CN103981511A - Vertically-arranged multi-array heating wire device for preparing diamond film - Google Patents
Vertically-arranged multi-array heating wire device for preparing diamond film Download PDFInfo
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- CN103981511A CN103981511A CN201410241054.7A CN201410241054A CN103981511A CN 103981511 A CN103981511 A CN 103981511A CN 201410241054 A CN201410241054 A CN 201410241054A CN 103981511 A CN103981511 A CN 103981511A
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Abstract
The invention discloses a vertically-arranged multi-array heating wire device for preparing a diamond film and belongs to the technical field of coating films. The device comprises an upper vacuum chamber wall plate and a lower vacuum chamber wall plate. The device is characterized in that an upper electrode plate is fixedly connected with the upper vacuum chamber wall plate; at least two rows of heating wires are vertically distributed; the upper ends of each row of the heating wires are fixedly connected with the upper electrode plate; the lower ends of each row of the heating wires are fixedly connected with a corresponding lower electrode plate; the lower end of the lower electrode plate is fixedly arranged on a heating wire force adjusting mechanism; the heating wire force adjusting mechanism is fixedly arranged on the lower vacuum chamber wall plate. As the device is in vertical multi-array heating wire arrangement, films can be coated in a large area on two sides, and the cost of the heating wires is lowered; due to the distribution mode of multiple rows of the heating wires, complete and effective film coating on a large-area film coating test sample is achieved, and the film coating efficiency is improved; due to the vertical distribution of the heating wire structure, test samples can be taken out without damaging the heating wires, and the cost of the heating wires is further lowered; due to the heating wire force adjusting mechanism at the lower ends of the heating wires, the heating wires can be tensioned and prevented from swinging, and thus uniform film coating is achieved.
Description
Technical field
The invention belongs to coating technique field, particularly a kind of heated filament device of preparing diamond film.
Background technology
Diamond has excellent power, heat, sound, the properties such as optical, electrical, chemical.The performance of artificial diamond film has approached natural diamond substantially, and excellent performance makes it in high-tech area, be with a wide range of applications.At present, thin diamond membrane technique is at cutter, high-performance electric sub-element, and numerous occasions such as space material are applied, and receive fabulous effect, and it is applied in high-tech area and is extraordinarily paid close attention to by people.
At present, the preparation method of industrialization CVD diamond thin mainly contains two kinds, and the one, hot filament CVD (HFCVD), the 2nd, microwave plasma CVD method (MPCVD).Microwave method can be prepared the diamond wafer that high-quality diamond thin and thickness reach millimeter magnitude, but equipment cost is high, and depositional area is less, and sedimentation velocity is slow.Hot wire process is simple to operate, and sedimentation rate is fast, and cost is low, easily controls the underlayer temperature of deposition, can obtain the diamond thin that quality is higher, area size is larger.Adopting HFCVD legal system is indoor by passing into vacuum reaction after reactant gases mixing for diamond thin, and mixed gas is after the cracking of high temperature heated filament, and the active atoms of carbon in its gas will be deposited on matrix surface, thereby grows diamond thin.
Heated filament device in diamond coated equipment is the device for cutter head Mass production diamond film, traditional heated filament device is generally horizontally disposed, namely heated filament is that horizontal cross is arranged, this structure can only utilize a side of heated filament to carry out heating film-coated, and efficiency is very low.
At present, the heated filament device of some company's invention, for being arranged vertically, can utilize two sides of heated filament to generate diamond film, efficiency is improved significantly, but in these devices, heated filament is arranged vertically, adopt counterweight hanging in the lower end of heated filament simultaneously, because heated filament has elasticity, and counterweight is free suspension, can causes lower electrode plate to rock, thereby further cause heated filament to rock, the unstable meeting of heated filament makes plated film inhomogeneous, and the diamond film that affects cutter generates quality.
In addition, current heated filament is general adopts single-row heated filament to distribute, and cannot realize complete effective plated film, and have the problem that plated film efficiency is lower for the larger sample of plated film area.
Summary of the invention
The object of the invention is to overcome above the deficiencies in the prior art, provide a kind of vertical layout to prepare many array thermal silk device of diamond film, this device adopts many arrays heated filament vertically to distribute, can two-sided large-area coating film, reduce the cost of heated filament, the distribution mode of multiple row heated filament can realize complete effective plated film of large-area coating film sample simultaneously, and improve the efficiency of plated film, the hot wire structure vertically distributing has guaranteed to take out sample in the situation that not destroying heated filament, further reduced the cost of heated filament, the heated filament of heated filament lower end adjusts the force mechanisms can tensioning heated filament and limit heated filament and swing, realize uniform coated.
The technical scheme that the present invention adopted is for achieving the above object: a kind of vertical layout is prepared many array thermal silk device of diamond film, comprises vacuum chamber wainscot and vacuum chamber lower wall panels, it is characterized in that: electric pole plate is fixedly connected with vacuum chamber wainscot; At least two row heated filaments vertically distribute, and every row heated filament upper end electric pole plate corresponding with it is fixedly connected with, and every row heated filament lower end lower electrode plate corresponding with it is fixedly connected with; Lower electrode plate lower end is fixed on heated filament tune force mechanisms, and heated filament adjusts force mechanisms to be fixed on vacuum chamber lower wall panels.
Described electric pole plate is fixedly connected with vacuum chamber wainscot by fixed support.
Being distributed as of the heated filament of described every row:
In electric pole plate and lower electrode plate end positions, perpendicular to electric pole plate and lower electrode plate, parallel equidistant 4 heated filaments of arranging respectively, the parallel equidistant 10-30 root heated filament of arranging on electric pole plate and lower electrode plate mid-way, and the distance between the heated filament in end positions is half of distance between the heated filament on mid-way, that heater material is generally is dystectic, can and carbon form the metal of carbide, as tungsten, tantalum etc., its diameter is generally no more than 0.6mm.
Described heated filament adjusts force mechanisms to comprise protection bell jar, and described protection bell jar lower end is fixed on vacuum chamber lower wall panels, and protection bell jar upper end is provided with limiting through hole; Heated filament adjusts power slide plate upper end to be fixed on lower electrode plate, and its lower end is successively through limiting through hole and roller bearing.
Described heated filament adjusts power slide plate upper end to be fixed on lower electrode plate, and its lower end is passed after limiting through hole and roller bearing successively, then is connected with counterweight.
Described heated filament adjusts power slide plate upper end to be fixed on lower electrode plate, and its lower end is passed after limiting through hole and roller bearing successively, then is connected with the power of tune spring, adjusts the power spring the other end to be connected with vacuum chamber lower wall panels or protection bell jar diapire.
It is linear pattern slide plate that described heated filament is adjusted power slide plate, and it is inner that roller bearing is fixedly installed in protection bell jar.
It is bending type slide plate that described heated filament is adjusted power slide plate, and roller bearing is fixedly installed on pillar stiffener, and pillar stiffener is fixed on vacuum chamber lower wall panels.
The beneficial effect of apparatus of the present invention is:
(1) this device heated filament adopts multiple row to distribute, improve the area of heated filament plated film radiation, can realize needing complete, effective plated film of large-area coating film sample, simultaneously for general sample, efficient, the complete plated film of more sample be can once complete, plated film efficiency and quality improved;
(2) heated filament adopts vertically and distributes, and all can arrange that sample carries out plated film in heated filament both sides, can realize two-sided large-area coating film, and heated filament once can plated film area change, has relatively improved the service efficiency of heated filament, has reduced the cost of heated filament;
(3), in the device that heated filament vertically distributes, sample can be installed on the both sides of heated filament, after completing plated film, can in the situation that not destroying heated filament, take out sample, can repeatedly use heated filament, has further reduced heated filament cost;
(4) heated filament is installed on the lower electrode plate of heated filament lower end and is adjusted force mechanisms, by its deadweight, additional counterweight or the power of tune spring, make heated filament tensioning, limit heated filament simultaneously and swing, protection heated filament, prevents that heated filament from destroying, and is beneficial to uniform coated simultaneously;
(5) heated filament adjusts the heated filament of force mechanisms to adjust power slide plate can be designed to bending shape, avoids adjusting force mechanisms inside to be subject to coating influence, guarantees to adjust effective, the safe and reliable life-time service of force mechanisms, improves its work-ing life.
Accompanying drawing explanation
Fig. 1 is many array thermal silk device structural representation that a kind of vertical layout is prepared diamond film.
Fig. 2 is the A-A schematic cross-section that a kind of vertical layout is prepared many array thermal silk device of diamond film.
In figure: 11, vacuum chamber wainscot, 12, vacuum chamber lower wall panels, 2, electric pole plate, 3, lower electrode plate, 4, heated filament adjusts power slide plate, 5, protection bell jar, 6, counterweight, 7, heated filament, 8, fixed support, 9, pillar stiffener, 10, roller bearing
Embodiment
Below in conjunction with accompanying drawing, the present invention will be further described, but the present invention is not limited to specific embodiment.
Embodiment 1
A kind of vertical layout is as illustrated in fig. 1 and 2 prepared many array thermal silk device of diamond film, comprises vacuum chamber wainscot 11 and vacuum chamber lower wall panels 12, and electric pole plate 2 is fixedly connected with vacuum chamber wainscot 11; Two row heated filaments 7 vertically distribute, and every row heated filament upper end electric pole plate 2 corresponding with it is fixedly connected with, and every row heated filament lower end lower electrode plate 3 corresponding with it is fixedly connected with; Two lower electrode plate 3 lower ends are fixed on heated filament tune force mechanisms, and heated filament adjusts force mechanisms to be fixed on vacuum chamber lower wall panels 11.
Electric pole plate 2 is fixedly connected with vacuum chamber wainscot 11 by fixed support 8.
Being distributed as of every row heated filament 7: in electric pole plate and lower electrode plate end positions, perpendicular to electric pole plate and lower electrode plate, parallel equidistant 4 heated filaments of arranging respectively, parallel equidistant 30 heated filaments of arranging on electric pole plate and lower electrode plate mid-way, and the distance between the heated filament in end positions is half of distance between the heated filament on mid-way, heater material is tungsten (W), and heated filament diameter is 0.4mm.
Heated filament adjusts force mechanisms to comprise protection bell jar 5, and affiliated protection bell jar lower end is fixed on vacuum chamber lower wall panels, and protection bell jar upper end is provided with limiting through hole; Heated filament adjusts power slide plate 4 upper ends to be fixed on lower electrode plate, and its lower end is successively through limiting through hole and roller bearing 10, and it is linear pattern slide plate that heated filament is adjusted power slide plate 4, and it is inner that roller bearing 10 is fixedly installed in protection bell jar.
Embodiment 2
A kind of vertical layout is as illustrated in fig. 1 and 2 prepared many array thermal silk device of diamond film, comprises vacuum chamber wainscot 11 and vacuum chamber lower wall panels 12, and electric pole plate 2 is fixedly connected with vacuum chamber wainscot 11; Three row heated filaments 7 vertically distribute, and every row heated filament upper end electric pole plate 2 corresponding with it is fixedly connected with, and every row heated filament lower end lower electrode plate 3 corresponding with it is fixedly connected with; Three lower electrode plate 3 lower ends are fixed on heated filament tune force mechanisms, and heated filament adjusts force mechanisms to be fixed on vacuum chamber lower wall panels 11.
Electric pole plate 2 is fixedly connected with vacuum chamber wainscot 11 by fixed support 8.
Being distributed as of every row heated filament 7: in electric pole plate and lower electrode plate end positions, perpendicular to electric pole plate and lower electrode plate, parallel equidistant 4 heated filaments of arranging respectively, parallel equidistant 20 heated filaments of arranging on electric pole plate and lower electrode plate mid-way, and the distance between the heated filament in end positions is half of distance between the heated filament on mid-way, heater material is tantalum (Ta), and heated filament diameter is 0.3mm.
Heated filament adjusts force mechanisms to comprise protection bell jar 5, and affiliated protection bell jar lower end is fixed on vacuum chamber lower wall panels, and protection bell jar upper end is provided with limiting through hole; Heated filament adjusts power slide plate 4 upper ends to be fixed on lower electrode plate, and its lower end is passed after limiting through hole and roller bearing 10 successively, then is connected with counterweight 6.
It is bending type slide plate that heated filament is adjusted power slide plate 4, and roller bearing 10 is fixedly installed on pillar stiffener 9, and pillar stiffener is fixed on vacuum chamber lower wall panels.
Embodiment 3
A kind of vertical layout is as illustrated in fig. 1 and 2 prepared many array thermal silk device of diamond film, comprises vacuum chamber wainscot 11 and vacuum chamber lower wall panels 12, and electric pole plate 2 is fixedly connected with vacuum chamber wainscot 11; Four row heated filaments 7 vertically distribute, and every row heated filament upper end electric pole plate 2 corresponding with it is fixedly connected with, and every row heated filament lower end lower electrode plate 3 corresponding with it is fixedly connected with; Four lower electrode plate 3 lower ends are fixed on heated filament tune force mechanisms, and heated filament adjusts force mechanisms to be fixed on vacuum chamber lower wall panels 11.
Electric pole plate 2 is fixedly connected with vacuum chamber wainscot 11 by fixed support 8.
Being distributed as of every row heated filament 7: in electric pole plate and lower electrode plate end positions, perpendicular to electric pole plate and lower electrode plate, parallel equidistant 4 heated filaments of arranging respectively, parallel equidistant 10 heated filaments of arranging on position therebetween, and the distance between the heated filament in end positions is half of distance between the heated filament on mid-way, heater material is tungsten (W), and heated filament diameter is 0.3mm.
Heated filament adjusts force mechanisms to comprise protection bell jar 5, and affiliated protection bell jar lower end is fixed on vacuum chamber lower wall panels, and protection bell jar upper end is provided with limiting through hole; Heated filament adjusts power slide plate 4 upper ends to be fixed on lower electrode plate, and its lower end is passed after limiting through hole and roller bearing 10 successively, then is connected with the power of tune spring, adjusts the power spring the other end to be connected with vacuum chamber lower wall panels.
It is bending type slide plate that heated filament is adjusted power slide plate 4, and roller bearing 10 is fixedly installed on pillar stiffener 9, and pillar stiffener is fixed on vacuum chamber lower wall panels.
Claims (8)
1. vertical layout is prepared many array thermal silk device of diamond film, comprises vacuum chamber wainscot (11) and vacuum chamber lower wall panels (12), it is characterized in that: electric pole plate (2) is fixedly connected with vacuum chamber wainscot (11); At least two row heated filaments (7) vertically distribute, and every row heated filament upper end electric pole plate (2) corresponding with it is fixedly connected with, and every row heated filament lower end lower electrode plate (3) corresponding with it is fixedly connected with; Lower electrode plate (3) lower end is fixed on heated filament tune force mechanisms, and heated filament adjusts force mechanisms to be fixed on vacuum chamber lower wall panels (11).
2. a kind of vertical layout according to claim 1 is prepared many array thermal silk device of diamond film, it is characterized in that: described electric pole plate (2) is fixedly connected with vacuum chamber wainscot (11) by fixed support (8).
3. a kind of vertical layout according to claim 1 is prepared many array thermal silk device of diamond film, it is characterized in that: being distributed as of the heated filament of described every row (7):
In electric pole plate and lower electrode plate end positions, perpendicular to electric pole plate and lower electrode plate, parallel equidistant 4 heated filaments of arranging respectively, the parallel equidistant 10-30 root heated filament of arranging on electric pole plate and lower electrode plate mid-way, and the distance between the heated filament in end positions is half of distance between the heated filament on mid-way.
4. a kind of vertical layout according to claim 1 is prepared many array thermal silk device of diamond film, it is characterized in that: described heated filament adjusts force mechanisms to comprise protection bell jar (5), affiliated protection bell jar lower end is fixed on vacuum chamber lower wall panels, and protection bell jar upper end is provided with limiting through hole; Heated filament adjusts power slide plate (4) upper end to be fixed on lower electrode plate, and its lower end is successively through limiting through hole and roller bearing (10).
5. a kind of vertical layout according to claim 4 is prepared many array thermal silk device of diamond film, it is characterized in that: described heated filament adjusts power slide plate (4) upper end to be fixed on lower electrode plate, its lower end is passed after limiting through hole and roller bearing (10) successively, then is connected with counterweight (6).
6. a kind of vertical layout according to claim 4 is prepared many array thermal silk device of diamond film; it is characterized in that: described heated filament adjusts power slide plate (4) upper end to be fixed on lower electrode plate; its lower end is successively through after limiting through hole and roller bearing (10); be connected with the power of tune spring again, adjust the power spring the other end to be connected with vacuum chamber lower wall panels (12) or protection bell jar (5) diapire.
7. according to claim 4,5 or 6 arbitrary described a kind of vertical layouts, prepare many array thermal silk device of diamond film, it is characterized in that: described heated filament adjusts power slide plate (4) for linear pattern slide plate, and it is inner that roller bearing (10) is fixedly installed in protection bell jar.
8. according to claim 4,5 or 6 arbitrary described a kind of vertical layouts, prepare many array thermal silk device of diamond film, it is characterized in that: described heated filament adjusts power slide plate (4) for bending type slide plate, it is upper that roller bearing (10) is fixedly installed in pillar stiffener (9), and pillar stiffener is fixed on vacuum chamber lower wall panels.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410241054.7A CN103981511B (en) | 2014-05-30 | 2014-05-30 | A kind of vertical arrangement prepares many array thermal silk device of diamond film |
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| CN201410241054.7A CN103981511B (en) | 2014-05-30 | 2014-05-30 | A kind of vertical arrangement prepares many array thermal silk device of diamond film |
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| CN103981511A true CN103981511A (en) | 2014-08-13 |
| CN103981511B CN103981511B (en) | 2016-06-29 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108531882A (en) * | 2017-03-03 | 2018-09-14 | 深圳先进技术研究院 | Filament assembly and deposition of diamond thin films equipment |
| CN109722646A (en) * | 2017-10-27 | 2019-05-07 | 深圳先进技术研究院 | Prepare the heated filament frame and device of diamond coatings |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5273731A (en) * | 1989-09-14 | 1993-12-28 | General Electric Company | Substantially transparent free standing diamond films |
| CN102383113A (en) * | 2011-10-25 | 2012-03-21 | 武汉工程大学 | Method and device for improving efficiency of preparing diamond coating on tool surface and coating evenness |
| CN203999806U (en) * | 2014-05-30 | 2014-12-10 | 大连理工常州研究院有限公司 | A kind of vertical layout is prepared many array thermal silk device of diamond film |
-
2014
- 2014-05-30 CN CN201410241054.7A patent/CN103981511B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5273731A (en) * | 1989-09-14 | 1993-12-28 | General Electric Company | Substantially transparent free standing diamond films |
| CN102383113A (en) * | 2011-10-25 | 2012-03-21 | 武汉工程大学 | Method and device for improving efficiency of preparing diamond coating on tool surface and coating evenness |
| CN203999806U (en) * | 2014-05-30 | 2014-12-10 | 大连理工常州研究院有限公司 | A kind of vertical layout is prepared many array thermal silk device of diamond film |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108531882A (en) * | 2017-03-03 | 2018-09-14 | 深圳先进技术研究院 | Filament assembly and deposition of diamond thin films equipment |
| CN109722646A (en) * | 2017-10-27 | 2019-05-07 | 深圳先进技术研究院 | Prepare the heated filament frame and device of diamond coatings |
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| Publication number | Publication date |
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| CN103981511B (en) | 2016-06-29 |
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Effective date of registration: 20171106 Address after: 225600 Yangzhou City, Gaoyou Province, South City Economic Zone, the outer ring road Patentee after: Gaoyou Institute of Dalian University of Technology Co., Ltd. Address before: 213164 Changzhou science and Education City, No. 801 middle Wu Road, Wujin District, Jiangsu, Changzhou Patentee before: Changzhou Institute Co., Ltd. of Daian University of Technology |
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