CN207775346U - Prepare the heated filament frame and device of diamond coatings - Google Patents
Prepare the heated filament frame and device of diamond coatings Download PDFInfo
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- CN207775346U CN207775346U CN201721416517.4U CN201721416517U CN207775346U CN 207775346 U CN207775346 U CN 207775346U CN 201721416517 U CN201721416517 U CN 201721416517U CN 207775346 U CN207775346 U CN 207775346U
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Abstract
The utility model is related to a kind of heated filament framves and device preparing diamond coatings.The heated filament frame includes two left electrodes, two right electrodes, and two heating wire groups of the connection positioned at the left electrode of same level and with the right electrode, the two left electrode is mutually parallel in a first direction, the two right electrode is mutually parallel in a first direction, the two heating wire group is mutually parallel in a second direction, and the first direction is mutually perpendicular to the second direction.In this way, using the heated filament frame diamond coatings can be prepared simultaneously to two surfaces of metal substrate.
Description
Technical field
The utility model is related to chemistry for gas phase depositing diamond film fields, and in particular to a kind of diamond coatings preparation facilities
And its heated filament frame.
Background technology
Diamond is the highest solid matter of hardness, and performance is stablized, wear-resisting, but is difficult into various required parts
And product.Diamond coatings are prepared using chemical vapour deposition technique, diamond properties can be made to be fully used.And heat wire method
It is a kind of method relatively conventional in chemical vapour deposition technique.
It is usually necessary to use the heater arrays that more heated filaments form for heated filament preparing diamond coatings to realize, mitigate reaction
Gas flows to heater array by the air inlet in reative cell from top, is heated through high temperature heated filament, and partial reaction gas resolves into carbon
Active group and atomic hydrogen.These carbon activity groups and atomic hydrogen flow to substrate, in the table of substrate under certain process conditions
Diamond coatings are deposited on face.
However, electrode used by heated filament preparing diamond coatings is the two-dimentional heated filament arranged in the same direction at present
Array.In this way, the group containing carbon activity and the atomic hydrogen overwhelming majority that are generated through heated filament decomposition are deposited on the upper surface of substrate work pieces,
There is a small amount of deposition in the side of substrate work pieces, the case where the lower surface of substrate work pieces is likely to occur without deposition.That is, once can only
It is deposited on a face of substrate work pieces, the preparation efficiency of substrate work pieces diamond coatings must be influenced in this way.
Utility model content
In view of this, it is necessary to provide a kind of preparations that can simultaneously at least two faces of substrate work pieces be carried out at the same time with deposition
The heated filament frame of diamond coatings, to solve the above problems.
In addition, to solve the above-mentioned problems, it there is a need to provide and a kind of preparing diamond coatings using above-mentioned heated filament frame
Device.
In order to achieve the above objectives, the heated filament frame provided by the utility model for preparing diamond coatings, including two left electrodes,
Two right electrodes, and two heating wire groups of the connection positioned at the left electrode of same level and with the right electrode, described two is left
Electrode is mutually parallel in a first direction, and the two right electrode is mutually parallel in a first direction, and the two heating wire group is
It is mutually parallel on two directions, the first direction is mutually perpendicular to the second direction.
In one embodiment, it is provided with supporting rack on the side of each right electrode far from the left electrode, it is described
Supporting rack is connected by insulating part with the right electrode；Each heating wire group includes multiple heating wire being mutually parallel, Mei Yisuo
It includes first end and the second end with the first end face to state heating wire, and the first end is fixed on the left electrode
On, the second end is fixed on by the right electrode on support frame as described above.
In one embodiment, the right electrode offers the fluting for accommodating the heating wire, and the second of the heating wire
End is fixed on by the fluting on support frame as described above.
In one embodiment, support frame as described above is equipped with high temperature spring, and the second end passes through the fluting to be fixed on
The other end of one end of the high temperature spring, the high temperature spring is fixed on support frame as described above.
In one embodiment, the angle of support frame as described above and horizontal plane is 30 °.
In one embodiment, the heated filament frame further includes being used to support the left electrode and the support right electrode
At least two electrode supports.
