CN101831624A - Hot wire tensioning mechanism - Google Patents
Hot wire tensioning mechanism Download PDFInfo
- Publication number
- CN101831624A CN101831624A CN 201010181903 CN201010181903A CN101831624A CN 101831624 A CN101831624 A CN 101831624A CN 201010181903 CN201010181903 CN 201010181903 CN 201010181903 A CN201010181903 A CN 201010181903A CN 101831624 A CN101831624 A CN 101831624A
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- CN
- China
- Prior art keywords
- fixed
- hot wire
- tensioning mechanism
- crossbeam
- wire tensioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 12
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 10
- 229910052750 molybdenum Inorganic materials 0.000 claims description 7
- 239000011733 molybdenum Substances 0.000 claims description 7
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 7
- 229910052721 tungsten Inorganic materials 0.000 claims description 7
- 239000010937 tungsten Substances 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical group [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 239000010432 diamond Substances 0.000 abstract description 9
- 229910003460 diamond Inorganic materials 0.000 abstract description 8
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 3
- 238000002360 preparation method Methods 0.000 abstract description 2
- 238000004050 hot filament vapor deposition Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- ORILYTVJVMAKLC-UHFFFAOYSA-N adamantane Chemical compound C1C(C2)CC3CC1CC2C3 ORILYTVJVMAKLC-UHFFFAOYSA-N 0.000 description 1
- 229910001573 adamantine Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Images
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- Heat Treatment Of Strip Materials And Filament Materials (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Resistance Heating (AREA)
Abstract
The invention belongs to the field of chemical vapor deposition diamonds and particularly relates to a hot wire tensioning mechanism of hot wire chemical vapor deposition diamond equipment. The hot wire tensioning mechanism comprises a first cross beam, a second cross beam, supporting bars, a cross bar, a fixed electrode, a movable electrode, a movable bolt and a spring, wherein the first cross beam is parallel and opposite to the second cross beam; one end of the fixed electrode is provided with a hook and is fixed on the first cross beam; the two ends of the movable electrode are provided with hooks and are arranged on the second cross beam through movable bolts; one end of each of the two supporting bars is fixed one the second cross beam and the other end of each of the two supporting bars is fixed on the cross bar to form a fixed support; and one end of the spring is connected with the movable electrode and the other end of the spring is fixed on the cross bar. The hot wire tensioning mechanism of the invention is to allow the spring to absorb the deformation immediately as the heated wire is stretched and produce deformation due to heat with the increase in a current in a diamond preparation process, in order to make the heated wire in a straight state constantly.
Description
Technical field
The invention belongs to the chemical vapour deposition diamond field, particularly relate to a kind of hot wire tensioning mechanism in the thermal filament chemical vapor deposition of diamond equipment.
Background technology
When utilizing the hot-wire chemical gas-phase deposition method to prepare diamond film (thick film or coating) (CVD diamond), must use heater strip (tantalum wire or tungsten filament).In use, heated filament will be fixed by a mechanism, and when requiring in vacuum oven this heated filament of heating simultaneously, that heated filament must keep is straight, tighten, and this is most important to adamantine production.
Chinese patent ZL200720086710.6 discloses the permanent tension force suspension system of a kind of heated filament.It comprises first electrode, second electrode, hook electrode lead-in wire, piston-type travelling electrode assembly, plain conductor, conducting metal bar, ceramics insulator, tackleblock, the first electrode metal lead-in wire, counterweight, first electrode holder, tackleblock bracing frame, the second click metal lead wire, second electrode holder, be provided with piston-type travelling electrode assembly in the pipe through hole of second electrode, second pull wire left end fixedly connected with ceramics insulator, the right-hand member of second pull wire is through fixedly connected in counterweight behind the tackleblock.But there is following problem in above-mentioned patent: 1, complex structure; 2, utilize counterweight to hang and draw heated filament, counterweight has only the fixed weight specification, can make the adjusting of heated filament not in place.
Summary of the invention
The objective of the invention is to overcome shortcoming of the prior art, a kind of simple in structure, easy for installation and hot wire tensioning mechanism that result of use is good is provided.It can make and make heated filament keep state straight, that tighten in the process of diamond film all the time utilizing the hot-wire chemical gas-phase deposition method to prepare.
