CN207572715U - Semiconductor laser fast axis collimation equipment - Google Patents
Semiconductor laser fast axis collimation equipment Download PDFInfo
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- CN207572715U CN207572715U CN201721381216.2U CN201721381216U CN207572715U CN 207572715 U CN207572715 U CN 207572715U CN 201721381216 U CN201721381216 U CN 201721381216U CN 207572715 U CN207572715 U CN 207572715U
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Abstract
For adjusting the position of fast axle lens and angle, fast axis collimation is carried out with the light beam that noise spectra of semiconductor lasers luminescence chip is sent out for a kind of semiconductor laser fast axis collimation equipment.The semiconductor laser fast axis collimation equipment includes pedestal, the chip bearing frame on pedestal, the adjustment frame on pedestal, the lens holder on adjustment frame, the image collection assembly on pedestal and the optical sensing module on pedestal；Image collection assembly is used to identify the position of fast axle lens by image detection, and adjustment frame is used to adjust position and the angle of lens holder, laser beam is made to form hot spot on optical sensing module.The detection and analysis that the semiconductor laser fast axis collimation equipment of the utility model is analyzed by image detection component or optical sensing module, control the action of adjustment frame, so as to fulfill the automation of semiconductor laser fast axis collimation, artificial frequent operation is avoided, provides the production efficiency of semiconductor laser.
Description
Technical field
The utility model is related to laser regulation technology, more particularly to a kind of semiconductor laser fast axis collimation equipment.
Background technology
The light beam that luminescence chip in semiconductor laser is sent out is the elliptical beam of diverging, parallel and light-emitting surface side
To for slow axis, the angle of divergence is about 10 °, is vertically fast axis direction with the direction of light-emitting surface, the angle of divergence can reach 40 °.Due to laser
The angle of divergence of the device luminescence chip in fast axle is larger, for the luminous mass of semiconductor laser is effectively ensured, it is necessary to utilize fast axle
The light beam that lens send out luminescence chip carries out fast axis collimation, and existing fast axis collimation process is generally completed by human hand, caused
The problems such as the accuracy of collimation is not high, efficiency is low.
Utility model content
Based on this, the utility model provides a kind of semiconductor laser fast axis collimation process of can completing automatically and efficiently
Semiconductor laser fast axis collimation equipment.
In order to realize the purpose of this utility model, the utility model uses following technical scheme：
A kind of semiconductor laser fast axis collimation equipment, chip bearing frame, peace including pedestal, on the pedestal
Adjustment frame on the pedestal, the lens holder on the adjustment frame, the image on the pedestal are adopted
Collect component and the optical sensing module on the pedestal；The adjustment frame is in the chip bearing frame and the light
Between detection components.
The semiconductor laser fast axis collimation equipment of the utility model passes through image detection component or optical sensing module point
The detection and analysis of analysis control the action of adjustment frame, so as to fulfill the automation of semiconductor laser fast axis collimation, avoid artificial
Frequent operation, provide the production efficiency of semiconductor laser.
The adjustment frame includes the Y-axis feeder assembly, X-axis feeder assembly, the Y that are stacked in one of the embodiments,
Axis tuning component and X-axis tuning component.
The adjustment frame includes Y-axis feeder assembly, the X-axis on Y-axis feeder assembly in one of the embodiments,
Feeder assembly, the Y-axis tuning component on X-axis feeder assembly, the X-axis tuning component on Y-axis tuning component.
The adjustment frame further includes Z axis feeder assembly and mounted on the Z axis feeding group in one of the embodiments,
Z axis tuning component on part；The Z axis feeder assembly is mounted on the Y-axis feeder assembly, the X-axis feeder assembly, the Y
It is in axis tuning component, the X-axis tuning component on one on most.
The Y-axis feeder assembly includes the parallel seat of Y-axis being mounted on the bottom plate, peace in one of the embodiments,
The first regulation motor mounted in the parallel seat side of the Y-axis and the Y-axis sliding panel on the parallel seat of the Y-axis；Described
The output shaft of one regulation motor extends to the inside of the parallel seat of the Y-axis, the Y-axis sliding panel and first regulation motor
Export axis connection.
The Y-axis tuning component includes Y-axis concave surface seat, mounted on Y axis concave surface seat in one of the embodiments,
The third regulation motor of side and the Y-axis D-shaped plate on the seat of the Y-axis concave surface；The upper surface of the Y-axis concave surface seat is in
Concave arc shape, the lower surface of the Y-axis D-shaped plate are corresponding with the upper surface of Y-axis concave surface seat；The output shaft of the third regulation motor prolongs
It extends in the seat of Y-axis concave surface.
The Z axis feeder assembly includes the first pinboard, is connect with first pinboard in one of the embodiments,
The parallel seat of Z axis, the 5th regulation motor on the parallel seat of the Z axis, the Z axis mounted on the parallel seat side of the Z axis
Sliding panel and the second pinboard being connect with the Z axis sliding panel.
The Z axis tuning component includes Z axis rotation seat, mounted on the Z axis rotation seat in one of the embodiments,
Rotating platform in 6th regulation motor of side and the installation Z axis rotation seat；The rotating platform is rotatably connected on described
On Z axis rotating seat, the output shaft of the 6th regulation motor is extended in the Z axis rotating seat.
The lens holder includes the backing plate being mounted on the rotating platform, is mounted in one of the embodiments,
Actuation plate on the backing plate and hold mirror holder mounted on the actuation plate side；The mirror holder that holds is equipped with side channel.
Described image acquisition component includes support shaft, the in the support shaft in one of the embodiments,
One interface member, the first support shank being connect with first interface member, the lateral image detection being connect with first support shank
Device, the second interface member in the support shaft, the second support shank being connect with second interface member and described second
The vertical visual detector of support shank connection；The lower end of the support shaft is fixed on pedestal；The chip bearing frame includes vertical
Column and the tabletting block on the column；The upper surface of the column is equipped with holding tank.
Description of the drawings
Fig. 1 is the stereoscopic schematic diagram of the semiconductor laser fast axis collimation equipment of a preferred embodiment of the utility model；
Fig. 2 is enlarged drawing at the circle A of semiconductor laser fast axis collimation equipment shown in FIG. 1；
Fig. 3 is the side view of semiconductor laser fast axis collimation equipment shown in FIG. 1；
Fig. 4 is the stereoscopic schematic diagram of adjustment frame shown in FIG. 1；
Fig. 5 is stereoscopic schematic diagram of the adjustment frame shown in FIG. 1 in another angle；
Fig. 6 is enlarged drawing at the circle A of adjustment frame shown in fig. 5；
Fig. 7 is the side view of adjustment frame shown in Fig. 4；
Fig. 8 is the front view of adjustment frame shown in Fig. 4.
Specific embodiment
For the ease of understanding the utility model, the utility model will be described more fully below.But this practicality
It is novel to realize in many different forms, however it is not limited to embodiment described herein.On the contrary, provide these implementations
The purpose of example is to make the more thorough and comprehensive of the understanding to the disclosure of the utility model.
Unless otherwise defined, all of technologies and scientific terms used here by the article is led with belonging to the technology of the utility model
The normally understood meaning of technical staff in domain is identical.It is only in the term used in the description of the utility model herein
The purpose of description specific embodiment, it is not intended that in limitation the utility model.
It please refers to Fig.1 to Fig. 8, is the semiconductor laser fast axis collimation equipment of one better embodiment of the utility model
100, for adjusting the position of fast axle lens and angle, carried out with the light beam that noise spectra of semiconductor lasers luminescence chip 200 is sent out
Fast axis collimation.The semiconductor laser fast axis collimation equipment 100 includes pedestal 10, the chip bearing frame on pedestal 10
20th, the adjustment frame 30 on pedestal 10, the lens holder 40 on adjustment frame 30, the figure on pedestal 10
Optical sensing module 60 as acquisition component 50 and on pedestal 10；Lens holder 40 is used to clamp fast axle lens, image
Acquisition component 50 is used to identify the position of fast axle lens by image detection, and adjustment frame 30 is used to adjust the position of lens holder 40
And angle, adjustment frame 30 make laser beam on optical sensing module 60 by the position and angle of coarse adjustment fast axle lens first
Hot spot is formed, is then fed back according to the signal of optical sensing module 60, adjustment frame 30 finely tunes position and the angle of fast axle lens, from
And it realizes laser luminescence chip 200 and sends out the collimation of light beam.
It please refers to Fig.1 to Fig.3, chip bearing frame 20 includes column 21 and the tabletting block 22 on column 21；Column
21 upper surface is equipped with holding tank, and holding tank is corresponding with laser luminescence chip 200, to accommodate laser luminescence chip 200.
Also referring to Fig. 4 to Fig. 8, adjustment frame 30 include bottom plate 31, the Y-axis feeder assembly 32 on bottom plate 31,
X-axis feeder assembly 33 on Y-axis feeder assembly 32, the Y-axis tuning component 34 on X-axis feeder assembly 33, peace
X-axis tuning component 35 on Y-axis tuning component 34, the Z axis feeder assembly 36 and and Z axis being connect with X-axis tuning component 35
The Z axis tuning component 37 that feeder assembly 36 connects.
Y-axis feeder assembly 32 includes the parallel seat 321 of Y-axis being mounted on bottom plate 31, mounted on parallel 321 side of seat of Y-axis
The first regulation motor 322 and the Y-axis sliding panel 323 on the parallel seat 321 of Y-axis；The output of first regulation motor 322
Axis extends to the inside of the parallel seat 321 of Y-axis, and the output axis connection of 323 and first regulation motor 322 of Y-axis sliding panel makes first
The output shaft of regulation motor 322 can drive Y axis sliding panel 323 to move linearly with respect to the parallel seat 321 of Y-axis.
X-axis feeder assembly 33 includes the parallel seat 331 of X-axis being mounted on Y-axis sliding panel 323, mounted on the parallel seat of X-axis
Second regulation motor 332 of 331 sides and the X-axis sliding panel 333 on the parallel seat 331 of X-axis；Second regulation motor 332
Output shaft extend to the inside of the parallel seat 331 of X-axis, the output axis connection of 333 and second regulation motor 332 of X-axis sliding panel makes
The output shaft of second regulation motor 332 can drive X-axis sliding panel 333 to move linearly with respect to the parallel seat 331 of X-axis.
Y-axis tuning component 34 includes the Y-axis concave surface being mounted on X-axis sliding panel 333 seat 341, mounted on Y-axis concave surface seat
The third regulation motor 342 of 341 sides and the Y-axis D-shaped plate 343 on Y-axis concave surface seat 341；Y-axis concave surface seat 341
Upper surface is in concave arc shape, and the lower surface of Y-axis D-shaped plate 343 is corresponding with the upper surface of Y axis concave surface seat 341；Third regulation motor 342
Output shaft extend to Y-axis concave surface seat 341 in, Y-axis D-shaped plate 343 can be driven along Y by the output shaft of third regulation motor 342
The upper surface slide of axis concave surface seat 341, and in sliding process, 343 upper surface of Y-axis D-shaped plate is with respect to Y-axis concave surface seat 341
The angle of bottom surface generates adjustment；Further, for avoid Y-axis tuning component 34 because angle adjustment it is excessive due to it is impaired, Y-axis concave surface seat
341 side is equipped with Y-axis angular transducer 344, and the side of Y-axis D-shaped plate 343 is equipped with Y-axis angle limit catch 346, Y-axis angle
Sensor 344 is corresponding with Y-axis angle limit catch 346；Further, for Y-axis angular transducer 344, Y-axis angle limit
Catch 346 provides protection, and the side of Y-axis concave surface seat 341 is equipped with protective shell 345 in Y-axis, and the side of Y-axis D-shaped plate 343 is equipped with Y
The outer protective shell 347 of axis.
X-axis tuning component 35 includes the X-axis concave surface being mounted on Y-axis D-shaped plate 343 seat 351, mounted on X-axis concave surface seat
4th regulation motor 352 of 351 sides and the X-axis D-shaped plate 353 on X-axis concave surface seat 351；X-axis concave surface seat 351
Upper surface is in concave arc shape, and the lower surface of X-axis D-shaped plate 353 is corresponding with the upper surface of X axis concave surface seat 351；4th regulation motor 352
Output shaft extend to X-axis concave surface seat 351 in, X-axis D-shaped plate 353 can be driven along X by the output shaft of the 4th regulation motor 352
The upper surface slide of axis concave surface seat 351, and in sliding process, 353 upper surface of X-axis D-shaped plate is with respect to X-axis concave surface seat 351
The angle of bottom surface generates adjustment；Further, for avoid X-axis tuning component 35 because angle adjustment it is excessive due to it is impaired, X-axis concave surface seat
351 side is equipped with X-axis angular transducer 354, and the side of X-axis D-shaped plate 353 is equipped with X-axis angle limit catch 356, X-axis angle
Sensor 354 is corresponding with X-axis angle limit catch 356；Further, for X-axis angular transducer 354, X-axis angle limit
Catch 356 provides protection, and the side of X-axis concave surface seat 351 is equipped with protective shell 355 in X-axis, and the side of X-axis D-shaped plate 353 is equipped with X
The outer protective shell 357 of axis.
Z axis feeder assembly 36 includes the first pinboard 361, seat 362 parallel with the Z axis of the first pinboard 361 connection, installation
The 5th regulation motor 363 on the parallel seat 362 of Z axis, Z axis sliding panel 364 and and Z mounted on parallel 362 side of seat of Z axis
The second pinboard 365 that axis sliding panel 364 connects；First pinboard 361 includes the first transverse part 366 and from the first transverse part
366 vertically extending first vertical portions 367；The parallel seat 362 of Z axis is fixed on the inside of the first vertical portion 367；5th adjusts electricity
The output shaft of machine 363 extends to the inside of the parallel seat 362 of Z axis, and the output shaft of 364 and the 5th regulation motor 363 of Z axis sliding panel connects
It connects, makes the output shaft of the 5th regulation motor 363 Z axis sliding panel 364 can be driven to move linearly with respect to the parallel seat 362 of Z axis；Second turn
Fishplate bar 365 includes the second vertical portion 368 and from 368 vertically extending second transverse part 369 of the second vertical portion；Second vertical portion
368 outside is fixed on Z axis sliding panel 364.
Z axis tuning component 37 includes Z axis rotation seat 371, the 6th regulation motor mounted on 371 side of Z axis rotation seat
372 and installation Z axis rotation seat 371 on rotating platform 373；Rotating platform 373 is rotatably connected on Z axis rotating seat, and the 6th adjusts
The output shaft of section motor 372 is extended in Z axis rotating seat, and the output shaft of the 6th regulation motor 372 can drive 373 phase of rotating platform
Z axis rotation seat 371 is rotated.
First transverse part 366 of the first pinboard 361 is fixed on the upper surface of X-axis D-shaped plate 353；Z axis rotation seat 371 is pacified
On the second transverse part 369 of the second pinboard 365.
Lens holder 40 include be mounted on rotating platform 373 on backing plate 41, the actuation plate 42 on backing plate 41 and
Mirror holder 43 is held mounted on 42 side of actuation plate；Mirror holder 43 is held equipped with side channel 44, to accommodate fast axle lens.
It please refers to Fig.1 and Fig. 3, image collection assembly 50 includes support shaft 51, the first handing-over in support shaft 51
Part 52, the first support shank 53 being connect with the first interface member 52, the lateral visual detector 54 being connect with the first support shank 53, peace
The second interface member 55 in support shaft 51, the second support shank 56 being connect with the second interface member 55, with the second support shank 56
The vertical visual detector 57 of connection.
Optical sensing module 60 includes montant 61 and the laser beam analyzer 62 on montant 61；In this embodiment, it is
Facilitate the horizontal position for adjusting laser beam analyzer 62, optical sensing module 60 further includes slide 63, and slide 63 is equipped with sleeve
64, slide 63 is mounted on pedestal 10, and the lower end of montant 61 is threaded through in sleeve 64；Sleeve 64 is threaded through by adjusting montant 61
In depth, the height of 62 opposite base 10 of adjusting light beam analyzer.In another embodiment, the lower end of montant 61 is direct
It is fixed on pedestal 10.
In the present embodiment, lateral visual detector 54 is horizontally disposed, and with the upper end surface of chip bearing frame 20 in same
On one horizontal plane；Lateral visual detector 54 is directed at the side of the upper surface of chip carrier 20, makes lateral visual detector 54
Location drawing picture of the fast axle lens on Z axis and X-axis can be obtained；Vertical visual detector 57 is located at the top of chip bearing frame 20,
Make vertical visual detector 57 that can obtain location drawing picture of the fast axle lens on Y axis and X-axis.
The bottom plate 31 of adjustment frame 30 is mounted on pedestal 10；Adjustment frame 30 is in chip bearing frame 20 and optical sensing module
Between 60.
When semiconductor laser fast axis collimation equipment 100 is run, semiconductor laser luminescence chip 200 is placed into column 21
On holding tank in, tabletting block 22 fixes semiconductor laser luminescence chip 200, and fast axle lens are placed into lens holder 40
In side channel 44；Then, semiconductor laser luminescence chip 200 is powered and generates laser beam, and image collection assembly 50 is according to side
The image information obtained to visual detector 54, vertical visual detector 57 determines the position of fast axle lens, adjustment frame 30
According to the position for the fast axle lens that image collection assembly 50 determines, fast axle lens position and the first successive step of angle are carried out, makes partly to lead
The light beam of body laser luminescence chip 200 forms hot spot on laser beam analyzer 62.Specifically, pass through X-axis feeder assembly 33, Y
Axis feeder assembly 32 can be adjusted fast axle lens in the position of same level, by Z axis feeder assembly 36, can adjust fast
The height of axis lens opposite base 10；By the adjustment of X-axis tuning component 35, Y-axis tuning component 34 and Z axis tuning component 37,
The orientation angle of the focus line of adjustable fast axle lens makes the light beam of semiconductor laser luminescence chip 200 to beam analysis
Instrument 62 is assembled.After the hot spot that 200 light beam of semiconductor laser luminescence chip is formed is obtained on laser beam analyzer 62, light beam point
Analyzer 62 analyzes the parameter of hot spot and generates analysis result, and adjustment frame 30 is accurately adjusted according to the analysis result of laser beam analyzer 62
The position of fast axle lens makes the light beam that semiconductor laser luminescence chip 200 is sent out obtain best collimating effect.
In the present embodiment, the location information of fast axle lens is obtained by image collection assembly, adjustment frame is according to fast axle lens
Location information adjust fast axle lens position and angle, optical sensing module analysis facula information, make adjustment frame saturating to fast axle
After mirror is adjusted again, good collimating effect can be obtained, the adjusting repeatedly to fast axle lens is avoided, improves semiconductor
The production efficiency of laser.
Embodiment described above only expresses the several embodiments of the utility model, and description is more specific and detailed,
But therefore it can not be interpreted as the limitation to utility model patent range.It should be pointed out that the common skill for this field
For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to
The scope of protection of the utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.
Claims (10)
- A kind of 1. semiconductor laser fast axis collimation equipment, which is characterized in that the chip including pedestal, on the pedestal Carrier, the adjustment frame on the pedestal, the lens holder on the adjustment frame, on the pedestal Image collection assembly and the optical sensing module on the pedestal；The adjustment frame is in the chip bearing frame Between the optical sensing module.
- 2. semiconductor laser fast axis collimation equipment according to claim 1, which is characterized in that the adjustment frame includes layer Y-axis feeder assembly, X-axis feeder assembly, Y-axis tuning component and the X-axis tuning component of folded setting.
- 3. semiconductor laser fast axis collimation equipment according to claim 1, which is characterized in that the adjustment frame includes Y Axis feeder assembly, the X-axis feeder assembly on Y-axis feeder assembly, the Y-axis tuning component on X-axis feeder assembly, X-axis tuning component on Y-axis tuning component.
- 4. the semiconductor laser fast axis collimation equipment according to Claims 2 or 3, which is characterized in that the adjustment frame is also Z axis tuning component including Z axis feeder assembly and on the Z axis feeder assembly；The Z axis feeder assembly is mounted on In most upper in the Y-axis feeder assembly, the X-axis feeder assembly, the Y-axis tuning component, the X-axis tuning component One on.
- 5. semiconductor laser fast axis collimation equipment according to claim 4, which is characterized in that the adjustment frame further includes Bottom plate；The Y-axis feeder assembly is mounted on the bottom plate；The Y-axis feeder assembly includes the Y-axis being mounted on the bottom plate Parallel seat, the Y-axis mounted on the first regulation motor of the parallel seat side of the Y-axis and on the parallel seat of the Y-axis are slided Plate；The output shaft of first regulation motor extends to the inside of the parallel seat of the Y-axis, the Y-axis sliding panel and described first The output axis connection of regulation motor.
- 6. semiconductor laser fast axis collimation equipment according to claim 4, which is characterized in that the Y-axis tuning component Including Y-axis concave surface seat, mounted on the third regulation motor of Y-axis concave surface seat side and on the seat of the Y-axis concave surface Y-axis D-shaped plate；The upper surface of the Y-axis concave surface seat is in concave arc shape, the lower surface of the Y-axis D-shaped plate and the upper table of Y-axis concave surface seat Face corresponds to；The output shaft of the third regulation motor is extended in the seat of Y-axis concave surface.
- 7. semiconductor laser fast axis collimation equipment according to claim 4, which is characterized in that the Z axis feeder assembly It is adjusted including the first pinboard, with the parallel seat of Z axis of first pinboard connection, the on the parallel seat of the Z axis the 5th Section motor, the Z axis sliding panel mounted on the parallel seat side of the Z axis and the second pinboard for being connect with the Z axis sliding panel.
- 8. semiconductor laser fast axis collimation equipment according to claim 7, which is characterized in that the Z axis tuning component The rotation in the 6th regulation motor and the installation Z axis rotation seat including Z axis rotation seat, mounted on the Z axis rotation seat side Turn platform；The rotating platform is rotatably connected on the Z axis rotating seat, and the output shaft of the 6th regulation motor extends to institute It states in Z axis rotating seat.
- 9. semiconductor laser fast axis collimation equipment according to claim 8, which is characterized in that the lens holder includes Backing plate on the rotating platform is attracted plate and mounted on the actuation plate side on the backing plate Hold mirror holder；The mirror holder that holds is equipped with side channel.
- 10. semiconductor laser fast axis collimation equipment according to claim 1, which is characterized in that described image acquisition group Part include support shaft, the first interface member in the support shaft, the first support shank being connect with first interface member, The lateral visual detector being connect with first support shank, the second interface member in the support shaft, with described the Second support shank of two interface members connection, the vertical visual detector being connect with second support shank；Under the support shaft End is fixed on pedestal；The chip bearing frame includes column and the tabletting block on the column；The column it is upper Surface is equipped with holding tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721381216.2U CN207572715U (en) | 2017-10-23 | 2017-10-23 | Semiconductor laser fast axis collimation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721381216.2U CN207572715U (en) | 2017-10-23 | 2017-10-23 | Semiconductor laser fast axis collimation equipment |
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| Publication Number | Publication Date |
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| CN207572715U true CN207572715U (en) | 2018-07-03 |
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| CN201721381216.2U Active CN207572715U (en) | 2017-10-23 | 2017-10-23 | Semiconductor laser fast axis collimation equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107706736A (en) * | 2017-10-23 | 2018-02-16 | 深圳市杰普特光电股份有限公司 | Semiconductor laser fast axis collimation equipment |
-
2017
- 2017-10-23 CN CN201721381216.2U patent/CN207572715U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107706736A (en) * | 2017-10-23 | 2018-02-16 | 深圳市杰普特光电股份有限公司 | Semiconductor laser fast axis collimation equipment |
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