CN208455057U - Heated filament fixture and hot filament deposit equipment - Google Patents
Heated filament fixture and hot filament deposit equipment Download PDFInfo
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- CN208455057U CN208455057U CN201820707020.6U CN201820707020U CN208455057U CN 208455057 U CN208455057 U CN 208455057U CN 201820707020 U CN201820707020 U CN 201820707020U CN 208455057 U CN208455057 U CN 208455057U
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- heated filament
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Abstract
The utility model provides a kind of heated filament fixture and hot filament deposit equipment, it is related to heated filament gas phase deposition technology field, the heated filament fixture, it include: fixture mount, the first heated filament fixed link including the setting of successively parallel interval, first heated filament carries stick, second heated filament carries stick and the second heated filament fixed link, first heated filament fixed link can be moved along the vertical line direction that the first heated filament carries stick, with, the heated filament group of more heated filament parallel interval setting compositions, it is fixedly connected on the first heated filament fixed link and the second heated filament fixed link, and it is contacted with the first heated filament carrying stick and the second heated filament carrying stick；And, spring, both ends are respectively fixedly connected in the first heated filament fixed link and the second heated filament fixed link, and it is parallel with heated filament, the heated filament fixture of the prior art is alleviated in the technical problem of working condition part thermo parameters method unevenness as caused by the stress difference of every heated filament, has reached the technical effect for improving temperature difference distribution consistency degree.
Description
Technical field
The utility model relates to heated filament vapor deposition apparatus fields, set more particularly, to a kind of heated filament fixture and hot filament deposit
It is standby.
Background technique
The basic principle that hot filament CVD prepares diamond thin is as follows: carbon source (such as methane, acetone) and
The mixed gas of hydrogen decomposites methyl and hydrogen atom, and one by metal heated filament in the high-temperature field formed by heated filament
Under fixed pressure, complicated recombination reaction occurs between the alloy substrate effect of a large amount of methyl and certain temperature and methyl,
Generate the hydrocarbon group of various sp, sp2 and sp3 hydridization.Since hydrogen atom has very strong corrasion to sp2 bond structure carbon, because
And inhibit the generation of graphite；Hydrogen atom is smaller to the corrasion of sp3 bond structure carbon simultaneously, and there is certain stablizing to make
With, thus be eventually deposited on substrate be thermodynamic instability diamond, rather than thermodynamically stable graphite, and then serving as a contrast
Bottom surface forms discontinuous nucleation of diamond.The good diamond thin of quality is obtained to need in suitable temperature and steady
Mixed gas is cracked under fixed temperature field generates hydrogen atom and various hydrocarbon groups.And temperature field mainly by heated filament arrangement,
The influence of plant capacity and cooling condition, reasonable heated filament arrangement, heated filament spacing and sample substrate spacing can be full
Under conditions of sufficient diamond thin deposition growing, production cost is reduced, improves production efficiency.
Current existing heated filament fixture is connected to one end of heated filament on high temperature spring then again by the other end of heated filament
And the other end of heated filament is fixedly attached in fixture mount, i.e. has a high temperature spring on each heated filament, this is unfavorable for
The consistency of structure and stress is kept between heated filament, it is also possible to the contact under operating condition between heated filament and electrode carrying stick is influenced,
It causes the electric current passed through between heated filament inconsistent, causes thermo parameters method uneven.
Utility model content
The first of the utility model is designed to provide a kind of heated filament fixture and hot filament deposit equipment, to alleviate the prior art
Heated filament fixture it is different as the stress of every heated filament in working condition part caused by thermo parameters method unevenness technical problem.
In order to realize the above-mentioned purpose of the utility model, the following technical scheme is adopted:
A kind of heated filament fixture, comprising:
Fixture mount, the first heated filament fixed link, the first heated filament including the setting of successively parallel interval carry stick, the second heated filament
Stick and the second heated filament fixed link are carried, the vertical line direction that the first heated filament fixed link can carry stick along first heated filament is moved
It is dynamic, and,
The heated filament group of more heated filament parallel intervals setting composition is fixedly connected on the first heated filament fixed link and described the
Two heated filament fixed links, and contacted with first heated filament carrying stick and the second heated filament carrying stick；And
Spring, both ends are respectively fixedly connected in the first heated filament fixed link and the second heated filament fixed link, and with institute
It is parallel to state heated filament.
Further, two guide rails are vertically connected on the first heated filament carrying stick, the first heated filament fixed link is sliding
It is dynamic to be installed between the guide rail.
Further, the second heated filament fixed link can be moved along the vertical line direction that second heated filament carries stick.
Further, two guide rails are vertically connected on the second heated filament carrying stick, the second heated filament fixed link is sliding
It is dynamic to be installed between the guide rail.
Further, the spring is at least two, and is symmetrically disposed on the two sides of the heated filament group.
Further, insulating support rod is equipped between the first heated filament carrying stick and the second heated filament carrying stick.
Further, the insulating support rod is ceramic bar.
Further, it is equipped in the first heated filament fixed link and the second heated filament fixed link for the heat that is fastened
The cylinder of silk.
Further, electrode connecting hole is equipped on the first heated filament carrying stick and the second heated filament carrying stick.
A kind of hot filament deposit equipment, including above-mentioned heated filament fixture.
Compared with the prior art, the utility model has the following beneficial effects:
In heated filament fixture provided by the utility model, the first heated filament fixed link, the first heated filament carrying stick, the carrying of the second heated filament
Stick and the second heated filament fixed link are successively spaced setting, and heated filament is fixed between the first heated filament fixed link and the second heated filament fixed link,
And contacted with the first heated filament carrying stick and the second heated filament carrying stick, meanwhile, the both ends of spring are also respectively fixedly connected in the first heat
Between silk fixed link and the second heated filament fixed link, and it is parallel with heated filament, at this point, spring is in compressive state.
Stick is carried to the first heated filament when deposition and the second heated filament carrying stick is powered, carries stick, heated filament and the in the first heated filament
Form circuit between two heated filaments carrying stick, after heated filament is powered fever for hot-wire chemical gas-phase deposition technical process provide temperature field from
And realize deposition.During heated filament fever, heated filament can generate certain deformation, at this point, spring is under the action of screen resilience
It pushes the first heated filament fixed link to move along the vertical line direction of the first heated filament carrying stick, and carries stick far from the first heated filament, to make
Heated filament carries stick with the first heated filament and the second heated filament carrying stick is remained and well contacted；Since different heated filaments are fixed on the simultaneously
In one heated filament fixed link and the second heated filament fixed link, therefore, identical deformation and stress can be kept between different heated filaments, in turn
The temperature field for generating heated filament fixture keeps preferable consistency.
Detailed description of the invention
It, below will be right in order to illustrate more clearly of specific embodiment of the present invention or technical solution in the prior art
Specific embodiment or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, it is described below
In attached drawing be that some embodiments of the utility model are not paying creativeness for those of ordinary skill in the art
Under the premise of labour, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is a kind of structural schematic diagram of the heated filament fixture of embodiment of the utility model；
(a) overlooking structure diagram of heated filament fixture；
(b) side structure schematic view of heated filament fixture；
Fig. 2 is a kind of knot of the heated filament fixed link (including the first heated filament fixed link and the second heated filament fixed link) of embodiment
Structure schematic diagram；
(a) overlooking structure diagram of heated filament fixed link；
(b) the forward sight structural schematic diagram of heated filament fixed link；
(c) left view structural representation of the second heated filament fixed link；
Fig. 3 is that a kind of heated filament of embodiment of the utility model carries stick (including the first heated filament carries stick and the second heated filament
Carry stick) structural schematic diagram；
(a) overlooking structure diagram of heated filament carrying stick；
(b) the forward sight structural schematic diagram of heated filament carrying stick；
(c) left view structural representation of heated filament carrying stick；
Fig. 4 is a kind of structural schematic diagram of the spring of embodiment of the utility model.
