CN104007014B - Micro structures comprehensive mechanical property proving installation - Google Patents
Micro structures comprehensive mechanical property proving installation Download PDFInfo
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- CN104007014B CN104007014B CN201410271006.2A CN201410271006A CN104007014B CN 104007014 B CN104007014 B CN 104007014B CN 201410271006 A CN201410271006 A CN 201410271006A CN 104007014 B CN104007014 B CN 104007014B
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Abstract
Micro structures comprehensive mechanical property proving installation, relates to a kind of micro structures Mechanics Performance Testing device.The present invention can realize the mechanical property static parameter measurement of micro-meter scale component and probing into of fatigue properties.X-Y two-dimension moving platform is arranged on above marble vibration-isolating platform, and the Y-direction motion platform of X-Y two-dimension moving platform is arranged on X above motion platform, described micro-stretching test system is arranged on above Y-direction motion platform, described dynamic test system is arranged on marble crossbeam leading flank, the two ends of described marble crossbeam are respectively by the marble upright supports described in, and the lower end of two marble columns is fixed on above marble vibration-isolating platform, described in-situ observation system is arranged in the vertical high precision electro moving stage of dynamic test system.The present invention is used for the test of micro structures comprehensive mechanical property.
Description
Technical field
The present invention relates to a kind of micro structures Mechanics Performance Testing device.
Background technology
Inertial navigation system high elastic modulus alloy micro structures loads very easily fracture failure in test on ground, and in inertial sensor, the characteristic dimension of micro structures is roughly in the scope of sub-micron to millimeter.When trickle after micrometer/nanometer yardstick, due to size effect, all can there is very large change in physical property and the degree etc. affected by environment thereof of micro structures material itself, the relativeness etc. of its mechanical characteristic and suffered body force and surface force also significant change can occur.Under macroscopic conditions, the mechanical property parameters of material can not meet the designing requirement of MEMS system architecture far away, and the technical matterss such as a series of brought by small test specimen make traditional method of testing and device also no longer applicable.
In recent years, Chinese scholars more and more payes attention to the research of micro structures material mechanical performance, proposes some new method of testing and proving installations.But the data scatter that various method records is comparatively large, even most basic elastic modulus is the neither one result of unanimously generally acknowledging all.In micro structures design with when carrying out fail-safe analysis, owing to lacking the basic data about micro structures material mechanical performance, also do not set up an effective design criteria at present, cause yield rate low, poor reliability, this seriously inhibits the development of MEMS.
The Mechanics Performance Testing of micro structures is divided into static test and the large class of dynamic test two.The characterisitic parameter of micro structures in stationary state is measured in static characteristics test, and conventional method comprises uniaxial stretching method, Using Nanoindentation, eardrum method, micro-beam deflection method and substrate curvature method etc.Wherein, the most frequently used method is uniaxial stretching method, and micro-stretching experiment measures micron order elasticity modulus of materials, Poisson ratio, yield strength and the most direct method of fracture strength, and the data of stretching experiment are easily explained, test result is more reliable than crooked experiment.Dynamic characteristic test is then adopt exciting bank to apply specific incentives signal to device, and device is moved, and in device motion process, measures the dynamic perfromance change of the device be kept in motion.Dynamic perfromance determines the key property of micro structures, can reflect the key issues such as the material properties of micro structures, three-dimensional micromotion situation, reliability, Mechanics of Machinery parameter, component failure pattern and failure mechanism.
But because specimen size is small, no matter be in static test or dynamic test, a series of technical barrier such as measurement of the centering of micro structures, clamping, Micro-displacement Driving and small load and micrometric displacement makes traditional method of testing and device also no longer applicable.The standard that current proving installation is also ununified, and most of proving installation structure all more complicated, required instrument is all very expensive, and test data dispersiveness is very large.How to reduce test error to greatest extent, ensure to obtain accurately consistent test result, improve testing efficiency, test data is processed rapidly and carries out feedback monitoring or directly apply to production practices, these problems are also challenge concerning being the difficulty urgently broken through scientific research personnel.
Summary of the invention
The object of the invention is to the shortcoming for current micro structures mechanical property testing system and deficiency, a kind of comprehensive mechanical property test macro for high elastic modulus alloy micro structures is provided, realizes the mechanical property static parameter measurement of micro-meter scale component and probing into of fatigue properties.
The present invention's technical scheme taked that solves the problem is:
Micro structures comprehensive mechanical property proving installation of the present invention, it comprises in-situ observation system, micro-stretching test system, Aided Machine system and dynamic test system, described Aided Machine system comprises X-Y two-dimension moving platform, marble vibration-isolating platform, marble crossbeam and two marble columns, described X-Y two-dimension moving platform is arranged on above marble vibration-isolating platform, and the Y-direction motion platform of X-Y two-dimension moving platform is arranged on X above motion platform, described micro-stretching test system is arranged on above Y-direction motion platform, described dynamic test system is arranged on marble crossbeam leading flank, the two ends of described marble crossbeam are respectively by the marble upright supports described in, and the lower end of two marble columns is fixed on above marble vibration-isolating platform, described in-situ observation system is arranged in the vertical high precision electro moving stage of dynamic test system.
The present invention relative to the beneficial effect of prior art is: dynamic test combines with static test by the present invention, by the high-cycle fatigue exciting of dynamic test system to micro structures, adopt the control program of semiclosed loop to realize diamond penetrator accurately to control in the position of vertical direction, greatly improve the accuracy of centering.By micro-stretching test system, original position stretching test is carried out to micro structures, recording geometry in position auxiliary under, realize the centering of sound objective table, micro structures accommodates reliable; Adopt high-precision force snesor device (precision 5mN), realize the accurate measurement (precision can reach 5mN) of load; Adopt the micrometric displacement of high precision Grating examinations test specimen, resolution high (resolution is 5nm), is convenient to Installation and Debugging.This device not only realizes the measurement of static parameter, as the measurement of elastic modulus, yield strength, fracture strength, and can also realize probing into high-cycle fatigue characteristic, as fatigue strength.
Accompanying drawing explanation
Fig. 1 is the test philosophy schematic diagram of micro structures comprehensive mechanical property proving installation of the present invention, in figure ↓ arrow shown in direction be alternate load direction, shown in ← → arrow, direction is tensile load direction;
Fig. 2 is the overall wiring layout of micro structures comprehensive mechanical property proving installation of the present invention;
Fig. 3 is the micro-tensioning system wiring layout in Fig. 1;
Fig. 4 is the horizontal precision actuation unit wiring layout of the micro-tensioning system in Fig. 3;
Fig. 5 is the A place partial enlarged drawing of Fig. 3;
Fig. 6 is the vertical precision actuation unit wiring layout of the dynamic test system in Fig. 1;
Fig. 7 is the B place partial enlarged drawing of Fig. 1.
The component names related in above-mentioned figure and label are respectively:
In-situ observation system 1, CCD camera 1-1, fixture 1-2, zoom Zoom lens 1-3, micro-stretching test system 2, horizontal precision actuation unit 2-1, first flexure hinge mechanism 2-1-1, first pre-loading screw 2-1-2, first piezoelectric ceramics 2-1-3, first pad 2-1-4, steel ball 2-1-5, first mounting hole 2-1-6, Micro-force sensor 2-2, horizontal linear grating measuring device 2-3, grating ruler reading head erecting frame 2-3-1, read head 2-3-2, grating scale 2-3-3, horizontal high precision electro moving stage 2-4, left article carrying platform 2-4-1, right article carrying platform 2-4-2, screw pair 2-4-3, L shape base 2-4-4, supporting seat 2-4-5, stepper motor 2-4-6, left slider 2-4-7, right slide block 2-4-8, guide rail 2-4-9, horizontal objective table 2-5, dynamic objective table 2-5-1, quiet objective table 2-5-2, force snesor fixed block 2-6, fixture 2-7, Aided Machine system 3, Y-direction motion platform 3-1, X is to motion platform 3-2, marble vibration-isolating platform 3-3, marble column 3-4, marble crossbeam 3-5, dynamic test system 4, vertical high precision electro moving stage 4-1, vertical precision actuation unit 4-2, second pre-loading screw 4-2-1, second flexure hinge mechanism 4-2-2, second mounting hole 4-2-3, vertical straight line grating measurement mechanism 4-2-4, diamond penetrator 4-2-5, second piezoelectric ceramics 4-2-6, second pad 4-2-7, micro structures 5.
Embodiment
Embodiment one: as shown in Fig. 2, Fig. 7, micro structures comprehensive mechanical property proving installation, it comprises in-situ observation system 1, micro-stretching test system 2, Aided Machine system 3 and dynamic test system 4, described Aided Machine system 3 comprises X-Y two-dimension moving platform, marble vibration-isolating platform 3-3, marble crossbeam 3-5 and two marble column 3-4, described X-Y two-dimension moving platform is arranged on above marble vibration-isolating platform 3-3, and the Y-direction motion platform 3-1 of X-Y two-dimension moving platform is arranged on X above motion platform 3-2, described micro-stretching test system 2 is arranged on above Y-direction motion platform 3-1, described dynamic test system 4 is arranged on marble crossbeam 3-5 leading flank, the two ends of described marble crossbeam 3-5 are respectively supported by the marble column 3-4 described in, and the lower end of two marble column 3-4 is fixed on above marble vibration-isolating platform 3-3, described in-situ observation system 1 is arranged on the vertical high precision electro moving stage 4-1 of dynamic test system 4.
Embodiment two: as Fig. 2, shown in Fig. 3 and Fig. 5, micro structures comprehensive mechanical property proving installation described in embodiment one, described micro-stretching test system 2 comprises horizontal precision actuation unit 2-1, Micro-force sensor 2-2, horizontal linear grating measuring device 2-3, horizontal high precision electro moving stage 2-4, horizontal objective table 2-5, force snesor fixed block 2-6, two fixture 2-7, described horizontal high precision electro moving stage 2-4 comprises left article carrying platform 2-4-1, right article carrying platform 2-4-2, screw pair 2-4-3, L shape base 2-4-4, supporting seat 2-4-5, stepper motor 2-4-6, four left slider 2-4-7, four right slide block 2-4-8, two guide rail 2-4-9, described horizontal objective table 2-5 comprises dynamic objective table 2-5-1 and quiet objective table 2-5-2, described horizontal linear grating measuring device 2-3 comprises grating ruler reading head erecting frame 2-3-1, read head 2-3-2 and grating scale 2-3-3,
The long slab level of described L shape base 2-4-4 and along X to setting, two described guide rail 2-4-9 are parallel to the long limit of L shape base 2-4-4 and are fixed on the long slab of L shape base 2-4-4, described left article carrying platform 2-4-1 and right article carrying platform about 2-4-2 is set up in parallel, described horizontal precision actuation unit 2-1 is fixed on right article carrying platform 2-4-2 upper surface, described dynamic objective table 2-5-1 is fixedly connected with the left surface of horizontal precision actuation unit 2-1, described quiet objective table 2-5-2 and corresponding setting adjacent with dynamic objective table 2-5-1, the upper surface correspondence position of quiet objective table 2-5-2 and dynamic objective table 2-5-1 is processed with one respectively for the locating slot of fixing micro structures 5, utilize minuteness milling technology, process locating slot, described quiet objective table 2-5-2, Micro-force sensor 2-2 and force snesor fixed block 2-6 is successively set on the upper surface of left article carrying platform 2-4-1 from right to left, and quiet objective table 2-5-2 is fixedly connected with Micro-force sensor 2-2, Micro-force sensor 2-2 is fixedly connected with force snesor fixed block 2-6, force snesor fixed block 2-6 is fixedly connected with the upper surface of left article carrying platform 2-4-1, on the leading flank that described grating scale 2-3-3 is arranged on horizontal precision actuation unit 2-1 or trailing flank, the side that right article carrying platform 2-4-2 is positioned at homonymy with grating scale 2-3-3 is fixed with grating ruler reading head erecting frame 2-3-1, described read head 2-3-2 and grating scale 2-3-3 is oppositely arranged and is fixed on grating ruler reading head erecting frame 2-3-1, the lower surface of described right article carrying platform 2-4-2 is fixedly connected with the nut of screw pair 2-4-3, leading screw one end and the supporting seat 2-4-5 of screw pair 2-4-3 are rotationally connected, the leading screw other end of screw pair 2-4-3 and the short slab of L shape base 2-4-4 are rotationally connected, supporting seat 2-4-5 is fixedly connected with the long slab of L shape base 2-4-4, the lower surface of right article carrying platform 2-4-2 is fixedly connected with four of rectangular setting right slide block 2-4-8, four right slide block 2-4-8 and two guide rail 2-4-9 are slidably connected, lead, described stepper motor 2-4-6 is fixed on the short slab of L shape base 2-4-4, stepper motor 2-4-6 drives screw pair 2-4-3 motion, the lower surface of left article carrying platform 2-4-1 is fixedly connected with four left slider 2-4-7 of rectangular setting, four left slider 2-4-7 are arranged on two guide rail 2-4-9, be arranged between two left slider 2-4-7 on same guide rail 2-4-9 and a fixture 2-7 be fixedly connected with guide rail 2-4-9 is installed, in work, left article carrying platform 2-4-1 opposite rail 2-4-9 maintains static, and right article carrying platform 2-4-2 opposite rail 2-4-9 moves.Described Micro-force sensor 2-2 is commercial sensor, and Micro-force sensor 2-2 model is GSO-1000-T.Horizontal precision actuation unit 2-1 not only can realize the driving of simple extension displacement, and can realize the fatigue loading of certain frequency of micro structures.
Embodiment three: as Fig. 3, shown in Fig. 4, micro structures comprehensive mechanical property proving installation described in embodiment two, described horizontal precision actuation unit 2-1 comprises the first flexure hinge mechanism 2-1-1, first pre-loading screw 2-1-2, first piezoelectric ceramics 2-1-3, two the first pad 2-1-4, two steel ball 2-1-5, three the first mounting hole 2-1-6, the first groove is provided with in the middle part of the first described flexure hinge mechanism 2-1-1, the first described piezoelectric ceramics 2-1-3 is arranged in first groove of the first flexure hinge mechanism 2-1-1, first piezoelectric ceramics 2-1-3 two ends are respectively by steel ball 2-1-5, first pad 2-1-4 contacts with first groove inner wall of the first flexure hinge mechanism 2-1-1, first flexure hinge mechanism 2-1-1 is provided with three the first mounting hole 2-1-6 for being fixedly connected with right article carrying platform 2-4-2, the right side of the first flexure hinge mechanism 2-1-1 is processed with the first threaded hole, the first described pre-loading screw 2-1-2 is threaded with first threaded hole of the first flexure hinge mechanism 2-1-1, first pre-loading screw 2-1-2 is by the first pad 2-1-4 and steel ball 2-1-5 pre-pressing first piezoelectric ceramics 2-1-3.
Embodiment four: as shown in Figure 2, micro structures comprehensive mechanical property proving installation described in embodiment two, described dynamic test system 4 comprises vertical high precision electro moving stage 4-1 and vertical precision actuation unit 4-2, and described vertical precision actuation unit 4-2 is arranged on the objective table of vertical high precision electro moving stage 4-1.Vertical high precision electro moving stage 4-1 is outsourcing part, and model is the Chinese light KSA050-13-X that stands upright.
Embodiment five: as shown in Fig. 2, Fig. 3 and Fig. 6, micro structures comprehensive mechanical property proving installation described in embodiment four, described vertical precision actuation unit 4-2 comprises the second pre-loading screw 4-2-1, the second flexure hinge mechanism 4-2-2, vertical straight line grating measurement mechanism 4-2-4, diamond penetrator 4-2-5, the second piezoelectric ceramics 4-2-6, two the second pad 4-2-7, multiple second mounting hole 4-2-3, the second groove is provided with in the middle part of the second described flexure hinge mechanism 4-2-2, the second described piezoelectric ceramics 4-2-6 is arranged in second groove of the second flexure hinge mechanism 4-2-2, a second pad 4-2-7 is respectively installed at second piezoelectric ceramics 4-2-6 two ends, the upper surface of the second flexure hinge mechanism 4-2-2 is processed with the second threaded hole, the second described pre-loading screw 4-2-1 is threaded with second threaded hole of the second flexure hinge mechanism 4-2-2, second piezoelectric ceramics 4-2-6 carries out pretension by the second pre-loading screw 4-2-1, described vertical straight line grating measurement mechanism 4-2-4 is arranged on the front of the second flexure hinge mechanism 4-2-2, the lower surface of the second flexure hinge mechanism 4-2-2 is provided with diamond penetrator 4-2-5, the head end of diamond penetrator 4-2-5 is vertically also arranged down, during work, the head end of diamond penetrator 4-2-5 contacts with described micro structures 5 upper surface, the second described flexure hinge mechanism 4-2-2 is provided with the multiple second mounting hole 4-2-3 for being fixedly connected with the objective table of described vertical high precision electro moving stage 4-1, penetrate screw in second mounting hole 4-2-3, be fixedly connected with by the objective table of screw with vertical high precision electro moving stage 4-1.To be in-situ observation system 1 realized by the routing motion of the vertical high precision electro moving stage 4-1 of X-Y two-dimension moving platform and dynamic test system 4 for the centering of diamond penetrator 4-2-5 and in-situ observation.Vertical straight line grating measurement mechanism 4-2-4 is identical with horizontal linear grating measuring device 2-3 structure, and the installation site of each component in vertical straight line grating measurement mechanism 4-2-4 is determined as required, is prior art.
Embodiment six: as shown in Figure 2, micro structures comprehensive mechanical property proving installation described in embodiment one, described in-situ observation system 1 comprises CCD camera 1-1, fixture 1-2 and zoom Zoom lens 1-3, described CCD camera 1-1 and zoom Zoom lens 1-3 from top to bottom arranges and links together, and CCD camera 1-1 and zoom Zoom lens 1-3 entirety is vertically arranged on the objective table of vertical high precision electro moving stage 4-1 of dynamic test system 4 by fixture 1-2.
Lower mask body composition graphs 1 ~ Fig. 7 illustrates: this whole set of micro structures comprehensive mechanical property proving installation is placed on marble vibration-isolating platform, and laboratory environment is clean, constant temperature.First opening control general supply, piezoelectric ceramics controls power supply preheating 30 minutes.Assisting of recycling image capturing system, adjusts the position of dynamic and static objective table, its mark center is overlapped.Then, with tweezers, the micro structures of minuteness milling processes is taken out, stick with glue in the locating slot of dynamic and static objective table.
Before dynamic test, demarcate the position of exemplar (micro structures) center and CCD camera field of view center groove, moved by X-Y two-dimension moving platform, diamond penetrator is overlapped in X-Y direction with exemplar center, the vertical high precision electro moving stage in the vertical direction of recycling dynamic test system performs the feeding of Long Distances, when diamond penetrator is close to target location, piezoelectric ceramics is utilized to carry out Fine Feed.When Micro-force sensor has voltage signal to export, illustrate that diamond penetrator has just touched exemplar upper surface, now stop Fine Feed immediately, vertical direction feeding completes.By testing software, drive power supply for piezoelectric ceramics is controlled, vertical precision actuation unit drives diamond penetrator exemplar to be carried out to the excitation of high frequency load, and in test process, force signal and electric signal detect in real time respectively by Micro-force sensor and horizontal linear grating measuring device.Time fatigue and cyclic reaches predetermined cycle, dynamic test completes.Again by the vertical high precision electro moving stage of X-Y two-dimension moving platform and dynamic test system, by CCD camera field of view center groove and exemplar center superposition, carry out micro-stretching test under the assisting of recording geometry in position.Utilize piezoelectric ceramic actuator to control the horizontal precision actuation unit of micro-stretching test system, exemplar is stretched, until exemplar is broken.Record test data also carries out data processing.Finally infiltrate the exemplar be pulled off with acetone soln, with tweezers, exemplar is taken off after 5 minutes.Test process terminates.
Micro structures comprehensive mechanical property proving installation of the present invention directly carries out micro-stretching test to micro structures, measures the static mechanical property of test specimen.
Claims (6)
1. a micro structures comprehensive mechanical property proving installation, is characterized in that: it comprises in-situ observation system (1), micro-stretching test system (2), Aided Machine system (3) and dynamic test system (4), described Aided Machine system (3) comprises X-Y two-dimension moving platform, marble vibration-isolating platform (3-3), marble crossbeam (3-5) and two marble columns (3-4), described X-Y two-dimension moving platform is arranged on above marble vibration-isolating platform (3-3), and the Y-direction motion platform (3-1) of X-Y two-dimension moving platform is arranged on X above motion platform (3-2), described micro-stretching test system (2) is arranged on above Y-direction motion platform (3-1), described dynamic test system (4) is arranged on marble crossbeam (3-5) leading flank, the two ends of described marble crossbeam (3-5) are respectively supported by the marble column (3-4) described in, and the lower end of two marble columns (3-4) is fixed on above marble vibration-isolating platform (3-3), described in-situ observation system (1) is arranged on the vertical high precision electro moving stage (4-1) of dynamic test system (4).
2. micro structures comprehensive mechanical property proving installation according to claim 1, is characterized in that: described micro-stretching test system (2) comprises horizontal precision actuation unit (2-1), Micro-force sensor (2-2), horizontal linear grating measuring device (2-3), horizontal high precision electro moving stage (2-4), horizontal objective table (2-5), force snesor fixed block (2-6), two fixtures (2-7), described horizontal high precision electro moving stage (2-4) comprises left article carrying platform (2-4-1), right article carrying platform (2-4-2), screw pair (2-4-3), L shape base (2-4-4), supporting seat (2-4-5), stepper motor (2-4-6), four left sliders (2-4-7), four right slide blocks (2-4-8), two guide rails (2-4-9), described horizontal objective table (2-5) comprises dynamic objective table (2-5-1) and quiet objective table (2-5-2), and described horizontal linear grating measuring device (2-3) comprises grating ruler reading head erecting frame (2-3-1), read head (2-3-2) and grating scale (2-3-3), the long slab level of described L shape base (2-4-4) and along X to setting, two described guide rails (2-4-9) are parallel to the long limit of L shape base (2-4-4) and are fixed on the long slab of L shape base (2-4-4), described left article carrying platform (2-4-1) and right article carrying platform (2-4-2) left and right are set up in parallel, described horizontal precision actuation unit (2-1) is fixed on right article carrying platform (2-4-2) upper surface, described dynamic objective table (2-5-1) is fixedly connected with the left surface of horizontal precision actuation unit (2-1), and the corresponding setting adjacent with dynamic objective table (2-5-1) of described quiet objective table (2-5-2), the upper surface correspondence position of quiet objective table (2-5-2) and dynamic objective table (2-5-1) is processed with one respectively for the locating slot of fixing micro structures (5), described quiet objective table (2-5-2), Micro-force sensor (2-2) and force snesor fixed block (2-6) are successively set on the upper surface of left article carrying platform (2-4-1) from right to left, and quiet objective table (2-5-2) is fixedly connected with Micro-force sensor (2-2), Micro-force sensor (2-2) is fixedly connected with force snesor fixed block (2-6), force snesor fixed block (2-6) is fixedly connected with the upper surface of left article carrying platform (2-4-1), on the leading flank that described grating scale (2-3-3) is arranged on horizontal precision actuation unit (2-1) or trailing flank, the side that the upper and grating scale (2-3-3) of right article carrying platform (2-4-2) is positioned at homonymy is fixed with grating ruler reading head erecting frame (2-3-1), described read head (2-3-2) and grating scale (2-3-3) are oppositely arranged and are fixed on grating ruler reading head erecting frame (2-3-1), the lower surface of described right article carrying platform (2-4-2) is fixedly connected with the nut of screw pair (2-4-3), leading screw one end and the supporting seat (2-4-5) of screw pair (2-4-3) are rotationally connected, the leading screw other end of screw pair (2-4-3) and the short slab of L shape base (2-4-4) are rotationally connected, supporting seat (2-4-5) is fixedly connected with the long slab of L shape base (2-4-4), the lower surface of right article carrying platform (2-4-2) is fixedly connected with four right slide blocks (2-4-8) of rectangular setting, four right slide blocks (2-4-8) are slidably connected with two guide rails (2-4-9), described stepper motor (2-4-6) is fixed on the short slab of L shape base (2-4-4), stepper motor (2-4-6) drives screw pair (2-4-3) to move, the lower surface of left article carrying platform (2-4-1) is fixedly connected with four left sliders (2-4-7) of rectangular setting, four left sliders (2-4-7) are arranged on two guide rails (2-4-9), be arranged between two left sliders (2-4-7) on same guide rail (2-4-9) and a fixture (2-7) be fixedly connected with guide rail (2-4-9) is installed, in work, left article carrying platform (2-4-1) opposite rail (2-4-9) maintains static, and right article carrying platform (2-4-2) opposite rail (2-4-9) moves.
3. micro structures comprehensive mechanical property proving installation according to claim 2, it is characterized in that: described horizontal precision actuation unit (2-1) comprises the first flexure hinge mechanism (2-1-1), first pre-loading screw (2-1-2), first piezoelectric ceramics (2-1-3), two the first pads (2-1-4), two steel balls (2-1-5), three the first mounting holes (2-1-6), described the first flexure hinge mechanism (2-1-1) middle part is provided with the first groove, described the first piezoelectric ceramics (2-1-3) is arranged in the first groove of the first flexure hinge mechanism (2-1-1), first piezoelectric ceramics (2-1-3) two ends are respectively by steel ball (2-1-5), first pad (2-1-4) contacts with the first groove inner wall of the first flexure hinge mechanism (2-1-1), first flexure hinge mechanism (2-1-1) is provided with three the first mounting holes (2-1-6) for being fixedly connected with right article carrying platform (2-4-2), the right side of the first flexure hinge mechanism (2-1-1) is processed with the first threaded hole, described the first pre-loading screw (2-1-2) is threaded with the first threaded hole of the first flexure hinge mechanism (2-1-1), first pre-loading screw (2-1-2) is by the first pad (2-1-4) and steel ball (2-1-5) pre-pressing first piezoelectric ceramics (2-1-3).
4. micro structures comprehensive mechanical property proving installation according to claim 2, it is characterized in that: described dynamic test system (4) comprises vertical high precision electro moving stage (4-1) and vertical precision actuation unit (4-2), described vertical precision actuation unit (4-2) is arranged on the objective table of vertical high precision electro moving stage (4-1).
5. micro structures comprehensive mechanical property proving installation according to claim 4, is characterized in that: described vertical precision actuation unit (4-2) comprises the second pre-loading screw (4-2-1), the second flexure hinge mechanism (4-2-2), vertical straight line grating measurement mechanism (4-2-4), diamond penetrator (4-2-5), the second piezoelectric ceramics (4-2-6), two the second pads (4-2-7), multiple second mounting hole (4-2-3);
Described the second flexure hinge mechanism (4-2-2) middle part is provided with the second groove, described the second piezoelectric ceramics (4-2-6) is arranged in the second groove of the second flexure hinge mechanism (4-2-2), second pad (4-2-7) is respectively installed at second piezoelectric ceramics (4-2-6) two ends, the upper surface of the second flexure hinge mechanism (4-2-2) is processed with the second threaded hole, described the second pre-loading screw (4-2-1) is threaded with the second threaded hole of the second flexure hinge mechanism (4-2-2), second piezoelectric ceramics (4-2-6) carries out pretension by the second pre-loading screw (4-2-1), described vertical straight line grating measurement mechanism (4-2-4) is arranged on the front of the second flexure hinge mechanism (4-2-2), the lower surface of the second flexure hinge mechanism (4-2-2) is provided with diamond penetrator (4-2-5), the head end of diamond penetrator (4-2-5) is vertically also arranged down, during work, the head end of diamond penetrator (4-2-5) contacts with described micro structures (5) upper surface, described the second flexure hinge mechanism (4-2-2) is provided with multiple second mounting holes (4-2-3) for being fixedly connected with the objective table of described vertical high precision electro moving stage (4-1).
6. micro structures comprehensive mechanical property proving installation according to claim 1, it is characterized in that: described in-situ observation system (1) comprises CCD camera (1-1), fixture (1-2) and zoom Zoom lens (1-3), described CCD camera (1-1) and zoom Zoom lens (1-3) from top to bottom arrange and link together, and CCD camera (1-1) is vertically arranged on the objective table of vertical high precision electro moving stage (4-1) of dynamic test system (4) by fixture (1-2) with zoom Zoom lens (1-3) entirety.
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| CN104729919B (en) * | 2015-03-12 | 2017-09-22 | 北京大学 | A kind of method and system for the micro- beam tensile break strength for extracting bulk silicon technological manufacture |
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