CN103981510A - Double-door vertical equipment for preparing diamond film - Google Patents
Double-door vertical equipment for preparing diamond film Download PDFInfo
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- CN103981510A CN103981510A CN201410240868.9A CN201410240868A CN103981510A CN 103981510 A CN103981510 A CN 103981510A CN 201410240868 A CN201410240868 A CN 201410240868A CN 103981510 A CN103981510 A CN 103981510A
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Abstract
The invention discloses double-door vertical equipment for preparing a diamond film, belongs to the technical field of coating films and particularly relates to equipment for preparing a diamond film. The equipment comprises a power supply, a control system, a vacuum system, a gas supply system and a deposition system. The equipment is characterized in that the deposition system is connected with the vacuum system and the gas supply system; the deposition system comprises a left chamber, a right chamber, a middle chamber and a heating wire force adjusting chamber; the middle chamber is fixedly mounted above the vacuum system; the left chamber and the right chamber are respectively and rotatably mounted on two sides of the middle chamber; heating wires are vertically and fixedly mounted inside the middle chamber; a heating wire force adjusting mechanism is connected to the lower ends of the heating wires. As the equipment adopts the heating wires which are vertically mounted inside the middle chamber, the vacuum chamber is in double-door vertical arrangement, to-be-coated test samples are respectively mounted on the inner walls of two vacuum chambers, and the heating wire force adjusting mechanism is mounted at the lower ends of the heating wires, efficient, stable and uniform preparation of the diamond film is achieved, and the equipment is simple, high in production efficiency and low in production cost.
Description
Technical field
The invention belongs to coating technique field, particularly a kind of equipment of preparing diamond film.
Background technology
Diamond has excellent power, heat, sound, the properties such as optical, electrical, chemical.The performance of artificial diamond film has approached natural diamond substantially, and excellent performance makes it be with a wide range of applications in high-tech area.At present, thin diamond membrane technique is at cutter, high-performance electric sub-element, and numerous occasions such as space material are applied, and receive fabulous effect, and it is applied in high-tech area and is extraordinarily paid close attention to by people.
At present, the preparation method of industrialization CVD diamond thin mainly contains two kinds, and the one, hot filament CVD (HFCVD), the 2nd, microwave plasma CVD method (MPCVD).Microwave method can be prepared the diamond thin of high-quality and thickness and reach the diamond wafer of millimeter magnitude, but equipment cost is high, and depositional area is less, and sedimentation velocity is slow.Hot wire process is simple to operate, and sedimentation rate is fast, and cost is low, easily controls the underlayer temperature of deposition, can obtain the diamond thin that quality is higher, area size is larger.Adopting HFCVD legal system is indoor by passing into vacuum reaction after reactant gases mixing for diamond thin, and mixed gas is after the cracking of high temperature heated filament, and the active atoms of carbon in its gas will be deposited on matrix surface, thereby grows diamond thin.
At present, adopt the most of heated filament in this preparation method's equipment to adopt horizontal layout, main enterprises including SP3 company of the U.S. is not always the case, for example US Patent No. 5997650, the heated filament of this structure distribution requires plated film sample to install in heated filament one side, and this structure exists following shortcoming:
(1) this filming equipment can only utilize a side of heated filament to realize coating single side, fails effectively to utilize heated filament, and plated film efficiency is lower;
(2) when this filming equipment often completes and takes out plated film sample after a plated film, could take out plated film sample after all needing to destroy heated filament, increase the use cost of heated filament.
At present, the equipment plated film that domestic some company has taked heated filament vertically to distribute, comprise the patent of invention of the 200910043584.X of Central South University etc., but device structure complexity, complicated rotating mechanism need to be installed, cost is higher, in the equipment of some patented technology, heated filament adopts vertically and distributes, heated filament lower end adopts the lower end of counterweight hanging at heated filament, but because heated filament has elasticity, can cause lower electrode plate to rock, and counterweight is free suspension, will further cause heated filament to rock, the diamond film that affects sample generates quality.
Summary of the invention
The object of the invention is to overcome above the deficiencies in the prior art, provide a kind of double door the vertical equipment of preparing diamond film, in this equipment, adopt heated filament to be vertically installed on the chamber of middle part, vacuum chamber adopts the vertical layout of double door, and sample to be coated is installed on respectively two vacuum chamber inwalls, and heated filament lower end is installed heated filament and adjusted force mechanisms, realize efficient, stable, prepare diamond thin uniformly, this equipment is simple, and production efficiency is high, and production cost is low.
