CN205501447U - Heat exchange sapphire crystal growth furnace - Google Patents

Heat exchange sapphire crystal growth furnace Download PDF

Info

Publication number
CN205501447U
CN205501447U CN201620243564.2U CN201620243564U CN205501447U CN 205501447 U CN205501447 U CN 205501447U CN 201620243564 U CN201620243564 U CN 201620243564U CN 205501447 U CN205501447 U CN 205501447U
Authority
CN
China
Prior art keywords
heat
heat exchange
sapphire crystal
crucible
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201620243564.2U
Other languages
Chinese (zh)
Inventor
季泳
滑喜宝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guizhou Haotian Optoelectronics Technology Co Ltd
Original Assignee
Guizhou Haotian Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guizhou Haotian Optoelectronics Technology Co Ltd filed Critical Guizhou Haotian Optoelectronics Technology Co Ltd
Priority to CN201620243564.2U priority Critical patent/CN205501447U/en
Application granted granted Critical
Publication of CN205501447U publication Critical patent/CN205501447U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The utility model discloses a heat exchange sapphire crystal growth furnace, including the stove outer covering, install the heat preservation in the stove outer covering, heat preservation internally mounted has the crucible, heat exchanger is installed to the crucible bottom, the heat preservation with be provided with the heat -generating body between the crucible, the heat -generating body is provided with a plurality ofly, and is a plurality of the heat -generating body vertically sets gradually, every the heat -generating body is connected with same power control unit through a transformer. The utility model discloses a set up a plurality of heat -generating bodies, a plurality of heat -generating bodies vertically set gradually to every heat -generating body all is connected with a transformer, and every the transformer all passes through power control unit control power to form the lower low temperature gradient who climbs to a high place from bottom to top, and temperature steady avoids frequently changing the high condition of manufacturing cost that equipment thermal field part brought, improve product yield and product stability.