Icon: 101- the first heated filament fixed link；The first heated filament of 102- carries stick；The second heated filament of 103- carries stick；
104- the second heated filament fixed link；105- heated filament；106- spring；107- guide rail；108- molybdenum matter screw；109- ceramic bar；
110- cylinder；111- electrode connecting hole.
Specific embodiment
The technical solution of the utility model is clearly and completely described below in conjunction with attached drawing, it is clear that described
Embodiment is the utility model a part of the embodiment, instead of all the embodiments.Based on the embodiments of the present invention, originally
Field those of ordinary skill every other embodiment obtained without making creative work belongs to practical
Novel protected range.
It is in the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", " perpendicular
Directly ", the orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, and is only
For ease of description the utility model and simplify description, rather than the device or element of indication or suggestion meaning must have it is specific
Orientation, be constructed and operated in a specific orientation, therefore should not be understood as limiting the present invention.In addition, term " the
One ", " second ", " third " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, be also possible to be electrically connected；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, on can understanding as the case may be
State the concrete meaning of term in the present invention.
Embodiment 1
Fig. 1 is a kind of heated filament fixture of embodiment of the utility model, and Fig. 2 is a kind of heated filament fixed link of embodiment
Structural schematic diagram, Fig. 3 are a kind of structural schematic diagrams of the heated filament carrying stick of embodiment, and Fig. 4 is a kind of spring of embodiment
Structural schematic diagram.
As shown in Figs 1-4, which includes:
(A) fixture mount, the first heated filament fixed link 101, the first heated filament including the setting of successively parallel interval carry stick
102, the second heated filament carrying stick 103 and the second heated filament fixed link 104, the first heated filament fixed link 101 can carry stick along the first heated filament
102 vertical line direction is mobile, and,
(B) the heated filament group of more 105 parallel interval of heated filament setting compositions, the both ends of every heated filament 105 are respectively fixedly connected with
Stick 102 and the second heated filament carrying stick are carried in the first heated filament fixed link 101 and the second heated filament fixed link 104, and with the first heated filament
103 contacts；And
(C) spring 106, both ends are respectively fixedly connected in the first heated filament fixed link 101 and the second heated filament fixed link 104, and
It is parallel with heated filament 105.
In heated filament fixture provided by the utility model, the first heated filament fixed link 101, the first heated filament carrying the 102, second heat of stick
Silk carrying stick 103 and the second heated filament fixed link 104 are successively spaced setting, and heated filament 105 is fixed on the first heated filament fixed link 101 and the
Between two heated filament fixed links 104, and contacted with the first heated filament carrying stick 102 and the second heated filament carrying stick 103, meanwhile, spring 106
Both ends be also respectively fixedly connected between the first heated filament fixed link 101 and the second heated filament fixed link 104, and it is flat with heated filament 105
Row, at this point, spring 106 is in compressive state.
When deposition to the first heated filament carry stick 102 and the second heated filament carrying stick 103 be powered, the first heated filament carry stick 102,
Circuit is formed between heated filament 105 and the second heated filament carrying stick 103, fever is 105 chemical vapor deposition of heated filament after heated filament 105 is powered
Technical process provides temperature field to realize deposition.During heated filament 105 generates heat, heated filament 105 can generate certain deformation,
At this point, spring 106 pushes the first heated filament fixed link 101 along the vertical line side of the first heated filament carrying stick 102 under the action of screen resilience
Stick 102 is carried to movement, and far from the first heated filament, so that heated filament 105 and the first heated filament be made to carry stick 102 and the carrying of the second heated filament
Stick 103 remains good contact；Since different heated filaments 105 are fixed on the first heated filament fixed link 101 and the second heated filament is solid simultaneously
In fixed pole 104, therefore, identical deformation and stress can be kept between different heated filaments 105, and then generate 105 fixture of heated filament
Temperature field keep preferable consistency.It is the shifting that the first heated filament fixed link 101 of control is gone using spring 106 in the embodiment
It is dynamic, so that the tensile force being consistent between heated filament 105, to obtain more uniform temperature field.
First heated filament carries stick 102 and the second heated filament carrying stick 103 is arranged in the first heated filament fixed link 101 and the second heated filament
Stick 102 carried by the first heated filament between fixed link 104, when use and the second heated filament to carry stick 103 be that heated filament 105 is powered, this
When, the first heated filament fixed link 101 and the first heated filament carry stick 102 and the second heated filament fixed link 104 and the second heated filament carrying stick
Heated filament 105 between 103 is open circuit dress state, and the heated filament 105 of the part will not generate heat.
Stick is not carried to the first heated filament fixed link 101, the first heated filament carrying stick 102, the second heated filament in present embodiment
103 and second the material of heated filament fixed link 104 make restriction, as long as can the use in hot-wire chemical gas-phase deposition.For example,
In some embodiments of the utility model, the first heated filament fixed link 101, the first heated filament carrying stick 102, the carrying of the second heated filament
Stick 103 and the second heated filament fixed link 104 are all made of molybdenum prepared material and are made.Spring 106 is high temperature resistant spring 106, for heavy
The difference of coating is accumulated, the temperature in heated filament technique is different, and the material of the high temperature resistant spring of selection is different, i.e., in Hot Filament Chemical Vapor
In the manufacturing process of deposition, the problems such as spring 106 will not melt.
When spring 106 coats insulation crust, the heated filament group that plane locating for spring 106 can be formed with heated filament 105 exists
Same plane, 106 surface of spring can carry stick 102 with the first heated filament at this time and the second heated filament carrying stick 103 contacts.Work as spring
When 106 surfaces are in conduction state, spring 106 will carry stick 102 with the first heated filament and the second heated filament carrying stick 103 separates.For
Make that spring 106 carries stick 102 with the first heated filament and the second heated filament carrying stick 103 separates, heated filament 105 is distributed in spring 106
First heated filament carries stick 102 and the second heated filament carries the not ipsilateral of stick 103, at this time the first heated filament fixed link 101 and the second heated filament
The plane that the plane and the first heated filament carrying stick 102 and the second heated filament carrying stick 103 that fixed link 104 forms form is not with one
In plane, heated filament 105 carries stick 102 with the first heated filament after tensing and the second heated filament carrying stick 103 contacts, spring 106 and first
Heated filament carries stick 102 and the second heated filament carrying stick 103 separates.
Wherein, the first heated filament fixed link 101 can be moved along the vertical line direction that the first heated filament carries stick 102, can be realized this
There are many connection types of function, such as sliding slot is arranged on the first heated filament carrying stick 102, and the first heated filament fixed link 101 is made to exist
It is moved in sliding slot, but needs to carry the first heated filament fixed link 101 and the first heated filament between stick 102 in state of insulation；Again
Two guide rails 107 are vertically connected on stick 102 for example, can carry in the first heated filament, the first heated filament fixed link 101 is slidably installed
Between guide rail 107.For example, guide rail 107 is attached with the first heated filament carrying stick 102 using molybdenum matter screw 108.First heated filament
Fixed link 101 can be moved along guide rail 107.First heated filament fixed link 101 can be towards under the rebound effect of spring 106
Direction far from the first heated filament carrying stick 102 is mobile, in addition, the first heated filament fixed link 101 can also be in the tightening force of heated filament 105
Under the action of towards mobile close to the direction of the first heated filament carrying stick 102.
Equally, the second heated filament fixed link 104 can be moved along the vertical line direction that the second heated filament carries stick 103.Second heated filament is held
It carries and is vertically connected with two guide rails 107 on stick 103, the second heated filament fixed link 104 is slidably mounted between guide rail 107.For example, leading
Rail 107 is attached with the second heated filament carrying stick 103 using molybdenum matter screw 108.
Shown in (b) in referring to Fig.1, there are certain bendings for guide rail 107, so that the first heated filament fixed link 101 and second
The plane that the plane and the first heated filament carrying stick 102 and the second heated filament carrying stick 103 that heated filament fixed link 104 forms form does not exist
With in a plane, guarantee spring 106 does not carry stick 102 with the first heated filament and the second heated filament carrying stick 103 contacts.
First heated filament carries and is equipped with insulating support rod between stick 102 and the second heated filament carrying stick 103.Insulating support rod is set
The installation positioning between the first heated filament carrying stick 102 and the second heated filament carrying stick 103 is not only improved, heated filament 105 can also be made to press from both sides
The structure of tool is more stable, while making between the first heated filament carrying stick 102 and the second heated filament carrying stick 103 in state of insulation.It should
In embodiment, insulating support rod is ceramic bar 109, ceramic support bar for example can by molybdenum matter screw 108 with respectively with the
One heated filament carries stick 102 and the second heated filament carrying stick 103 connects.
Referring to Fig. 2, the first heated filament fixed link 101 and the first heated filament fixed link 104 are equipped with for the heated filament 105 that is fastened
Cylinder 110, the end of heated filament 105 is fastened in cylinder 110.It, will be hot compared with the screw fixation method of traditional heated filament 105
The step of silk 105, which is wound on cylinder 110, can be improved operating efficiency, eliminate dismounting screw.
Referring to shown in Fig. 3, electrode connecting hole 11 is equipped on the first heated filament carrying stick 102 and the second heated filament carrying stick 103.
In use, external power supply is connected at electrode connecting hole 11 to realize powering-on function.
Specifically, the heated filament fixture of above embodiment specifically includes that the first heated filament fixed link 101, the carrying of the first heated filament
Stick 102, the second heated filament carry stick 103, the second heated filament fixed link 104, guide rail 107, heated filament 105, ceramic strip, electrode connecting hole
11, the components such as spring 106, cylinder 110, molybdenum matter screw 108 and ceramic gasket.Wherein the first heated filament carrying stick 102 and the second heat
The effect of silk carrying stick 103 is that heated filament 105 is electrically connected by electrode connecting hole 11 with external power supply, heated filament 105 and the
One heated filament carrying stick 102 and the second heated filament carrying stick 103 are in contact to obtain electric current.Sliding rail and the first heated filament carry stick 102
It is fixedly connected with the second heated filament carrying stick 103, is slidably connected with the first heated filament fixed link 101 and the second heated filament fixed link 104, the
Heated filament 105 is wrapped on cylinder 110 by one heated filament fixed link 101 and the second heated filament fixed link 104 for fixing heated filament 105.
The both ends of ceramic bar 109 are fixedly connected on the first heated filament carrying stick 102 and the second heated filament carrying stick 103, play and stablize and insulate
Effect.The effect of spring 106 is to apply pretightning force in the first heated filament fixed link 101 and the second heated filament fixed link 104, initially
High temperature spring 106 is in confined state under operating condition, and when due to that will thermally expand flexible deformation occurs for heated filament 105, spring 106 is returned
Bullet, the first heated filament fixed link 101 and the second heated filament fixed link 104 move respectively increases distance between the two, to guarantee
Heated filament 105 remains straight under operating condition.
The heated filament fixture of the embodiment has the advantage that
1) heated filament is balanced by thermogenetic expansion using new structure design, increases the consistency of heated filament, adopts simultaneously
Heated filament is fixed on cylinder with canoe, reduces the silk time, improves the efficiency of silk；
2) push the first heated filament fixed link and the second heated filament fixed link mobile using spring, to guarantee heated filament under operating condition
Keep straight, and the stress of every silk is consistent；
3) setting of heated filament spacing mainly passes through the interval setting in the first heated filament fixed link and the second heated filament fixed link
Cylinder realize, can carry out continuous wrapping or interval wrapping；
4) ceramic bar is for the first heated filament of connection carrying stick and the second heated filament carrying stick of insulating, without dismantling pottery under operating condition
Porcelain bar simplifies silk process；
5) it is connected using ceramic bar, is conducive to the stability for improving heated filament fixture entirety, and then improve technology stability, protects
Demonstrate,prove the consistency of product quality.
Embodiment 2
The present embodiment is a kind of hot filament deposit equipment, and the deposition chamber of the equipment is equipped with the heated filament of the offer of embodiment 1
Fixture.
Finally, it should be noted that the above various embodiments is only to illustrate the technical solution of the utility model, rather than it is limited
System；Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should
Understand: it is still possible to modify the technical solutions described in the foregoing embodiments, or to some or all of
Technical characteristic is equivalently replaced；And these are modified or replaceed, it does not separate the essence of the corresponding technical solution, and this is practical new
The range of each embodiment technical solution of type.
Claims (10)
1. a kind of heated filament fixture characterized by comprising
Fixture mount, the first heated filament fixed link, the first heated filament carrying stick, the carrying of the second heated filament including the setting of successively parallel interval
Stick and the second heated filament fixed link, the first heated filament fixed link can be moved along the vertical line direction that first heated filament carries stick, and,
The heated filament group of more heated filament parallel interval setting compositions is fixedly connected on the first heated filament fixed link and second heat
Silk fixed link, and contacted with first heated filament carrying stick and the second heated filament carrying stick；And
Spring, both ends are respectively fixedly connected in the first heated filament fixed link and the second heated filament fixed link, and with the heat
Silk is parallel.
2. heated filament fixture according to claim 1, which is characterized in that be vertically connected with two on the first heated filament carrying stick
Root guide rail, the first heated filament fixed link are slidably mounted between the guide rail.
3. heated filament fixture according to claim 1 or 2, which is characterized in that the second heated filament fixed link can be along described
The vertical line direction that two heated filaments carry stick is mobile.
4. heated filament fixture according to claim 3, which is characterized in that be vertically connected with two on the second heated filament carrying stick
Root guide rail, the second heated filament fixed link are slidably mounted between the guide rail.
5. heated filament fixture according to claim 1 or 2, which is characterized in that the spring is at least two, and is symmetrical arranged
In the two sides of the heated filament group.
6. heated filament fixture according to claim 1 or 2, which is characterized in that the first heated filament carrying stick and the second heated filament
It carries and is equipped with insulating support rod between stick.
7. heated filament fixture according to claim 4, which is characterized in that the insulating support rod is ceramic bar.
8. heated filament fixture according to claim 1 or 2, which is characterized in that the first heated filament fixed link is equipped with and is used for
Be fastened the cylinder of heated filament.
9. heated filament fixture according to claim 1 or 2, which is characterized in that the first heated filament carrying stick and the second heated filament
Electrode connecting hole is equipped on carrying stick.
10. a kind of hot filament deposit equipment, which is characterized in that including the described in any item heated filament fixtures of claim 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820707020.6U CN208455057U (en) | 2018-05-11 | 2018-05-11 | Heated filament fixture and hot filament deposit equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820707020.6U CN208455057U (en) | 2018-05-11 | 2018-05-11 | Heated filament fixture and hot filament deposit equipment |
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| Publication Number | Publication Date |
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| CN208455057U true CN208455057U (en) | 2019-02-01 |
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| CN201820707020.6U Active CN208455057U (en) | 2018-05-11 | 2018-05-11 | Heated filament fixture and hot filament deposit equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110468386A (en) * | 2018-05-11 | 2019-11-19 | 深圳先进技术研究院 | Heated filament fixture and hot filament deposit equipment are applied with it and the preparation method of cutter |
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2018
- 2018-05-11 CN CN201820707020.6U patent/CN208455057U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110468386A (en) * | 2018-05-11 | 2019-11-19 | 深圳先进技术研究院 | Heated filament fixture and hot filament deposit equipment are applied with it and the preparation method of cutter |
| CN110468386B (en) * | 2018-05-11 | 2024-02-09 | 深圳先进技术研究院 | Hot wire clamp, hot wire deposition equipment, application of hot wire clamp and preparation method of cutter |
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