A kind of hot wire tensioning mechanism of the present invention, described hot wire tensioning mechanism comprise first crossbeam, second crossbeam, support bar, horizontal stripe, fixed electorde, mobile electrode, active screw and spring; Described first crossbeam is parallel relative with second crossbeam; Described fixed electorde one end buckle also is fixed on first crossbeam; Described mobile electrode two ends buckle is installed on second crossbeam by active screw; Described support bar has two, and an end all is fixed on second crossbeam, and the other end is all fixed with horizontal stripe, forms anchor; Described spring one end is connected on the mobile electrode, and the other end is fixed on the horizontal stripe.
Further, in the technique scheme, described first crossbeam, second crossbeam adopt tungsten bar or molybdenum rod.
Further, in the technique scheme, described support bar material is the high temperature resistant insulating ceramic of processing.
Further, in the technique scheme, described horizontal stripe material is molybdenum or stainless steel.
Further, in the technique scheme, the material of described fixed electorde and mobile electrode is: tantalum or molybdenum.
Further, in the technique scheme, described active screw material is tungsten or molybdenum.
Further, in the technique scheme, described mobile electrode center has slot or groove, and described active screw is installed by slot or groove.
A kind of hot wire tensioning mechanism of the present invention, its effect are in the diamond preparation process, and along with electric current increases, heater strip is owing to be heated and lengthening deformation, but its deflection absorbs by spring immediately, can make heater strip be in straightened condition always.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Embodiment
Below in conjunction with accompanying drawing, specifically set forth technical scheme of the present invention.
Hot wire tensioning mechanism of the present invention comprises first crossbeam 1, second crossbeam 2, support bar 3, horizontal stripe 4, fixed electorde 5, mobile electrode 6, active screw 7 and spring 8; First crossbeam 1 and second crossbeam 2 adopt tungsten bar or molybdenum rod material, are parallel and are oppositely arranged; Fixed electorde 5 one end buckles also are fixed on first crossbeam; Mobile electrode two ends buckle, active screw 7 with tungsten or Mo is installed in it on second crossbeam 2, active screw 7 is fixed when tightening, and unclamps the transversal displacement about Shi Zeqi can do, and makes that pull-up in time is not sagging because of heating elongated heated filament under the pulling force of spring; Support bar 3 has two, and an end all is fixed on second crossbeam 2, and the other end is all fixing with horizontal stripe 4, and second crossbeam 2, support bar, horizontal stripe form stable fixed rack structure; Spring 8 one ends are connected on the hook of mobile electrode, and the other end is fixed on the horizontal stripe 4; Above-mentioned support bar material is the high temperature resistant insulating ceramic of processing; The horizontal stripe material is molybdenum or stainless steel; The material of fixed electorde and mobile electrode is: tantalum or molybdenum.
Described mobile electrode center has slot or groove 9, described active screw is installed by slot or groove, make mobile electrode can be before heated filament be heated during wrapping wire left (opposite direction that spring shrinks) displacement is arranged, and can be fixed on second crossbeam 2 by active screw, after guide frame installed, active screw will unclamp, rely on the pulling force of heated filament to keep displacement, after heated filament was heated, heated filament was elongated, and deflection is absorbed by spring at any time.
The present invention is when concrete the use, as follows:
1, outside stove, arrange heater strip by shown in the figure, make heater strip on the hook of fixed electorde and mobile electrode, and the right-hand member that makes mobile electrode is tightened active screw near the second crossbeam centre hole.The heater strip of this moment should be tightened, and must not hang, bending.
2, after entire mechanism is put into process furnace, connect, unclamp active screw with electrode column in the stove.Along with electric current increases, heated filament is heated elongated, and under spring action, mobile electrode is transversal displacement to the right, and the deflection of heated filament is absorbed by spring immediately, can make heater strip be in straightened condition always.
Claims (7)
1. hot wire tensioning mechanism is characterized in that:
Described hot wire tensioning mechanism comprises first crossbeam, second crossbeam, support bar, horizontal stripe, fixed electorde, mobile electrode, active screw and spring;
Described first crossbeam is parallel relative with second crossbeam;
Described fixed electorde one end buckle also is fixed on first crossbeam;
Described mobile electrode two ends buckle is installed on second crossbeam by active screw;
Described support bar has two, and an end all is fixed on second crossbeam, and the other end is all fixed with horizontal stripe, forms anchor;
Described spring one end is connected on the mobile electrode, and the other end is fixed on the horizontal stripe.
2. a kind of hot wire tensioning mechanism according to claim 1 is characterized in that: described first crossbeam, second crossbeam adopt tungsten bar or molybdenum rod.
3. a kind of hot wire tensioning mechanism according to claim 1 is characterized in that: described support bar material is the high temperature resistant insulating ceramic of processing.
4. a kind of hot wire tensioning mechanism according to claim 1 is characterized in that: described horizontal stripe material is molybdenum or stainless steel.
5. a kind of hot wire tensioning mechanism according to claim 1 is characterized in that: the material of described fixed electorde and mobile electrode is tantalum or copper.
6. a kind of hot wire tensioning mechanism according to claim 1 is characterized in that: described active screw material is tungsten or molybdenum.
7. a kind of hot wire tensioning mechanism according to claim 1 is characterized in that: described mobile electrode center has slot or groove, and described active screw is installed by slot or groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010181903 CN101831624A (en) | 2010-05-25 | 2010-05-25 | Hot wire tensioning mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010181903 CN101831624A (en) | 2010-05-25 | 2010-05-25 | Hot wire tensioning mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101831624A true CN101831624A (en) | 2010-09-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010181903 Pending CN101831624A (en) | 2010-05-25 | 2010-05-25 | Hot wire tensioning mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101831624A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102226273A (en) * | 2011-06-13 | 2011-10-26 | 南京航空航天大学 | Elastic tensioning device for growth of diamond film electrode |
| CN103215561A (en) * | 2013-04-24 | 2013-07-24 | 中国科学院物理研究所 | Plasma depositing and etching system |
| CN103429786A (en) * | 2011-03-22 | 2013-12-04 | 应用材料公司 | Apparatus and method for coating using hot wire |
| CN104862670A (en) * | 2015-05-06 | 2015-08-26 | 华中科技大学 | Hot wire tensioning device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5997650A (en) * | 1995-12-20 | 1999-12-07 | Sp3, Inc. | Reactor having an array of heating filaments and a filament force regulator |
| CN1831187A (en) * | 2006-03-27 | 2006-09-13 | 南京航空航天大学 | Heater array electrode system used for stable growth of diamond membrane with large area |
| CN201695087U (en) * | 2010-05-25 | 2011-01-05 | 晏双利 | Hot wire tensioning mechanism |
-
2010
- 2010-05-25 CN CN 201010181903 patent/CN101831624A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5997650A (en) * | 1995-12-20 | 1999-12-07 | Sp3, Inc. | Reactor having an array of heating filaments and a filament force regulator |
| CN1831187A (en) * | 2006-03-27 | 2006-09-13 | 南京航空航天大学 | Heater array electrode system used for stable growth of diamond membrane with large area |
| CN201695087U (en) * | 2010-05-25 | 2011-01-05 | 晏双利 | Hot wire tensioning mechanism |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103429786A (en) * | 2011-03-22 | 2013-12-04 | 应用材料公司 | Apparatus and method for coating using hot wire |
| CN102226273A (en) * | 2011-06-13 | 2011-10-26 | 南京航空航天大学 | Elastic tensioning device for growth of diamond film electrode |
| CN102226273B (en) * | 2011-06-13 | 2012-09-05 | 南京航空航天大学 | Elastic tensioning device for growth of diamond film electrode |
| CN103215561A (en) * | 2013-04-24 | 2013-07-24 | 中国科学院物理研究所 | Plasma depositing and etching system |
| CN103215561B (en) * | 2013-04-24 | 2015-11-18 | 中国科学院物理研究所 | A kind of plasma-deposited and etching system |
| CN104862670A (en) * | 2015-05-06 | 2015-08-26 | 华中科技大学 | Hot wire tensioning device |
| CN104862670B (en) * | 2015-05-06 | 2017-04-19 | 华中科技大学 | Hot wire tensioning device |
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| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| ASS | Succession or assignment of patent right |
Owner name: BEIJING ZT DIAMOND TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: YAN SHUANGLI Effective date: 20110328 |
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| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 100024 12-1-101, WANGCHUNYUAN, BEIYUAN JIAYUAN, CHAOYANG DISTRICT, BEIJING TO: 100081 ROOM 2026, BEIJING CHUANGYIN HOTEL, BUILDING 2, NO. 8A, LANGQIUYUAN, TAYUAN, HAIDIAN DISTRICT, BEIJING |
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| TA01 | Transfer of patent application right |
Effective date of registration: 20110328 Address after: 100081 Beijing City, Haidian District Tayuan autumn Lang Park No. 8 Building No. 2 Beijing chuangyin hotel room 2026 Applicant after: Zhongke union carbon (Beijing) Technology Co., Ltd. Address before: 100024, Beijing, Chaoyang District Beiyuan homes spring garden 12-1-101 Applicant before: Yan Shuangli |
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20100915 |