CN201695087U - Hot wire tensioning mechanism - Google Patents
Hot wire tensioning mechanism Download PDFInfo
- Publication number
- CN201695087U CN201695087U CN2010202021122U CN201020202112U CN201695087U CN 201695087 U CN201695087 U CN 201695087U CN 2010202021122 U CN2010202021122 U CN 2010202021122U CN 201020202112 U CN201020202112 U CN 201020202112U CN 201695087 U CN201695087 U CN 201695087U
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- CN
- China
- Prior art keywords
- hot wire
- fixed
- tensioning mechanism
- crossbeam
- wire tensioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Resistance Heating (AREA)
- Heat Treatment Of Strip Materials And Filament Materials (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model belongs to the field of chemical vapor deposition diamonds, and particularly relates to a hot wire tensioning mechanism in hot wire chemical vapor deposition diamond equipment. The hot wire tensioning mechanism comprises a first cross beam, a second cross beam, supporting bars, a horizontal bar, a fixed electrode, a movable electrode, movable screws and a spring, wherein the first cross beam is parallel to and opposite to the second cross beam; one end of the fixed electrode is provided with a hook and is fixed on the first cross beam through the movable screws; the two ends of the movable electrode are provided with hooks and mounted on the second cross beam through the movable screws; the supporting bars are two in number, one end of each supporting bar is fixed on the second cross beam while the other end of each supporting bar is fixed with the horizontal bar, so as to form the fixed frame; and one end of the spring is connected to the movable electrode, while the other end is fixed on the horizontal bar. The hot wire tensioning mechanism of the utility model has the effects that the hot wire is prolonged and deformed due to heating with the increment of current during the diamond preparation processes, but the deflection can be absorbed by the spring immediately, namely, the hot wire can be under a straight state all the way.
Description
Technical field
The utility model belongs to the chemical vapour deposition diamond field, particularly relates to a kind of hot wire tensioning mechanism in the thermal filament chemical vapor deposition of diamond equipment.
Background technology
When utilizing the hot-wire chemical gas-phase deposition method to prepare diamond film (thick film or coating) (CVD diamond), must use heater strip (tantalum wire or tungsten filament).In use, heated filament will be fixed by a mechanism, and when requiring in vacuum oven this heated filament of heating simultaneously, that heated filament must keep is straight, tighten, and this is most important to adamantine production.
Chinese patent ZL200720086710.6 discloses the permanent tension force suspension system of a kind of heated filament.It comprises first electrode, second electrode, hook electrode lead-in wire, piston-type travelling electrode assembly, plain conductor, conducting metal bar, ceramics insulator, tackleblock, the first electrode metal lead-in wire, counterweight, first electrode holder, tackleblock bracing frame, the second click metal lead wire, second electrode holder, be provided with piston-type travelling electrode assembly in the pipe through hole of second electrode, second pull wire left end fixedly connected with ceramics insulator, the right-hand member of second pull wire is through fixedly connected in counterweight behind the tackleblock.But there is following problem in above-mentioned patent: 1, complex structure; 2, utilize counterweight to hang and draw heated filament, counterweight has only the fixed weight specification, can make the adjusting of heated filament not in place.
The utility model content
The purpose of this utility model is to overcome shortcoming of the prior art, and a kind of simple in structure, easy for installation and hot wire tensioning mechanism that result of use is good is provided.It can make and make heated filament keep state straight, that tighten in the process of diamond film all the time utilizing the hot-wire chemical gas-phase deposition method to prepare.
A kind of hot wire tensioning mechanism of the utility model, described hot wire tensioning mechanism comprise first crossbeam, second crossbeam, support bar, horizontal stripe, fixed electorde, mobile electrode, active screw and spring; Described first crossbeam is parallel relative with second crossbeam; Described fixed electorde one end buckle also is fixed on first crossbeam; Described mobile electrode two ends buckle is installed on second crossbeam by active screw; Described support bar has two, and an end all is fixed on second crossbeam, and the other end is all fixed with horizontal stripe, forms anchor; Described spring one end is connected on the mobile electrode, and the other end is fixed on the horizontal stripe.
Further, in the technique scheme, described first crossbeam, second crossbeam adopt tungsten bar or molybdenum rod.
Further, in the technique scheme, described support bar material is the high temperature resistant insulating ceramic of processing.
Further, in the technique scheme, described horizontal stripe material is molybdenum or stainless steel.
Further, in the technique scheme, the material of described fixed electorde and mobile electrode is: tantalum or molybdenum.
Further, in the technique scheme, described active screw material is tungsten or molybdenum.
Further, in the technique scheme, described mobile electrode center has slot or groove, and described active screw is installed by slot or groove.
A kind of hot wire tensioning mechanism of the utility model, its effect are in the diamond preparation process, and along with electric current increases, heater strip is owing to be heated and lengthening deformation, but its deflection absorbs by spring immediately, can make heater strip be in straightened condition always.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Embodiment
Below in conjunction with accompanying drawing, specifically set forth the technical solution of the utility model.
Hot wire tensioning mechanism of the present utility model comprises first crossbeam 1, second crossbeam 2, support bar 3, horizontal stripe 4, fixed electorde 5, mobile electrode 6, active screw 7 and spring 8; First crossbeam 1 and second crossbeam 2 adopt tungsten bar or molybdenum rod material, are parallel and are oppositely arranged; Fixed electorde 5 one end buckles also are fixed on first crossbeam; Mobile electrode two ends buckle, active screw 7 with tungsten or Mo is installed in it on second crossbeam 2, active screw 7 is fixed when tightening, and unclamps the transversal displacement about Shi Zeqi can do, and makes that pull-up in time is not sagging because of heating elongated heated filament under the pulling force of spring; Support bar 3 has two, and an end all is fixed on second crossbeam 2, and the other end is all fixing with horizontal stripe 4, and second crossbeam 2, support bar, horizontal stripe form stable fixed rack structure; Spring 8 one ends are connected on the hook of mobile electrode, and the other end is fixed on the horizontal stripe 4; Above-mentioned support bar material is the high temperature resistant insulating ceramic of processing; The horizontal stripe material is molybdenum or stainless steel; The material of fixed electorde and mobile electrode is: tantalum or molybdenum.
Described mobile electrode center has slot or groove 9, described active screw is installed by slot or groove, make mobile electrode can be before heated filament be heated during wrapping wire left (opposite direction that spring shrinks) displacement is arranged, and can be fixed on second crossbeam 2 by active screw, after guide frame installed, active screw will unclamp, rely on the pulling force of heated filament to keep displacement, after heated filament was heated, heated filament was elongated, and deflection is absorbed by spring at any time.
The utility model is when concrete the use, as follows:
1, outside stove, arrange heater strip by shown in the figure, make heater strip on the hook of fixed electorde and mobile electrode, and the right-hand member that makes mobile electrode is tightened active screw near the second crossbeam centre hole.The heater strip of this moment should be tightened, and must not hang, bending.
2, after entire mechanism is put into process furnace, connect, unclamp active screw with electrode column in the stove.Along with electric current increases, heated filament is heated elongated, and under spring action, mobile electrode is transversal displacement to the right, and the deflection of heated filament is absorbed by spring immediately, can make heater strip be in straightened condition always.
Claims (7)
1. hot wire tensioning mechanism is characterized in that:
Described hot wire tensioning mechanism comprises first crossbeam, second crossbeam, support bar, horizontal stripe, fixed electorde, mobile electrode, active screw and spring;
Described first crossbeam is parallel relative with second crossbeam;
Described fixed electorde one end buckle also is fixed on first crossbeam;
Described mobile electrode two ends buckle is installed on second crossbeam by active screw;
Described support bar has two, and an end all is fixed on second crossbeam, and the other end is all fixed with horizontal stripe, forms anchor;
Described spring one end is connected on the mobile electrode, and the other end is fixed on the horizontal stripe.
2. a kind of hot wire tensioning mechanism according to claim 1 is characterized in that: described first crossbeam, second crossbeam adopt tungsten bar or molybdenum rod.
3. a kind of hot wire tensioning mechanism according to claim 1 is characterized in that: described support bar material is the high temperature resistant insulating ceramic of processing.
4. a kind of hot wire tensioning mechanism according to claim 1 is characterized in that: described horizontal stripe material is molybdenum or stainless steel.
5. a kind of hot wire tensioning mechanism according to claim 1 is characterized in that: the material of described fixed electorde and mobile electrode is tantalum or molybdenum.
6. a kind of hot wire tensioning mechanism according to claim 1 is characterized in that: described active screw material is tungsten or molybdenum.
7. a kind of hot wire tensioning mechanism according to claim 1 is characterized in that: described mobile electrode center has slot or groove, and described active screw is installed by slot or groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202021122U CN201695087U (en) | 2010-05-25 | 2010-05-25 | Hot wire tensioning mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202021122U CN201695087U (en) | 2010-05-25 | 2010-05-25 | Hot wire tensioning mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201695087U true CN201695087U (en) | 2011-01-05 |
Family
ID=43396328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010202021122U Expired - Fee Related CN201695087U (en) | 2010-05-25 | 2010-05-25 | Hot wire tensioning mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201695087U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101831624A (en) * | 2010-05-25 | 2010-09-15 | 晏双利 | Hot wire tensioning mechanism |
-
2010
- 2010-05-25 CN CN2010202021122U patent/CN201695087U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101831624A (en) * | 2010-05-25 | 2010-09-15 | 晏双利 | Hot wire tensioning mechanism |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110105 Termination date: 20110525 |