CN104007014A - Micro component comprehensive mechanical property test device - Google Patents
Micro component comprehensive mechanical property test device Download PDFInfo
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- CN104007014A CN104007014A CN201410271006.2A CN201410271006A CN104007014A CN 104007014 A CN104007014 A CN 104007014A CN 201410271006 A CN201410271006 A CN 201410271006A CN 104007014 A CN104007014 A CN 104007014A
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Abstract
The invention discloses a micro component comprehensive mechanical property test device, and relates to a micro component mechanical property test device. By means of the device, measurement of mechanical property static parameters of micrometer-scale components and exploration of the fatigue characteristic can be achieved. An X-Y two-dimensional movement platform is arranged on a marble vibration isolation platform, and a Y-direction movement platform of the X-Y two-dimensional movement platform is arranged on an X-direction movement platform. A micro tensile test system is installed on the Y-direction movement platform. A dynamic test system is installed on the front side face of a marble beam. The two ends of the marble beam are supported through marble stand columns respectively. The lower ends of the two marble stand columns are fixed to the upper surface of the marble vibration isolation platform. An in-situ observation system is installed on a vertical high-precision electric movement platform of the dynamic test system. The micro component comprehensive mechanical property test device is used for the micro component comprehensive mechanical property test.
Description
Technical field
The present invention relates to a kind of micro-member mechanics performance testing device.
Background technology
The micro-member of inertial navigation system high elastic modulus alloy loads fracture failure very easily in test on ground, in inertial sensor the characteristic dimension of micro-member roughly in sub-micron in the scope of millimeter.Arrive after micrometer/nanometer yardstick when trickle, due to size effect, all can there is very large change in physical property and the degree affected by environment etc. thereof of micro-construction material itself, significant variation also can occur the relativeness of its mechanical characteristic and suffered body force and surface force etc.Under macroscopic conditions, the mechanical property parameters of material can not meet the designing requirement of MEMS system architecture far away, and the technical matterss such as a series of of being brought by small test specimen make traditional method of testing and device also no longer applicable.
In recent years, Chinese scholars is more and more paid attention to the research of micro-construction material mechanical property, has proposed some new method of testing and proving installations.But the data dispersiveness that the whole bag of tricks records is larger, even most basic elastic modulus is the consistent generally acknowledged result of neither one all.In micro-member designs with while carrying out fail-safe analysis, due to the basic data lacking about micro-construction material mechanical property, also do not set up at present an effective design criteria, cause yield rate low, poor reliability, this has seriously hindered the development of MEMS.
The Mechanics Performance Testing of micro-member is divided into static test and the large class of dynamic test two.Static characteristics test is to measure the characterisitic parameter of micro-member in stationary state, and conventional method comprises uniaxial tension method, Using Nanoindentation, eardrum method, micro-beam deflection method and substrate curvature method etc.Wherein, the most frequently used method is uniaxial tension method, and micro-stretching experiment is to measure micron order elasticity modulus of materials, Poisson ratio, yield strength and the most direct method of fracture strength, and the data of stretching experiment easily explain, test result is more reliable than crooked experiment.Dynamic characteristic test is to adopt exciting bank to apply specific incentives signal to device, and device is moved, and in device motion process, the dynamic perfromance of measuring the device being kept in motion changes.Dynamic perfromance has determined the key property of micro-member, can reflect the key issues such as the material properties of micro-member, three-dimensional micromotion situation, reliability, Mechanics of Machinery parameter, component failure pattern and failure mechanism.
But because specimen size is small, no matter be in static test or dynamic test, a series of technical barriers such as the measurement of the centering of micro-member, clamping, Micro-displacement Driving and small load and micrometric displacement make traditional method of testing and install also no longer applicable.At present also ununified standard of proving installation, and all more complicated of most of proving installation structure, required instrument is all very expensive, and test data dispersiveness is very large.How to reduce to greatest extent test error, ensure to obtain accurately consistent test result, improve testing efficiency, make test data can be processed rapidly and feed back monitoring or directly apply to production practices, these problems are that the difficulty urgently breaking through is also challenge to scientific research personnel.
Summary of the invention
The object of the invention is to shortcoming and deficiency for current micro-member mechanical property testing system, a kind of comprehensive mechanical property test macro for the micro-member of high elastic modulus alloy is provided, realizes the mechanical property static parameter measurement of micro-meter scale member and probing into of fatigue properties.
The present invention addresses the above problem the technical scheme of taking:
Micro-member comprehensive mechanical property proving installation of the present invention, it comprises in-situ observation system, micro-stretching test system, Aided Machine system and dynamic test system, described mechanical assistance system comprises X-Y two-dimension moving platform, marble vibration-isolating platform, marble crossbeam and two marble columns, described X-Y two-dimension moving platform is arranged on above marble vibration-isolating platform, and the Y-direction motion platform of X-Y two-dimension moving platform is arranged on X above motion platform, described micro-stretching test system is arranged on above Y-direction motion platform, described dynamic test system is arranged on marble crossbeam leading flank, the two ends of described marble crossbeam are respectively by the marble upright supports described in, and the lower end of two marble columns is fixed on above marble vibration-isolating platform, described in-situ observation system is arranged on the vertical high precision electromigration platform of dynamic test system.
The present invention with respect to the beneficial effect of prior art is: the present invention combines dynamic test and static test, high-cycle fatigue exciting by dynamic test system to micro-member, the control program of employing semiclosed loop realizes diamond penetrator and accurately controls in the position of vertical direction, has improved greatly the accuracy of centering.By micro-stretching test system, micro-member is carried out to original position stretching test, in position under recording geometry auxiliary, the centering of realizing sound objective table, micro-member accommodates reliable; Adopt high-precision power sensor device (precision 5mN), realize the accurate measurement (precision can reach 5mN) of load; Adopt high precision grating to detect the micrometric displacement of test specimen, resolution high (resolution is 5nm), is convenient to Installation and Debugging.This device is not only realized the measurement of static parameter, as the measurement of elastic modulus, yield strength, fracture strength, and can also realize to the probing into of high-cycle fatigue characteristic, as fatigue strength.
Brief description of the drawings
Fig. 1 is the test philosophy schematic diagram of micro-member comprehensive mechanical property proving installation of the present invention, in figure ↓ arrow shown in direction be alternate load direction, shown in ← → arrow, direction is tensile load direction;
Fig. 2 is the overall wiring layout of micro-member comprehensive mechanical property proving installation of the present invention;
Fig. 3 is the micro-tensioning system wiring layout in Fig. 1;
Fig. 4 is the accurate driver element wiring layout of the level of the micro-tensioning system in Fig. 3;
Fig. 5 is the A place partial enlarged drawing of Fig. 3;
Fig. 6 is the vertical accurate driver element wiring layout of the dynamic test system in Fig. 1;
Fig. 7 is the B place partial enlarged drawing of Fig. 1.
The component names and the label that in above-mentioned figure, relate to are respectively:
In-situ observation system 1, CCD camera 1-1, fixture 1-2, zoom Zoom lens 1-3, micro-stretching test system 2, the accurate driver element 2-1 of level, the first flexure hinge mechanism 2-1-1, the first pretension screw 2-1-2, the first piezoelectric ceramics 2-1-3, the first pad 2-1-4, steel ball 2-1-5, the first mounting hole 2-1-6, Micro-force sensor 2-2, horizontal linear grating measuring device 2-3, grating ruler reading head erecting frame 2-3-1, read head 2-3-2, grating scale 2-3-3, horizontal high precision electromigration platform 2-4, left article carrying platform 2-4-1, right article carrying platform 2-4-2, screw pair 2-4-3, L shaped base 2-4-4, supporting seat 2-4-5, stepper motor 2-4-6, left slider 2-4-7, right slide block 2-4-8, guide rail 2-4-9, horizontal objective table 2-5, moving objective table 2-5-1, quiet objective table 2-5-2, power sensor fixed block 2-6, fixture 2-7, Aided Machine system 3, Y-direction motion platform 3-1, X is to motion platform 3-2, marble vibration-isolating platform 3-3, marble column 3-4, marble crossbeam 3-5, dynamic test system 4, vertically high precision electromigration platform 4-1, vertical accurate driver element 4-2, the second pretension screw 4-2-1, the second flexure hinge mechanism 4-2-2, the second mounting hole 4-2-3, vertical straight line grating measurement mechanism 4-2-4, diamond penetrator 4-2-5, the second piezoelectric ceramics 4-2-6, the second pad 4-2-7, micro-member 5.
Embodiment
Embodiment one: as shown in Fig. 2, Fig. 7, micro-member comprehensive mechanical property proving installation, it comprises in-situ observation system 1, micro-stretching test system 2, Aided Machine system 3 and dynamic test system 4, described mechanical assistance system 3 comprises X-Y two-dimension moving platform, marble vibration-isolating platform 3-3, marble crossbeam 3-5 and two marble column 3-4, described X-Y two-dimension moving platform is arranged on above marble vibration-isolating platform 3-3, and the Y-direction motion platform 3-1 of X-Y two-dimension moving platform is arranged on X above motion platform 3-2, described micro-stretching test system 2 is arranged on above Y-direction motion platform 3-1, described dynamic test system 4 is arranged on marble crossbeam 3-5 leading flank, the two ends of described marble crossbeam 3-5 are respectively supported by the marble column 3-4 described in, and the lower end of two marble column 3-4 is fixed on above marble vibration-isolating platform 3-3, described in-situ observation system 1 is arranged on the vertical high precision electromigration platform 4-1 of dynamic test system 4.
Embodiment two: as Fig. 2, shown in Fig. 3 and Fig. 5, micro-member comprehensive mechanical property proving installation described in embodiment one, described micro-stretching test system 2 comprises the accurate driver element 2-1 of level, Micro-force sensor 2-2, horizontal linear grating measuring device 2-3, horizontal high precision electromigration platform 2-4, horizontal objective table 2-5, power sensor fixed block 2-6, two fixture 2-7, described horizontal high precision electromigration platform 2-4 comprises left article carrying platform 2-4-1, right article carrying platform 2-4-2, screw pair 2-4-3, L shaped base 2-4-4, supporting seat 2-4-5, stepper motor 2-4-6, four left slider 2-4-7, four right slide block 2-4-8, two guide rail 2-4-9, described horizontal objective table 2-5 comprises moving objective table 2-5-1 and quiet objective table 2-5-2, described horizontal linear grating measuring device 2-3 comprises grating ruler reading head erecting frame 2-3-1, read head 2-3-2 and grating scale 2-3-3,
The long slab level of described L shaped base 2-4-4 and along X to setting, two described guide rail 2-4-9 are parallel to the long limit of L shaped base 2-4-4 and are fixed on the long slab of L shaped base 2-4-4, described left article carrying platform 2-4-1 and right article carrying platform 2-4-2 left and right are set up in parallel, the accurate driver element 2-1 of described level is fixed on right article carrying platform 2-4-2 upper surface, described moving objective table 2-5-1 is fixedly connected with the left surface of the accurate driver element 2-1 of level, described quiet objective table 2-5-2 and corresponding setting adjacent with moving objective table 2-5-1, the upper surface correspondence position of quiet objective table 2-5-2 and moving objective table 2-5-1 is processed with respectively a locating slot for fixing micro-member 5, utilize minuteness milling technology, process locating slot, described quiet objective table 2-5-2, Micro-force sensor 2-2 and power sensor fixed block 2-6 are successively set on the upper surface of left article carrying platform 2-4-1 from right to left, and quiet objective table 2-5-2 is fixedly connected with Micro-force sensor 2-2, Micro-force sensor 2-2 is fixedly connected with power sensor fixed block 2-6, power sensor fixed block 2-6 is fixedly connected with the upper surface of left article carrying platform 2-4-1, described grating scale 2-3-3 is arranged on the leading flank or trailing flank of the accurate driver element 2-1 of level, upper and the grating scale 2-3-3 of right article carrying platform 2-4-2 is positioned on the side of homonymy and is fixed with read head erecting frame 13, described number of degrees head 15 is oppositely arranged and is fixed on read head erecting frame 13 with grating scale 2-3-3, the lower surface of described right article carrying platform 2-4-2 is fixedly connected with the nut of screw pair 2-4-3, leading screw one end and the supporting seat 2-4-5 of screw pair 2-4-3 are rotationally connected, the leading screw other end of screw pair 2-4-3 and the short slab of L shaped base 2-4-4 are rotationally connected, supporting seat 2-4-5 is fixedly connected with the long slab of L shaped base 2-4-4, the lower surface of right article carrying platform 2-4-2 is fixedly connected with four right slide block 2-4-8 of rectangular setting, four right slide block 2-4-8 and two guide rail 2-4-9 are slidably connected, lead, described stepper motor 2-4-6 is fixed on the short slab of L shaped base 2-4-4, stepper motor 2-4-6 drives screw pair 2-4-3 motion, the lower surface of left article carrying platform 2-4-1 is fixedly connected with four left slider 2-4-7 of rectangular setting, four left slider 2-4-7 are arranged on two guide rail 2-4-9, be arranged on a fixture 2-7 who is fixedly connected with guide rail 2-4-9 is installed between two left slider 2-4-7 on same guide rail 2-4-9, in work, the relative guide rail 2-4-9 of left article carrying platform 2-4-1 maintains static, and right article carrying platform 2-4-2 is relative, and guide rail 2-4-9 moves.Described Micro-force sensor 2-2 is commercial sensor, and Micro-force sensor 2-2 model is GSO-1000-T.The accurate driver element 2-1 of level not only can realize the driving of simple extension displacement, and can realize the fatigue loading of the certain frequency of micro-member.
Embodiment three: as Fig. 3, shown in Fig. 4, micro-member comprehensive mechanical property proving installation described in embodiment two, the accurate driver element 2-1 of described level comprises the first flexure hinge mechanism 2-1-1, the first pretension screw 2-1-2, the first piezoelectric ceramics 2-1-3, two the first pad 2-1-4, two steel ball 2-1-5, three the first mounting hole 2-1-6, the first described flexure hinge mechanism 2-1-1 middle part is provided with the first groove, the first described piezoelectric ceramics 2-1-3 is arranged in the first groove of the first flexure hinge mechanism 2-1-1, the first piezoelectric ceramics 2-1-3 two ends are respectively by steel ball 2-1-5, the first pad 2-1-4 contacts with the first groove inwall of the first flexure hinge mechanism 2-1-1, the first flexure hinge mechanism 2-1-1 is provided with three the first mounting hole 2-1-6 for being fixedly connected with right article carrying platform 2-4-2, the right side of the first flexure hinge mechanism 2-1-1 is processed with the first threaded hole, the first described pretension screw 2-1-2 is threaded with the first threaded hole of the first flexure hinge mechanism 2-1-1, the first pretension screw 2-1-2 is by the first pad 2-1-4 and steel ball 2-1-5 pre-pressing the first piezoelectric ceramics 2-1-3.
Embodiment four: as shown in Figure 2, micro-member comprehensive mechanical property proving installation described in embodiment two, described dynamic test system 4 comprises vertical high precision electromigration platform 4-1 and vertical accurate driver element 4-2, and described vertical accurate driver element 4-2 is arranged on the objective table of vertical high precision electromigration platform 4-1.Vertically high precision electromigration platform 4-1 is outsourcing part, and model is the Chinese light KSA050-13-X that stands upright.
Embodiment five: as shown in Fig. 2, Fig. 3 and Fig. 6, micro-member comprehensive mechanical property proving installation described in embodiment four, described vertical accurate driver element 4-2 comprises the second pretension screw 4-2-1, the second flexure hinge mechanism 4-2-2, vertical straight line grating measurement mechanism 4-2-4, diamond penetrator 4-2-5, the second piezoelectric ceramics 4-2-6, two the second pad 4-2-7, multiple the second mounting hole 4-2-3;
The second described flexure hinge mechanism 4-2-2 middle part is provided with the second groove, the second described piezoelectric ceramics 4-2-6 is arranged in the second groove of the second flexure hinge mechanism 4-2-2, a second pad 4-2-7 of the each installation in the second piezoelectric ceramics 4-2-6 two ends, the upper surface of the second flexure hinge mechanism 4-2-2 is processed with the second threaded hole, the second described pretension screw 4-2-1 is threaded with the second threaded hole of the second flexure hinge mechanism 4-2-2, the second piezoelectric ceramics 4-2-6 carries out pretension by the second pretension screw 4-2-1, described vertical straight line grating measurement mechanism 4-2-4 is arranged on the front of the second flexure hinge mechanism 4-2-2, the lower surface of the second flexure hinge mechanism 4-2-2 is provided with diamond penetrator 4-2-5, the head end of diamond penetrator 4-2-5 vertically and down arranges, when work, the head end of diamond penetrator 4-2-5 contacts with described micro-member 5 upper surfaces, the second described flexure hinge mechanism 4-2-2 is provided with multiple the second mounting hole 4-2-3 for being fixedly connected with the objective table of described vertical high precision electromigration platform 4-1, in the second mounting hole 4-2-3, penetrate screw, be fixedly connected with the objective table of vertical high precision electromigration platform 4-1 by screw.The centering of diamond penetrator 4-2-5 and in-situ observation are that in-situ observation system 1 is realized by the routing motion of the vertical high precision electromigration platform 4-1 of X-Y two-dimension moving platform and dynamic test system 4.Vertical straight line grating measurement mechanism 4-2-4 is identical with horizontal linear grating measuring device 2-3 structure, and the installation site of the each member in vertical straight line grating measurement mechanism 4-2-4 is determined as required, is prior art.
Embodiment six: as shown in Figure 2, micro-member comprehensive mechanical property proving installation described in embodiment one, described in-situ observation system 1 comprises CCD camera 1-1, fixture 1-2 and zoom Zoom lens 1-3, described CCD camera 1-1 and zoom Zoom lens 1-3 from top to bottom arrange and link together, and CCD camera 1-1 and zoom Zoom lens 1-3 entirety are vertically arranged on the objective table of vertical high precision electromigration platform 4-1 of dynamic test system 4 by fixture 1-2.
Lower mask body illustrates in conjunction with Fig. 1 ~ Fig. 7: this whole set of micro-member comprehensive mechanical property proving installation is placed on marble vibration-isolating platform, laboratory environment cleaning, constant temperature.First opening control general supply, piezoelectric ceramics control power supply preheating 30 minutes.Assisting of recycling image capturing system, adjusts the position of dynamic and static objective table, and its mark center is overlapped.Then,, stick with glue in the locating slot of dynamic and static objective table micro-member taking-up of minuteness milling processes with tweezers.
Before dynamic test, demarcate the position of exemplar (micro-member) center and CCD viewing field of camera center groove, move by X-Y two-dimension moving platform, diamond penetrator is overlapped in X-Y direction with exemplar center, the vertical high precision electromigration platform in the vertical direction of recycling dynamic test system is carried out the feeding of large stroke, in the time that diamond penetrator approaches target location, utilize piezoelectric ceramics to carry out micro-feeding.When Micro-force sensor has voltage signal when output, illustrate that diamond penetrator rigidly connects to contact exemplar upper surface, now stop immediately micro-feeding, vertical direction feeding completes.By testing software, drive power supply for piezoelectric ceramics is controlled, vertical accurate driver element drives diamond penetrator exemplar to be carried out to the excitation of high frequency load, and in test process, force signal and electric signal detect in real time by Micro-force sensor and horizontal linear grating measuring device respectively.When fatigue and cyclic reaches predetermined cycle, dynamic test completes.Again by the vertical high precision electromigration platform of X-Y two-dimension moving platform and dynamic test system, by CCD viewing field of camera center groove and exemplar center superposition, under the assisting of recording geometry, carry out micro-stretching test in position.The accurate driver element of level that utilizes piezoelectric ceramic actuator control micro-stretching test system, stretches to exemplar, until exemplar is broken.Record test data also carries out data processing.Finally infiltrate with acetone soln the exemplar being pulled off, after 5 minutes, with tweezers, exemplar is taken off.Test process finishes.
Micro-member comprehensive mechanical property proving installation of the present invention directly carries out micro-stretching test to micro-member, measures the static mechanical performance of test specimen.
Claims (6)
1. a micro-member comprehensive mechanical property proving installation, is characterized in that: it comprises in-situ observation system (1), micro-stretching test system (2), Aided Machine system (3) and dynamic test system (4), described mechanical assistance system (3) comprises X-Y two-dimension moving platform, marble vibration-isolating platform (3-3), marble crossbeam (3-5) and two marble columns (3-4), described X-Y two-dimension moving platform is arranged on marble vibration-isolating platform (3-3) above, and the Y-direction motion platform (3-1) of X-Y two-dimension moving platform is arranged on X above motion platform (3-2), described micro-stretching test system (2) is arranged on Y-direction motion platform (3-1) above, described dynamic test system (4) is arranged on marble crossbeam (3-5) leading flank, the two ends of described marble crossbeam (3-5) are respectively supported by the marble column (3-4) described in, and the lower end of two marble columns (3-4) is fixed on marble vibration-isolating platform (3-3) above, described in-situ observation system (1) is arranged on the vertical high precision electromigration platform (4-1) of dynamic test system (4).
2. micro-member comprehensive mechanical property proving installation according to claim 1, is characterized in that: described micro-stretching test system (2) comprises the accurate driver element of level (2-1), Micro-force sensor (2-2), horizontal linear grating measuring device (2-3), horizontal high precision electromigration platform (2-4), horizontal objective table (2-5), power sensor fixed block (2-6), two fixtures (2-7), described horizontal high precision electromigration platform (2-4) comprises left article carrying platform (2-4-1), right article carrying platform (2-4-2), screw pair (2-4-3), L shaped base (2-4-4), supporting seat (2-4-5), stepper motor (2-4-6), four left sliders (2-4-7), four right slide blocks (2-4-8), two guide rails (2-4-9), described horizontal objective table (2-5) comprises moving objective table (2-5-1) and quiet objective table (2-5-2), described horizontal linear grating measuring device (2-3) comprises grating ruler reading head erecting frame (2-3-1), read head (2-3-2) and grating scale (2-3-3), the long slab level of described L shaped base (2-4-4) and along X to setting, described two guide rails (2-4-9) are parallel to the long limit of L shaped base (2-4-4) and are fixed on the long slab of L shaped base (2-4-4), described left article carrying platform (2-4-1) and right article carrying platform (2-4-2) left and right are set up in parallel, the described accurate driver element of level (2-1) is fixed on right article carrying platform (2-4-2) upper surface, described moving objective table (2-5-1) is fixedly connected with the left surface of the accurate driver element of level (2-1), and the corresponding setting adjacent with moving objective table (2-5-1) of described quiet objective table (2-5-2), quiet objective table (2-5-2) is processed with respectively a locating slot for fixing micro-member (5) with the upper surface correspondence position of moving objective table (2-5-1), described quiet objective table (2-5-2), Micro-force sensor (2-2) and power sensor fixed block (2-6) are successively set on the upper surface of left article carrying platform (2-4-1) from right to left, and quiet objective table (2-5-2) is fixedly connected with Micro-force sensor (2-2), Micro-force sensor (2-2) is fixedly connected with power sensor fixed block (2-6), power sensor fixed block (2-6) is fixedly connected with the upper surface of left article carrying platform (2-4-1), described grating scale (2-3-3) is arranged on the leading flank or trailing flank of the accurate driver element of level (2-1), upper and the grating scale (2-3-3) of right article carrying platform (2-4-2) is positioned on the side of homonymy and is fixed with read head erecting frame (13), described number of degrees head (15) is oppositely arranged and is fixed on read head erecting frame (13) with grating scale (2-3-3), the lower surface of described right article carrying platform (2-4-2) is fixedly connected with the nut of screw pair (2-4-3), leading screw one end of screw pair (2-4-3) and supporting seat (2-4-5) are rotationally connected, the short slab of the leading screw other end of screw pair (2-4-3) and L shaped base (2-4-4) is rotationally connected, supporting seat (2-4-5) is fixedly connected with the long slab of L shaped base (2-4-4), the lower surface of right article carrying platform (2-4-2) is fixedly connected with four right slide blocks (2-4-8) of rectangular setting, four right slide blocks (2-4-8) are slidably connected with two guide rails (2-4-9), described stepper motor (2-4-6) is fixed on the short slab of L shaped base (2-4-4), stepper motor (2-4-6) drives screw pair (2-4-3) motion, the lower surface of left article carrying platform (2-4-1) is fixedly connected with four left sliders (2-4-7) of rectangular setting, four left sliders (2-4-7) are arranged on two guide rails (2-4-9), be arranged on a fixture (2-7) being fixedly connected with guide rail (2-4-9) is installed between two left sliders (2-4-7) on same guide rail (2-4-9), in work, the relative guide rail (2-4-9) of left article carrying platform (2-4-1) maintains static, and right article carrying platform (2-4-2) relatively guide rail (2-4-9) moves.
3. micro-member comprehensive mechanical property proving installation according to claim 2, it is characterized in that: the described accurate driver element of level (2-1) comprises the first flexure hinge mechanism (2-1-1), the first pretension screw (2-1-2), the first piezoelectric ceramics (2-1-3), two the first pads (2-1-4), two steel balls (2-1-5), three the first mounting holes (2-1-6), described the first flexure hinge mechanism (2-1-1) middle part is provided with the first groove, described the first piezoelectric ceramics (2-1-3) is arranged in the first groove of the first flexure hinge mechanism (2-1-1), the first piezoelectric ceramics (2-1-3) two ends are respectively by steel ball (2-1-5), the first pad (2-1-4) contacts with the first groove inwall of the first flexure hinge mechanism (2-1-1), the first flexure hinge mechanism (2-1-1) is provided with three the first mounting holes (2-1-6) for being fixedly connected with right article carrying platform (2-4-2), the right side of the first flexure hinge mechanism (2-1-1) is processed with the first threaded hole, the first described pretension screw (2-1-2) is threaded with the first threaded hole of the first flexure hinge mechanism (2-1-1), the first pretension screw (2-1-2) is by the first pad (2-1-4) and steel ball (2-1-5) pre-pressing the first piezoelectric ceramics (2-1-3).
4. micro-member comprehensive mechanical property proving installation according to claim 2, it is characterized in that: described dynamic test system (4) comprises vertical high precision electromigration platform (4-1) and vertical accurate driver element (4-2), described vertical accurate driver element (4-2) is arranged on the objective table of vertical high precision electromigration platform (4-1).
5. micro-member comprehensive mechanical property proving installation according to claim 4, is characterized in that: described vertical accurate driver element (4-2) comprises the second pretension screw (4-2-1), the second flexure hinge mechanism (4-2-2), vertical straight line grating measurement mechanism (4-2-4), diamond penetrator (4-2-5), the second piezoelectric ceramics (4-2-6), two the second pads (4-2-7), multiple the second mounting hole (4-2-3);
Described the second flexure hinge mechanism (4-2-2) middle part is provided with the second groove, described the second piezoelectric ceramics (4-2-6) is arranged in the second groove of the second flexure hinge mechanism (4-2-2), second pad (4-2-7) is respectively installed at the second piezoelectric ceramics (4-2-6) two ends, the upper surface of the second flexure hinge mechanism (4-2-2) is processed with the second threaded hole, the second described pretension screw (4-2-1) is threaded with the second threaded hole of the second flexure hinge mechanism (4-2-2), the second piezoelectric ceramics (4-2-6) carries out pretension by the second pretension screw (4-2-1), described vertical straight line grating measurement mechanism (4-2-4) is arranged on the front of the second flexure hinge mechanism (4-2-2), the lower surface of the second flexure hinge mechanism (4-2-2) is provided with diamond penetrator (4-2-5), the head end of diamond penetrator (4-2-5) vertically and down arranges, when work, the head end of diamond penetrator (4-2-5) contacts with described micro-member (5) upper surface, described the second flexure hinge mechanism (4-2-2) is provided with multiple the second mounting holes (4-2-3) for being fixedly connected with the objective table of described vertical high precision electromigration platform (4-1).
6. micro-member comprehensive mechanical property proving installation according to claim 1, it is characterized in that: described in-situ observation system (1) comprises CCD camera (1-1), fixture (1-2) and zoom Zoom lens (1-3), described CCD camera (1-1) from top to bottom arranges and links together with zoom Zoom lens (1-3), and CCD camera (1-1) is vertically arranged on the objective table of vertical high precision electromigration platform (4-1) of dynamic test system (4) by fixture (1-2) with zoom Zoom lens (1-3) entirety.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| CN104960673B (en) * | 2015-06-08 | 2017-06-13 | 上海交通大学 | Suitable for the multi-functional expansible test platform of bionic flapping-wing microreactor technology |
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| CN106248509B (en) * | 2016-08-30 | 2019-01-08 | 吉林大学 | Resonant sleeper fatigue bending machine and its application |
| CN110261081A (en) * | 2019-06-06 | 2019-09-20 | 华南理工大学 | A kind of submissive hinge flexibility and running accuracy measuring device based on micro- vision system |
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