CN106757375A - It is a kind of effectively to prevent the heating module of burner hearth cold spot - Google Patents
It is a kind of effectively to prevent the heating module of burner hearth cold spot Download PDFInfo
- Publication number
- CN106757375A CN106757375A CN201611207398.1A CN201611207398A CN106757375A CN 106757375 A CN106757375 A CN 106757375A CN 201611207398 A CN201611207398 A CN 201611207398A CN 106757375 A CN106757375 A CN 106757375A
- Authority
- CN
- China
- Prior art keywords
- electrode
- burner hearth
- cold spot
- heating module
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 40
- 238000004321 preservation Methods 0.000 claims abstract description 23
- 239000000956 alloy Substances 0.000 claims abstract description 20
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 20
- 238000000605 extraction Methods 0.000 claims abstract description 20
- 238000009413 insulation Methods 0.000 claims description 7
- 238000005452 bending Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 230000005611 electricity Effects 0.000 claims description 3
- 239000000835 fiber Substances 0.000 claims description 2
- 239000012774 insulation material Substances 0.000 claims 2
- 238000003466 welding Methods 0.000 claims 1
- NMFHJNAPXOMSRX-PUPDPRJKSA-N [(1r)-3-(3,4-dimethoxyphenyl)-1-[3-(2-morpholin-4-ylethoxy)phenyl]propyl] (2s)-1-[(2s)-2-(3,4,5-trimethoxyphenyl)butanoyl]piperidine-2-carboxylate Chemical compound C([C@@H](OC(=O)[C@@H]1CCCCN1C(=O)[C@@H](CC)C=1C=C(OC)C(OC)=C(OC)C=1)C=1C=C(OCCN2CCOCC2)C=CC=1)CC1=CC=C(OC)C(OC)=C1 NMFHJNAPXOMSRX-PUPDPRJKSA-N 0.000 description 10
- 239000013078 crystal Substances 0.000 description 7
- 239000002184 metal Substances 0.000 description 4
- 230000008030 elimination Effects 0.000 description 3
- 238000003379 elimination reaction Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Furnace Details (AREA)
Abstract
The heating module of burner hearth cold spot is effectively prevented the invention discloses a kind of, including heat-preservation guard shield and the lectrothermal alloy wire being arranged on heat-preservation guard shield inwall, the Top electrode and bottom electrode being imbedded in heat-preservation guard shield two ends are drawn in the two ends of the lectrothermal alloy wire respectively, and the free end of Top electrode and bottom electrode connects extraction electrode respectively.Top electrode and bottom electrode are designed to special U-shaped or C-shaped by the present invention, extraction electrode slots to form bow font, using the characteristic of self-heating, reduce its thermal conductance simultaneously, growth furnace thermal field is eliminated because electrode is drawn " cold spot " that produces, the radial temperature uniformity of burner hearth thermal field is substantially increased, the non-uniform temperature for being grown in radial cross-section of monocrystalline is solved the problems, such as.And each heating module can independent temperature, a heating furnace can combine multiple heating modules of different height, realize arbitrary thermal field curve, adapt to the heating furnace of the special temperature curve of various needs.
Description
Technical field
The invention belongs to crystal processing device technical field, and in particular to it is a kind of effectively to prevent the heated mould of burner hearth cold spot
Block.
Background technology
At present, the heating of heating furnace be must be by the electrode that is powered, electrode is that power supply is powered to heater strip and realizes heater strip
The necessary transmission medium of heating work, therefore heating furnace has to electrode, and because electrode is metal, the thermal conductivity factor of metal is big, easily
Guide substantial amounts of heat, the temperature of the heater strip in usual burner hearth is in 1200 DEG C or so, connect the electrode of heater strip from insulation
After stretching out outside in block, about 1100 DEG C or so of the temperature difference is formd, cause electrode to go deep into burner hearth interior and heater strip junction
Temperature forms " cold spot " warm area, and the temperature of temperature warm area more normal than other of the warm area is low 2 DEG C -4 DEG C, seriously limits heating furnace
Thermal field distributing homogeneity in burner hearth, and " cold spot " of thermal field never has solution, the serious shadow of thermal field skewness
The performance of heating furnace is rung, especially for crystal growth, is made up of many heating modules, each heating module independence temperature control, formed
It is required that thermal field curve, but " cold spot " phenomenon, make crystal mass yield rate low, it is second-rate.
Therefore, Optimal Growing furnace temperature, " cold spot " of elimination growth furnace thermal field, it is current process modification to improve crystal growth quality
Main way.
Background technology
At present, the heating of heating furnace be must be by the electrode that is powered, electrode is that power supply is powered to heater strip and realizes heater strip
The necessary transmission medium of heating work, therefore heating furnace has to electrode, and because electrode is metal, the thermal conductivity factor of metal is big, easily
Guide substantial amounts of heat, the temperature of the heater strip in usual burner hearth is in 1200 DEG C or so, connect the electrode of heater strip from insulation
After stretching out outside in block, about 1100 DEG C or so of the temperature difference is formd, cause electrode to go deep into burner hearth interior and heater strip junction
Temperature forms " cold spot " warm area, and the temperature of temperature warm area more normal than other of the warm area is low 2 DEG C -4 DEG C, seriously limits heating furnace
Thermal field distributing homogeneity in burner hearth, and " cold spot " of thermal field never has solution, the serious shadow of thermal field skewness
The performance of heating furnace is rung, especially for crystal growth, is made up of many heating modules, each heating module independence temperature control, formed
It is required that thermal field curve, but " cold spot " phenomenon, make crystal mass yield rate low, it is second-rate.
Therefore, Optimal Growing furnace temperature, " cold spot " of elimination growth furnace thermal field, it is current process modification to improve crystal growth quality
Main way.
The content of the invention
The present invention is intended to provide a kind of heating module of " cold spot " for eliminating growth furnace thermal field, effectively prevents burner hearth cold spot
Growth furnace heating unit.
The object of the present invention is achieved like this:Including heat-preservation guard shield and the electrothermal alloy being arranged on heat-preservation guard shield inwall
Silk, the two ends of the lectrothermal alloy wire connect the Top electrode and bottom electrode being imbedded in heat-preservation guard shield two ends respectively, Top electrode and
The free end of bottom electrode connects extraction electrode respectively.
Beneficial effect:Top electrode and bottom electrode are designed to special U-shaped or C-shaped by the present invention, reduce its thermal conductance, together
Also in heating, while insulation shield is wrapped up, the radiating for resisting extraction electrode makes the temperature difference of " cold spot " warm area to Shi Benshen
The temperature drop for there was only 0.1 ~ 0.5 DEG C at 1200 DEG C or so is can control, thermal field is " cold in elimination growth furnace burner hearth
Point ", it is ensured that fire box temperature is more uniform, the caloric value of electrode lead-out part point is basic with the heat conduction amount of electrode and other thermal loss
It is equal, balance can be realized in theory, that is, do not have " cold spot ".The temperature homogeneity of burner hearth radial direction thermal field is substantially increased, in monocrystalline
In the experiment of growth furnace, it will be apparent that improve the quality of growth monocrystalline.
Brief description of the drawings
Fig. 1 is structural representation of the invention;
Fig. 2 is longitudinal sectional view of the invention;
Fig. 3 is the attachment structure schematic diagram of electrode of the invention and lectrothermal alloy wire;
Fig. 4 is the structural representation of extraction electrode of the invention;
Label in figure:1 ~ heat-preservation guard shield, 2 ~ lectrothermal alloy wire, 3 ~ Top electrode, 4 ~ bottom electrode, 5 ~ extraction electrode, 6 ~ geometrical clamp group.
Specific embodiment
The heating module of burner hearth cold spot is effectively prevented shown in 1 ~ 4, including heat-preservation guard shield 1 and be arranged on insulation with reference to the accompanying drawings
Lectrothermal alloy wire 2 on the inwall of shield 1, the two ends of the lectrothermal alloy wire 2 connect be imbedded in the two ends of heat-preservation guard shield 1 respectively
The free end of Top electrode 3 and bottom electrode 4, Top electrode 3 and bottom electrode 4 connects extraction electrode 5 respectively.
The described fluting of extraction electrode 5 is in bow font, bending section one end difference of the connection lectrothermal alloy wire 2 of extraction electrode 5
It is embedded in the lump in heat-preservation guard shield 1 with Top electrode 3 and bottom electrode 4, the other end exposes heat-preservation guard shield, and sets power supply connecting hole.
Described extraction electrode 5 stretch into length in heat-preservation guard shield 1 for heat-preservation guard shield 1 1/3rd thickness ~ bis-/
One thickness.
Described Top electrode 3, bottom electrode 4 are respectively provided with and take the shape of the letter U or C-shaped configuration.
Described Top electrode 3 and bottom electrode 4 misplaces and symmetrically or non-symmetrically set.
Described lectrothermal alloy wire 2 at least one, and the coiled of lectrothermal alloy wire 2, described heat-preservation guard shield 1
Material is the insulation fibre material of dense uniform.
Circumference sets at least three groups geometrical clamp groups 6 vertically on the inwall of described heat-preservation guard shield 1, and lectrothermal alloy wire 2 is consolidated
It is scheduled in geometrical clamp group 6.
Described Top electrode 3, bottom electrode 4 is welded with extraction electrode 5.
The cross section of described extraction electrode 5 is square or circle.
Working method of the invention:When using, Top electrode 3, other end bending are formed in the upper-end bent of lectrothermal alloy wire 2
Bottom electrode 4 is formed, and lectrothermal alloy wire 2 is fixed in the geometrical clamp group 6 on the inwall of heat-preservation guard shield 1, Top electrode 3, bottom electrode 4
It is fixed in heat-preservation guard shield 1, extraction electrode 5 is respectively welded in the end of Top electrode 3, bottom electrode 4;After energization, Top electrode 3, under
Electrode 4, on the one hand also in heating, on the other hand reduces the sectional area of heat conduction in heating, extraction electrode 5 in bow word-lifting formula, and again
Labyrinth is walked, increases heat conduction length, reduce heat derived from electrode, when caloric value is equal to heat conduction amount, be at poised state, electricity
No longer there is the problem for taking heat away in pole, makes heating module not have " cold spot " to occur, and highly significant solves problem.
Claims (9)
1. it is a kind of effectively to prevent the heating module of burner hearth cold spot, including heat-preservation guard shield(1)Be arranged on heat-preservation guard shield(1)On inwall
Lectrothermal alloy wire(2), it is characterised in that:The lectrothermal alloy wire(2)Bending two ends form Top electrode into U or c-type(3)With
Bottom electrode(4), it is imbedded in heat-preservation guard shield(1)Two ends in, be respectively welded extraction electrode(5).
2. it is according to claim 1 effectively prevent burner hearth cold spot heating module it is characterized in that:Described extraction electrode
(5)Fluting is in bow font, extraction electrode(5)Connection lectrothermal alloy wire(2)Bending section one end respectively with Top electrode(3)With lower electricity
Pole(4)On be embedded in heat-preservation guard shield in the lump(1)Interior, the other end exposes insulation material, and sets power supply connecting hole.
3. it is according to claim 1 effectively prevent burner hearth cold spot heating module it is characterized in that:Described extraction electrode
(5)Stretch into insulation material(1)Interior length is heat-preservation guard shield(1)1/3rd thickness ~ bis-/mono- thickness.
4. it is according to claim 1 effectively prevent burner hearth cold spot heating module it is characterized in that:Described electrothermal alloy
Silk Top electrode(3), bottom electrode(4)It is respectively provided with and takes the shape of the letter U or C-shaped configuration.
5. it is according to claim 1 effectively prevent burner hearth cold spot heating module it is characterized in that:Described Top electrode(3)
And bottom electrode(4)Dislocation is symmetrically or non-symmetrically set.
6. it is according to claim 1 effectively prevent burner hearth cold spot heating module it is characterized in that:Lectrothermal alloy wire(2)Around
Curl;The heat-preservation guard shield(1)Material for dense uniform insulation fibre material.
7. it is according to claim 1 it is a kind of effectively prevent burner hearth cold spot heating module it is characterized in that:Described insulation
Shield(1)Inwall on vertically circumference set at least three groups geometrical clamps(6), lectrothermal alloy wire(2)It is fixed on geometrical clamp(6)
It is interior.
8. it is according to claim 1 it is a kind of effectively prevent burner hearth cold spot heating module it is characterized in that:Described upper electricity
Pole(3), bottom electrode(4)And extraction electrode(5)Welding.
9. it is according to claim 1 it is a kind of effectively prevent burner hearth cold spot heating module it is characterized in that:Described extraction
Electrode(5)Cross section be square or circle.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201611207398.1A CN106757375A (en) | 2016-12-23 | 2016-12-23 | It is a kind of effectively to prevent the heating module of burner hearth cold spot |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201611207398.1A CN106757375A (en) | 2016-12-23 | 2016-12-23 | It is a kind of effectively to prevent the heating module of burner hearth cold spot |
Publications (1)
Publication Number | Publication Date |
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CN106757375A true CN106757375A (en) | 2017-05-31 |
Family
ID=58919857
Family Applications (1)
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CN201611207398.1A Pending CN106757375A (en) | 2016-12-23 | 2016-12-23 | It is a kind of effectively to prevent the heating module of burner hearth cold spot |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108827015A (en) * | 2018-08-16 | 2018-11-16 | 广东省计量科学研究院(华南国家计量测试中心) | A kind of hollow horizontal heater and its control system and control method |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06227837A (en) * | 1993-02-02 | 1994-08-16 | Fujikura Ltd | Heating oven for spinning optical fiber |
JPH0859277A (en) * | 1994-08-12 | 1996-03-05 | Sumitomo Electric Ind Ltd | Drawing furnace for optical fiber and heater used for the furnace |
US6546760B1 (en) * | 1995-07-05 | 2003-04-15 | Sumitomo Electric Industries, Ltd. | Optical fiber drawing furnace with a zig zag heating element |
CN202072808U (en) * | 2011-05-11 | 2011-12-14 | 昆明沃特尔机电设备有限公司 | Furnace body moving type high-purity crystal growing device |
CN206319082U (en) * | 2016-12-23 | 2017-07-11 | 昆明沃特尔机电设备有限公司 | It is a kind of effectively to prevent the heating module of burner hearth cold spot |
-
2016
- 2016-12-23 CN CN201611207398.1A patent/CN106757375A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06227837A (en) * | 1993-02-02 | 1994-08-16 | Fujikura Ltd | Heating oven for spinning optical fiber |
JPH0859277A (en) * | 1994-08-12 | 1996-03-05 | Sumitomo Electric Ind Ltd | Drawing furnace for optical fiber and heater used for the furnace |
US6546760B1 (en) * | 1995-07-05 | 2003-04-15 | Sumitomo Electric Industries, Ltd. | Optical fiber drawing furnace with a zig zag heating element |
CN202072808U (en) * | 2011-05-11 | 2011-12-14 | 昆明沃特尔机电设备有限公司 | Furnace body moving type high-purity crystal growing device |
CN206319082U (en) * | 2016-12-23 | 2017-07-11 | 昆明沃特尔机电设备有限公司 | It is a kind of effectively to prevent the heating module of burner hearth cold spot |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108827015A (en) * | 2018-08-16 | 2018-11-16 | 广东省计量科学研究院(华南国家计量测试中心) | A kind of hollow horizontal heater and its control system and control method |
CN108827015B (en) * | 2018-08-16 | 2023-11-07 | 广东省计量科学研究院(华南国家计量测试中心) | Hollow horizontal heating furnace and control system and control method thereof |
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