CN87201004U - Transistor chip measurement and observation unit - Google Patents
Transistor chip measurement and observation unit Download PDFInfo
- Publication number
- CN87201004U CN87201004U CN 87201004 CN87201004U CN87201004U CN 87201004 U CN87201004 U CN 87201004U CN 87201004 CN87201004 CN 87201004 CN 87201004 U CN87201004 U CN 87201004U CN 87201004 U CN87201004 U CN 87201004U
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- tube core
- measurement
- make
- transistor chip
- emitting diode
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Abstract
The utility model relates to a measurement and observation device of the semiconductor laser or the transistor chip of the light-emitting diode, belonging to the measurement equipment when the optical radiation device of the semiconductor is manufactured or processed. The measurement and observation device is composed of a sucking pump, and a ventilating pump valve, and a mechanical regulating mechanism making the transistor chip rotate 360 DEG around a shaft, rotating 360 DEG around the shaft and moving up and down and an observation microscope. The utility model matched with a measuring device can measure the electrical property and the electro-optical property of the laser or the light-emitting diode and can also observe the cleaved cavity surfaces of the laser and the transistor chip of the light-emitting diode, and the measurement and observation device can make the transistor chip be conveniently adsorbed on a sucking sheet needle and be naturally fallen into the box of the transistor chip through the ventilating pump valve. The measurement and observation device is an effective monitoring tool in the process of researching and manufacturing the LD and the LED.
Description
The utility model is the measurement finder of semiconductor laser (LD) or light-emitting diode (LED) tube core, the measuring equipment when belonging to manufacturing of semiconductor optical radiation device or processing.
In recent years, along with optical fiber communication technology, photoelectric sense technology, automatic control technology, the development in fields such as CD Storage Techniques, the research of semiconductor laser and light-emitting diode has also had progress rapidly with manufacturing.For obtaining high-quality LD and LED device, improve the rate of finished products that LD and LED make, in the research manufacture process, carry out necessary parameter to the tube core quality measures, for example measure current-voltage (I-V) characteristic, electric current-luminous power (I-P) characteristic, threshold current electric properties such as (Ith), cleaved cavity surface is observed etc., influence the various factors of tube core quality, find out improvement tube core quality with research, improve the process program of die yield, shorten the lead time, and reject underproof tube core, alleviate the pressure of shelving back technologies such as hot pressing, save the labor and raw material, can further study of the influence of back technology simultaneously device performance.Therefore, be important step in the device technology to the measurement of tube core with observing.Domestic is to carry out tube core with the JT-1 transistor curve tracer to measure on probe station basically, and this method can only be measured the I-V characteristic, and energy measurement I-P characteristic can not observed cleaved cavity surface, and probe can damage tube core.Finish the feature measurement and the analysis of tube core with the die testing workbench abroad, but do not see yet can the composite measurement electrology characteristic, electro-optical characteristic, can observe the measurement observation platform of cleaved cavity surface again.In addition, for reducing the artificial damage of tube core, often adopt vacuum to inhale the sheet device and hold tube core, but because the adhesion of absorbing needle and tube core when the air roadlock of taking seriously is disconnected, usually can not make little tube core throw off absorbing needle, and when measuring, often still use probe, thereby still can cause the tube core damage as electrode.
It is that development for LD and LED designs that tube core of the present utility model is measured finder, and it can observe two cleaved cavity surfaces of tube core easily, can cooperate with the surveying record instrument again, measures its electricity, electro-optical characteristic line item of going forward side by side.The utility model directly with absorbing needle as top electrode, fully without probe, simultaneously, adopt custom-designed ventilating pump valve, produce a malleation air-flow when vacuum air-channel is disconnected, tube core and absorbing needle are thrown off naturally, avoided the mechanical damage of tube core.
The utility model is by aspiration pump, and ventilating pump valve, die testing observation platform and viewing microscope constitute.Aspiration pump provides negative pressure to inhale sheet.Ventilating pump valve comprises bibcock, valve body, spring, valve seat and turnover wireway, and valve body is provided with air vent.In use, no external force is done the time spent, and this pump valve is in and the vacuum air-channel normal open state.The normal open gas circuit can make tube core be adsorbed on the absorbing needle.When measuring the observation end, press bibcock, the vacuum normal open gas circuit that blocking-up communicates with aspiration pump is connected air vent rapidly, produces a malleation, and tube core is blown off from absorbing needle automatically.Tube core is measured observation platform mainly by mechanical adjustment mechanism, absorbing needle and gas circuit, photodetector and detector seat, insulation spacer and wiring board, formations such as base.Mechanical adjustment mechanism can make absorbing needle do 360 ° of rotations and upper and lower displacement together with tube core around axle, also can make absorbing needle and tube core self planar do 360 ° of rotations to observe two cleaved cavity surfaces of device.Absorbing needle self is as LD, or the top electrode of LED, is connected to wiring board by pivoted arm, rotating shaft, and insulate by insulator foot.The top of detector seat or base is equipped with bottom electrode, connects power supply (direct current, signal sources such as pulse sawtooth waveforms) between upper/lower electrode, so that LD or LED measuring current to be provided.For surface-emitting type diode (SLED), photodetector can place the below (below of bottom electrode) of absorbing needle, opposite side light-emitting diode (ELED) or laser, then photodetector being placed with the absorbing needle is on the cylinder position of axle, aims at LD or LED light beam.Then can detect the Output optical power of LD or LED, light wave shape viewing microscope is used for the observation of cleaved cavity surface, by the rotation of right-angle prism and absorbing needle, can observe the situation of cleavage surface on all directions easily.
Use the utility model, can observe electrology characteristic and the electro-optical characteristic of cleaved cavity surface and measurement LD or LED easily.Be equipped with photomicrographic device and recording instrument, can note cleaved cavity surface and electrology characteristic, electro-optical characteristic.Can reduce the mechanical damage of tube core widely.Can effectively check the tube core quality, reject defective tube core, alleviate the pressure of back technology, increase work efficiency, save the human and material resources of back technology.Also be convenient to tube core is carried out automated sorting.
Fig. 1 is a schematic diagram of the present utility model.(1) is aspiration pump among the figure, and (2) are ventilating pump valves, and (3) are that tube core is measured observation platform, and (4) are viewing microscopes, and (5) are right-angle prisms, and (6) are (ventilation) pipes of bleeding.
Fig. 2 and Fig. 3 are respectively the embodiment of the measurement observation platform of opposite light-emitting diode (SLED) and limit light-emitting diode (ELED) or laser diode (LD).Its main difference is the installation site of photodetector.The photodetector of the measurement observation platform of SLED is installed in the below of absorbing needle, and the photodetector that ELED and LD measure observation platform is installed on the cylinder position of absorbing needle for axle.(11) are tube core direction adjustment disks among the figure, make tube core (absorbing needle) around self axle rotation, (12) be hold-down nut, (13) be suction pipe, (14) thus be to regulate the adjusting nut that the rocking arm height is regulated the tube core upper-lower position, (15) be dowel, (16) be packing ring, (17), (18) be steady pin positioning cap up and down, (19) be rocking arm, (20) be sealing screw, (21) be the rocking arm dog screw, (22) spring, (23) location pellet shot from a slingshot, (24) spring cover cap, (25) collar, (26) spring base, (27) spring, (28) die pad, the double as bottom electrode, (29) rocker arm shaft is screwed on base, and the double as conductive path is used, (30) base is used nylon, bakelite, insulating material such as polymethyl methacrylate or plastics is made, and the double as electric insulation is used, (31) detector seat, (32) photodetector, (33) absorbing needle, double as top electrode, (34) wiring board, (35) wireway (gas circuit), (36) bottom plate, (37) spring, (38) dead ring, (39) electrode packing ring, (40) bottom electrode locating cover, it links to each other with bottom electrode (28), double electrode path effect, (41) bottom electrode positioning cap, electrode in (42) bottom electrode base, (43) rotatable detector, (44) electrode tip holder in the detector, (45) rotatable detector external electrode, (46) detector external electrode seat, (47) insulating washer, by (42), (43), (44), (45), (46), (47) etc. the rotatable detector seat of forming makes detector can do 360 ° rotation around tube core, can observe the electro-optical characteristic on limit light-emitting diode or the laser diode chip different directions so easily, (48) electrode spring, its effect will make tube core avoid the external force damage and make good electric path.
The measurement observation platform of Fig. 2 and Fig. 3 certainly combines, and respectively by adorning a photodetector, a promptly available covering device both can be measured SLED, can measure the chip of observing ELED and LD again in the bottom of base plate diverse location and side.
The electrode of luminous tube among Fig. 2 and Fig. 3 (or laser tube) and photodetector all is directly connected on the wiring board (34) by screw.
Fig. 4 is the structure chart of the utility model ventilating pump valve (2).(61) are the pressing bibcocks among the figure, and (62) are valve bodies, and (63) are springs, and (64) are valve seats, and (65) are the wireways that links to each other with aspiration pump, and (66) are to connect the wireway that tube core is measured observation platform, and (67) are the air vents that connects atmosphere.
When using the utility model, start aspiration pump, rotation rocking arm (19) and turn adjusting nut (14), the absorbing needle pipe is aimed at tube core, tube core is sucked up, rotate rocking arm to measuring observation platform die pad top-be the top of bottom electrode (28), turn direction adjustment disk (11), can be at the cleaved cavity surface of microscopically by right-angle prism observation tube core, the rotation direction adjustment disk can be observed another cleaved cavity surface for (11) 180 ° then.Then regulate adjusting nut (14), tube core is pressed on the die pad (28), and (to ELED or LD, top electrode can just can be born to make top electrode with the absorbing needle pipe, and top electrode is generally ten utmost points concerning SLED, and lightening hole is aimed at slit and light beam is mapped on the photodetector.) die pad is as bottom electrode, at this moment, can be to the tube core biasing, measure electrology characteristic and electro-optical characteristic, when test finishes, mention tube core by adjusting nut (14), rotate rocking arm (19) to tube core box top, the pressing ventilating pump valve promptly has an air-flow that tube core is blown in the tube core box from the sheet pin.
The utility model is to the quality monitoring of LD and LED tube core, and the research to the various factors that influences LD and LED quality provides effective instrument.
Claims (2)
1, the measurement finder of a kind of semiconductor laser or light-emitting diode, it measures observation platform by aspiration pump, ventilating pump valve, tube core and viewing microscope constitutes, and the tube core that is characterised in that of the present utility model is measured the photodetector that observation platform has detection of optical power; Have to comprise and make tube core make the rocking arm of 360 ° of rotations in the plane, make tube core self make the direction adjustment disk of 360 ° of rotations and regulate the mechanical adjustment mechanism that adjusting nut constituted of rocking arm and die height, and the air guide pipeline that can find time or ventilate is arranged around axle; Ventilating pump valve has wireway that links to each other with the measurement observation platform with aspiration pump and the air vent that links to each other with atmosphere; The absorbing needle double as top electrode of tube core observation platform, the insulator foot that has insulating material to make between top electrode and bottom electrode.
2, the measurement finder of semiconductor laser according to claim 1 or light-emitting diode, the material that it is characterized in that insulator foot wherein is nylon, bakelite, polymethyl methacrylate or plastics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 87201004 CN87201004U (en) | 1987-02-05 | 1987-02-05 | Transistor chip measurement and observation unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 87201004 CN87201004U (en) | 1987-02-05 | 1987-02-05 | Transistor chip measurement and observation unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN87201004U true CN87201004U (en) | 1988-05-18 |
Family
ID=4817356
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 87201004 Withdrawn CN87201004U (en) | 1987-02-05 | 1987-02-05 | Transistor chip measurement and observation unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN87201004U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104020327A (en) * | 2014-06-19 | 2014-09-03 | 中国电子科技集团公司第五十八研究所 | Probe station for chip total dose irradiation test |
-
1987
- 1987-02-05 CN CN 87201004 patent/CN87201004U/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104020327A (en) * | 2014-06-19 | 2014-09-03 | 中国电子科技集团公司第五十八研究所 | Probe station for chip total dose irradiation test |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |