CN100412231C - Hot wire for diamond film growth device and electrode structure thereof - Google Patents
Hot wire for diamond film growth device and electrode structure thereof Download PDFInfo
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- CN100412231C CN100412231C CNB2006100390883A CN200610039088A CN100412231C CN 100412231 C CN100412231 C CN 100412231C CN B2006100390883 A CNB2006100390883 A CN B2006100390883A CN 200610039088 A CN200610039088 A CN 200610039088A CN 100412231 C CN100412231 C CN 100412231C
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- electrode
- diamond film
- heated filament
- hot
- columns
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- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 32
- 239000010432 diamond Substances 0.000 title claims abstract description 32
- 238000004804 winding Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 12
- 239000007789 gas Substances 0.000 abstract description 10
- 238000006243 chemical reaction Methods 0.000 abstract description 6
- 230000005855 radiation Effects 0.000 abstract description 5
- 238000000354 decomposition reaction Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 8
- 239000000376 reactant Substances 0.000 description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000006911 nucleation Effects 0.000 description 3
- 238000010899 nucleation Methods 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- YZCKVEUIGOORGS-UHFFFAOYSA-N Hydrogen atom Chemical compound [H] YZCKVEUIGOORGS-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 238000003421 catalytic decomposition reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The present invention relates to a hot filament and an electrode structure thereof for a diamond film growing device, which belongs to the technical field of the growth of diamond films through a hot filament method. The present invention mainly comprises a fixed electrode, a movable electrode and corresponding hot filaments. The present invention is characterized in that a set of electrode columns are arranged on the fixed electrode in an equidistant way. A set of electrode columns are also arranged on the movable electrode in an equidistant way, and the space among the electrode columns on the movable electrode is equal to the space among the electrode columns on the fixed electrode. The electrode columns on the movable electrode are staggered for half space with the electrode columns on the fixed electrode. The hot filaments are tabular hot filaments which are wound on the electrode columns of the fixed electrode and the electrode columns of the movable electrode to form a hot filament array. Because of the adoption of the tabular filament structure, compared with round filaments, the present invention has the advantages of large contact area and long contact time of reaction gases with the hot filaments, high decomposition rate of the reaction gases, high growing rate of diamond films, mutual radiation heating among tabular hot filaments, electric energy saving, and low growing cost of the diamond films.
Description
Technical field
The present invention relates to a kind of equipment of hot wire process growing diamond film, particularly relate to heated filament and electrode structure thereof.
Background technology
The diamond film technology has been developed for many years, existing its product has begun to use (as welded type thick film cutter, coated cutting tool, wortle etc.) and has demonstrated wide application prospect and enormous and latent market in fields such as mechanical workouts. and the method for depositing diamond film is a lot. microwave plasma CVD method, dc arc plasma jet and hot wire process are arranged usually. wherein because hot wire process equipment is simple, cost is lower, film quality is better, relatively be fit to the application of mechanical field.
Diamond film instrument market survey both at home and abroad in the recent period shows, diamond film instrument market scale and tempo are more much lower than authority's international resource investment corporation prediction, its major cause is that the production of CVD diamond film and subsequent machining cost are too high. therefore, in order to advance diamond film instrument industrialization process as early as possible, must manage to reduce the growth cost of diamond film.
The hot wire process growth of diamond membrane with large area adopts many heated filaments to form the palisade heater array usually and realizes, as shown in Figure 1, hybrid reaction gas (for example H2 and CH4 mix) flows to heater array by inlet mouth in the reaction chamber from top, heat through the high temperature heated filament, the partial reaction decomposing gas becomes carbonaceous active group and atomic hydrogen, these carbonaceous active groups and atomic hydrogen flow to substrate, under certain process conditions, on substrate, deposit diamond film. growing diamond film consumption mainly be electric energy and reactant gases, wherein the shared cost of electric energy is usually in total cost more than 80%. and since high temperature circle silk to around quantity of radiant energy, effective radiation is mainly to the substrate surface radiation of heated filament below to diamond film growth, and quantity of radiant energy has been wasted substantially to the heated filament top. how to reduce the key that power consumption becomes the growth cost that reduces diamond film effectively.
Summary of the invention
The invention provides a kind of flat-shaped heater array and electrode structure, to reduce the power consumption in the growing diamond membrane process.
A kind of heated filament of diamond film growth device and electrode structure comprise a fixed electorde, traveling electrode and rely on the heated filament of fixed electorde and traveling electrode clamping, it is characterized in that: described fixed electorde equal intervals be provided with one group of electrode column; Described traveling electrode equal intervals be provided with one group of electrode column, and described spacing equates with fixed electorde top electrode intercolumniation, described electrode column and the fixed electorde pole half pitch that staggers that powers on; Described heated filament is a flats heated filament, forms heater array on the electrode column of fixed electorde and traveling electrode.
Flat filament is compared with the circle silk with sectional area, has following characteristics:
(1) flat-shaped heated filament outer surface area increases, and increases with the contact area of reactant gases, has increased reactant gases and heated filament duration of contact simultaneously, and the raising reactant gases is H especially
2The catalytic decomposition rate, help to increase substantially diamond film nucleation density and growth velocity, reduce sp in the diamond
2The content of defectives such as carbon improves the mechanical property of diamond film, nucleation density increase substantially the bonding force that also helps to improve diamond film and tool surfaces.
(2) flat-shaped heater array has reduced the reactant gases working direction and has stopped the cross section, makes air-flow more easily pass heater array and flows to substrate, thereby reduce thermal chokes and heat is streamed phenomenon, helps improving the homogeneity of growth velocity and thickness.
(3) thermal radiation on flat-shaped heated filament surface since flat filament cross section long leg divide mutually over against and at a distance of nearer, thermal radiation energy major part is absorbed and reflects by adjacent flat filament, the energy that is radiated reaction chamber wall and substrate surface reduces, and has improved utilization rate of electrical, has reduced the diamond film growth cost; The minimizing of substrate surface quantity of radiant energy not only makes the water-cooled substrate temperature be easy to control, and can select thicker heater array faster growing diamond film for use, and this is more obvious in effect when not carrying out the tool surface coating of water-cooled.
(4) flat-shaped heated filament is thinner, and the heated filament carbonization time shortens dramatically, and helps increasing work efficiency.
Description of drawings
Fig. 1 is circle silk Array Method growing diamond film synoptic diagram.
Fig. 2 is a flat filament Array Method growing diamond film synoptic diagram.
Fig. 3 is a flat filament array stretching device synoptic diagram.
Label title among Fig. 1: 1. reactant gases, 2. heater array, 3. diamond film, 4. substrate.
Label title among Fig. 3: 5. electrode column.
Embodiment
According to shown in Figure 3, heated filament of the present invention and electrode structure comprise a fixed electorde, traveling electrode and rely on the heated filament of fixed electorde and traveling electrode clamping, it is characterized in that: described fixed electorde is rectangular molybdenum electrode, its equal intervals be provided with one group of electrode column; Described traveling electrode is rectangular molybdenum electrode, its equal intervals be provided with one group of electrode column, and described spacing equates with fixed electorde top electrode intercolumniation, described electrode column and the fixed electorde pole half pitch that staggers that powers on; Described heated filament is a flats heated filament, forms heater array on the electrode column of fixed electorde and traveling electrode.
Flat-shaped heated filament adopts the high-melting point metal material, as tungsten, tantalum, niobium etc. and the method for making flat filament has multiple, for tantalum material, can adopt the tantalum wire of the soft attitude of annealed, handles through roll extrusion, and the circle silk is crimped onto desired size; For very hard tungsten material, available thin tungsten skin (thickness 0.1mm～0.6mm) warp cuts or is laser-cut into the flat-shaped tungsten filament that meets desired size.
Embodiment:
Adopting the soft attitude Ф 2mmTa of annealed silk to be pressed into the cross section is the flat-shaped heated filament of 7 * 0.45mm2, compare with φ 2mm circle silk, outer surface area increases by 2.4 times, install and fix into flat-shaped heater array, with Ф 2mm circle silk array simultaneous test, as 2400 ℃ of other processing parameter such as hot-wire temperatures, 800 ℃ of underlayer temperatures, reaction pressure 35Torr, total gas flow rate 200SCCM, volume proportion CH4: H2=3: conditions such as 97 are identical, the nucleation density that shows result viewing improves three orders of magnitude and reaches 2 * 109/cm2, growth velocity improves 1.5 times, by 10um/hr → 15um/hr, every carat of power consumption reduces 30%.
Claims (2)
1. the heated filament of a diamond film growth device and electrode structure comprise a fixed electorde, a traveling electrode and rely on the heated filament of fixed electorde and traveling electrode clamping, it is characterized in that: described fixed electorde equal intervals be provided with one group of electrode column; Described traveling electrode equal intervals be provided with one group of electrode column, and described spacing equates with fixed electorde top electrode intercolumniation, described electrode column and the fixed electorde pole half pitch that staggers that powers on; Described heated filament is a flats heated filament, forms heater array on the electrode column of fixed electorde and traveling electrode.
2. according to the heated filament and the electrode structure of the described diamond film growth device of claim 1, it is characterized in that: described heated filament is in winding, and the medullary ray that forms the angle of adjacent two sections heated filaments is a sea line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100390883A CN100412231C (en) | 2006-03-27 | 2006-03-27 | Hot wire for diamond film growth device and electrode structure thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100390883A CN100412231C (en) | 2006-03-27 | 2006-03-27 | Hot wire for diamond film growth device and electrode structure thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1844450A CN1844450A (en) | 2006-10-11 |
| CN100412231C true CN100412231C (en) | 2008-08-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100390883A Expired - Fee Related CN100412231C (en) | 2006-03-27 | 2006-03-27 | Hot wire for diamond film growth device and electrode structure thereof |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009023471B4 (en) | 2009-06-02 | 2012-08-30 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Coating plant and process |
| CN105755448A (en) * | 2016-03-08 | 2016-07-13 | 浙江大学 | Nano diamond thin film and preparation method thereof |
| CN108468037B (en) * | 2018-02-26 | 2019-03-29 | 武汉大学 | Femtosecond laser predissociation device and chemical vapor depsotition equipment |
| CN110318030B (en) | 2018-03-29 | 2021-10-22 | 中国科学院宁波材料技术与工程研究所 | Self-supporting superfine nanocrystalline diamond thick film |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2672082Y (en) * | 2003-06-24 | 2005-01-19 | 中国科学院物理研究所 | Heater in hot lamp filament chemical gas phase deposition device |
| CN1710996A (en) * | 2005-08-02 | 2005-12-21 | 中国科学院力学研究所 | Novel plane radiation heater |
-
2006
- 2006-03-27 CN CNB2006100390883A patent/CN100412231C/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2672082Y (en) * | 2003-06-24 | 2005-01-19 | 中国科学院物理研究所 | Heater in hot lamp filament chemical gas phase deposition device |
| CN1710996A (en) * | 2005-08-02 | 2005-12-21 | 中国科学院力学研究所 | Novel plane radiation heater |
Non-Patent Citations (2)
| Title |
|---|
| 大面积EACVD金刚石沉积设备的研究. 卢文壮，佐敦稳，王珉，黎向锋，宋胜利，相炳坤.机械设计与制造，第6期. 2003 |
| 大面积EACVD金刚石沉积设备的研究. 卢文壮，佐敦稳，王珉，黎向锋，宋胜利，相炳坤.机械设计与制造，第6期. 2003 * |
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| Publication number | Publication date |
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| CN1844450A (en) | 2006-10-11 |
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