Description

A kind of heat exchange sapphire crystal growing furnace
Technical field
This utility model relates to crystal production technical field, particularly relates to a kind of heat exchange sapphire crystal growth Stove.
Background technology
Heat exchange sapphire crystal growth technique belongs to the one of directional solidification technique, uses heat exchanger to derive Heat forms certain thermograde, thus drives crystal growth.For heat exchange process, grow different Crystalline material, is affected bigger by gradient and the stability of temperature field.The growth of sapphire crystal, for thermal field The requirement of layout is the harshest, thus equipment precision used is high, expensive.The shape of the warm field of its growth Become main by the heat exchange mode of heat exchanger, the layout of thermal insulation layer, the layout of heater, the convection current etc. of air-flow Factor determines, it is common that the coefficient result of several parts.
In actual production process, owing to there is individual variation, same thermal field component between different tables It is not necessarily applied to all of equipment.And change one of them or whole parts of thermal field component frequently, What meeting was serious affects production efficiency, increases the production cost of enterprise, thus is making more heat exchange in some cases Field parts become the most unrealistic.In order to make up different table for the requirement of thermal field component, software can only be passed through The change of aspect makes hardware components adapt to the individual variation of table.And heater is heat exchange sapphire crystalline substance A part the most key in bulk-growth stove, the heating system of heater is for directly affecting the temperature in furnace chamber Degree gradient, thus affect crystal growth, for improving the yield of product, improve the stability of product quality extremely Close important.
Use heat exchange process to carry out in sapphire crystal growing process, need a temperature from bottom to top Degree gradient, bottom temp is low, and upper temp is high.If using single heater to control thermograde, imitate Fruit is the most inconspicuous, once changes due to atmosphere during crystal growth, and resistivity will change Becoming, the thermograde of whole temperature field will be readjusted, and this adjusts process and needs more than 10 hours, but In this process, the growth rate of crystal can occur significantly to change, thus cause and split ingot, bubble ingot, The situations such as polycrystalline ingot.
Utility model content
This utility model mainly solves the technical problem in the presence of prior art, thus provides the one can Form thermograde, and the heat exchange sapphire crystal growing furnace of temperature stabilization.
Above-mentioned technical problem of the present utility model is mainly addressed by following technical proposals:
A kind of heat exchange sapphire crystal growing furnace that this utility model provides, including furnace shell, in described furnace shell Being provided with heat-insulation layer, described heat-insulation layer is internally installed crucible, and described crucible bottom is provided with heat exchanger, Being provided with heater between described heat-insulation layer and described crucible, described heater is provided with multiple, multiple described Heater longitudinally sets gradually, and each described heater is by a transformator and same output control device Connect.
Further, described heater includes annular heat-generating units, and the described heat-generating units of annular connects to be had Electrode, described electrode is connected with transformator after described heat-insulation layer and furnace shell.
Further, the described heat-generating units of multiple annulars collectively constitutes the heater of barrel shape.
Further, the material of described heat-generating units is graphite, and described heat-generating units and described electrode thread Connect.
Further, the material of described heat generating body unit is tungsten, and described heat-generating units and described electrode welding.
The beneficial effects of the utility model are: by arranging multiple heater, and multiple heaters are the most successively Arrange, and each heater is all connected with a transformator, and each described transformator all passes through power Control device and control power, thus form lower low high thermograde from bottom to top, and temperature stabilization, Avoid the situation that production cost that frequently more exchange device thermal field component brings is high, improve product yield and Product stability.
Accompanying drawing explanation
In order to be illustrated more clearly that this utility model embodiment or technical scheme of the prior art, below by right In embodiment or description of the prior art, the required accompanying drawing used is briefly described, it should be apparent that below, Accompanying drawing in description is only embodiments more of the present utility model, for those of ordinary skill in the art, On the premise of not paying creative work, it is also possible to obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structural representation of heat exchange sapphire crystal growing furnace of the present utility model.
Detailed description of the invention
Below in conjunction with the accompanying drawings preferred embodiment of the present utility model is described in detail, so that this utility model Advantage and feature can be easier to be readily appreciated by one skilled in the art, thus to protection domain of the present utility model Make apparent clear and definite defining.
Refering to shown in Fig. 1, a kind of heat exchange sapphire crystal growing furnace of the present utility model, including furnace shell 1, Being provided with heat-insulation layer 2 in furnace shell 1, heat-insulation layer 2 is internally installed crucible 3, is provided with heat friendship bottom crucible 3 Parallel operation 7, is provided with heater 4 between heat-insulation layer 2 and crucible 3, heater 4 is provided with multiple, Duo Gefa Hot body 4 longitudinally sets gradually, and each heater 4 is by a transformator 5 and same output control device 6 Connect.By arranging multiple heater 4, multiple heaters 4 longitudinally set gradually, and each heater 4 All it is connected with a transformator 5, and each described transformator 5 all controls merit by output control device 6 Rate, thus form lower low high thermograde from bottom to top, and temperature stabilization, it is to avoid frequently change The situation that the production cost that equipment thermal field component brings is high, improves product yield and product stability.
In the present embodiment, heater 4 includes annular heat-generating units 41, and the heat-generating units 41 of annular connects Electrode 42, electrode 42 is had to be connected with transformator 5 after heat-insulation layer 2 and furnace shell 1.Transformator 5 electric energy leads to Cross electrode 42 to be delivered on the heater 4 of inside, crucible 3 is heated, its simple in construction, this electrode 42 can be red copper binding post, it is also possible to be other materials.Preferably, the heat-generating units 41 of multiple annulars is altogether With the heater 4 forming barrel shape.Barrel-shaped heater 4 heating area is big, and caloric value is uniform.
Concrete, when the material of heat-generating units 41 is graphite, heat-generating units 41 is threadeded with electrode 42, Convenient disassembly.When the material of heat generating body unit 41 is tungsten, and heat-generating units 41 welds with electrode 42, connection side Formula is simple.
Above, detailed description of the invention the most of the present utility model, but protection domain of the present utility model not office It is limited to this, any change expected without creative work or replacement, all should contain of the present utility model Within protection domain.Therefore, the protection that protection domain of the present utility model should be limited with claims Scope is as the criterion.

Claims (5)

1. a heat exchange sapphire crystal growing furnace, including furnace shell (1), it is characterised in that: described furnace shell (1) being provided with heat-insulation layer (2) in, described heat-insulation layer (2) is internally installed crucible (3), described crucible (3) bottom is provided with heat exchanger (7), is provided with between described heat-insulation layer (2) and described crucible (3) Heater (4), described heater (4) is provided with multiple, and multiple described heaters (4) longitudinally set successively Putting, each described heater (4) is by a transformator (5) with same output control device (6) even Connect.
2. heat exchange sapphire crystal growing furnace as claimed in claim 1, it is characterised in that: described heating Body (4) includes annular heat-generating units (41), and the upper connection of the described heat-generating units (41) of annular has electrode (42), Described electrode (42) is connected with transformator (5) afterwards through described heat-insulation layer (2) and furnace shell (1).
3. heat exchange sapphire crystal growing furnace as claimed in claim 2, it is characterised in that: multiple annulars Described heat-generating units (41) collectively constitute the heater (4) of barrel shape.
4. heat exchange sapphire crystal growing furnace as claimed in claim 3, it is characterised in that: described heating The material of unit (41) is graphite, and described heat-generating units (41) is threadeded with described electrode (42).
5. heat exchange sapphire crystal growing furnace as claimed in claim 3, it is characterised in that: described heating The material of body unit (41) is tungsten, and described heat-generating units (41) welds with described electrode (42).
CN201620243564.2U 2016-03-28 2016-03-28 Heat exchange sapphire crystal growth furnace Active CN205501447U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620243564.2U CN205501447U (en) 2016-03-28 2016-03-28 Heat exchange sapphire crystal growth furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201620243564.2U CN205501447U (en) 2016-03-28 2016-03-28 Heat exchange sapphire crystal growth furnace

Publications (1)

Publication Number Publication Date
CN205501447U true CN205501447U (en) 2016-08-24

Family

ID=56732750

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201620243564.2U Active CN205501447U (en) 2016-03-28 2016-03-28 Heat exchange sapphire crystal growth furnace

Country Status (1)

Country Link
CN (1) CN205501447U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109023534A (en) * 2018-09-25 2018-12-18 天通银厦新材料有限公司 A kind of detachable heating device of sapphire crystal growing furnace

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109023534A (en) * 2018-09-25 2018-12-18 天通银厦新材料有限公司 A kind of detachable heating device of sapphire crystal growing furnace

Similar Documents

Publication Publication Date Title
CN103469295B (en) A kind of sapphire crystal growing furnace with three well heaters
CN207109156U (en) A kind of silicon carbide crystal growing device
CN102978691A (en) Novel heating system of sapphire crystal growing furnace
CN205501447U (en) Heat exchange sapphire crystal growth furnace
CN105951169B (en) A kind of big gradient visualization tubular type monocrystal growing furnace
JP2020521268A (en) Vacuum sintering furnace capable of controlling heating element and multi-region temperature
CN102912414B (en) A kind of polycrystalline silicon ingot or purifying furnace and crucible thereof
CN102154683A (en) Monocrystal/polycrystal directional solidification system of metal heating body structure
CN205990463U (en) A kind of thermal field for aluminum nitride crystal growth stove
CN205347626U (en) Polysilicon ingot furnace
CN104391525A (en) Temperature control system used for intermittent sintering furnace
CN103898603A (en) Dual-power polycrystalline silicon ingot casting process
CN104651924B (en) Tubular type growth furnace
CN103696002A (en) Electromagnetic and resistance mixed heating thermal field structure of ingot furnace and using method of electromagnetic and resistance mixed heating thermal field structure
CN209456615U (en) Crystal silicon ingot casting heater
CN204039546U (en) The heating unit of Large Copacity polycrystalline silicon ingot or purifying furnace
CN209584423U (en) The heating device and grower of crystal growth
CN203653759U (en) Furnace body cooling system of sapphire single crystal growth furnace
CN106222740A (en) A kind of polycrystalline silicon ingot casting method reducing oxygen content bottom polycrystalline silicon ingot casting
CN207958542U (en) The thermal field brilliant for czochralski method length
CN103374758B (en) Crystal growth heating system
CN204959078U (en) Sapphire single crystal furnace thermal -insulation structure
CN109594124A (en) The heating device and grower of crystal growth
CN105970291B (en) A kind of 9 operated type sapphire single crystal growth furnace birdcage heaters
CN203247337U (en) Heating body structure of single crystal growth furnace

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant