CN104651924B - Tubular type growth furnace - Google Patents
Tubular type growth furnace Download PDFInfo
- Publication number
- CN104651924B CN104651924B CN201510101607.3A CN201510101607A CN104651924B CN 104651924 B CN104651924 B CN 104651924B CN 201510101607 A CN201510101607 A CN 201510101607A CN 104651924 B CN104651924 B CN 104651924B
- Authority
- CN
- China
- Prior art keywords
- temperature
- stove circle
- low
- stove
- circle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The invention discloses a kind of tubular type growth furnace, the scheme of larger thermograde is produced by the combination of simple tubular type body of heater, including a heating stove circle (upper stove) compared with ringlet footpath, one heating stove circle (lower stove) compared with great circle footpath, gradient zones, and corresponding heat preserving and insulating material.Solve the problems, such as that some crystal structure degree of supercoolings, compared with big thermograde needed for large single crystal growth, considerably increase the adjustable extent of furnace body temperature gradient, for the growth of some high-quality crystal provides new solution.
Description
Technical field
The present invention relates to crystal structure technical field, and in particular to a kind of tubular type growth furnace.
Background technology
Some crystallization degree of supercoolings larger crystal such as AgGaS2, AgGaSe2 etc. are in growth, it is desirable in crystal growth solid-liquid
There is larger thermograde (generally higher than 30 DEG C) interface position, with constituents for suppressing be subcooled and ensure as far as possible it is spontaneous into
Monokaryon grows, and its growth furnace ideal thermal field curve is as shown in figure 1, Fig. 1 shows the preferable thermal field distribution schematic diagram of growth furnace.With
It is to grow crystal by two warm area growth furnaces based on two groups of heaters toward the method for being used.This growth furnace is typically used
Heat preserving and insulating material wraps up the cylindrical structure of spiral resistance wire, and upper and lower stove is spiral resistance coil, temperature control thermoelectricity
The separate temperature-controlling system that even, temperature-controlling system is constituted, upper stove control is high temperature, and the control of lower stove is low temperature, the temperature of upper and lower stove
Difference forms thermograde, to increase thermograde and just have to improve the temperature of stove or reduce the temperature of lower stove, but root
According to the growth technique of crystal, high-temperature region often can only be in a small range fluctuation for technique license, gradient with the temperature of low-temperature space
Area typically only has the thermograde of 12-15 DEG C/cm, is extremely difficult to the thermograde of 30 DEG C/cm, solid-liquid circle when causing crystal growth
Face thermograde is too small, has a strong impact on crystal mass.This kind of tubular type gradient growth furnace shortcoming：1st, it is difficult to form larger in transition region
Thermograde.2nd, the adjustable extent very little of thermograde.
The content of the invention
Instant invention overcomes the deficiencies in the prior art, there is provided a kind of tubular type growth furnace, for solving some crystal structure mistakes
Problem of the cold degree compared with big thermograde needed for large single crystal growth.
In view of the above mentioned problem of prior art, according to one side disclosed by the invention, the present invention uses following technology
Scheme：
A kind of tubular type growth furnace, it includes high-temperature region stove circle, low-temperature space stove circle, high-temperature region temperature-controlling thermal couple, low-temperature space temperature control
Thermocouple, heat-insulation layer, upper type of furnace chamber and lower type of furnace chamber, the high-temperature region stove circle are set in the upper type of furnace chamber, the low-temperature space stove
Circle is set in the low-temperature space stove circle, and the heat-insulation layer is trapped among on the upper type of furnace chamber and lower type of furnace chamber, the high-temperature region temperature control
Thermocouple is connected with the high-temperature region stove circle, and the low-temperature space temperature-controlling thermal couple is connected with the low-temperature space stove circle.
In order to the present invention is better achieved, further technical scheme is：
An embodiment of the invention, the heat-insulation layer is heat-preservation cotton.
Another embodiment of the invention, the high-temperature region temperature-controlling thermal couple passes through the heat-insulation layer and the high temperature
Area's stove circle connection.
Another embodiment of the invention, the low-temperature space temperature-controlling thermal couple passes through the heat-insulation layer and the low temperature
Area's stove circle connection.
Another embodiment of the invention, the upper type of furnace chamber is less than the lower type of furnace chamber.
The present invention can also be：
Another embodiment of the invention, the high-temperature region stove circle and/or low-temperature space stove circle are resistive heater
The tubing coil of the system of twining.
Another embodiment of the invention, has one between the high-temperature region stove circle and the low-temperature space stove circle
Temperature gradient zone.
Compared with prior art, one of beneficial effects of the present invention are：
A kind of tubular type growth furnace of the invention, by upper stove control be high temperature, the control of lower stove be low temperature, can gradient zones formed compared with
Big thermograde, and lower furnace temperature can be reduced by the upper furnace temperature of increase, reduce upper furnace ring footpath, increase lower stove circle footpath,
Increase the thermograde of gradient zones, thermograde that can also be by the length adjustment of appropriate adjustment gradient zones therebetween, thus solution
Some crystal structure degree of supercoolings of having determined and increase the adjustable model of temperature compared with the problem of big thermograde needed for large single crystal growth
Enclose.
Brief description of the drawings
For clearer explanation present specification embodiment or technical scheme of the prior art, below will be to embodiment
Or the accompanying drawing to be used needed for the description of prior art is briefly described, it should be apparent that, drawings in the following description are only
It is the reference to some embodiments in present specification, for those skilled in the art, is not paying creative work
In the case of, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 shows the preferable thermal field distribution schematic diagram of growth furnace.
Fig. 2 shows tubular type growth furnace structural representation according to an embodiment of the invention.
Wherein, it is entitled corresponding to the reference in accompanying drawing：
1- high-temperature regions stove circle, 2- low-temperature space stove circles, 3- high-temperature regions temperature-controlling thermal couple, 4- low-temperature space temperature-controlling thermal couples, 5- is protected
Warm layer, the upper type of furnace chambers of 6-, type of furnace chamber under 7-, 8- temperature gradient zones.
Specific embodiment
The present invention is described in further detail with reference to embodiment, but embodiments of the present invention not limited to this.
As shown in Fig. 2 a kind of tubular type growth furnace, it includes high-temperature region stove circle 1, low-temperature space stove circle 2, high-temperature region temperature-controlling thermal couple
3rd, low-temperature space temperature-controlling thermal couple 4, heat-insulation layer 5, upper type of furnace chamber 6 and lower type of furnace chamber 7, the high-temperature region stove circle 1 set the upper type of furnace
In chamber 6, the low-temperature space stove circle 2 is set in the low-temperature space stove circle 2, and the heat-insulation layer 5 is trapped among the upper type of furnace chamber 6 and lower stove
On die cavity 7, the high-temperature region temperature-controlling thermal couple 3 is connected with the high-temperature region stove circle 1, and the low-temperature space temperature-controlling thermal couple 4 is low with described
Warm area stove circle 2 is connected.There is a temperature gradient zone 8 between the high-temperature region stove circle 1 and the low-temperature space stove circle 2.
The simple structure of larger thermograde is produced by the splicing of above tubular type body of heater, it is possible to resolve some crystal structures
Degree of supercooling compared with big thermograde needed for large single crystal growth problem, while also greatly increases the adjustable model of furnace body temperature gradient
Enclose, for the growth of some high-quality crystal provides new solution.
The upper type of furnace chamber 6 is less than the lower type of furnace chamber 7, and high-temperature region stove circle 1 is again smaller than low-temperature space stove circle 2.
The heat-insulation layer 5 can be heat-preservation cotton or other heat preserving and insulating materials.The high-temperature region temperature-controlling thermal couple 3 is described in
Heat-insulation layer 5 is connected with the high-temperature region stove circle 1.The low-temperature space temperature-controlling thermal couple 4 passes through the heat-insulation layer 5 and the low-temperature space stove
Circle 2 is connected.The high-temperature region stove circle 1 and/or low-temperature space stove circle 2 are the tubing coil of the resistive heater system of twining.
Another embodiment, compared with minor spiral shape adding thermal resistance coil (upper stove), a Duan Quan footpaths add compared with extensive helical in a Duan Quan footpaths
Thermal resistance coil (lower stove), the gradient zones in center, the heat preserving and insulating material of periphery, two temperature-control heat couples, and a set of temperature control
6 parts of system constitute.The less spiral resistance coil in upper furnace ring footpath, being twined by spiral for resistance wire is made or it
Other party method is made, and the thickness of resistance wire, length, circle footpath, pitch can be selected according to actual conditions.The lower stove circle footpath is larger
Spiral resistance coil, resistance wire can by spiral twine system or other method be made, the thickness of resistance wire, length, circle
Footpath, pitch can be selected according to actual conditions.The whole body of heater is to carry out cylindrical shape to upper and lower stove with heat preserving and insulating material
Parcel is formed, and final body of heater is cylindrical, and the thickness for wrapping up heat preserving and insulating material can be according to the thermal diffusivity required for actual body of heater
Can be adjusted.The gradient zones are the interval region in upper and lower stove center, its should not it is too big also should not be too small, cause greatly very much whole
Temperature gradient diminishes, too it is small easily cause upper and lower furnace temperature field and influence each other excessive cause thermograde to reduce.Can be according to experiment
Thermograde needed for crystal growth and gradient section length are adjusted.The circle footpath is larger smaller, refers to upper stove stove compared with
Circle footpath is small.The circle footpath of upper and lower stove can be adjusted by actually required thermograde, reduce the circle of upper furnace ring footpath or the lower stove of increase
Footpath can all increase two temperature-control heat couple idol heads described in the thermograde of gradient zones and insert respectively at upper and lower stove circle surface, heat
The position of body of heater residing for galvanic couple can be adjusted by actual demand.The model of thermocouple, specification can be according to actual experiment need
Ask and selected.The temperature-controlling system is carried out from main regulation by two temperature-control heat couple feedback temperatures, by height warm area control
System is in a temperature value for stabilization.
Another embodiment, according to experiment demand, by a length 150mm, encloses footpath 40mm, the stove circle of pitch 1mm, Φ 1.5
Used as upper stove, a length 800mm encloses footpath 76mm, and the stove circle of pitch 2.5mm, Φ 1.5 used as lower stove, determine by the length of gradient zones
Position 30mm, is 850 DEG C, lower stove temperature control by upper stove temperature control by above combination of materials into a big thermograde body of heater of the invention
It is 400 DEG C, a larger temperature gradient zone can be formed in the gradient zones of upper stove rear end, its average temperature gradient is up to 22.5
DEG C/cm, maximum temperature gradient is up to 30 DEG C/cm.
Another embodiment, a kind of easy big thermograde tubular type body of heater, including a resistance-heated furnace compared with ringlet footpath
Circle (upper stove), a resistance heating stove circle (lower stove) compared with great circle footpath, gradient zones, temperature-controlling system, thermocouple, insulation material
Material.The tubing coil of the resistive heater that upper stove or lower stove the are used system of twining, Qi Quan footpaths are small compared with lower stove, its, specification, length,
Thickness, encloses footpath, and pitch can all be adjusted according to the actual requirements.It is less that as long as larger one of one, footpath is enclosed in upper and lower stove
Tubular electric resistance silk twines body of heater processed combination, and upper stove temperature control is high temperature, and lower stove temperature control is low temperature, comes under and of the invention is related to category.
Gradient zones, its length should be adapted to, unsuitable oversize too short, but can be adjusted in suitable scope according to actual experiment demand,
The length change of gradient zones will cause the change of thermograde simultaneously.Thermocouple being capable of relatively accurately temperature in feedback reacting furnace-e/or
Degree and its change, its specification, length, access way all can voluntarily be selected according to actual experiment demand.Temperature-controlling system energy
It is enough by the temperature and temperature change with the feedback of thermocouple institute, the temperature control of thermocouple position in body of heater is solid at one
Definite value, but temperature-controlling system can be selected according to actual experiment demand.Heat preserving and insulating material uniformly can superscribe completely, under
Body of heater, should possess preferable thermal and insulating performance, but its specification, and thickness, length can all be selected according to actual experiment demand
Select and adjust.
Upper and lower stove can for tubular structure and with one heart in the present invention, and position is fixed, therefore can ensure radially and whole in burner hearth
Individual thermal field stabilization, is conducive to the growth of crystal.
Each embodiment is described by the way of progressive in this specification, and what each embodiment was stressed is and other
The difference of embodiment, identical similar portion cross-reference between each embodiment.
" one embodiment ", " another embodiment ", " embodiment " for being spoken of in this manual, etc., refer to knot
Specific features, structure or the feature for closing embodiment description are included at least one embodiment of the application generality description
In.It is not necessarily to refer to same embodiment that statement of the same race occur in multiple places in the description.Furthermore, it is understood that with reference to appoint
When one embodiment describes specific features, structure or a feature, what is advocated is this to realize with reference to other embodiment
Feature, structure or feature also fall within the scope of the present invention.
Although reference be made herein to invention has been described for multiple explanatory embodiments of the invention, however, it is to be understood that
Those skilled in the art can be designed that a lot of other modification and implementation methods, and these modifications and implementation method will fall in this Shen
Please be within disclosed spirit and spirit.More specifically, in the range of disclosure and claim, can be to master
The building block and/or layout for inscribing composite configuration carry out various variations and modifications.Except what is carried out to building block and/or layout
Outside variations and modifications, to those skilled in the art, other purposes also will be apparent.
Claims (4)
1. a kind of tubular type growth furnace, it is characterised in that it includes high-temperature region stove circle (1), low-temperature space stove circle (2), high-temperature region temperature control heat
Even (3), low-temperature space temperature-controlling thermal couple (4), heat-insulation layer (5), upper type of furnace chamber (6) and lower type of furnace chamber (7), the upper type of furnace chamber (6) are small
In the lower type of furnace chamber (7), the high-temperature region stove circle (1) is set in the upper type of furnace chamber (6), and the low-temperature space stove circle (2) sets
Put in the lower type of furnace chamber (7), there is a thermograde between the high-temperature region stove circle (1) and the low-temperature space stove circle (2)
Area (8), the heat-insulation layer (5) is trapped among on the upper type of furnace chamber (6) and lower type of furnace chamber (7), the high-temperature region temperature-controlling thermal couple (3) with
High-temperature region stove circle (1) connection, the low-temperature space temperature-controlling thermal couple (4) is connected with the low-temperature space stove circle (2)；The high-temperature region
Stove circle (1) and/or low-temperature space stove circle (2) are the tubing coil of the resistive heater system of twining；High-temperature region stove circle (1) and low-temperature space
The circle footpath of stove circle (2) can be adjusted by actually required thermograde, and by reducing, high-temperature region stove circle (1) encloses footpath or increase is low
The circle footpath of warm area stove circle (2) is increasing the thermograde of gradient zones.
2. tubular type growth furnace according to claim 1, it is characterised in that the heat-insulation layer (5) is heat-preservation cotton.
3. tubular type growth furnace according to claim 1, it is characterised in that the high-temperature region temperature-controlling thermal couple (3) is through the guarantor
Warm layer (5) is connected with the high-temperature region stove circle (1).
4. tubular type growth furnace according to claim 1, it is characterised in that the low-temperature space temperature-controlling thermal couple (4) is through the guarantor
Warm layer (5) is connected with the low-temperature space stove circle (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510101607.3A CN104651924B (en) | 2015-03-09 | 2015-03-09 | Tubular type growth furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510101607.3A CN104651924B (en) | 2015-03-09 | 2015-03-09 | Tubular type growth furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104651924A CN104651924A (en) | 2015-05-27 |
| CN104651924B true CN104651924B (en) | 2017-06-06 |
Family
ID=53243546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510101607.3A Active CN104651924B (en) | 2015-03-09 | 2015-03-09 | Tubular type growth furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104651924B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105369343B (en) * | 2015-12-08 | 2017-08-29 | 中国工程物理研究院化工材料研究所 | A kind of single temperature zone crystal growing apparatus and single temperature zone growing method |
| CN111564401A (en) * | 2020-06-04 | 2020-08-21 | 捷捷半导体有限公司 | Single-peak high-temperature heating furnace for PN junction diffusion or passivation and application |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1974882A (en) * | 2006-11-20 | 2007-06-06 | 宁波大学 | Monocrystal growing furnace in multiple falling crucible method |
| CN101220502A (en) * | 2007-09-30 | 2008-07-16 | 西北工业大学 | Vertical Bridgman growth furnace and method of optimizing temperature field inside furnace |
| CN201224776Y (en) * | 2008-07-24 | 2009-04-22 | 山东大学 | Multi-element compound infrared crystal growth apparatus |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070034141A1 (en) * | 2001-11-02 | 2007-02-15 | Pengdi Han | Hybrid stockbarger zone-leveling melting method for directed crystallization and growth of single crystals of lead magnesium niobate-lead titanate (PMN-PT) solid solutions and related piezocrystals |
-
2015
- 2015-03-09 CN CN201510101607.3A patent/CN104651924B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1974882A (en) * | 2006-11-20 | 2007-06-06 | 宁波大学 | Monocrystal growing furnace in multiple falling crucible method |
| CN101220502A (en) * | 2007-09-30 | 2008-07-16 | 西北工业大学 | Vertical Bridgman growth furnace and method of optimizing temperature field inside furnace |
| CN201224776Y (en) * | 2008-07-24 | 2009-04-22 | 山东大学 | Multi-element compound infrared crystal growth apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104651924A (en) | 2015-05-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207109156U (en) | A kind of silicon carbide crystal growing device | |
| CN104651924B (en) | Tubular type growth furnace | |
| CN103966668A (en) | Growth method for controlling diameter of rod-like sapphire crystal based on protective atmosphere | |
| CN110172730A (en) | A kind of single crystal growing furnace heater and its heating process | |
| CN204849118U (en) | Modified steeps sapphire single crystal growing furnace cooling system structure of thinking of a way | |
| CN103924293A (en) | Bottom-enhanced cooling device and cooling method | |
| CN108458589B (en) | A kind of calandria and the vacuum sintering furnace for realizing multizone temperature control | |
| CN206666673U (en) | A kind of multistation crucible declines stove | |
| CN208100862U (en) | Blade cures temperature control system | |
| CN102946653A (en) | Variable cross-section high temperature furnace heating body | |
| CN105951169A (en) | High-gradient visual tubular single crystal growth furnace | |
| Ding et al. | Movable partition designed for the seed‐assisted silicon ingot casting in directional solidification process | |
| CN206680617U (en) | A kind of bottom radial pattern Gem furnace heater | |
| CN106637386A (en) | Single crystal straight-pulling heater capable of increasing crystal pulling rate, and single crystal straight-pulling method | |
| CN207071663U (en) | One kind continuously prepares aluminium alloy semi-solid slurry crucible heat insulation stove differential heating system | |
| CN203065635U (en) | Bottom enhanced cooling device | |
| CN203382850U (en) | Polycrystalline silicon ingot furnace thermal field heating device | |
| CN107699943A (en) | Prepare the heater and ingot furnace of crystalline silicon ingot | |
| CN103696002A (en) | Electromagnetic and resistance mixed heating thermal field structure of ingot furnace and using method of electromagnetic and resistance mixed heating thermal field structure | |
| CN205501447U (en) | Heat exchange sapphire crystal growth furnace | |
| CN215103676U (en) | Temperature gradient method crystal growth is with adjustable crystal stove of temperature gradient | |
| CN205241849U (en) | Induction heating rutile list crystal growth stove | |
| CN103334154A (en) | Preparation method of polycrystalline silicon ingots based on thermal exchange technology | |
| CN205501450U (en) | Sapphire crystal growth furnace | |
| CN102995116B (en) | Aluminum nitride crystal preparation furnace and thermal-insulation device thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |