CN110261081A - A kind of submissive hinge flexibility and running accuracy measuring device based on micro- vision system - Google Patents

A kind of submissive hinge flexibility and running accuracy measuring device based on micro- vision system Download PDF

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Publication number
CN110261081A
CN110261081A CN201910493563.1A CN201910493563A CN110261081A CN 110261081 A CN110261081 A CN 110261081A CN 201910493563 A CN201910493563 A CN 201910493563A CN 110261081 A CN110261081 A CN 110261081A
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China
Prior art keywords
fixed
hinge
shock insulation
micro
measuring device
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CN201910493563.1A
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Chinese (zh)
Inventor
张宪民
周安泰
朱本亮
李海
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South China University of Technology SCUT
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South China University of Technology SCUT
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Priority to CN201910493563.1A priority Critical patent/CN110261081A/en
Publication of CN110261081A publication Critical patent/CN110261081A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/022Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M13/00Testing of machine parts

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a kind of submissive hinge flexibility and running accuracy measuring device based on micro- vision system, comprising: a shock insulation pedestal;Bracket is fixed on shock insulation pedestal;Camera motor and camera lens, camera lens are fixed on bracket vertically facing downward;X-Y two-dimensional movement platform is fixed on shock insulation pedestal and is located at below camera motor and camera lens;Three fixed pulleys, are fixed at shock insulation base edge, and two of them fixed pulley is relatively fixed at shock insulation base edge along Y-direction, another fixed pulley is along X to being fixed at shock insulation base edge;Counterweight, the counterweight are connected by the rope across corresponding fixed pulley with the submissive hinge to be measured being fixed in X-Y two-dimensional movement platform.The present invention carries out real-time measurement, the stress point by changing hinge and magnitude of load to displacement of the hinge before and after applying load using micro- vision system and obtains multiple groups experimental data, simple installation, easy to operate, repeatable height.

Description

A kind of submissive hinge flexibility and running accuracy measuring device based on micro- vision system
Technical field
The invention belongs to compliant mechanism fields, are related to a kind of submissive hinge flexibility and running accuracy based on micro- vision system Measuring device.
Background technique
Precision positioning technology manufactures (such as litho machine, scanning electron microscope), aerospace, micro-nano behaviour in high-end devices Make and many fields such as surgical medical are widely used, is always the hot spot studied both at home and abroad.Traditional rigid mechanism Because there are fit-up gap, the problems such as friction, lubrication, it is difficult to realize high-precision positioning operation, and compliant mechanism is because have essence The advantages that degree is high, and rigidity is big, compact-sized can then meet the needs of precision positioning well.Compliant mechanism is according to flexibility distribution Difference can be divided into and concentrate flexibility formula and distribution flexibility formula two major classes, and it is soft to concentrate the flexibility of flexibility formula compliant mechanism to concentrate on Along at hinge, hinge assumes responsibility for the main deformation of mechanism, and three principal elements for judging submissive hinge performance have: flexibility, rotation Turn precision and maximum stress.Flexibility shows that more greatly hinge can generate bigger displacement under identical loading condition, and rotates The precision the high, shows that the hinge performance is more preferable, is more nearly ideal hinge.
Mathematical notation about submissive hinge flexibility is represented as the following formula:
Mz, Fy, Fx indicate the load for being applied to hinge free end, αZ, Δ y, Δ x indicate hinge free end in load effect The displacement of lower generation, and centre is connected by one 3 × 3 flexibility matrix, with more notch type hinge (paper Design And analysis of a multi-notched flexure hinge for compliant mechanisms is proposed) be , the alphabetical meaning in above-mentioned formula is as shown in Fig. 2.
Mathematical notation about the rotation of submissive hinge is represented as the following formula:
Mz, Fy, Fx indicate the load for being applied to hinge free end, and δ y, δ x indicates the parasitic displacement that hinge centres generate, in Between be connected by 3 × 3 running accuracy matrix, in the case of same load, parasitic displacement is smaller, show that hinge performance is better, on The alphabetical meaning stated in formula is as shown in Fig. 2.
Summary of the invention
For the measurement demand of hinge flexibility and running accuracy mentioned above, the present invention, which devises one kind, can measure hinge The measuring device of chain flexibility and running accuracy in different loads.The measuring device structure is simple, is easy to build, and passes through The data of micro- vision measurement can obtain change in displacement of the hinge before and after applying load.
The technical solution adopted by the present invention to solve the technical problems is as follows:
A kind of submissive hinge flexibility and running accuracy measuring device based on micro- vision system, comprising:
One shock insulation pedestal;
Bracket is fixed on the shock insulation pedestal;
Camera motor and camera lens, camera lens are fixed on the bracket vertically facing downward;
X-Y two-dimensional movement platform is fixed on the shock insulation pedestal and is located at the lower section of the camera motor and camera lens;
Three fixed pulleys are fixed at the shock insulation base edge, two of them fixed pulley along Y-direction relatively It is fixed at the shock insulation base edge, another fixed pulley is along X to being fixed at the shock insulation base edge Place;
Counterweight, the counterweight is by the rope across corresponding fixed pulley and is fixed on the X-Y two-dimensional movement platform On submissive hinge to be measured be connected.
Further, the camera motor and camera lens are fixed on the bracket by symmetrically arranged two cameras pinboard Crossbeam on.
Further, the fixed pulley includes the support being fixed on the shock insulation pedestal, is rotatably arranged on institute State the idler wheel on support.
Further, the periphery of the idler wheel is arranged at intervals with several annular grooves along its length, by rope with The cooperation of different annular grooves, to obtain multiple groups experimental data.
Further, the X-Y two-dimensional movement platform includes for installing the rectangle mobile platform of submissive hinge, consolidating respectively The spiral micrometer head of the rectangle mobile platform X and Y-direction two sides are set calmly, are fixed on the shock insulation pedestal and respectively with Two fixed blocks of two spiral micrometer head phase separations.
Further, the bracket is assembled by aluminium alloy, including two columns, connection are arranged in two column Crossbeam between top.
Further, the shock insulation pedestal uses marble pedestal or metab.
Further, the submissive hinge to be measured include the submissive hinge of more notch types, straight round hinge, the round hinge in angle and V-type hinge.
Further, it is evenly arranged on the rectangle mobile platform and several is bolted the submissive hinge to be measured The screw hole of chain fixing end.
Compared with prior art, the beneficial effect comprise that
The present invention can be provided the load of different size and direction to hinge, be led to by relatively simple assembly and replacement The stress point for crossing change hinge can easily obtain different loading conditions, convenient for obtaining multiple groups experimental data;Using micro- vision System carries out real-time measurement to displacement of the hinge before and after applying load, according to the obtained displacement result of measurement and hinge is given to apply Load, the flexibility and running accuracy of hinge can be calculated, simple installation, easy to operate, repeatable height.
Detailed description of the invention
Fig. 1 is the measuring device overall structure diagram of the embodiment of the present invention.
Fig. 2 is the flexibility and running accuracy instrumentation plan of submissive hinge.
Fig. 3 is micro- vision measurement schematic diagram, wherein Fig. 3 (a) is the coordinate bit that submissive hinge applies index point before load It sets;Fig. 3 (b) is the coordinate position that submissive hinge applies index point after load;
Fig. 4 is more notch type hinge three-dimensional figure.
Fig. 5 (a) to Fig. 5 (c) is that submissive hinge different directions load applies schematic diagram.
In figure: 1- camera motor and the more notch type hinges of camera lens, 2-X-Y two-dimensional movement platform, 3- counterweight, 4-, 5- shock insulation Pedestal, 6- idler wheel, 7- bracket, 8- camera pinboard, the first adapter of 9-, the second adapter of 10-, 11- third adapter.
Specific embodiment
The object of the invention will be described in further detail combined with specific embodiments below, wherein identical zero Part is presented with like reference characters.It should be noted that word "front", "rear" used in the following description, "left", "right", "up" and "down" refers to that the direction in attached drawing, word "inner" and "outside" are referred respectively to towards or away from particular elements geometry The direction of the heart.
As shown in fig. 1, a kind of submissive hinge flexibility measuring device based on micro- vision, comprising:
One shock insulation pedestal, the shock insulation pedestal use marble pedestal or metab;
Bracket is fixed on the shock insulation pedestal, is assembled by aluminium alloy, including two columns, connection are arranged in institute State the crossbeam between two column tops;
Camera motor and camera lens, the camera motor and camera lens 1 are fixed on by symmetrically arranged two cameras pinboard 8 On the crossbeam of the bracket 7 and camera lens downwards;
X-Y two-dimensional movement platform is fixed on the shock insulation pedestal and is located at the lower section of the camera motor and camera lens;
Three fixed pulleys are fixed at the shock insulation base edge, two of them fixed pulley along Y-direction relatively It is fixed at the shock insulation base edge, another fixed pulley is along X to being fixed at the shock insulation base edge Place;
Counterweight, the counterweight is by the rope across corresponding fixed pulley and is fixed on the X-Y two-dimensional movement platform On submissive hinge to be measured be connected.
The fixed pulley includes the support being fixed on the shock insulation pedestal, is rotatably arranged on the support The periphery of idler wheel 6, the idler wheel 6 is arranged at intervals with several annular grooves along its length.
The X-Y two-dimensional movement platform includes that the rectangle mobile platform of submissive hinge to be measured, fixation is set respectively for installing Set the rectangle mobile platform X and Y-direction two sides spiral micrometer head, be fixed on the shock insulation pedestal and respectively with two spiral shells Two fixed blocks for revolving micrometer head phase separation, be evenly arranged on the rectangle mobile platform it is several be bolted it is described to Survey the screw hole of submissive hinge fixing end.
Certainly, those skilled in the art, which also can according to need, completes class using other kinds of X-Y two-dimensional movement platform As plane motion, such as ball wire bar pair etc., details are not described herein.
It should be clear that submissive hinge to be measured described in above-described embodiment is more submissive hinges of notch type, but above-mentioned reality The measuring device for applying example offer is equally applicable to the measurement of other kinds of submissive hinge flexibility and running accuracy, including straight round Hinge, the round hinge in angle and V-type hinge etc..
The camera motor and camera lens 1 are connected with host computer (PC), the survey for some position displacement of hinge upper surface Amount, the three-dimensional results of more submissive hinges 4 of notch type as shown in figure 4, the submissive hinge 4 of more notch types three face bolts Three adapters are connected to, such as the first adapter 9, the second adapter 10, third adapter 11, for applying load.X-Y two dimension Mobile platform 2 is used to move the position of hinge, and camera is allowed to measure the change in displacement situation of hinge different location.For example, Carry out hinge flexibility measurement when, the free end of hinge is moved to the underface of camera, so as to measure by The change in displacement that external force lower hinge generates, the size of hinge flexibility is calculated according to the shift value for loading and measuring;Measurement When hinge running accuracy, the center of hinge is moved to the underface of camera, is measured in by external force lower hinge The parasitic displacement that the heart generates, to calculate the running accuracy of hinge.Counterweight for give hinge apply load, three kinds of load Situation is shown in shown in Fig. 5 (a) to Fig. 5 (c).The main function of idler wheel be allow rope to hinge provide pulling force when as far as possible not by To outer friction, to guarantee the precision of experiment.Pedestal, aluminum profile bracket and camera pinboard play vibration isolation and fixed camera Effect.
During measuring, in order to obtain compared with the misalignment under multi-load case, so that the result calculated It is more accurate and reliable, different bear can be obtained by replacing the forced position of hinge or replacing the counterweight 3 of different weight It carries, it is very simple and convenient.When carrying out flexibility experiment, the position of camera observation is (for measuring flexibility) O point in attached drawing 2, And when carrying out running accuracy experiment, the position of camera observation is (for measuring running accuracy) O ' point in attached drawing 2.
The concrete principle of the micro- vision measurement of camera is shown in Fig. 3 (a) and Fig. 3 (b):
This measuring device measures the displacement of hinge by the way of micro- vision measurement, because what submissive hinge generated Displacement is very small, is μm grade, therefore need to be amplified using camera to viewing area to obtain the movement of characteristic point, and micro- vision is surveyed Shown in the principle of amount such as Fig. 3 (a) and Fig. 3 (b), phase chance collects the photo of hinge surface, then two spies in selected digital image Region is levied, centre coordinate is respectively P1(x1,y1) and P2(x2,y2), after hinge applies load, selected characteristic area in image Domain can be subjected to displacement, and the coordinate after variation is P1’(x1’,y1') and P2’(x2’,y2'), according to the difference of former and later two coordinates, Displacement [the α that hinge is generated in load effect lower hinge end can be calculatedzΔ y Δ x] and hinge centres generate parasitism It is displaced [0 δ y δ x], so as to calculate the flexibility and running accuracy of hinge.
More notch type hinges 4 that the present embodiment is chosen are paper Design and analysis of a multi- The hinge that notched flexure hinge for compliant mechanisms is proposed, in the paper only to hinge into It has gone theoretical modeling and simulation analysis, has lacked experimental analysis, therefore the test device chooses more notch type hinges as research pair As, but the measuring device is equally applicable to other kinds of submissive hinge.
The operating process of measuring device provided by the above embodiment includes:
Firstly, more notch type hinges 4 to be measured are passed through X-Y two-dimensional movement platform 2 for position to be measured (the O point in attached drawing 2 Or O ' point) move to immediately below camera, camera heights focusing is adjusted, makes the image clearly observed, then fixed camera.
Then, on the hole that the rope for hanging with counterweight 3 is tied to hinge adapter, by rope across pulley 6, counterweight is first held 3, image acquisition procedure is executed in host computer, and the apparent index point of feature is selected simultaneously by fine tuning X-Y two-dimensional movement platform 2 Its frame is selected, starts to carry out image trace, starts slow release counterweight 3 at this time, after rope extends completely, closes Image Acquisition Program, then handle Image Acquisition as a result, calculating the flexibility of hinge according to the size and corresponding shift value that apply load And running accuracy.
The sequence of measurement can successively be carried out according to Fig. 5 (a) to Fig. 5 (c), usually first in a horizontal direction (along x Direction) applied force Fx, its corresponding displacement is then measured, the C in flexibility matrix can be measured according to the two values33, then In vertical direction (in the y-direction) applied force Fy, its corresponding displacement is measured, can be measured in flexibility matrix according to the two values C22, finally by pure torque load and corresponding displacement, measure flexibility C11.In flexibility matrix, C12With C21Value be it is equal, They will can just be measured by the collective effect of Fy and pure torsion load Mz.
It is almost the same about the measurement of running accuracy and the measurement method of flexibility, when measuring running accuracy, the survey of camera Amount position is located at the rotation center of hinge.
The position of the specification of counterweight 3 and hinge stress point can carry out diversified selection in above-described embodiment, to meet Experiment measurement in the case of different external applied loads, convenient for obtaining multiple groups experiment number.Apply load in the present invention and mainly passes through counterweight Gravity realize that economical simple, the method for other similar applications load also can be in this measuring device.With micro- vision The mode of measurement has simple installation compared to the measurement of capacitance sensor or other touch sensors, easy to operate etc. excellent Gesture.
The above embodiment of the present invention be only to clearly illustrate example of the present invention, and not be to the present invention Embodiment restriction.For those of ordinary skill in the art, it can also make on the basis of the above description Other various forms of variations or variation.There is no necessity and possibility to exhaust all the enbodiments.It is all of the invention Made any modifications, equivalent replacements, and improvements etc., should be included in the protection of the claims in the present invention within spirit and principle Within the scope of.

Claims (9)

1. a kind of submissive hinge flexibility and running accuracy measuring device based on micro- vision system characterized by comprising
One shock insulation pedestal;
Bracket is fixed on the shock insulation pedestal;
Camera motor and camera lens, camera lens are fixed on the bracket vertically facing downward;
X-Y two-dimensional movement platform is fixed on the shock insulation pedestal and is located at the lower section of the camera motor and camera lens;
Three fixed pulleys are fixed at the shock insulation base edge, and two of them fixed pulley is relatively fixed along Y-direction It is arranged at the shock insulation base edge, another fixed pulley is along X to being fixed at the shock insulation base edge;
Counterweight, the counterweight is by the rope across corresponding fixed pulley and is fixed in the X-Y two-dimensional movement platform Submissive hinge to be measured is connected.
2. the submissive hinge flexibility and running accuracy measuring device according to claim 1 based on micro- vision system, special Sign is that the camera motor and camera lens are fixed on the crossbeam of the bracket by symmetrically arranged two cameras pinboard.
3. the submissive hinge flexibility and running accuracy measuring device according to claim 1 based on micro- vision system, special Sign is that the fixed pulley includes the support being fixed on the shock insulation pedestal, is rotatably arranged on the support Idler wheel.
4. the submissive hinge flexibility and running accuracy measuring device according to claim 3 based on micro- vision system, special Sign is that the periphery of the idler wheel is arranged at intervals with several annular grooves along its length.
5. the submissive hinge flexibility and running accuracy measuring device according to claim 1 based on micro- vision system, special Sign is that the X-Y two-dimensional movement platform includes for installing the rectangle mobile platform of submissive hinge, being respectively fixedly disposed at institute State the spiral micrometer head of rectangle mobile platform X and Y-direction two sides, be fixed on the shock insulation pedestal and respectively with two spiral micrometers Two fixed blocks of head phase separation.
6. the submissive hinge flexibility and running accuracy measuring device according to claim 1 based on micro- vision system, special Sign is that the bracket is assembled by aluminium alloy, is arranged between two column top including two columns, connection Crossbeam.
7. the submissive hinge flexibility and running accuracy measuring device according to claim 1 based on micro- vision system, special Sign is that the shock insulation pedestal uses marble pedestal or metab.
8. the submissive hinge flexibility and running accuracy measuring device according to claim 1 based on micro- vision system, special Sign is that the submissive hinge to be measured includes the submissive hinge of more notch types, straight round hinge, the round hinge in angle and V-type hinge.
9. the submissive hinge flexibility and running accuracy measuring device according to claim 5 based on micro- vision system, special Sign is, is evenly arranged on the rectangle mobile platform and several is bolted the submissive hinge fixing end to be measured Screw hole.
CN201910493563.1A 2019-06-06 2019-06-06 A kind of submissive hinge flexibility and running accuracy measuring device based on micro- vision system Pending CN110261081A (en)

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