The technical scheme that the present invention adopted is for achieving the above object: the vertical equipment of preparing diamond film of a kind of double door, comprise power supply and Controlling System, vacuum system, airing system and depositing system, it is characterized in that: on described depositing system, be connected with vacuum system and airing system, described depositing system comprises left chamber, right chamber, middle part chamber and heated filament are adjusted force mechanisms, described middle part chamber is fixedly installed on vacuum system, left chamber and right chamber rotate respectively and are installed on chamber both sides, middle part, heated filament is vertically fixedly installed in center lumen chamber interior, heated filament lower end is connected with heated filament and adjusts force mechanisms.
Described airing system is connected on the middle part chamber of depositing system by gas pipeline
Described middle part chamber comprises vacuum chamber wainscot and vacuum chamber lower wall panels, fixed support is fixedly installed on vacuum chamber wainscot, electric pole plate is fixedly installed on fixed support, heated filament adjusts force mechanisms to be fixedly installed on vacuum chamber lower wall panels, lower electrode plate is fixed on heated filament adjusts force mechanisms upper end, and heated filament two ends are individually fixed on electric pole plate and lower electrode plate.
Described heated filament adjusts force mechanisms to adopt protection bell jar to be fixedly installed on vacuum chamber lower wall panels, and roller bearing is fixedly installed in protection bell jar inside, and heated filament adjusts power slide plate upper end to be connected with lower electrode plate, and protection bell jar upper end is provided with limiting through hole; Heated filament adjusts power slide plate lower end successively through limiting through hole and roller bearing on protection bell jar, and lower electrode plate is fixedly installed in heated filament and adjusts the heated filament of force mechanisms to adjust on power slide plate, and can adjust power slide plate easy on and off to slide with heated filament.
Described heated filament adjusts power slide plate lower end successively through after limiting through hole and roller bearing on protection bell jar, then is connected with counterweight.
Described heated filament adjusts power slide plate lower end successively through after limiting through hole and roller bearing on protection bell jar, then is connected with the power of tune spring, adjusts the power spring the other end to be connected with vacuum chamber lower wall panels or protection bell jar diapire.
Described left chamber and/or right chamber interior are installed with sample fixed mechanism.
Described sample fixed mechanism adopts sidepiece base to be fixedly installed in left chamber and/or right chamber inner wall, and shaft collar is fixed on sidepiece base, and fixed tube is fixed on shaft collar.
Left chamber and right chamber are rotated and are installed on chamber two side, middle part by rotation axis respectively.
The beneficial effect of present device is:
(1) in equipment, depositing system adopts double door mode, is divided into left chamber and right chamber, is beneficial to product and takes out, and changes sample at every turn and does not destroy heated filament, reduces heated filament cost;
Between (2) two chambers, be middle part chamber, in the chamber of middle part, heated filament is vertically arranged installation, and sample to be coated is installed on respectively on left and right chamber, heated filament can carry out plated film to the element of left and right chamber, realize large area two-side plated film, improve plated film efficiency, further reduce costs;
(3) heated filament of heated filament lower end adjusts force mechanisms or to adjust the effective tensioning heated filament of power spring by deadweight, counterweight, prevents that heated filament from swinging, and realizes the effect of uniform coated;
(4) in prior art and patent, in order to improve the efficiency of plated film, generally adopt rotary plating equipment, complicated rotating mechanism need to be installed, device structure of the present invention is simple, and cost is low, easy to operate.
Brief description of the drawings
Fig. 1 is the perspective view of the vertical equipment of preparing diamond film of a kind of double door.
Fig. 2 is the A-A schematic cross-section of the vertical equipment of preparing diamond film of a kind of double door.
Fig. 3 is the B-B schematic cross-section of the vertical equipment of preparing diamond film of a kind of double door.
In figure: 1, power supply and Controlling System, 2, rotation axis, 3, middle part chamber; 41, left chamber, 42, right chamber, 5, gas pipeline; 6, airing system, 7, vacuum system, 81, vacuum chamber wainscot; 82, vacuum chamber lower wall panels, 9, electric pole plate, 10, lower electrode plate; 11, heated filament is adjusted power slide plate; 12, protection bell jar, 13, counterweight, 14, heated filament; 15, fixed support; 16, sample to be coated, 17, sidepiece base, 18, shaft collar; 19, fixed tube; 20, roller bearing, 21, sample fixed mechanism, 22, depositing system
Embodiment
Below in conjunction with accompanying drawing, the present invention will be further described, but the present invention is not limited to specific embodiment.
Embodiment 1
The vertical equipment of preparing diamond film of a kind of double door as shown in Figure 1,2 and 3, comprises power supply and Controlling System, vacuum system, airing system and depositing system.
Power supply and Controlling System 1 have realized the functions such as power supply, control, record, supervision, warning and the protection of vacuum system 7, airing system 6 and depositing system 22.
On depositing system, be connected with vacuum system and airing system, depositing system comprises that left chamber 41, right chamber 42, middle part chamber 3 and heated filament adjust force mechanisms, also comprises water-cooling system, cooling for chamber.
Airing system comprises 1 road hydrogen (99.99%), 1 road methane (99.99%), 1 road nitrogen (15-20psi), 1 road argon gas (15-20psi) and No. 1 nitrogen (70psi) etc. and respective quality under meter and controller for pneumavalve.
Vacuum system is made up of the unit of bleeding, air pressure controlling system, exhaust treatment system.
In depositing system, middle part chamber is fixedly installed on vacuum system, and left chamber and right chamber are rotated and are installed on chamber both sides, middle part by rotation axis respectively, and heated filament 14 is vertically fixedly installed in center lumen chamber interior, and heated filament lower end is connected with heated filament and adjusts force mechanisms.
Airing system is connected on the middle part chamber 3 of depositing system by gas pipeline.
Vacuum system is also connected on the chamber 3 of middle part by vacuum pipe, air valve etc.
Middle part chamber comprises vacuum chamber wainscot 81 and vacuum chamber lower wall panels 82, fixed support 15 is fixedly installed on vacuum chamber wainscot, electric pole plate 9 is fixedly installed on fixed support, heated filament adjusts force mechanisms to be fixedly installed on vacuum chamber lower wall panels, lower electrode plate 10 is fixed on heated filament adjusts force mechanisms upper end, and heated filament two ends are individually fixed on electric pole plate and lower electrode plate.
Heated filament adjusts force mechanisms to adopt protection bell jar 12 to be fixedly installed on vacuum chamber lower wall panels, and roller bearing 20 is fixedly installed in protection bell jar inside, and heated filament adjusts power slide plate 11 upper ends to be connected with lower electrode plate, and protection bell jar upper end is provided with limiting through hole; Heated filament adjusts power slide plate lower end successively through limiting through hole and roller bearing on protection bell jar.
Left chamber and right chamber interior are installed with sample fixed mechanism 21.
Sample fixed mechanism adopts sidepiece base 17 to be fixedly installed in left chamber and/or right chamber inner wall, shaft collar 18 is fixed on sidepiece base, fixed tube 19 is fixed on shaft collar, and fixed tube adopts quartz material to make, and sample 16 to be coated is that diamond cutter is installed on fixed tube.
Limiting through hole on protection bell jar plays position-limiting action; make heated filament adjust power slide plate only can move up and down, can radial-play, thus ensure that heated filament can not radially wobble; ensure sample after installation and between heated filament distance can not change, improved the quality of sample in the time generating diamond film.
Embodiment 2
On embodiment 1 basis, increase following technology contents:
Heated filament adjusts power slide plate lower end successively through after limiting through hole and roller bearing on protection bell jar, then is connected with counterweight.
Embodiment 3
On embodiment 1 basis, increase following technology contents:
Heated filament adjusts power slide plate lower end successively through after limiting through hole and roller bearing on protection bell jar, then is connected with the power of tune spring, adjusts the power spring the other end to be connected with vacuum chamber lower wall panels.
Claims (9)
1. the vertical equipment of preparing diamond film of double door, comprise power supply and Controlling System (1), vacuum system (7), airing system (6) and depositing system (22), it is characterized in that: on described depositing system (22), be connected with vacuum system (2) and airing system (3), described depositing system comprises left chamber (41), right chamber (42), middle part chamber (3) and heated filament are adjusted force mechanisms, described middle part chamber (3) is fixedly installed on vacuum system, left chamber (41) and right chamber (42) rotate respectively and are installed on chamber (3) both sides, middle part, heated filament (14) is vertically fixedly installed in chamber (3) inside, middle part, heated filament (14) lower end is connected with heated filament and adjusts force mechanisms.
2. the vertical equipment of preparing diamond film of a kind of double door according to claim 1, is characterized in that: described airing system (6) is connected on the middle part chamber (3) of depositing system (22) by gas pipeline (5).
3. the vertical equipment of preparing diamond film of a kind of double door according to claim 1, it is characterized in that: described middle part chamber (3) comprises vacuum chamber wainscot (81) and vacuum chamber lower wall panels (82), fixed support (15) is fixedly installed on vacuum chamber wainscot (81), electric pole plate (9) is fixedly installed on fixed support (15), heated filament adjusts force mechanisms to be fixedly installed on vacuum chamber lower wall panels (82), lower electrode plate (10) is fixed on heated filament adjusts force mechanisms upper end, heated filament (14) two ends are individually fixed on electric pole plate (9) and lower electrode plate (10).
4. the vertical equipment of preparing diamond film of a kind of double door according to claim 3, it is characterized in that: described heated filament adjusts force mechanisms to adopt protection bell jar (12) to be fixedly installed on vacuum chamber lower wall panels (82), roller bearing (20) is fixedly installed in protection bell jar (12) inside, and protection bell jar upper end is provided with limiting through hole; Heated filament adjusts power slide plate (11) upper end to be connected with lower electrode plate (10), and heated filament adjusts power slide plate (11) lower end successively through limiting through hole and roller bearing (20) on protection bell jar (12).
5. the vertical equipment of preparing diamond film of a kind of double door according to claim 4; it is characterized in that: described heated filament adjusts power slide plate (11) lower end successively through after limiting through hole and roller bearing (20) on protection bell jar (12), then is connected with counterweight (13).
6. the vertical equipment of preparing diamond film of a kind of double door according to claim 4; it is characterized in that: described heated filament adjusts power slide plate (11) lower end successively through after limiting through hole and roller bearing (20) on protection bell jar (12); be connected with the power of tune spring again, adjust the power spring the other end to be connected with vacuum chamber lower wall panels (82) or protection bell jar (12) diapire.
7. the vertical equipment of preparing diamond film of a kind of double door according to claim 1, is characterized in that: described left chamber (41) and/or right chamber (42) inside are installed with sample fixed mechanism (21).
8. the vertical equipment of preparing diamond film of a kind of double door according to claim 7, it is characterized in that: described sample fixed mechanism (21) adopts sidepiece base (17) to be fixedly installed in left chamber (41) and/or right chamber (42) inwall, it is upper that shaft collar (18) is fixed on sidepiece base (17), and fixed tube (19) is fixed on shaft collar (18).
9. the vertical equipment of preparing diamond film of a kind of double door according to claim 1, is characterized in that: left chamber (41) and right chamber (42) are rotated and are installed on chamber (3) two side, middle part by rotation axis (2) respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410240868.9A CN103981510A (en) | 2014-05-30 | 2014-05-30 | Double-door vertical equipment for preparing diamond film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410240868.9A CN103981510A (en) | 2014-05-30 | 2014-05-30 | Double-door vertical equipment for preparing diamond film |
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| CN103981510A true CN103981510A (en) | 2014-08-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410240868.9A Pending CN103981510A (en) | 2014-05-30 | 2014-05-30 | Double-door vertical equipment for preparing diamond film |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108531882A (en) * | 2017-03-03 | 2018-09-14 | 深圳先进技术研究院 | Filament assembly and deposition of diamond thin films equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6582780B1 (en) * | 1999-08-30 | 2003-06-24 | Si Diamond Technology, Inc. | Substrate support for use in a hot filament chemical vapor deposition chamber |
| US20040071876A1 (en) * | 1996-07-25 | 2004-04-15 | Rakhimov Alexandr Tursunovich | Method for forming nanocrystalline diamond films for cold electron emission using hot filament reactor |
| CN102211218A (en) * | 2011-04-01 | 2011-10-12 | 上海祥仁新材料有限公司 | Diamond coated cutter and application thereof to processing of fiber composite material |
| EP2420591A1 (en) * | 2010-08-20 | 2012-02-22 | Echerkon Technologies Ltd. | Apparatus and methodology for hot wire chemical vapour deposition |
| CN203999807U (en) * | 2014-05-30 | 2014-12-10 | 大连理工常州研究院有限公司 | The vertical equipment of preparing diamond film of a kind of double door |
-
2014
- 2014-05-30 CN CN201410240868.9A patent/CN103981510A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040071876A1 (en) * | 1996-07-25 | 2004-04-15 | Rakhimov Alexandr Tursunovich | Method for forming nanocrystalline diamond films for cold electron emission using hot filament reactor |
| US6582780B1 (en) * | 1999-08-30 | 2003-06-24 | Si Diamond Technology, Inc. | Substrate support for use in a hot filament chemical vapor deposition chamber |
| EP2420591A1 (en) * | 2010-08-20 | 2012-02-22 | Echerkon Technologies Ltd. | Apparatus and methodology for hot wire chemical vapour deposition |
| CN102211218A (en) * | 2011-04-01 | 2011-10-12 | 上海祥仁新材料有限公司 | Diamond coated cutter and application thereof to processing of fiber composite material |
| CN203999807U (en) * | 2014-05-30 | 2014-12-10 | 大连理工常州研究院有限公司 | The vertical equipment of preparing diamond film of a kind of double door |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108531882A (en) * | 2017-03-03 | 2018-09-14 | 深圳先进技术研究院 | Filament assembly and deposition of diamond thin films equipment |
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Application publication date: 20140813 |