CN216663228U - Hot wire heating device and hot wire chemical vapor deposition equipment - Google Patents
Hot wire heating device and hot wire chemical vapor deposition equipment Download PDFInfo
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- CN216663228U CN216663228U CN202122552651.XU CN202122552651U CN216663228U CN 216663228 U CN216663228 U CN 216663228U CN 202122552651 U CN202122552651 U CN 202122552651U CN 216663228 U CN216663228 U CN 216663228U
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Abstract
The utility model discloses a hot wire heating device and hot wire chemical vapor deposition equipment, wherein the hot wire heating device comprises a workpiece mounting position, a first clamping device, a second clamping device and a hot wire; the hot wire comprises a first hot wire end part, a hot wire middle part and a second hot wire end part which are sequentially distributed; the first hot wire end is clamped on the first clamping device, and the second hot wire end is clamped on the second clamping device. Two ends of a hot wire are respectively clamped on the first clamping device and the second clamping device, and the middle part of the hot wire is arranged between the first clamping device and the second clamping device and is distributed horizontally to provide main heat for a workpiece; and the first hot wire end part and the second hot wire end part of the hot wire are clamped on the corresponding clamping devices and are arranged between the middle part of the hot wire and the workpiece mounting position, the extending directions of the first hot wire end part and the second hot wire end part are not parallel to the horizontal direction, namely, in the vertical direction, the hot wire end parts are closer to the workpiece, auxiliary heat can be provided for the workpiece from the side surfaces, and the consistency of the coating quality of the product is ensured.
Description
Technical Field
The utility model relates to the technical field of hot wire chemical vapor deposition, in particular to a hot wire heating device and hot wire chemical vapor deposition equipment.
Background
The Hot wire Chemical Vapor Deposition (HFCVD) method is an important method for artificially synthesizing the diamond film, has the advantages of mature process, simple equipment, convenience in operation, low preparation cost, high Deposition rate, large Deposition area and the like, and is very suitable for large-scale industrial production. The hot wire chemical vapor deposition method generally uses hydrogen and methane as gas source gases, mixes the gases according to a certain proportion and introduces the gases into a reaction chamber which is vacuumized in advance, and carries out chemical reaction under the action of a high-temperature metal hot wire (higher than 2000 ℃) to generate carbon clusters, and then further nucleates and slowly grows to finally form a diamond film on the surface of a polished substrate.
The hot wire is clamped by a horizontal clamping mode, namely two clamps which are arranged oppositely are arranged on a horizontal plane, two ends of the hot wire are respectively clamped on the clamps on two sides, and the whole hot wire is distributed horizontally. The heat generated by the hot wire in the clamping mode is usually non-uniform, for example, the temperature at the two ends of the hot wire is lower than the temperature in the middle of the hot wire, so that the effect of non-uniform temperature distribution of the hot wire is brought, and the coating quality consistency of a product is influenced.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a hot wire heating device and hot wire chemical vapor deposition equipment to solve the problem of uneven temperature distribution of the existing hot wire.
In order to achieve the purpose, the utility model adopts the following technical scheme:
a hot wire heating device comprises a workpiece mounting position; a first clamping device, a second clamping device and a hot wire are arranged on one side of the workpiece mounting position; the hot wire comprises a first hot wire end part, a hot wire middle part and a second hot wire end part which are distributed in sequence;
the middle part of the hot wire extends along the horizontal direction and is arranged between the first clamping device and the second clamping device;
the first hot wire end part and the second hot wire end part are both arranged between the middle part of the hot wire and the workpiece mounting position;
the first hot wire end part is clamped on the first clamping device, and the extending direction of the first hot wire end part is not parallel to the horizontal direction; the second hot wire end part is clamped on the second clamping device, and the extending direction of the second hot wire end part is not parallel to the horizontal direction.
Optionally, the first clamping device includes a first clamping base and a first supporting member, and the first supporting member and the first clamping base are sequentially arranged at intervals along a first direction;
the second clamping device comprises a second clamping base and a second supporting piece, and the second supporting piece and the second clamping base are sequentially arranged at intervals along a second direction.
Optionally, a connecting piece is arranged between the first supporting piece and the second supporting piece, one end of the connecting piece is fixedly connected with the first supporting piece, and the other end of the connecting piece is fixedly connected with the second supporting piece.
Optionally, two ends of the connecting piece are respectively provided with a mounting groove, and the first supporting piece and the second supporting piece are both provided with a connecting hole;
the mounting groove is fixedly connected with the connecting hole through a bolt.
