox is connected to the driving bevel gear being meshed with driven wheel of differential, institute The bottom surface for stating shell inner cavity is fixedly installed with battery on the left of rotary shaft, and the top surface of the shell is fixedly installed with support Column, the top of the support column are fixedly installed with regulating box, and movable sleeve is connected between the left and right sides for adjusting box cavity Threaded rod, the external screw-thread of the threaded rod are socketed with connecting column, and the bottom end of the connecting column extends to the outside of regulating box simultaneously It is fixedly installed with rangefinder, the bottom surface of the shell is fixedly installed with fixed sleeving, the bottom end screw thread socket of the fixed sleeving There is supporting leg.
Preferably, the top surface of the workbench offers clamping slot compatible with card adapter plate, and the close fixation of card adapter plate Block is fixedly installed with rubber pad on one side, and the top surface of the workbench is fixedly installed with cushion.
Preferably, the inner wall of the shell is fixedly installed with the support plate above battery, and support plate top surface Middle part offers movable span compatible with rotary shaft.
Preferably, the top surface of the support plate is fixedly installed with support base, and the top surface of the support base offers recessed Type groove, the internal activity of the concave groove are equipped with ball, and the bottom surface of the workbench is fixedly installed with positioned at support base just The limit plate of top, the bottom surface of the limit plate offer arc groove compatible with ball.
Preferably, the bottom surface of the regulating box offers loose slot compatible with connecting column, the front of the connecting column It is fixedly installed with pointer, the front of the pointer extends to the outside of regulating box, and the front of regulating box offers and pointer phase The rectangular channel of adaptation, the front of the regulating box are equipped with the graduation mark for being located at rectangular channel or more two sides.
Preferably, the right end of the threaded rod extends to the outside of regulating box and is fixedly installed with rotating disk, and threaded rod Outside and regulating box right side pivot bush unit.
(3) beneficial effect
Compared with prior art, the utility model provides a kind of wafer sampling observation device, have it is following the utility model has the advantages that
1, the wafer inspects device by random samples, by being clamped spring, provides an active force for sliding block, enables sliding block with card Fishplate bar, by the cooperation of four card adapter plates, provides four equal-sized works to close to the movement of the direction of fixed block for wafer Firmly, so that the center of circle of wafer is overlapped with the center of circle of bench top and fixes wafer, by driving motor, reduction gearbox, The cooperation of driving bevel gear and driven wheel of differential provides a power for rotary shaft, rotary shaft is enabled to pass through workbench It is rotated with wafer, so that rangefinder can continuously be detected on the surface of wafer, increases the point of sample detection, The accuracy for increasing wafer sampling observation device improves the practicability of wafer sampling observation device.
2, the wafer inspects device by random samples, by the cooperation of driving motor, reduction gearbox, driving bevel gear and driven wheel of differential, for rotation Shaft provides a power, and rotary shaft is persistently rotated by workbench with wafer, by rangefinder, so that people Can observe the variation of wafer local thickness in real time, by rotating threaded rod, enable connecting column with rangefinder or so It is mobile, so that people can observe the variation of wafer integral thickness in real time, judge eventually by the variation of wafer thickness brilliant Whether round surface is smooth, improves the practicability of wafer sampling observation device.
Detailed description of the invention
FIG. 1 is a schematic structural view of the utility model;
Fig. 2 is the front view of Fig. 1;
Fig. 3 is the vertical view schematic diagram of internal structure of workbench in Fig. 1.
In figure: 1, shell;2, rotary shaft;3, workbench;4, fixed block;5, locating slide rod;6, sliding block;7, it is clamped spring; 8, card adapter plate;9, driven wheel of differential;10, driving motor;11, reduction gearbox;12, driving bevel gear;13, battery;14, it supports Plate;15, support base;16, ball;17, limit plate;18, support column;19, regulating box;20, threaded rod;21, connecting column;22, Rangefinder;23, pointer;24, fixed sleeving;25, supporting leg.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.
Fig. 1-3, a kind of wafer sampling observation device, including shell 1, the inner wall of shell 1 is please referred to be fixedly installed with positioned at battery The support plate 14 of 13 tops, the top surface of support plate 14 are fixedly installed with support base 15, and the top surface of support base 15 offers recessed Type groove, the internal activity of concave groove are equipped with ball 16, and the bottom surface of workbench 3 is fixedly installed with right above support base 15 Limit plate 17, the bottom surface of limit plate 17 offers arc groove compatible with ball 16, using support base 15, concave groove, The cooperation of ball 16, arc groove and limit plate 17 reduces the bearing capacity of rotary shaft 2, reduces support base 15 and limit plate Frictional force between 17 increases wafer sampling observation device more stability, improves the practicability of wafer sampling observation device, and prop up Movable span compatible with rotary shaft 2 is offered in the middle part of 14 top surface of fagging, using support plate 14, reduces holding for rotary shaft 2 Gravity increases wafer sampling observation device more stability, improves the practicability of wafer sampling observation device, 1 inner chamber bottom surface of shell Middle part movable sleeve be connected to rotary shaft 2, the top of rotary shaft 2 is fixedly installed with workbench 3, the top surface of workbench 3 offer with The compatible clamping slot of card adapter plate 8, and card adapter plate 8 is fixedly installed with rubber pad, the top of workbench 3 close to fixed block 4 on one side Face is fixedly installed with cushion, using rubber pad, slows down card adapter plate 8 to the active force of wafer, so that the edge of wafer will not It is damaged, and utilizes cushion, reduce the bottom surface of wafer and the frictional force of 3 top surface of workbench, so that the bottom surface of wafer is not Scratch can be generated, the practicability of wafer sampling observation device is improved, is fixedly installed with fixation between the upper and lower surface of 3 inner cavity of workbench Block 4 is fixedly installed with locating slide rod 5, the external activity set of locating slide rod 5 between the side of fixed block 4 and the inner wall of workbench 3 Be connected to sliding block 6, the external activity of locating slide rod 5 is socketed with clamping spring 7, be clamped the both ends of spring 7 respectively with fixed block 4 and sliding Two close sides of block 6 are fixedly connected, and the top surface of sliding block 6 is fixedly installed with card adapter plate 8, and the outside of rotary shaft 2 is fixedly attached There is driven wheel of differential 9, the bottom surface of 1 inner cavity of shell is fixedly installed with the driving motor 10 positioned at 2 right side of rotary shaft, driving motor 10 Model Y80M2-2, the bottom surface of 1 inner cavity of shell is fixedly installed with the reduction gearbox 11 positioned at the left side of driving motor 10, driving electricity The output shaft of machine 10 is fixedly connected with the right side of reduction gearbox 11, and the output shaft fixing sleeve of reduction gearbox 11 is connected to and driven wheel of differential 9 driving bevel gears 12 being meshed, the bottom surface of 1 inner cavity of shell are fixedly installed with the battery 13 positioned at 2 left side of rotary shaft, shell 1 top surface is fixedly installed with support column 18, and the top of support column 18 is fixedly installed with regulating box 19, and the bottom surface of regulating box 19 opens up There is loose slot compatible with connecting column 21, the front of connecting column 21 is fixedly installed with pointer 23, and the front of pointer 23 extends to The outside of regulating box 19, and the front of regulating box 19 offers rectangular channel compatible with pointer 23, the front of regulating box 19 is set There is the graduation mark for being located at rectangular channel or more two sides to allow one to gradually using the cooperation of pointer 23, rectangular channel and graduation mark Thickness sensitivity is carried out to wafer, while facilitating people and detecting brilliant diameter of a circle, the practicability of wafer sampling observation device is improved, adjusts It saves movable sleeve between the left and right sides of 19 inner cavity of case and is connected to threaded rod 20, the right end of threaded rod 20 extends to the outer of regulating box 19 Portion is simultaneously fixedly installed with rotating disk, and the right side pivot bush unit of the outside of threaded rod 20 and regulating box 19 is made using rotating disk The position for adjusting rangefinder 22 that people can be quick and easy is obtained, work task efficiency is increased, improves wafer sampling observation The practicability of device, the external screw-thread of threaded rod 20 are socketed with connecting column 21, and the bottom end of connecting column 21 extends to the outer of regulating box 19 Portion is simultaneously fixedly installed with rangefinder 22, and the model GOLDM-41FB of rangefinder 22, the bottom surface of shell 1 is fixedly installed with fixing sleeve Pipe 24, the bottom end screw thread of fixed sleeving 24 are socketed with supporting leg 25, and the bottom surface of supporting leg 25 is fixedly installed with resilient cushion, utilizes branch The cooperation of support leg 25 and fixed sleeving 24 allows one to individually adjust the height of four angular distances of 1 bottom surface of shell from the ground, So that it is guaranteed that the bottom surface of shell 1 can be constantly in horizontality, the applicability of wafer sampling observation device is increased, the crystalline substance is improved The practicability of circle sampling observation device.
It is preferred to pull card adapter plate 8 to the direction far from fixed block 4 when work, then wafer is placed on to the top of workbench 3 Face, then card adapter plate 8 is close to fixed block 4 under the active force of clamping spring 7, and card adapter plate 8 pushes wafer in workbench 3 later Top surface it is mobile, then the center of circle of wafer is overlapped with the center of circle of 3 top surface of workbench, and then wafer is fixed, later unlatching drive Dynamic motor 10, then driving motor 10 is rotated by reduction gearbox 11 and driving bevel gear 12 with driven wheel of differential 9, then driven Bevel gear 9 by rotary shaft 2 with workbench 3 rotate, aftertable 3 persistently rotated with wafer, be then turned on rangefinder 22, then the thickness of 22 real-time measurement wafer of rangefinder, rotates threaded rod 20 later, and then connecting column 21 is left with rangefinder 22 It moves right, then rangefinder 22 carries out comprehensive Thickness sensitivity to wafer, judges wafer according to the variation of wafer thickness later Whether surface is smooth.
In conclusion the wafer inspects device by random samples, by being clamped spring 7, an active force is provided for sliding block 6, so that sliding block 6 , by the cooperation of four card adapter plates 8, four can be provided for wafer with card adapter plate 8 to close to the movement of the direction of fixed block 4 Equal-sized active force passes through driving so that the center of circle of wafer is overlapped with the center of circle of 3 top surface of workbench and fixes wafer The cooperation of motor 10, reduction gearbox 11, driving bevel gear 12 and driven wheel of differential 9 provides a power for rotary shaft 2, so that Rotary shaft 2 can be rotated by workbench 3 with wafer, so that rangefinder 22 can carry out continuously on the surface of wafer Detection, increases the point of sample detection, increases the accuracy of wafer sampling observation device, improves the practical of wafer sampling observation device Property;By the cooperation of driving motor 10, reduction gearbox 11, driving bevel gear 12 and driven wheel of differential 9, one is provided for rotary shaft 2 A power enables rotary shaft 2 persistently to rotate by workbench 3 with wafer, by rangefinder 22, allows one to reality When observe wafer local thickness variation, by rotate threaded rod 20, enable connecting column 21 with rangefinder 22 or so move It is dynamic, so that people can observe the variation of wafer integral thickness in real time, wafer is judged eventually by the variation of wafer thickness Surface it is whether smooth, improve the wafer sampling observation device practicability;It solves existing wafer thickness detection device directly will Wafer is placed on monitor station, and the thickness of wafer is measured by mobile optical detection machinery, since the point of sample detection is limited, The resultant error for causing wafer thickness to detect is bigger, and cannot detect the flatness of crystal column surface, causes second-rate The problem of wafer is mixed into standard wafer, influences the qualification rate of product wafer.
It should be noted that, in this document, relational terms such as first and second and the like are used merely to a reality Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment Intrinsic element.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art, It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.

Claims (6)

1. a kind of wafer inspects device, including shell (1) by random samples, it is characterised in that: the middle part pivot bush unit of shell (1) inner chamber bottom surface Having rotary shaft (2), the top of the rotary shaft (2) is fixedly installed with workbench (3), and up and down the two of workbench (3) inner cavity It is fixedly installed between face fixed block (4), is fixedly installed between the side of the fixed block (4) and the inner wall of workbench (3) The external activity of locating slide rod (5), the locating slide rod (5) is socketed with sliding block (6), the external activity of the locating slide rod (5) It is socketed with clamping spring (7), the both ends of clamping spring (7) two sides close with fixed block (4) and sliding block (6) respectively Be fixedly connected, the top surface of the sliding block (6) is fixedly installed with card adapter plate (8), the external fixing sleeve of the rotary shaft (2) be connected to from The bottom surface of dynamic bevel gear (9), shell (1) inner cavity is fixedly installed with the driving motor (10) on the right side of rotary shaft (2), institute The bottom surface for stating shell (1) inner cavity is fixedly installed with reduction gearbox (11) on the left of driving motor (10), the driving motor (10) output shaft is fixedly connected with the right side of reduction gearbox (11), the output shaft fixing sleeve of the reduction gearbox (11) be connected to from The bottom surface of the driving bevel gear (12) that dynamic bevel gear (9) is meshed, shell (1) inner cavity is fixedly installed with positioned at rotary shaft (2) top surface of the battery (13) on the left of, the shell (1) is fixedly installed with support column (18), the top of the support column (18) End is fixedly installed with regulating box (19), and movable sleeve is connected to threaded rod between the left and right sides of regulating box (19) inner cavity (20), the external screw-thread of the threaded rod (20) is socketed with connecting column (21), and the bottom end of the connecting column (21) extends to adjusting The outside of case (19) is simultaneously fixedly installed with rangefinder (22), and the bottom surface of the shell (1) is fixedly installed with fixed sleeving (24), institute The bottom end screw thread for stating fixed sleeving (24) is socketed with supporting leg (25).
2. a kind of wafer according to claim 1 inspects device by random samples, it is characterised in that: the top surface of the workbench (3) offers The compatible clamping slot with card adapter plate (8), and card adapter plate (8) is fixedly installed with rubber pad close to fixed block (4) on one side, it is described The top surface of workbench (3) is fixedly installed with cushion.
3. a kind of wafer according to claim 1 inspects device by random samples, it is characterised in that: the inner wall of the shell (1) is fixedly mounted There is the support plate (14) being located above battery (13), and is offered in the middle part of support plate (14) top surface and rotary shaft (2) Xiang Shi The movable span matched.
4. a kind of wafer according to claim 3 inspects device by random samples, it is characterised in that: the fixed peace in the top surface of the support plate (14) Equipped with support base (15), the top surface of the support base (15) offers concave groove, the internal activity installation of the concave groove Have ball (16), the bottom surface of the workbench (3) is fixedly installed with the limit plate (17) right above support base (15), institute The bottom surface for stating limit plate (17) offers and ball (16) compatible arc groove.
5. a kind of wafer according to claim 1 inspects device by random samples, it is characterised in that: the bottom surface of the regulating box (19) offers The front of the compatible loose slot with connecting column (21), the connecting column (21) is fixedly installed with pointer (23), the pointer (23) front extends to the outside of regulating box (19), and the front of regulating box (19) offers and pointer (23) compatible square Shape slot, the front of the regulating box (19) are equipped with the graduation mark for being located at rectangular channel or more two sides.
6. a kind of wafer according to claim 1 inspects device by random samples, it is characterised in that: the right end of the threaded rod (20) extends to The outside of regulating box (19) is simultaneously fixedly installed with rotating disk, and the activity of the right side of the outside of threaded rod (20) and regulating box (19) Socket.
CN201821579483.5U 2018-09-27 2018-09-27 A kind of wafer sampling observation device Active CN208704692U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110657770A (en) * 2019-09-06 2020-01-07 广东兴发环境科技有限公司 Device for thermally measuring the dimensions of a metal profile during rolling
CN111609261A (en) * 2020-05-20 2020-09-01 长春师范大学 Automatic control support for measuring instrument
CN112697396A (en) * 2020-12-07 2021-04-23 王成龙 LED bulb surface detection device and detection method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110657770A (en) * 2019-09-06 2020-01-07 广东兴发环境科技有限公司 Device for thermally measuring the dimensions of a metal profile during rolling
CN111609261A (en) * 2020-05-20 2020-09-01 长春师范大学 Automatic control support for measuring instrument
CN112697396A (en) * 2020-12-07 2021-04-23 王成龙 LED bulb surface detection device and detection method

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