In one embodiment, the heater strip is tantalum wire.
In one embodiment, the left electrode and right electrode are molybdenum electrode.
In order to achieve the above objectives, the offer of the utility model institute prepares the device of diamond coatings, including above-mentioned arbitrary implementation
The heated filament frame that example is provided.
In one embodiment, the device for preparing diamond coatings further includes being placed in two electric heating being mutually parallel
Metal bearing assembly between silk group.
In one embodiment, the device for preparing diamond coatings further includes being placed in two electric heating being mutually parallel
Metal bearing assembly between silk group, the metal bearing assembly include two intermediate plates overlapped and step up screw, wherein are waited for
The metal substrate for prepare diamond coatings is placed on by the intermediate plate and the screw that steps up described in be mutually parallel two
Between heating wire group.
In one embodiment, the metal bearing assembly include be used to support the intermediate plate an at least holder and with institute
State the connected substrate tray of holder.
In one embodiment, the device for preparing diamond coatings further includes a lifting platform, the lifting platform and institute
It states substrate tray and is fixedly connected and will pass through that control lifting platform rises or drop adjustable clamp is located at metal substrate between two intermediate plates
Height between two heating wire groups.
In one embodiment, the device for preparing diamond coatings further includes electrode supporting component, the electrode branch
Support component is connected with each electrode support, is used to support each electrode support.
In one embodiment, the electrode supporting component includes transition copper support column and is used to support the transition copper
The water-cooled copper electrode support of support column, the transition copper support column are connected with the electrode support, the water-cooled copper electrode support
For hollow structure, the cooling liquid of flowing can be poured in.
The heated filament frame provided by the utility model for preparing diamond coatings and equipment, because in the both sides of metal substrate face
It is both provided with heating wire, in this way, can while depositing diamond film two-sided in metal substrate.In addition, gas outlet and metal substrate
It is perpendicular, gas flow direction can be made perpendicular with metal substrate surface, improve the active atoms of carbon base needed for diamond growth
The contact area of group or hydrogen atom and metal substrate surface.Furthermore due to being in the both sides of metal substrate face while to prepare gold
Hard rock coating, so, generated thermal stress is cancelled out each other in this process, and avoidable metal substrate occurs bending and deformation.
Description of the drawings
Fig. 1 is the dimensional structure diagram for the heated filament frame that diamond coatings are prepared in one embodiment of the utility model.
Fig. 2 is the sectional view for the device that diamond coatings are prepared in one embodiment of the utility model.
Fig. 3 is the schematic diagram at another visual angle of the metal bearing assembly of the device shown in Fig. 2 for preparing diamond coatings.
Fig. 4 is the enlarged diagram of the electrode supporting component of the device shown in Fig. 2 for preparing diamond coatings.
Specific implementation mode
Fig. 1 is referred to, the stereochemical structure for the heated filament frame for preparing diamond coatings in one embodiment of the utility model is shown
Schematic diagram.
As shown in Figure 1, this prepare diamond coatings heated filament frame 100 include two left electrodes 13, two right electrodes 14 and
Two heating wire groups 10.Wherein, each heating wire group 10 be used for connect be located at same level the left electrode 13 and with it is described
Right electrode 14.Each heating wire group 10 includes a plurality of heating wire 101 disposed in parallel.In the present embodiment, described two left electricity
Pole 13 is mutually parallel in a first direction, and the two right electrode 14 is also mutually parallel in a first direction, the two heating wire group
10 are mutually parallel in a second direction.The first direction is mutually perpendicular to the second direction.In the present embodiment, described
First direction is vertical direction, and the second direction is horizontal direction.
When need when the surface of a metal substrate (not shown) prepares diamond coatings, which is placed on phase
Mutually between two parallel heated filament groups 10, in this way, two outer surfaces of the metal substrate face are respectively towards a heated filament group 10, the i.e. heat
Guide frame 100 once can simultaneously carry out the both sides of the metal substrate preparation of diamond coatings.Improve the efficiency of processing.
The heated filament frame 100 further includes having an at least supporting rack 5.In this described mode, heated filament frame 100 includes 2 institutes
State supporting rack 5.The outside in the left electrode 13 or right electrode 14 is arranged in support frame as described above 5.The outside is the left electrode
13 sides of side and the right electrode 14 far from the left electrode 13 far from the right electrode 14.
In the present embodiment, the outside of each right electrode 14, that is, each right electrode is far from the left electrode
Supporting rack 5 is provided on side.In the present embodiment, which is the frame unit for having an opening.The right electrode 14 is set
It sets at the aperture position of support frame as described above 5.Specifically, support frame as described above 5 is connected by insulating part with the right electrode 14.
In the present embodiment, which is ceramic insulation piece.In other embodiments, which can be that rubber or plastics are exhausted
Embolium etc..Each heating wire group 10 includes multiple heating wire 101 being mutually parallel.In the present embodiment, multiple heating wire
101 equidistant are spaced apart, wherein the distance between two heating wire 101 of arbitrary neighborhood is 5-8 millimeters.Each heating wire 101
The second end 103 including first end 102 and with 102 face of the first end, the first end 102 are fixed on the left electricity
On pole 13, the second end 103 is fixed on by the right electrode 14 on support frame as described above 5.In the present embodiment, described
One end 102 is fixed to by nut XX on the left electrode 13.It is offered on the right electrode 14 for accommodating the heating wire
Fluting 15, the second end 103 of the heating wire 101 is fixed on by the fluting 15 on support frame as described above 5.In this implementation
In mode, which is arc groove.
In the present embodiment, support frame as described above 5 is equipped with spring 4.In the present embodiment, which is high temperature bullet
Spring.The second end 103 of the heating wire 101 is fixed on one end of the high temperature spring 4, the high temperature bullet across the fluting 15
The other end of spring 4 is fixed on support frame as described above 5.It is used specifically, offering the fixed high temperature spring 4 on support frame as described above 5
Trepanning XX.By the elastic pulling force by high temperature spring, the length of heating wire 101 can be adjusted.In this way, can avoid heating wire
101 deform upon after electrified regulation and influence the spacing with adjacent heated filament, so that it is guaranteed that mutual flat between adjacent heated filament
Row.
In the present embodiment, there are certain angles between support frame as described above 5 and horizontal plane.Preferably, which is
30°。
In addition, in the present embodiment, which further includes being used to support described in the left electrode 13 and support
At least two electrode supports 6 of right electrode 14.Wherein, an at least electrode support 6 is used to support two left electrodes 13, at least an electrode branch
Column 6 is used to support two right electrodes 14.In the present embodiment, which includes four electrode supports 6.Each two electrode
Pillar 6 is used to support two left electrodes, 13 or two right electrode 14.Specifically, the left electrode 13 and right electrode 14 and the electrode branch
Column 6 is provided with the receiving hole for accommodating the electrode support 6 on two connected ends.When the electrode support 6 is housed in the receiving
When in hole, the electrode support 6 is fixedly connected with electrode.In addition, the end of the electrode support 6 can also be locked by nut 16
It is fixed on electrode.
In the present embodiment, the heating wire 101 is tantalum wire.The left electrode 13 is molybdenum electrode with right electrode 14.
Fig. 2 is referred to, (the following letter of device 200 for preparing diamond coatings in one embodiment of the utility model is shown
Weighing device 200) sectional view.The device 200 includes the heated filament frame 100 that the above-mentioned any one embodiment of the utility model is provided.
In addition, the device further includes metal bearing assembly 201.The metal bearing assembly 201 be partially placed at be mutually parallel it is described
Between two heating wire groups 10.
As shown in Fig. 2, the metal bearing assembly 201 includes two intermediate plates 8 overlapped and steps up screw 7.One is pending
The metal substrate for preparing diamond coatings is placed on two electricity being mutually parallel by the intermediate plate 8 and the screw 7 that steps up
Between heated filament group 10.
In one embodiment, the metal bearing assembly 201 includes at least holder 9 for being used to support the intermediate plate 8
And the substrate tray 3 being connected with the holder 9.In the present embodiment, the metal bearing assembly 201 includes two holders
9。
Please also refer to Fig. 3, it show the schematic diagram at another visual angle of the metal bearing assembly 201.As shown in figure 3,
The holder 9 is substantially L-shaped.Wherein, an intermediate plate 8 is fixed on the holder 9 far from the substrate tray 3 by welding
End on, another intermediate plate 8 can freely activity, by step up screw 7 fixed to the holder 9 end on.By adjusting institute
It states and steps up screw 7, metal substrate can be clamped between two intermediate plate 8 and on the end fixed to the holder 9.
In the present embodiment, the intermediate plate 8, it is described step up screw 7, the holder 9 is made of metal molybdenum；The substrate
Pallet 3 is made of metallic copper.Certainly, the intermediate plate 8, screw 7, the holder 9 and the substrate tray 3 of stepping up can be by
Other metals are made.
Referring again to Fig. 2, described device 200 further includes a lifting platform 11.The lifting platform 11 is solid with the substrate tray 3
Fixed connection.It can be appreciated that being existed by controlling 11 liters of lifting platform or dropping the metal substrate that adjustable clamp is located between two intermediate plates 8
Height between two heating wire groups 10.
In addition, described device 200 further includes two stomatas 2.Each stomata 2 is located at each institute's heating wire group
10 outside.It should be noted that outside described herein is the side of the two heating wire groups 10 away from each other.It is heavy when needing
When product diamond coatings, it is passed through required mixed gas by two stomatas 2, and the surface of the method for the gas and metal substrate is hung down
Directly.So the quality of diamond coatings preparation can be improved.In the present embodiment, the gas being passed through can be hydrogen (H2)、
Methane (CH4), 3,3', the mixed gas of 5,5'- tetramethyl benzidines (TMB).It should be understood that in other embodiments,
In order to which the efficiency for preparing diamond coatings to be increased to faster, multiple stomatas 2 can be set.
Please also refer to Fig. 4, described device 200 further includes electrode supporting component 202.The electrode supporting component 202 with
Each electrode support 6 is connected, and is used to support each electrode support 6.
It show the enlarged diagram of electrode supporting component 202.The electrode supporting component 202 includes a transition copper support column
17 and it is used to support a water-cooled copper electrode support 1 of the transition copper support column 17.The transition copper support column 17 with it is described
Electrode support 6 be connected, by special copper at.The water-cooled copper electrode support 1 is connected with external power supply.
In the present embodiment, the transition copper support column 17 and the electrode support 6 and water-cooled copper electrode support 1 are logical
Threaded connection is crossed to fix.The end that the electrode support 6, the water-cooled copper electrode support 1 are connected with the transition copper support column 17
Thread groove (not shown) is provided on end, two ends of the transition copper support column 17 are equipped with to be matched with the thread groove
Screw thread.The transition copper support column 17 and the electrode support 6 and institute are realized by the mutual cooperation of thread groove and screw thread
State being fixedly connected between water-cooled copper electrode support 1.
In the present embodiment, the water-cooled copper electrode support 1 is hollow-core construction.When electrode (left electrode 13 or right electrode
14) when working, by being passed through flowing water in water-cooled copper electrode support 1, which can take away this to a certain extent
Heat caused by water-cooled copper electrode support 1, electrode support 6 and electrode, to prevent, temperature is excessively high and burns out electrode support 6.
Compared with the existing technology, the heated filament frame provided by the utility model for preparing diamond coatings and equipment, because in gold
The both sides for belonging to substrate face are both provided with heating wire, in this way, can while depositing diamond film two-sided in metal substrate.In addition,
Gas outlet is perpendicular with metal substrate, and gas flow direction can be made perpendicular with metal substrate surface, improves diamond growth institute
The contact area of the active atoms of carbon group or hydrogen atom and metal substrate surface that need.Furthermore due to being in metal substrate face
Both sides simultaneously prepare diamond coatings, so, in this process caused by thermal stress cancel out each other, can avoid metal substrate
The problem of flexural deformation occurred by unbalance stress during preparing diamond coatings.
It is the embodiment of the utility model embodiment above, it is noted that for the ordinary skill people of the art
For member, under the premise of not departing from the utility model embodiment principle, several improvements and modifications can also be made, these improvement
It is also considered as the scope of protection of the utility model with retouching.
Claims (12)
1. a kind of heated filament frame preparing diamond coatings, which is characterized in that be located at including two left electrodes, two right electrodes, and connection
The left electrode of same level and two heating wire groups with the right electrode, the two left electrode are mutual in a first direction
Parallel, the two right electrode is mutually parallel in a first direction, and the two heating wire group is mutually parallel in a second direction, described
First direction is mutually perpendicular to the second direction.
2. heated filament frame as described in claim 1, which is characterized in that on the side of each right electrode far from the left electrode
It is provided with supporting rack, support frame as described above is connected by insulating part with the right electrode；Each heating wire group includes multiple mutually flat
Capable heating wire, each heating wire include that first end and the second end with the first end face, the first end are fixed
On the left electrode, the second end is fixed on by the right electrode on support frame as described above.
3. heated filament frame as claimed in claim 2, which is characterized in that the right electrode, which offers, accommodates opening for the heating wire
The second end of slot, the heating wire is fixed on by the fluting on support frame as described above.
4. heated filament frame as claimed in claim 3, which is characterized in that support frame as described above is equipped with high temperature spring, the second end
It is fixed on one end of the high temperature spring across described slot, the other end of the high temperature spring is fixed on support frame as described above.
5. the heated filament frame as described in claim 2 to 4 any one, which is characterized in that the angle of support frame as described above and horizontal plane
It is 30 °.
6. heated filament frame as described in claim 1, which is characterized in that further include being used to support described in the left electrode and support
At least two electrode supports of right electrode.
7. a kind of device preparing diamond coatings, which is characterized in that include the heat as described in claim 1 to 6 any one
Guide frame.
8. device as claimed in claim 7, which is characterized in that further include being placed between the two heating wire groups being mutually parallel
Metal bearing assembly, the metal bearing assembly includes two intermediate plates overlapped and steps up screw, wherein pending preparation
The metal substrate of diamond coatings is placed on the two heating wire groups being mutually parallel by the intermediate plate and the screw that steps up
Between.
9. device as claimed in claim 8, which is characterized in that the metal bearing assembly includes being used to support the intermediate plate
An at least holder and the substrate tray being connected with the holder.
10. device as claimed in claim 9, which is characterized in that further include a lifting platform, the lifting platform and the substrate holder
Disk, which is fixedly connected, will pass through that control lifting platform rises or drop adjustable clamp is located at metal substrate between two intermediate plates in two electric heating
Height between silk group.
11. device as claimed in claim 7, which is characterized in that in the heated filament frame further include being used to support the left electrode
And when supporting at least two electrode support of the right electrode, described device further includes electrode supporting component, the electrode supporting
Component is connected with each electrode support, is used to support each electrode support.
12. device as claimed in claim 11, which is characterized in that the electrode supporting component include transition copper support column and
It is used to support the water-cooled copper electrode support of the transition copper support column, the transition copper support column is connected with the electrode support,
The water-cooled copper electrode support is hollow structure, can pour in the cooling liquid of flowing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721416517.4U CN207775346U (en) | 2017-10-27 | 2017-10-27 | Prepare the heated filament frame and device of diamond coatings |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721416517.4U CN207775346U (en) | 2017-10-27 | 2017-10-27 | Prepare the heated filament frame and device of diamond coatings |
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| Publication Number | Publication Date |
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| CN207775346U true CN207775346U (en) | 2018-08-28 |
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| CN201721416517.4U Active CN207775346U (en) | 2017-10-27 | 2017-10-27 | Prepare the heated filament frame and device of diamond coatings |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109722646A (en) * | 2017-10-27 | 2019-05-07 | 深圳先进技术研究院 | Prepare the heated filament frame and device of diamond coatings |
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2017
- 2017-10-27 CN CN201721416517.4U patent/CN207775346U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109722646A (en) * | 2017-10-27 | 2019-05-07 | 深圳先进技术研究院 | Prepare the heated filament frame and device of diamond coatings |
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