Optionally, a tension spring is mounted on the first clamping base, one end of the tension spring is fixedly connected with the first clamping base, and the other end of the tension spring is fixedly connected with the end part of the first hot wire;
or, an extension spring is installed on the second clamping base, one end of the extension spring is fixedly connected with the second clamping base, and the other end of the extension spring is fixedly connected with the end part of the second hot wire.
Optionally, the first clamping base and the second clamping base are both provided with threaded holes, the threaded holes are connected with compression bolts, and the compression bolts are used for clamping the hot wires.
Optionally, the first supporting member and the second supporting member are both provided with a guide groove, and the hot wire passes through the guide groove.
A hot wire chemical vapor deposition device comprises the hot wire heating device.
Compared with the prior art, the utility model has the following beneficial effects:
according to the hot wire heating device provided by the utility model, two ends of a hot wire are respectively clamped on the first clamping device and the second clamping device, and the middle part of the hot wire is arranged between the first clamping device and the second clamping device and is distributed horizontally to provide main heat for a workpiece; and the first hot wire end part and the second hot wire end part of the hot wire are clamped on the corresponding clamping devices and are arranged between the middle part of the hot wire and the workpiece mounting position, the extending directions of the first hot wire end part and the second hot wire end part are not parallel to the horizontal direction, namely, the hot wire end parts are closer to the workpiece in the vertical direction, and auxiliary heat can be provided for the workpiece from the side surfaces, so that the integral heat distribution of the hot wire is more uniform, and the consistency of the coating quality of the product is ensured.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.
The structure, proportion, size and the like shown in the drawings are only used for matching with the content disclosed in the specification, so that the person skilled in the art can understand and read the description, and the description is not used for limiting the limit condition of the implementation of the utility model, so the method has no technical essence, and any structural modification, proportion relation change or size adjustment still falls within the scope of the technical content disclosed by the utility model without affecting the effect and the achievable purpose of the utility model.
FIG. 1 is a schematic view of a partial structure of a hot-wire chemical vapor deposition apparatus according to an embodiment of the present invention;
fig. 2 is a schematic overall structure diagram of a hot wire heating device according to an embodiment of the present invention;
FIG. 3 is a schematic view of the enlarged partial structure of FIG. 2 at A;
fig. 4 is a schematic side view of a hot wire heating device according to an embodiment of the present invention.
Illustration of the drawings: 1. a first clamping device; 11. a first clamping base; 12. a first support member; 2. a second clamping device; 21. a second clamping base; 22. a second support member; 23. a guide groove; 3. heating wires; 31. A first hot wire end; 32. a second hot wire end; 33. the middle part of the hot wire; 4. a workpiece mounting position; 5. a connecting member; 51. mounting grooves; 6. a tension spring.
Detailed Description
In order to make the objects, features and advantages of the present invention more apparent and understandable, the embodiments of the present invention will be described in detail and completely with reference to the accompanying drawings, and it is to be understood that the embodiments described below are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. It should be noted that when one component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present.
The technical scheme of the utility model is further explained by the specific implementation mode in combination with the attached drawings.
Referring to fig. 1 to 4, fig. 1 is a partial structural schematic view of a hot wire chemical vapor deposition apparatus according to an embodiment of the present invention, fig. 2 is a schematic structural view of an entire hot wire heating device according to an embodiment of the present invention, fig. 3 is a schematic structural view of a portion of fig. 2 at a position a enlarged, and fig. 4 is a schematic structural view of a side view of the hot wire heating device according to an embodiment of the present invention.
Example one
The hot wire heating device that this embodiment provided is applied to hot wire chemical vapor deposition equipment on, improves through the structure to hot wire heating device, makes the distribution of its temperature field more reasonable, and then guarantees product quality's uniformity.
As shown in fig. 2 to 4, the hot wire heating apparatus of the present embodiment includes a workpiece mounting site 4; a first clamping device 1, a second clamping device 2 and a hot wire 3 are arranged on one side of the workpiece mounting position 4; the hot wire 3 comprises a first hot wire end part 31, a hot wire middle part 33 and a second hot wire end part 32 which are distributed in sequence.
The hot wire middle part 33 extends along the horizontal direction and is arranged between the first clamping device 1 and the second clamping device 2.
The first and second hot wire end portions 31 and 32 are both disposed between the hot wire central portion 33 and the workpiece mounting location 4.
The first hot wire end part 31 is clamped on the first clamping device 1, and the extending direction of the first hot wire end part 31 is not parallel to the horizontal direction; the second hot wire end portion 32 is clamped on the second clamping device 2, and the extending direction of the second hot wire end portion 32 is not parallel to the horizontal direction. It should be noted that the hot wire 3 is heated in an electrical heating manner, that is, by applying current to the hot wire 3, heat is generated according to the principle of thermal resistance, wherein the first clamping device 1 can be used as an anode, and the second clamping device 2 can be used as a cathode, so that current is conducted on the hot wire 3, and further heat is generated.
Specifically, when the hot wire 3 is installed on the first clamping device 1 and the second clamping device 2, two ends of the hot wire 3 are clamped on the first clamping device 1 and the second clamping device 2 respectively, and the hot wire middle part 33 of the hot wire 3 is arranged between the first clamping device 1 and the second clamping device 2 and is distributed horizontally to provide main heat for the workpiece; and the first hot wire end part 31 and the second hot wire end part 32 of the hot wire 3 are clamped on the corresponding clamping device and are arranged between the hot wire middle part 33 and the workpiece mounting position 4, the extending directions of the first hot wire end part and the second hot wire end part are not parallel to the horizontal direction, namely, in the vertical direction, the hot wire end parts are closer to the workpiece, and auxiliary heat can be provided for the workpiece from the side surface, so that the overall heat distribution of the hot wire 3 is more uniform, and the consistency of the coating quality of the product is ensured.
Further, as shown in fig. 2, the first clamping device 1 includes a first clamping base 11 and a first supporting member 12, and the first supporting member 12 and the first clamping base 11 are sequentially disposed at intervals along the first direction.
The second clamping device 2 comprises a second clamping base 21 and a second supporting piece 22, and the second supporting piece 22 and the second clamping base 21 are sequentially arranged at intervals along the second direction.
The first direction is not parallel to the horizontal direction and extends along the left-lower direction, and the second direction is not parallel to the horizontal direction and extends along the right-lower direction; therefore, the first support member 12 and the first clamping base 11, which are distributed in the first direction, are distributed in the lower left direction, and the first hot wire end portion 31 is disposed between the first clamping base 11 and the first support member 12, and also extends in the lower left direction; the second support member 22 and the second chuck base 21, which are distributed in the second direction, are distributed in the lower right direction, and the second hot wire end portion 32 is disposed between the second support member 22 and the second chuck base 21. Therefore, the hot wire 3 is integrally distributed in an shape and is arranged above the workpiece mounting position 4, the temperature field distribution is more reasonable, the coating quality of the workpiece is guaranteed, the hot wire 3 is better in tensioning effect and not easy to deform due to the distribution of the shape, and the service life of the hot wire 3 is prolonged.
Further, a connecting member 5 is disposed between the first supporting member 12 and the second supporting member 22, one end of the connecting member 5 is fixedly connected to the first supporting member 12, and the other end of the connecting member 5 is fixedly connected to the second supporting member 22. In this embodiment, the number of the connecting members 5 is two, so that a square structure is formed among the first supporting member 12, the second supporting member 22 and the connecting members 5, the position accuracy between the first supporting member 12 and the second supporting member 22 is maintained, and the processing stability is further ensured.
Further, the two ends of the connecting member 5 are respectively provided with a mounting groove 51, and the first supporting member 12 and the second supporting member 22 are both provided with a connecting hole. The mounting groove 51 is fixedly connected with the connecting hole by a bolt.
Wherein, the mounting groove 51 that is seted up on the connecting piece 5 leaves the installation threshold value for being connected between connecting piece 5 and the support piece, and the length of the groove length direction of mounting groove 51 is greater than the aperture of connecting hole, therefore, when the interval between first support piece 12 and the second support piece 22 is inconsistent with standard interval, the bolt still can pass mounting groove 51, guarantees heater heating device's stability.
Further, as shown in fig. 3 and 4, a tension spring 6 is mounted on the first clamping base 11, one end of the tension spring 6 is fixedly connected with the first clamping base 11, and the other end of the tension spring 6 is fixedly connected with the first hot wire end 31;
or, the second clamping base 21 is provided with a tension spring 6, one end of the tension spring 6 is fixedly connected with the second clamping base 21, and the other end of the tension spring 6 is fixedly connected with the second hot wire end 32.
In this embodiment, the tension spring 6 is disposed between the second clamping base 21 and the second hot wire end portion 32 to tension the second clamping base 21 and the second hot wire end portion 32, and it should be noted that the length of the hot wire 3 that is not deformed is smaller than the sum of the first distance between the first clamping base 11 and the first supporting member 12 (along the first direction), the second distance between the first supporting member 12 and the second supporting member 22 (along the horizontal direction), and the third distance between the second supporting member 22 and the second clamping base 21 (along the second direction), so that the hot wire 3 is kept tensioned after being installed.
Further, the first clamping base 11 and the second clamping base 21 are both provided with threaded holes, the threaded holes are connected with compression bolts, and the compression bolts are used for clamping the hot wires 3.
Further, as shown in fig. 2 and 3, the first support member 12 and the second support member 22 are both provided with a guide groove 23, and the hot wire 3 passes through the guide groove 23. Wherein, the guide groove 23 plays a role in limiting the hot wire 3, preventing the hot wire 3 from deviating and ensuring the heating effect of the hot wire heating device
In conclusion, the hot wire heating device provided by the embodiment enables the overall heat distribution of the hot wire 3 to be more uniform, ensures the consistency of the coating quality of the product, and also has the advantages of high stability, long service life and the like.
Example two
As shown in fig. 1, the hot wire chemical vapor deposition apparatus provided by this embodiment includes the hot wire heating device in the first embodiment. The first embodiment describes a specific structure and technical effects of a hot wire heating device, and the hot wire chemical vapor deposition apparatus of the present embodiment incorporates the structure, and also has the technical effects.
Therefore, the hot wire chemical vapor deposition equipment provided by the embodiment enables the overall heat distribution of the hot wire 3 to be more uniform, ensures the consistency of the coating quality of the product, and has the advantages of high stability, long service life and the like.
The above-mentioned embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (8)
1. A hot wire heating device is characterized by comprising a workpiece mounting position (4); a first clamping device (1), a second clamping device (2) and a hot wire (3) are arranged on one side of the workpiece mounting position (4); the hot wire (3) comprises a first hot wire end part (31), a hot wire middle part (33) and a second hot wire end part (32) which are sequentially distributed;
the hot wire middle part (33) extends along the horizontal direction and is arranged between the first clamping device (1) and the second clamping device (2);
the first hot wire end part (31) and the second hot wire end part (32) are both arranged between the hot wire middle part (33) and the workpiece mounting position (4);
the first hot wire end part (31) is clamped on the first clamping device (1), and the extending direction of the first hot wire end part (31) is not parallel to the horizontal direction; the second hot wire end part (32) is clamped on the second clamping device (2), and the extending direction of the second hot wire end part (32) is not parallel to the horizontal direction.
2. A hot wire heating device according to claim 1, wherein the first clamping device (1) comprises a first clamping base (11) and a first supporting member (12), and the first supporting member (12) and the first clamping base (11) are sequentially arranged at intervals along a first direction;
the second clamping device (2) comprises a second clamping base (21) and a second supporting piece (22), and the second supporting piece (22) and the second clamping base (21) are sequentially arranged at intervals along a second direction.
3. A hot wire heating device according to claim 2, wherein a connecting member (5) is provided between the first support member (12) and the second support member (22), one end of the connecting member (5) is fixedly connected to the first support member (12), and the other end of the connecting member (5) is fixedly connected to the second support member (22).
4. The hot wire heating device according to claim 3, wherein mounting grooves (51) are respectively formed at two ends of the connecting member (5), and connecting holes are formed in the first supporting member (12) and the second supporting member (22);
the mounting groove (51) is fixedly connected with the connecting hole through a bolt.
5. The hot wire heating device according to claim 2, wherein a tension spring (6) is mounted on the first clamping base (11), one end of the tension spring (6) is fixedly connected with the first clamping base (11), and the other end of the tension spring (6) is fixedly connected with the first hot wire end (31);
or, install extension spring (6) on second clamping base (21), the one end of extension spring (6) with second clamping base (21) fixed connection, the other end of extension spring (6) with second heater tip (32) fixed connection.
6. A hot wire heating device according to claim 2, wherein the first clamping base (11) and the second clamping base (21) are both provided with threaded holes, and the threaded holes are connected with compression bolts which are used for clamping the hot wire (3).
7. A hot wire heating apparatus according to claim 2, wherein the first support member (12) and the second support member (22) are each provided with a guide groove (23), and the hot wire (3) passes through the guide grooves (23).
8. A hot wire chemical vapor deposition apparatus comprising the hot wire heating device according to any one of claims 1 to 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122552651.XU CN216663228U (en) | 2021-10-22 | 2021-10-22 | Hot wire heating device and hot wire chemical vapor deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122552651.XU CN216663228U (en) | 2021-10-22 | 2021-10-22 | Hot wire heating device and hot wire chemical vapor deposition equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216663228U true CN216663228U (en) | 2022-06-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122552651.XU Active CN216663228U (en) | 2021-10-22 | 2021-10-22 | Hot wire heating device and hot wire chemical vapor deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216663228U (en) |
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2021
- 2021-10-22 CN CN202122552651.XU patent/CN216663228U/en active Active
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